CN101259549A - Electrolytic machining technique and device for small bore diameter inner wall surface fine groove - Google Patents

Electrolytic machining technique and device for small bore diameter inner wall surface fine groove Download PDF

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Publication number
CN101259549A
CN101259549A CNA2008100603291A CN200810060329A CN101259549A CN 101259549 A CN101259549 A CN 101259549A CN A2008100603291 A CNA2008100603291 A CN A2008100603291A CN 200810060329 A CN200810060329 A CN 200810060329A CN 101259549 A CN101259549 A CN 101259549A
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electrolyte
wall surface
electrolytic
fine groove
bore diameter
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王明环
彭伟
章巧芳
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Zhejiang University of Technology ZJUT
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Zhejiang University of Technology ZJUT
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Abstract

The invention discloses an electrolytic machining technique of a micro-groove on an inner wall surface of a small aperture and a device. The technique is that: a cathode of a forming tool of a variable cross-section structure which is provided with insulation sections and conductive sections at intervals and is made of conductive metal wires of 200 to 1000 mum is positioned in an unthreaded hole of a workpiece which is processed in advance by utilizing the electrolytic machining device of the invention, the workpiece is taken as an anode, then electrolytic solution is radially flowed along an electrode wire, the electrolytic machining is carried out in the unthreaded hole, the pressure of the electrolytic solution is maintained at 1 to 5 MPa, and the micro-groove structure is obtained at the inner wall surface of the unthreaded hole by flushing the products after the processing. The diameter size of the cathode of the forming tool which is prepared by adopting the ultra-violet light masking solidification technology and the electroforming process can be as small as a few hundred microns, and a rib cooling hole structure with the hole diameter size of about 1mm can be obtained by combining the electrolytic machining technique. The adopted technical process of the invention is easy to master and has small investment, the minimal hole diameter which can be processed is small, and the processing precision is high.

Description

The electrolytic processing process of small bore diameter inner wall surface fine groove and device
(1) technical field
The present invention relates to the electrolytic processing process and the device of small bore diameter inner wall surface fine groove, belong to technical field of electrolysis processing.
(2) background technology
One of significant problem of the world today during energy problem, China's Eleventh Five-Year Plan energy policy require energy-consuming to fall twenty percent, find out energy-conservation urgency and necessity thus.In addition, along with developing rapidly of industry, and the generation of extensive and super large-scale integration, when promoting technology and information revolution development, relative technology is also had higher requirement, as the high-performance development of Aeroengines, require the effective cooling means of exploitation to reduce the thermic load that engine blade bears, to guarantee that engine normally moves; In recent years, the development of effective cooling technology has become the prerequisite basis of computer and the development of other electron trades.So it is these all impel the constantly relevant heat conduction reinforced theory and technology of research of people, utilize low-grade energy as far as possible, energy-conservation and reduce cost.
The reeded rib of inner wall belt cooling duct is proved to be a kind of cooling duct of efficient low-resistance.The cooling duct of this kind shape is in diabatic process, little rib convection cell on the sidewall of cooling hole has bigger perturbation action, this perturbation action has destroyed the boundary layer of cooling duct inner fluid, reduced the thermal resistance that thermal boundary layer produced, quickened refrigerating gas by the conversion of laminar flow to turbulent flow, the cooling duct of this ribization has increased heat exchange area simultaneously, have better cooling effect, can be used in the cooling device in fields such as Aero-Space, the heat radiation of electronics microelectronics, the energy and chemical industry, waste heat recovery, air conditioner refrigerating, solar energy utilization.Have research data to show, little rib hole heat transfer efficiency can reach 300% of unthreaded hole.In recent years, the researcher has carried out research and discovery at the preparation method of this fine groove, has proposed multiple preparation method: as rolling and processing method [Patent No.:US 6,760,972 B2],
Auxiliary blanking method [Chinese patent: CN 1038360C], method of laser honing, electrochemical machining method [the Patent No.:US 6 of carving of lathe, 303,193 B1] etc., the common feature of above method is: can only process the hole wall groove of aperture size quite big (more than the 3mm), be difficult to realize for the fine groove of aperture less (about 1mm), difficult-to-machine material (as carbide alloy) hole wall.The machining process working (machining) efficiency is low, causes that labor content is big, the process-cycle is long, production cost is high.The Electrolyzed Processing method that proposes in the patent, owing to be subject to processing the restriction of technology, complex technical process, equipment investment are big; Because photoresist directly is coated in the metal tube surface, the high speed that is subjected to electrolyte in process is washed away, and photoresist easily comes off.Studying processing method new, that be fit to modern science and technology progress requirement is even more important.
