CN105880849A - Micro-nano machining method and device for laser composite ejection liquid beam - Google Patents
Micro-nano machining method and device for laser composite ejection liquid beam Download PDFInfo
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- CN105880849A CN105880849A CN201610480122.4A CN201610480122A CN105880849A CN 105880849 A CN105880849 A CN 105880849A CN 201610480122 A CN201610480122 A CN 201610480122A CN 105880849 A CN105880849 A CN 105880849A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
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Abstract
The invention discloses a micro-nano machining method and a micro-nano machining device for a laser composite ejection liquid beam, and belongs to the technical field of micro-nano processing techniques. The micro-nano machining device comprises a laser pulse sequence regulator (1), a laser system (2), a laser beam adjusting system (3), a visible light transmission reflector (4), a laser beam and ejection liquid beam coaxial observation regulation system (5), a focusing lens (6), a regulating and control device (7), an ejection device (8), a micro-nano working table (9), an ejection liquid filtering circulation system (10), a laser power supply (11) and an overall control system power supply (12). The micro-nano machining method comprises a step of implementing micro-nano machining on a workpiece by taking laser beams generated from the laser system (2) and ejection liquid beams generated from the ejection device (8). The micro-nano machining method and the micro-nano machining device are applicable to machining of engine blade film holes.
Description
Technical field
The invention belongs to technical field of micro and nano fabrication, be specifically related to a kind of laser composite injection liquid bundle
Big L/D ratio micro-nano processing method and device, draw ratio is maximum up to 20:1, this micro-nano technology
Method and device is applicable to the processing of engine blade air film hole.
Background technology
Modern Aviation, the development of naval technology promote aero-engine, large-scale gas turbine
Constantly updating, the electromotor of big thrust loading and high power to weight ratio means temperature before higher whirlpool, because of
This electromotor is commonly used high temperature alloy, titanium alloy or surface cover the alloy of ceramic coating
As blade material, use aperture gaseous film control formula turbo blade to carry out forcing cooling simultaneously, carry
The heat resistance of high electromotor and reliability.The aperture of blade air film hole is generally 0.2～0.8mm
Some designs are up to 0.2～2mm, due to the space angle of its complexity, it is desirable to have higher table
Face quality, less surface recast layer, every blade have tens of to hundreds of, combustor have number
Ten thousand such air film holes.
Existing air film hole processing method mainly includes conventional mechanical processing, spark machined, spray
Penetrate liquid Shu Jiagong, conventional laser processing, short-pulse laser processing and femtosecond laser to process, but this
A little processing methods all have some limitations.Conventional mechanical is processed due to tool wear and position
Limited, and air film hole cannot be processed；The electrode fabrication of spark machined and reparation difficulty, processing
Efficiency is low, and accurate to dimension is uncontrollable, and surface roughness is low, burr is many, and can produce
Coating again；The working (machining) efficiency of spraying liquid bunch processing is low, and processing roughness is poor, it is impossible to processing profiled
Hole；Coating is inevitably resulted from again even after conventional laser processing, short-pulse laser processing
There is heat affected area after micro-crack, and processing, below aperture, port has molten tumor to pile up, abrasive Flow
It is difficult to remove；The working (machining) efficiency of femtosecond laser processing is low.
Summary of the invention
It is an object of the invention to provide micro-nano processing method and the dress of a kind of laser composite injection liquid bundle
Put, use the method and device can process the metal micro-nanostructure of big L/D ratio expeditiously,
And recast layer, non-microcracked, without residual stress, without heat affected area can be eliminated.
