CN1895829A - Group-pore electrolytic machining method and apparatus - Google Patents
Group-pore electrolytic machining method and apparatus Download PDFInfo
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- CN1895829A CN1895829A CN 200610085360 CN200610085360A CN1895829A CN 1895829 A CN1895829 A CN 1895829A CN 200610085360 CN200610085360 CN 200610085360 CN 200610085360 A CN200610085360 A CN 200610085360A CN 1895829 A CN1895829 A CN 1895829A
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- 238000003754 machining Methods 0.000 title claims abstract description 26
- 238000000034 method Methods 0.000 title claims abstract description 18
- 239000011148 porous material Substances 0.000 title claims description 20
- 239000007788 liquid Substances 0.000 claims abstract description 5
- 239000003792 electrolyte Substances 0.000 claims description 33
- 229920002120 photoresistant polymer Polymers 0.000 claims description 5
- 238000005507 spraying Methods 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 description 11
- 239000000758 substrate Substances 0.000 description 11
- 238000010586 diagram Methods 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 6
- 238000005530 etching Methods 0.000 description 6
- 238000001259 photo etching Methods 0.000 description 4
- 238000011161 development Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005868 electrolysis reaction Methods 0.000 description 3
- 230000035611 feeding Effects 0.000 description 3
- 239000003822 epoxy resin Substances 0.000 description 2
- 239000011152 fibreglass Substances 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- TVEXGJYMHHTVKP-UHFFFAOYSA-N 6-oxabicyclo[3.2.1]oct-3-en-7-one Chemical compound C1C2C(=O)OC1C=CC2 TVEXGJYMHHTVKP-UHFFFAOYSA-N 0.000 description 1
- 239000010405 anode material Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005518 electrochemistry Effects 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 239000010977 jade Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000037361 pathway Effects 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
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Abstract
An electrolyzing method and apparatus for machining hole cluster includes such steps as making a pair of tool cathodes with shielding film on their surfaces and a cluster of through holes, positioning them opposite, arranging an anode as workpiece between them in perpendicular mode, clamping the anode by both cathodes, spraying electrolyzing liquid from said through holes to said workpiece, and turning on power supply for electrolyzing to machine a cluster of holes.
Description
Technical field
Group-pore electrolytic machining method of the present invention and device belong to technical field of electrolysis processing.
Background technology
Electrolyzed Processing is a kind of special processing technology, and it is to utilize electrochemistry anodic solution principle to remove the processing method of material.It is fast that it has process velocity, and surface quality is good, and instrument is lossless, is not subjected to restriction such as the strength of materials, toughness, hardness and do not have outstanding advantage such as macroscopical cutting force, obtained using widely in industries such as Aero-Space, weapons, automobile, mould.
Group such as screen pack, air coolant tube pore structure is widely used in fields such as automobile, Aero-Space, and its manufacture method adopts spark machined or photograph Electrolyzed Processing usually.Because group's pore structure has hundreds of micro hole usually, if adopt the single electrode form with spark machined, then process time oversize, manufacturing cost is high too.So the mode that generally adopts group's electrode to process simultaneously, but the manufacturing of group's electrode is very difficult.And there is export license in spark machined, so need a plurality of groups of electrodes, this increases to manufacturing and has added many troubles.The photograph electrolysis is at first at workpiece to be processed surface-coated one deck photoresist, be painted on the photoresist surface by light and form group's pore structure, after developing, formed hollow out group sectional hole patterns at surface of the work, exposed workpiece part is processed full removal with electrolysis, remove the workpiece that photoresist just can obtain to have group pore structure at last.Processing all needs the repetition above-mentioned steps with each part of a collection of workpiece.As seen, this two populations hole manufacture method exists all that processing technology is loaded down with trivial details, manufacturing cost is crossed problems such as height, therefore, is necessary to study the high efficiency that makes new advances, solution is made in the group hole cheaply.
Summary of the invention
The objective of the invention is to solve present group hole and process the defective that ubiquitous efficient is not high, manufacturing cost is too high, the group-pore electrolytic machining method and the device of a kind of high efficiency, low manufacturing cost is provided.