Electrolyzed Processing is to remove material with the form of ion, and processing back surface of the work does not have recast layer, unstressed, processing has nothing to do with material hardness, is usually used in the processing of micro-structural in recent years.
(3) summary of the invention
The technical problem to be solved in the present invention is to provide a kind of electrolytic processing process and device of small bore diameter inner wall surface fine groove, with the tool-electrode preparation difficulty that solves present small size variable cross-section hole processing, the processing aperture is big, photoresist easily comes off, process instability, working (machining) efficiency and the low problem of forming accuracy.
The present invention adopts following technical scheme: a kind of electrolytic processing process of small bore diameter inner wall surface fine groove, described technology is: the variable section structure that the insulating segment made from the conductive wire of 200~1000 μ m is alternate with conductive segment is that the forming tool negative electrode is positioned in the unthreaded hole that workpiece processes in advance, with the workpiece is anode, make electrolyte along the wire electrode Radial Flow, in unthreaded hole, carry out Electrolyzed Processing, and keeping electrolyte pressure at 1~5MPa, the product that washes away after the processing obtains the fine groove structure at the unthreaded hole internal face.
Workpiece needs prefabricated unthreaded hole among the present invention before carrying out Electrolyzed Processing, can adopt Electrolyzed Processing, spark machined or other machining process to prepare unthreaded hole.
The present invention adopts ultraviolet light mask curing technology and electroforming process to make the shaping tool cathode, because ultraviolet light polymerization speed is fast, curing performance good, can adopt of the substrate of thinner conductive wire as the forming tool negative electrode, solidify a layer insulating at its surperficial mask, mask solidifies the back and adopts galvanoplastics in the exposed position electroforming layer of metal of wire, to improve the bond strength of insulating cement in substrate.
Concrete, forming tool negative electrode described in the present invention makes as follows: the conductive wire of choosing 200~1000 μ m, the outer surface of described conductive wire solidifies the insulating barrier that one deck is set 50~100 μ m of shape by ultraviolet light mask curing technology, by developer solution the uncured portion removal is formed exposed conductive layer, expose the metal that conductive layer partly deposits one deck 50~100 μ m by galvanoplastics at wire then, obtain the alternate variable section structure of insulating segment and conductive segment and be the forming tool negative electrode.
Generally speaking, conductive wire can be selected stainless steel wire, copper wire etc. for use; Insulating layer material can be selected epoxide resin material for use, as 352AUV glue, WF-106UV glue, 623A-80UV glue etc.The present invention is solidified insulating barrier by ultraviolet light mask curing technology, adopts the 2KW ultraviolet lamp usually, is controlled at for 2~10 seconds hardening time.
Because in the Electrolyzed Processing, the shape of fine groove is decided by the shape of electroplated metal layer, and the shape of electroplated metal layer is directly related with the shape of insulating barrier, so the generally shape of the fine groove that can obtain as required such as ring-type, helical form etc. are determined the shape of insulating barrier.The shape of the insulating barrier of described forming tool cathode surface then can realize by the relative motion of ultraviolet light mask curing technology medium ultraviolet light and conductive wire.