For achieving the above object, technical scheme is as follows:
The micro-nano technology device of a kind of laser composite injection liquid bundle, described micro-nano technology device includes
Laser pulse sequence actuator 1, laser system 2, laser beam adjust system 3, visible transmission
Laser mirror 4, laser beam and spraying liquid bunch are coaxially observed regulator control system 5, focus lamp 6, are adjusted
Control device 7, injection apparatus 8, micro-nano workbench 9, injection liquid filtration cycle system 10, pulse
Power supply 11 and overall system control power supply 12, wherein,
Described laser pulse sequence modulator 1 is connected with laser system 2；
The laser that described laser system 2 produces arrives visible ray after laser beam adjusts system 3
Transmission laser reflecting mirror 4；
Described laser beam regulator control system coaxial with spraying liquid bunch 5 includes regulating mirror 501, filter lens
502, graduated scale mirror 503 and ccd video camera 504；
Described regulation device 7 center is provided with through hole, and regulation device 7 is fixing with injection apparatus 8 even
Connect；
Described injection apparatus 8 includes glass window 801, nozzle 802, spraying liquid bunch 803, glass
Glass window 801 is arranged on the housing of injection apparatus 8, and nozzle 802 is arranged in injection apparatus 8
The inside of housing, nozzle 802 sprays spraying liquid bunch 803,
Described micro-nano workbench 9 includes fixture 901 and work top 902, and fixture 901 is arranged in
On work top 902；
Described ccd video camera 504, graduated scale mirror 503, filter lens 502, regulation mirror 501,
Visible transmission laser mirror 4, focus lamp 6, regulation device 7, nozzle 802, fixture 901
It is sequentially arranged from top to bottom with work top 902 and there is same vertical centrage；
Described injection liquid filtration cycle system 10 includes spraying liquid case 1001, grade one filter
1002, accumulator 1003, pump group 1004, Pressure gauge 1005, secondary filter 1006 and stream
Amount controller 1007, injection liquid case 1001 by pipeline successively with pump group 1004, single filter
Device 1002, accumulator 1003 and secondary filter 1006 connect, and further with injection apparatus
The nozzle 802 of 8 connects, and pipeline is additionally provided with Pressure gauge 1005 and flow controller 1007, spray
Penetrate liquid case 1001 to be also connected with micro-nano workbench 9 by pipeline；
The described pulse power 11 is connected with the nozzle 801 of injection apparatus 8；
Described laser pulse sequence actuator 1, laser system 2, laser beam are coaxial with spraying liquid bunch
Observation regulator control system 5, micro-nano workbench 9, injection liquid filtration cycle system 10, the pulse power
11 all electrically connect with overall system control power supply 12.
Described laser system 2 is fs-laser system.
Described spraying liquid bunch 803 is electrolytic solution, and described electrolytic solution is acid or neutral solution,
Concentration is 5%-30%, and medium is distilled water or deionized water.
The material of described injection apparatus 8 entirety is corrosion-resistant stainless steel；The material of glass window 801
Matter is optical glass；The material of nozzle 802 is gem or diamond.
Described fixture 901 is in tilted layout, and angle of inclination is 12-72 °；Described work top 901
With fixture 902 through anticorrosion and insulation processing.
The described pulse power 11 is nanosecond class pulse generator for EDM.
The micro-nano processing method of the micro-nano technology device of the laser composite injection liquid bundle described in employing,
This micro-nano processing method is the spray that the laser beam utilizing laser system to produce produces with injection apparatus 8
Penetrate liquid Shu Zuowei medium on workpiece, carry out micro-nano technology.
Comprise the steps:
1) device detection: include the detection of electric circuit inspection, light path, injection liquid filtration cycle system inspection
Survey；
2) laser beam and spraying liquid bunch coaxially observe regulation and control: coaxial with spraying liquid bunch by laser beam
Laser beam and spraying liquid bunch are adjusted to coaxially, specifically comprise the following steps that by observation regulator control system 5
Regulating part is positioned over the top of injection apparatus 8, opens laser system 2, laser system 2
The laser beam produced arrives focus lamp 6 through visible transmission laser mirror 4 reflection, goes forward side by side one
Step is beaten and is formed through hole on regulating part surface, is laser spot center；Regulation CCD camera 504
The center of central point aligned through holes of screen graticule, the now screen ten of CCD camera 504
The central point of wordline is laser spot center, removes regulating part；Open injection liquid filtration cycle
Pump group 1004 in system 10, regulation injection hydraulic pressure so that spraying liquid bunch is stable, regulates Z
Direction of principal axis makes the upper surface of laser spot center and nozzle 801 coplanar；Again with CCD camera 504
Screen graticule central point on the basis of regulate regulation device 7, calibrate spraying liquid bunch center；
3) Compound Machining: the laser processing parameter of regulation laser system 2, injection liquid filtration cycle
Hydraulic pressure and the pulse of the pulse power 11 and voltage parameter are sprayed in the processing of system 10；By adjusting
Workpiece is fixed on work top 902 by fixture 901 with attitude to be processed, swashs workpiece
The micro-nano technology of photoreactivation spraying liquid bunch.