A kind of group-pore electrolytic machining method is characterized in that may further comprise the steps:
(1), making runs through group pore structure, surperficial tool cathode with screened film a pair of having; (2), during Electrolyzed Processing, a pair of tool cathode of making is placed in opposite directions, the workpiece anode vertically is between them, by making tool cathode feeding clamping work pieces anode in opposite directions; (3), in the Electrolyzed Processing, run through group hole to the even jet electrolytic liquid in workpiece anode both sides by tool cathode; (4), switch between workpiece anode and the tool cathode, to workpiece both sides Electrolyzed Processing simultaneously.
One population hole electrolytic machining device, by three electrolytic machine tool bodies, electrolyte circulation system, the electrolyte temperature control system is formed, wherein said three electrolytic machine tool bodies comprise: power supply, electrolytic machining clamper, a pair of tool cathode, a workpiece anode, described electrolytic machining clamper have two negative electrode shaft passage that are oppositely arranged vertical with one and be in anode shaft passage in the middle of their, the tool cathode of narrating link to each other with the negative electrode main shaft by cathode fixture, the negative electrode main shaft links to each other with the negative electrode feed arrangement, described workpiece anode links to each other with the anode main shaft by anode clamp, and the anode main shaft links to each other with the anode feed arrangement, it is characterized in that:
(1), described tool cathode has and runs through group pore structure, has screened film with workpiece anode facing surfaces; (2), described negative electrode main shaft has hollow channel, and hollow channel one end is provided with the electrolyte stream inlet, the other end is communicated with negative electrode group hole by the T shape chamber of cathode fixture, and described electrolyte stream enters the mouth outside electrolytic machining clamper; (3), described cathode fixture has an electrolyte stream outlet to communicate with the electrolyte outflow passage of described electrolytic machining clamper.
Because this processing mode is tool cathode and anode to fit tightly (middle rise shield and the screened film of insulating effect belongs to the part of tool cathode), this and traditional Electrolyzed Processing mode are very different.In traditional Electrolyzed Processing, leave an electrolyte flow channel between tool cathode and the workpiece anode.And the present invention adopts and runs through group pore structure as electrolyte flow channel on the tool cathode, promptly as feed pathway, also as liquid outlet channel.Electrolyte enters the hollow channel of negative electrode main shaft under the effect of pump, arrive tool cathode and this zone of workpiece anode by the cathode fixture internal cavities, at this moment group's pore structure is the flow channel of solution, it also is the flow pass of solution, electrolyte enters flow pass by the runner of cathode fixture again, gets back to electrolytic bath by flange.This moment, tool cathode ran through the interior ancient piece of jade, round, flat and with a hole in its centre in group hole and the electric field between the workpiece anode has been removed main effect to the workpiece anode material.
Adopted group-pore electrolytic machining method, only applied steps such as photoresist, photoetching, development, etching in tool surfaces, formed tool cathode, or had the through hole structure by other technology formation, the surface has the tool cathode of screened film.And anode is without any need for suchlike step, when tool cathode clamps the back with it just can Electrolyzed Processing, workpiece has also saved except that this processing step of glue after the process finishing.The most important thing is,, this means and to produce in batches easily so long as processing just need not be changed tool cathode with a kind of part.The once electrolytic that can realize group hole shapes, and has improved working (machining) efficiency, has reduced processing cost.
Description of drawings
Fig. 1 is a group hole electrolytic machine tool overall structure schematic diagram.
Fig. 2 is group Electrolyzed Processing district, a hole schematic diagram.
Fig. 3 is a group hole electrochemical machining process schematic diagram.
Fig. 4 is a tool cathode manufacturing process schematic diagram.Wherein, Fig. 4 (a) is that metal substrate applies screened film and carries out the photoetching schematic diagram; Fig. 4 (b) is the back band screened film metal substrate schematic diagram that develops; Fig. 4 (c) is the tool cathode schematic diagram that obtains after etching is finished.
Label title among Fig. 1: 1, lathe platform, 2, the anode main shaft, 3, the anode feed arrangement, 4, the workpiece anode clamp, 5, electrolytic machining clamper, 6, the negative electrode feed arrangement, 7, the negative electrode main shaft, 8, the tool cathode anchor clamps, 9, ball valve, 10, electrolytic bath, 11, heater, 12, thermocouple, 13, temperature controller, 14, filter, 15, check-valves, 16, pump, 17, check-valves, 18, stop valve, 19, ball valve, 20, fine filter.