Electroforming process among the present invention is a routine operation, and general electroforming solution adopts the aqueous solution of sulfate, sulfamate, borofluoride and the chloride etc. that contain the electroforming metal ion, and in the present invention, the metal of electroforming is generally copper or nickel, and the recommendation electroforming solution is CuSO 4, nickel sulfamic acid solution etc., control electroplate liquid concentration is 120g/L~250g/L, and temperature of electroplating solution remains 20~30 ℃, and the voltage of dc source is 5~8V, the electrolysis certain hour obtains the electroforming metal layer under stirring, and electroplating time can decide according to the thickness of the required electroforming metal layer that reaches.
The present invention is in electrochemical machining process, and electrolyte generally can be selected NaCl, NaNO for use 3, NaClO 3Deng, controlling concentration of electrolyte usually is 120g/L~300g/L, and machining voltage is set to 5~15V, and process time then can be according to desired size and the voltage swing that applies, and it is fixed to be come by the Faraday's law analysis.Electrolyte temperature generally remains on 20~30 ℃.
The invention provides a kind of electrolytic machining device of small bore diameter inner wall surface fine groove, described processing unit (plant) comprises electrolytic cell, electrolyte storage tank and the power supply that is electrically connected with electrolytic cell, described electrolyte storage tank is communicated with the electrolytic cell circulation by vavuum pump and circulation line, described electrolytic cell comprises processing cavity (2), be fixed on the base (34) of processing cavity (2) bottom, be used for fixing the upper cover plate (4) of the workpiece (30) that is shaped on unthreaded hole in advance, lower cover (1) and anchor clamps, described lower cover (1) is fixed on the base, described anchor clamps are connected on the described lower cover (1), it is fixing by anchor clamps and lower cover (1) that described upper cover plate (4) reaches the workpiece that is shaped on unthreaded hole in advance, described upper cover plate (4), lower cover (1) is equipped with the securing member of fastening shaping tool cathode, the fixing back of the described forming tool negative electrode of the position assurance of described securing member is high up in the air to be passed through in the middle of the unthreaded hole of the described workpiece that is shaped on unthreaded hole in advance, the negative electricity edge joint of described forming tool negative electrode and power supply, the described workpiece that is shaped on unthreaded hole in advance is electrically connected with the positive pole of power supply.
Further, described processing cavity (2) bottom is provided with electrolyte outlet (31), described processing cavity (2) top is provided with electrolyte import (28), described electrolyte outlet (31) is communicated with by electrolyte storage tank (13), vavuum pump (10), electrolyte import (28) circulation successively, and described circulation line is provided with control valve (8).
Be provided with filter (9) between described electrolyte storage tank (13) and the electrolyte import (28).
Described circulation line is provided with flowmeter (7) and Pressure gauge (6).
Described electrolyte storage tank (13) is communicated with to be established a loop in addition between filter (9) back and the electrolyte import (28) and directly is communicated with electrolyte storage tank (13), forms electrolyte circulation system, the supply of electrolyte in having guaranteed to process.
Described electrolyte storage tank (13) also is provided with attemperating unit, and described attemperating unit comprises temperature controller (14), heater (11) that is connected with temperature controller (14) and thermometer (7).
Compared with prior art, the present invention adopts ultraviolet light mask curing technology, galvanoplastics to combine with electrochemical Machining Technology, process the hole wall fine groove structure that has obtained about aperture size 1mm by preparing fine forming tool negative electrode, and proposed the electrolytic machining device of small bore diameter inner wall surface fine groove.The present invention has the following advantages:
1, adopt ultraviolet light mask curing technology and electroforming process to make the shaping tool cathode, give full play to the advantage that ultraviolet light polymerization speed is fast, curing performance is good, owing to can adopt of the substrate of thinner wire, can prepare the forming tool negative electrode of diameter dimension hundreds of micron as the forming tool negative electrode; Mask solidifies the back and adopts galvanoplastics in the exposed position electroforming layer of metal of wire, and electroforming metal has improved the bond strength of insulating cement in substrate, has avoided the wire surface insulating cement to be washed away by high speed electrolytic liquid.