The concrete operations of described device detection are as follows:
Electric circuit inspection: check and guarantee laser system 2, laser pulse sequence modulator 1, laser
Bundle and spraying liquid bunch coaxially observe regulator control system 5, injection apparatus 8, injection liquid filtration cycle system
10, micro-nano workbench 9 is connected normally with total system control power supply 12, there is not the hidden of short circuit
Suffer from；
Light path detects: opens laser system 2, is positioned over by detection piece on micro-nano workbench 9, in advance
First process detection piece, after confirming that laser optical path is smooth and easy, detection piece is taken from micro-nano workbench 9
Under；
Injection liquid filtration cycle system detection: distilled water is joined injection liquid filtration cycle system
In 10, open injection liquid filtration cycle system 10, confirm that pipeline is smooth, spray liquid filtration cycle
System 10 normally works；Add injection liquid, open the pump of injection liquid filtration cycle system 10
Organize 1004 heel row except remaining distilled water in pipeline.
The application in processing micropore of the micro-nano technology device of described laser composite injection liquid bundle.
Described micropore is engine blade air film hole, and the draw ratio of described micropore is maximum up to 20:1.
The application in processing micropore of the micro-nano processing method of described laser composite injection liquid bundle.
Described micropore is engine blade air film hole, and the draw ratio of described micropore is maximum up to 20:1.
The beneficial effects of the present invention is:
1) micro-nano processing method of the laser composite injection liquid bundle of the present invention is with the photo-thermal effect of laser
Being main, laser has high instantaneous power, can remove material within the extremely short time, and
And the recast layer of generation is thin, micro-crack is few, and the hole rounding of processing is bright and clean；
2) in the micro-nano processing method of the laser composite injection liquid bundle of the present invention, spraying liquid bunch is processed not
Only can remove material as the processing of medium auxiliary laser, and can remove sharp quickly and effectively
Light adds recast layer produced by man-hour, and the cooling effect of spraying liquid bunch simultaneously can eliminate laser and add
The heat affected area that work is brought, spraying liquid bunch can also wash away machining area in addition, thus effectively hinders
The only generation of recast layer；
3) the micro-nano technology device of the laser composite injection liquid bundle of the present invention adjusts Jiao based on cross hairs
The technology of point, utilizes the image of CCD camera Real-time Feedback, and the motor of regulation device 7 can be in real time
Running adjusts the position of injection apparatus 8, it is ensured that focus center is always positioned at CCD camera display screen
Cross hairs center, thus ensure that laser beam is coaxial with spraying liquid bunch, and can fully reduce
Vibrations when liquid entrance pressure and leading screw displacement, the impact on machining accuracy, can realize simultaneously
Laser Processing is processed with spraying liquid bunch, is reached the processing effect of high-efficiency high-accuracy by Compound Machining.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of the micro-nano technology device of the laser composite injection liquid bundle of the present invention；
Fig. 2 be the laser composite injection liquid bundle of the present invention micro-nano processing method in based on focus center adjust
The process schematic of the screen graticule of whole CCD camera display screen；
Fig. 3 be the laser composite injection liquid bundle of the present invention micro-nano processing method in Z-direction calibration before
Rear comparison diagram；
The micro-nano processing method of the laser composite injection liquid bundle of Fig. 4 present invention shows based on CCD camera
The screen graticule of screen adjusts the process schematic of injection window center.
Description of reference numerals
1 laser pulse sequence modulator
2 laser systems
3 laser beams adjust system
4 visible transmission laser mirrors
5 laser beams and spraying liquid bunch coaxially observe regulator control system
501 regulation mirrors
502 filter lenss
503 graduated scale mirrors
504 CCD camera
6 focus lamps
7 regulation devices
8 injection apparatus
801 glass windows
802 nozzles
803 spraying liquid bunch
9 micro-nano workbench
901 fixtures
902 work tops
10 injection liquid filtration cycle systems
1001 injection liquid casees
1002 grade one filters
1003 accumulators
1004 pump groups
1005 Pressure gauges
1006 secondary filters
1007 flow controllers
11 pulse powers
12 overall system control power supplys
Detailed description of the invention
Below in conjunction with the accompanying drawings, the detailed description of the invention of the present invention is described in further detail.