Label title among Fig. 2: 21, electrolyte flows into passage, and 22, supporting seat, 23, tool cathode, 24, electrolyte flows out passage, 25, the electrolyte outlet flange, 26, the workpiece anode,
Label title among Fig. 3: 27, screened film,
Label title among Fig. 4: 28, substrate, 29, exposure light source.
The specific embodiment
As shown in Figure 1, group hole electrolytic machine tool has comprised lathe platform 1, anode main shaft 2, anode feed arrangement 3, anode clamp 4, electrolytic machining clamper 5, negative electrode feed arrangement 6, negative electrode main shaft 7, tool cathode 8 etc., and they have formed machine body.In addition, formed the electrolyte circulation system of lathe by two ball valves 9,19, the liquid bath 10 of filling electrolyte, two- stage filter 14,20, two check- valves 15,17, pump 16, stop valve 18 and pipelines, supplied with the electrolyte of processing usefulness and discharge electrolysate.Heater is heated the electrolyte in the electrolytic bath 10 by thermocouple 11 and temperature controller 12 controls.Lathe is a kind of three-head flexible feeding electrolytic machine tool.
In conjunction with Fig. 2 and shown in Figure 3, the main body of group's hole electrolytic machining clamper 5 is an insulating materials, as epoxy resin, fiberglass etc.Have three shaft passage in a plane on the jig main body, wherein two cathode channel and an anode passages vertical of coaxial placement in opposite directions with them.Settle negative electrode main shaft 7 and anode main shaft 2 in cathode channel and the anode passages respectively.Negative electrode main shaft 7 one ends connect negative electrode feed arrangement 6, and the other end is by cathode fixture 8 fastening means negative electrodes 25.Described negative electrode main shaft 7 has hollow channel, and promptly electrolyte flows into passage 21, and electrolyte flows into passage 21 1 ends and be provided with the electrolyte stream inlet, and the other end is communicated with negative electrode group hole by cathode fixture 8.Described cathode fixture 8 internal cavities are the T font.Article one, electrolyte flows out the middle part that passage 24 is positioned at anchor clamps 5, and it communicates with electrolyte outlet flange 25.
Shown in Figure 4 is tool cathode manufacture process schematic diagram, on substrate 28, apply screened film 27, through having formed the figure shown in Fig. 4 (b) after photoetching, the development, the substrate exposed part is carried out etching, can adopt physical etchings, also can adopt chemical etching or electrochemical etching, substrate be carved worn, form figure shown in Fig. 4 (c).At this moment screened film 27 is referred to as tool cathode 23 with substrate 28 integrative-structures.Here it is to be noted: this only is a kind of technology that obtains tool cathode 23, also can adopt other technology (as drilling) to obtain to have to run through group pore structure, and the surface has the tool cathode 23 of screened film.
Below in conjunction with Fig. 1, Fig. 2, Fig. 3 and Fig. 4 method of the present invention is described, implementation process is passed through following step successively:
1, with reference to figure 4 (a), screened film 27 is coated in substrate 28, and photoetching, make to occur group's pore structure on the screened film;
2. with reference to figure 4 (b), after the development, there is the part substrate exposed externally;
3. with reference to figure 4 (c), the exposed part of substrate 28 is carried out etching, the substrate of carving after wearing 28 is called tool cathode 23 with screened film 27 integrative-structures, as the tool cathode of group hole Electrolyzed Processing;
4. with reference to figure 1 and Fig. 2, the electrolytic machining clamper of being made by insulating materials (as epoxy resin, fiberglass etc.) 5 is placed in the work box of Electrochemical Machine Tool for Blade Machining.Anchor clamps 5 have three shaft passage, supply anode main shaft 2 and two negative electrode main shaft 7 feedings used respectively; To anode workpiece blank 26 be clamped with anode clamp 4, by feed mechanism the anode workpiece blank is delivered to correct position, with the tool cathode cathode fixture of packing into, make two negative electrodes 23 move toward one another simultaneously or successively by negative electrode feed mechanism 6, until clamping work pieces blank 26.Connect electrolyte earlier, connect power supply again, the beginning Electrolyzed Processing, after anode blank 26 was processed to through hole, Electrolyzed Processing finished.