2, adopt special fixture that the forming tool negative electrode is positioned in the unthreaded hole; Take simultaneously along wire electrode to make the processing district be subjected to fully washing away, guaranteed that electrolysate is in time discharged and the stablizing of process radially at a high speed towards the mode of liquid.
To sum up, technical process of the present invention is easily grasped, and invests for a short time, and machinable minimum-value aperture is little, the machining accuracy height.
(4) description of drawings
Fig. 1 is the electrolytic machining device overall structure schematic diagram of embodiment 1 described small bore diameter inner wall surface fine groove.
Fig. 2 (a)~Fig. 2 (c) is that forming tool negative electrode preparation flow figure: Fig. 2 (a) is a forming tool electrode preparation general flow chart; Mask plate and forms of motion wiry when Fig. 2 (b) is the processing annular groove; Mask plate and forms of motion wiry when Fig. 2 (c) is the processing spiral groove.
Fig. 3 (a)~Fig. 3 (b) is the forming tool negative electrode that the forming tool cathode junction composition that embodiment 1 makes: Fig. 3 (a) uses for the processing annular groove; The forming tool negative electrode that Fig. 3 (b) uses for the processing spiral groove.
Fig. 4 is a small bore diameter inner wall surface fine groove electrochemical machining process device schematic diagram of the present invention.
Label title among Fig. 1: 1, lower cover, 2, processing cavity, 3, the forming tool negative electrode, 4, upper cover plate, 5, anchor clamps, 6, Pressure gauge, 7, flowmeter, 8, control valve, 9, filter, 10, vavuum pump, 11, heater, 12, thermometer, 13, the electrolyte storage tank, 14, temperature controller.
Label title among Fig. 2 (a)~Fig. 2 (c): 15, thread supplying machine, 16, wire, 17, roller, 18, glue spreading apparatus, 19, ultraviolet lamp, 20, the mask plate slit, 21, mask plate, 22, developer solution, 23, electroplate liquid, 24, receive a silk machine, the arrow of the 25 expression directions of motion.
Label title among Fig. 3 (a)~Fig. 3 (b): 26, insulating cement, 27, the metal plating layer.
Label title among Fig. 4: 28, electrolyte import, 29, sealing gasket, 30, workpiece, 31, electrolyte outlet, 32, hold-down screw, 33, adjusting nut, 34, firm banking, other labels are identical with title with the corresponding label of Fig. 1 with title.
(5) specific embodiment
Further set forth technical scheme of the present invention with specific embodiment below, but protection scope of the present invention is not limited thereto:
Embodiment 1 (annular groove)
As shown in Figure 1, the electrolytic machining device of a kind of small-bore wall fine groove, electrolytic machining device comprises electrolytic cell, electrolyte storage tank and the power supply that is electrically connected with electrolytic cell, described electrolyte storage tank is communicated with the electrolytic cell circulation by vavuum pump and circulation line, described electrolytic cell comprises processing cavity 2, be fixed on the base 34 of processing cavity 2 bottoms, be used for fixing the upper cover plate 4 of the workpiece 30 that is shaped on unthreaded hole in advance, lower cover 1 and anchor clamps 5, described lower cover 1 is fixed on the base, described anchor clamps are connected on the described lower cover 1, it is fixing by the pressing plate and the lower cover 1 of anchor clamps 5 that described upper cover plate 4 reaches the workpiece that is shaped on unthreaded hole in advance, described upper cover plate 4, lower cover 1 is equipped with the securing member of fastening shaping tool cathode, the fixing back of the described forming tool negative electrode of the position assurance of described securing member is high up in the air to be passed through in the middle of the unthreaded hole of the described workpiece that is shaped on unthreaded hole in advance, described forming tool negative electrode is connected with the negative electricity of power supply, and the described workpiece that is shaped on unthreaded hole in advance is electrically connected with the positive pole of power supply.
Described processing cavity 2 bottoms are provided with electrolyte outlet 31, described processing cavity 2 tops are provided with electrolyte import 28, described electrolyte outlet 31 is communicated with by electrolyte storage tank 13, vavuum pump 10, electrolyte import 28 circulations successively, and described circulation line is provided with control valve 8.Described liquid outlet 31 sizes are little than inlet 28, guarantee that there is enough pressure the processing district.
Also be provided with filter 9, flowmeter 7 and Pressure gauge 6 between described electrolyte storage tank 13 and the electrolyte import 28.Described electrolyte storage tank 13 also is provided with attemperating unit, and described attemperating unit comprises temperature controller 14, heater 11 that is connected with temperature controller 14 and thermometer 7, and heater 11 and thermometer 7 place in the electrolyte storage tank during use.
Electrolyte import 28 is arranged on the upper cover plate 4 in the present embodiment, and electrolyte outlet 31 is located on lower cover 1, and the electrolytic processing process of employing carries out according to following steps:
1, preparation shaping work negative electrode: wire 16 is derived by thread supplying machine 15, through guide wheel 17, arrive glue spreading apparatus 18, glue spreading apparatus 18 is evenly coated in wire 16 surfaces with epoxy resins insulation glue 26, wire 16 is vertically placed, guarantee that insulating cement 26 evenly distributes in wire surface, wire moves downward, through ultraviolet light polymerization device 18, ultraviolet light 19 passes mask plate 21 slits 20 and shines wire 16, cause insulating cement 25 to solidify, solidify and adopted two sides ultraviolet light polymerization method to carry out, guaranteed that the illuminated part of insulating cement fully solidifies.Wire 16 after the curing is through developing, make unexposed area dissolve removal by chemical reaction taking place with developer solution 22, the wire surface part metals is naked state, then through the electroplating bath 23 of electroplate liquid is housed, the wire exposed part is carried out electroforming to be handled, finally prepare forming tool negative electrode 3, as shown in Figure 3, it is spaced apart with insulating barrier 26 that the forming tool negative electrode is conductive layer 27.
2, processing fine groove: the forming tool negative electrode 3 that makes is fixing by upper cover plate 4 and lower cover 1, and is stretching by adjusting nut 33, and the processing cavity that upper cover plate 4, workpiece 30, forming tool negative electrode 3 and lower cover 1 form is fixed in mount pad 34.Electrolyte filters through the circulatory system, and be warmed to steady temperature by temperature control heater 11, when Pressure gauge 6 shows that the processing district internal pressure is suitable, connect the power supply between shaping tool cathode 3 and the workpiece 30 this moment, Electrolyzed Processing is carried out, electrolyte flows into the processing district by upper cover plate 4 electrolyte imports 28, through flowing out by the electrolyte outlet on the lower cover 1 31 behind the processing district, make the processing district be subjected to fully washing away, guaranteed the stable of electrolysate discharge in time and process, the electrolyte outlet size is little than electrolyte entrance, has guaranteed that there is enough pressure the processing district.Cut off the power supply after institute requires the degree of depth when processing reaches, stop processing, obtain fine circular groove structure.
The parameter condition that each step of present embodiment adopts is as follows: the conductive wire of use is 200 μ m copper wires, epoxy resins insulation glue adopts 352AUV glue, the control ultraviolet ray intensity is 2KW, keep the wire transfixion, the relative motion 25 of regulating ultraviolet lamp 19, mask plate 21 and wire 16 is shown in Fig. 2 (b), and prepare the employed fine forming tool negative electrode of the annular fine groove of processing hardening time about 2 seconds, shown in Fig. 3 (a), the thickness of insulating barrier is about 50 microns.
The metal of electroforming adopts copper, and electroplate liquid is CuSO 4, control electroplate liquid concentration is 150g/L, and temperature of electroplating solution is 20 ℃, and the voltage of dc source is 6V, stirs down and electroplates 2 hours, obtains the electroforming metal layer on the copper wire after mask solidifies, and thickness is about 30 microns.