5. with reference to figure 1 and Fig. 2, unclamp anode, take out workpiece, another workpiece blank 26 is installed again, carry out Electrolyzed Processing again after clamping with two tool cathodes 23 by negative electrode feed mechanism negative electrode.Like this, can realize efficient, the low-cost manufacturing of group batch of pore structure workpiece.
6. with reference to figure 1, the circulate electrolyte filter, and keep temperature constant by the temperature control heater; During Electrolyzed Processing, pump 16 is delivered to electrolytic machining clamper 5 with electrolyte, flows into passage 21 along the electrolyte of anchor clamps 5 both sides and flows to negative electrode and anode, flows out passage 24 from electrolyte and flows out, and flows back to electrolytic bath 10 through outlet(discharge) flange 25.
Claims (2)
1, a kind of group-pore electrolytic machining method is characterized in that may further comprise the steps:
(1), making runs through group pore structure, surperficial tool cathode (23) with screened film a pair of having;
(2), during Electrolyzed Processing, a pair of tool cathode of making (23) is placed in opposite directions, workpiece anode (26) vertically is between them, by making tool cathode (23) feeding clamping work pieces anode (26) in opposite directions;
(3), in the Electrolyzed Processing, run through group hole to the even jet electrolytic liquid in workpiece anode (26) both sides by tool cathode (23);
(4), energising between workpiece anode (26) and the tool cathode (23), to workpiece both sides Electrolyzed Processing simultaneously.
2, one population hole electrolytic machining device, by three electrolytic machine tool bodies, electrolyte circulation system, the electrolyte temperature control system is formed, wherein said three electrolytic machine tool bodies comprise: power supply, electrolytic machining clamper (5), a pair of tool cathode (23), a workpiece anode (26), described electrolytic machining clamper (5) has two negative electrode shaft passage that are oppositely arranged vertical with one and be in anode shaft passage in the middle of their, the tool cathode of narrating (23) link to each other with negative electrode main shaft (7) by cathode fixture (8), negative electrode main shaft (7) links to each other with negative electrode feed arrangement (6), described workpiece anode (26) links to each other with anode main shaft (2) by anode clamp (4), and anode main shaft (2) links to each other with anode feed arrangement (3), it is characterized in that:
(1), described tool cathode (23) has and runs through group pore structure, has photoresist with workpiece anode (26) facing surfaces;
(2), described negative electrode main shaft (7) has hollow channel (21), and hollow channel one end is provided with the electrolyte stream inlet, the other end is communicated with negative electrode group hole by the T shape chamber of cathode fixture (8), and described electrolyte stream enters the mouth outside electrolytic machining clamper (5);
(3), described cathode fixture (8) has an electrolyte stream outlet to communicate with the electrolyte outflow passage of described electrolytic machining clamper (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100853601A CN100411794C (en) | 2006-06-12 | 2006-06-12 | Group-pore electrolytic machining method and apparatus |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100853601A CN100411794C (en) | 2006-06-12 | 2006-06-12 | Group-pore electrolytic machining method and apparatus |
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| Publication Number | Publication Date |
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| CN1895829A true CN1895829A (en) | 2007-01-17 |
| CN100411794C CN100411794C (en) | 2008-08-20 |
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| CNB2006100853601A Expired - Fee Related CN100411794C (en) | 2006-06-12 | 2006-06-12 | Group-pore electrolytic machining method and apparatus |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101219517B (en) * | 2008-01-28 | 2010-07-14 | 南京航空航天大学 | Three-electrode group hole electrolytic machining clamper |