In electrochemical machining process, electrolyte is that concentration is the NaNO of 200g/L 3, the control electrolyte temperature maintains 30 degree, and electrolyte pressure keeps 1MPa, and machining voltage is provided with scope 5-10V, and be 2 minutes process time, processing obtains the rib cooling pore structure about aperture size 1mm.
Embodiment 2 (spiral groove)
The device that present embodiment adopted is identical with embodiment 1 with technological process.
The parameter condition that each step of present embodiment adopts is as follows: the conductive wire of use is 300 μ m stainless steel wires, epoxy resins insulation glue adopts 623A-80UV glue, the control ultraviolet ray intensity is 2KW, keep the wire transfixion, the relative motion 25 of regulating ultraviolet lamp 19, mask plate 21 and wire 16 is shown in Fig. 2 (c), hardening time is about 2 seconds, prepare the employed fine forming tool negative electrode of processing spirality fine groove, shown in Fig. 3 (b), the thickness of insulating barrier is about 50 microns.
The metal of electroforming adopts nickel, and electroplate liquid is a nickel sulfamic acid, and the control temperature of electroplating solution is 30 ℃, electroplate liquid concentration is 200g/L, and the voltage of dc source is 6V, stirs down and electroplates 2 hours, obtain the electroforming metal layer on the stainless steel wire after mask solidifies, thickness is about 80 microns.
In electrochemical machining process, electrolyte is that concentration is the NaClO of 150g/L 3, the control electrolyte temperature maintains 30 degree, and electrolyte pressure keeps 3MPa, and machining voltage is provided with scope 5-10V, and be 2min process time, processing obtains the rib cooling pore structure about aperture size 1mm.

Claims (10)

1, a kind of electrolytic processing process of small bore diameter inner wall surface fine groove, it is characterized in that described technology is: the variable section structure that the insulating segment made from the conductive wire of 200~1000 μ m is alternate with conductive segment is that the forming tool negative electrode is positioned in the unthreaded hole of workpiece, with the workpiece is anode, make electrolyte along the wire electrode Radial Flow, in unthreaded hole, carry out Electrolyzed Processing, and keeping electrolyte pressure at 1~5MPa, the product that washes away after the processing obtains the fine groove structure at the unthreaded hole wall of workpiece.
2, the electrolytic processing process of small bore diameter inner wall surface fine groove as claimed in claim 1, it is characterized in that described forming tool negative electrode makes as follows: the conductive wire of choosing 200~1000 μ m, the outer surface of described conductive wire solidifies the insulating barrier that one deck is set 50~100 μ m of shape by ultraviolet light mask curing technology, by developer solution the uncured portion removal is formed exposed conductive layer, expose the conductive layer part by galvanoplastics at wire then, the metal of deposition one deck 50~100 μ m obtains the alternate variable section structure of insulating segment and conductive segment and is the forming tool negative electrode.
3, the electrolytic processing process of small bore diameter inner wall surface fine groove as claimed in claim 2 is characterized in that described insulating layer material is an epoxide resin material.
4, the electrolytic processing process of small bore diameter inner wall surface fine groove as claimed in claim 2 is characterized in that described plated metal is copper or nickel.
5,, it is characterized in that in electrochemical machining process, with the NaNO of concentration at 120g/L~300g/L as the electrolytic processing process of the described small bore diameter inner wall surface fine groove of one of claim 1~4 3, NaCl or NaClO 3Solution is electrolyte, and control voltage is 5~15V.
6, a kind of electrolytic machining device of small bore diameter inner wall surface fine groove, it is characterized in that described processing unit (plant) comprises electrolytic cell, electrolyte storage tank and the power supply that is electrically connected with electrolytic cell, described electrolyte storage tank is communicated with the electrolytic cell circulation by vavuum pump and circulation line, described electrolytic cell comprises processing cavity (2), be fixed on the base (34) of processing cavity (2) bottom, be used for fixing the upper cover plate (4) of the workpiece (30) that is shaped on unthreaded hole in advance, lower cover (1) and anchor clamps, described lower cover (1) is fixed on the base, described anchor clamps are connected on the described lower cover (1), it is fixing by anchor clamps and lower cover (1) that described upper cover plate (4) reaches the workpiece that is shaped on unthreaded hole in advance, described upper cover plate (4), lower cover (1) is equipped with the securing member of fastening shaping tool cathode, the fixing back of the described forming tool negative electrode of the position assurance of described securing member is high up in the air to be passed through in the middle of the unthreaded hole of the described workpiece that is shaped on unthreaded hole in advance, described forming tool negative electrode is connected with the negative electricity of power supply, and the described workpiece that is shaped on unthreaded hole in advance is electrically connected with the positive pole of power supply.
7, the electrolytic machining device of small bore diameter inner wall surface fine groove as claimed in claim 6, it is characterized in that described processing cavity (2) bottom is provided with electrolyte outlet (31), described processing cavity (2) top is provided with electrolyte import (28), described electrolyte outlet (31) is communicated with by electrolyte storage tank (13), vavuum pump (10), electrolyte import (28) circulation successively, and described circulation line is provided with control valve (8).
8, the electrolytic machining device of small bore diameter inner wall surface fine groove as claimed in claim 7 is characterized in that described circulation line is provided with flowmeter (7) and Pressure gauge (6).
9, the electrolytic machining device of small bore diameter inner wall surface fine groove as claimed in claim 6, it is characterized in that being provided with filter (9) between described electrolyte storage tank (13) and the electrolyte import (28), electrolyte storage tank (13) is communicated with to be established a loop in addition between filter (9) back and the electrolyte import (28) and directly is communicated with electrolyte storage tank (13).
10, the electrolytic machining device of small bore diameter inner wall surface fine groove according to claim 6, it is characterized in that described electrolyte storage tank (13) is provided with attemperating unit, described attemperating unit comprises temperature controller (14), heater (11) that is connected with temperature controller (14) and thermometer (7).
CNA2008100603291A 2008-04-16 2008-04-16 Electrolytic machining technique and device for small bore diameter inner wall surface fine groove Pending CN101259549A (en)

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CN103182573A (en) * 2012-10-23 2013-07-03 南通大学 Method for processing micro-channels on surface of metal bipolar plate by adopting plate electrode in electrolytic transfer, as well as plate electrode thereof
CN102909445A (en) * 2012-10-31 2013-02-06 海宁市新艺机电有限公司 ECM (Electrochemical Machining) device and machining method of electrochemical machining narrow groove
CN103111696A (en) * 2012-12-31 2013-05-22 浙江工业大学 Metal surface micro texture group electrode direct writing micro electrolysis processing method and dedicated device
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CN106424984B (en) * 2016-11-29 2019-01-11 深圳大学 Electrochemical micromachining tool-electrode preparation method and device
CN106862683A (en) * 2017-04-26 2017-06-20 广东工业大学 A kind of device and electrochemical machining method for the profound and subtle groove of Electrolyzed Processing planar array
CN106862683B (en) * 2017-04-26 2019-06-11 广东工业大学 A kind of device and electrochemical machining method for the profound and subtle groove of Electrolyzed Processing planar array
CN110253699A (en) * 2019-06-24 2019-09-20 上海工程技术大学 A kind of method in simulation optimization electrolyte machining small diameter ring hole
CN113084465A (en) * 2021-05-07 2021-07-09 江苏江航智飞机发动机部件研究院有限公司 Precision machining method for multi-tooth turbine blade of aircraft engine
CN113084465B (en) * 2021-05-07 2022-05-20 江苏江航智飞机发动机部件研究院有限公司 Precision machining method for multi-tooth turbine blade of aircraft engine

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