| CN101862870A (en) * | 2010-06-21 | 2010-10-20 | 南京航空航天大学 | Array micro-pit electrolytic machining method and system |
| CN102528185A (en) * | 2010-12-31 | 2012-07-04 | 财团法人金属工业研究发展中心 | Electrolytic machining method and electrolytic machined part semi-finished product |
| CN103624348A (en) * | 2013-11-25 | 2014-03-12 | 南京航空航天大学 | Mass array group small hole electrolytic machining method and device based on PDMS masks |
| CN104001998A (en) * | 2014-05-08 | 2014-08-27 | 浙江工业大学 | Array minuteness group electrode manufacturing method and device based on cathode optimization |
| CN105014169A (en) * | 2015-08-13 | 2015-11-04 | 清华大学 | Method for electrolytically machining array holes of group electrodes |
| TWI577480B (en) * | 2015-11-27 | 2017-04-11 | Electrochemical processing device for turbine blades | |
| CN108637413A (en) * | 2018-05-24 | 2018-10-12 | 常州工学院 | A kind of hexagon blind hole rotating cathode electrolytic machining device with anodic protection |
| CN108637411A (en) * | 2018-05-16 | 2018-10-12 | 广东工业大学 | A kind of fluid channel electrolytic machining device |
| CN110614410A (en) * | 2019-09-20 | 2019-12-27 | 常州工学院 | Horizontal vibration device for dovetail groove electrolytic machining and dovetail groove machining method |
| CN111168173B (en) * | 2020-01-10 | 2021-05-14 | 安徽工业大学 | Positive flow type movable mould plate electrolytic grinding composite processing method and device |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1009376B (en) * | 1987-05-27 | 1990-08-29 | 西安交通大学 | Electro-chemical corrosion of circular silicon cup |
| US5507925A (en) * | 1994-10-28 | 1996-04-16 | Corning Incorporated | Electrochemical drilling of substrates |
| CN1212214C (en) * | 2003-04-29 | 2005-07-27 | 南京航空航天大学 | Technique for electrolysis processing fine slits and its devices |
| JP4274026B2 (en) * | 2004-04-05 | 2009-06-03 | 株式会社デンソー | Electrolytic processing method |
| US20050274625A1 (en) * | 2004-06-14 | 2005-12-15 | Frederick Joslin | Apparatus and method for white layer and recast removal |
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2006
- 2006-06-12 CN CNB2006100853601A patent/CN100411794C/en not_active Expired - Fee Related
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101219517B (en) * | 2008-01-28 | 2010-07-14 | 南京航空航天大学 | Three-electrode group hole electrolytic machining clamper |
| CN101862870A (en) * | 2010-06-21 | 2010-10-20 | 南京航空航天大学 | Array micro-pit electrolytic machining method and system |
| CN102528185A (en) * | 2010-12-31 | 2012-07-04 | 财团法人金属工业研究发展中心 | Electrolytic machining method and electrolytic machined part semi-finished product |
| CN103624348A (en) * | 2013-11-25 | 2014-03-12 | 南京航空航天大学 | Mass array group small hole electrolytic machining method and device based on PDMS masks |
| CN104001998A (en) * | 2014-05-08 | 2014-08-27 | 浙江工业大学 | Array minuteness group electrode manufacturing method and device based on cathode optimization |
| CN105014169A (en) * | 2015-08-13 | 2015-11-04 | 清华大学 | Method for electrolytically machining array holes of group electrodes |
| TWI577480B (en) * | 2015-11-27 | 2017-04-11 | Electrochemical processing device for turbine blades | |
| CN108637411A (en) * | 2018-05-16 | 2018-10-12 | 广东工业大学 | A kind of fluid channel electrolytic machining device |
| CN108637413A (en) * | 2018-05-24 | 2018-10-12 | 常州工学院 | A kind of hexagon blind hole rotating cathode electrolytic machining device with anodic protection |
| CN108637413B (en) * | 2018-05-24 | 2020-07-28 | 常州工学院 | Hexagonal blind hole rotary cathode electrolytic machining device with anode protection |
| CN110614410A (en) * | 2019-09-20 | 2019-12-27 | 常州工学院 | Horizontal vibration device for dovetail groove electrolytic machining and dovetail groove machining method |
| CN110614410B (en) * | 2019-09-20 | 2020-09-01 | 常州工学院 | Horizontal vibration device for dovetail groove electrolytic machining and dovetail groove machining method |
| CN111168173B (en) * | 2020-01-10 | 2021-05-14 | 安徽工业大学 | Positive flow type movable mould plate electrolytic grinding composite processing method and device |
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| CN100411794C (en) | 2008-08-20 |
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