The principle of the micro-nano processing method of the laser composite injection liquid bundle of the present invention is as follows:
The advantage of Laser Processing and spraying liquid bunch processing is effectively combined, utilizes laser system
The liquid Shu Zuowei medium that the laser beam of system 2 generation sprays with injection apparatus 8 is carried out greatly on workpiece
The processing of draw ratio micro-nano structure, the effect of Laser Processing is to remove material, and spraying liquid bunch is processed
Effect be that machining area " online " is eliminated the recast layer, micro-produced in laser processing procedure
Crackle and residual stress.Owing to Laser Processing belongs to the processing of gasification, although essentially eliminate heat
The zone of influence, but surface yet suffers from micro-crack, in conjunction with injection on the basis of Laser Processing
Liquid Shu Jiagong, can be completely eliminated the micro-crack of processing, it is achieved the height of engine blade air film hole
Matter highly-efficient processing, can also be extended to simultaneously the irregularly-shaped hole on engine chamber parts,
The processing in dustpan hole, and electromotor, gas turbine inlet air casing, low-pressure compressor and rectification
The Precision Machining in the leaf hole etc. of blade is installed on nozzle ring.The laser of the present invention is combined
The micro-nano processing method of spraying liquid bunch and device can efficiently reduce turbine vitals air film hole
Crucible zone thickness again, to ensureing that electromotor, the quality of gas turbine are of great importance, for new one
Development for opportunity of combat aero-engine, Vessel personnel provides technical support.
As it is shown in figure 1, the micro-nano technology device of the laser composite injection liquid bundle of the present invention includes swashing
Light pulse sequence actuator 1, laser system 2, laser beam adjust system 3, visible transmission swashs
Light reflection mirror 4, laser beam and spraying liquid bunch coaxially observe regulator control system 5, focus lamp 6, regulation and control
Device 7, injection apparatus 8, micro-nano workbench 9, injection liquid filtration cycle system 10, pulse electricity
Source 11 and overall system control power supply 12.
Described laser system 2 is preferably fs-laser system.
Described laser pulse sequence modulator 1 is connected with laser system 2, is used for adjusting laser system
The laser sequence that system 2 sends, enables, along with experimental condition change changes laser parameter, to obtain
Obtain optimal experimental result.
The laser that described laser system 2 produces arrives visible ray after laser beam adjusts system 3
Transmission laser reflecting mirror 4.
Described laser beam regulator control system coaxial with spraying liquid bunch 5 can realize X, Y, Z axis three
The fine position in direction, it includes regulating mirror 501, filter lens 502, graduated scale mirror 503 and
Ccd video camera 504.
Described regulation device 7 center is provided with through hole, and regulation device 7 is fixing with injection apparatus 8 even
Connect, for adjusting the position of injection apparatus 8, be provided with between regulation device 7 and injection apparatus 8
Damping block.
Described injection apparatus 8 generally axially symmetric structure, it is ensured that injection apparatus 8 exports attached
The flow velocity of near field keeps consistent in the axial direction, including glass window 801, nozzle 802, injection
Liquid bundle 803, glass window 801 is arranged on the housing of injection apparatus 8, nozzle 802 is arranged
In the inside of injection apparatus 8 housing, nozzle 802 sprays spraying liquid bunch 803.Spraying liquid bunch 803
Being preferably electrolytic solution, electrolytic solution is acid or neutral solution, and concentration is 5%-30%, is situated between
Matter is distilled water or deionized water, and effect is more under the hot conditions that laser produces for electrolysis
Good significantly so that the Anodic of machining area dissolves highly efficient, produces Anodic
Dissolve reaction.In addition, it is contemplated that liquid bundle pressure is higher, and it is acid or neutral electrolyte,
Therefore the structure of injection apparatus 8 has resistance to pressure and corrosion resistance, the material of injection apparatus 8 entirety
Matter is corrosion-resistant stainless steel；In order to ensure laser light transmission and compressive resistance, glass window 801
Material be optical glass, preferably ruby glass；The material of nozzle 802 is gem or gold
Hard rock.
Described micro-nano workbench 9 includes fixture 901 and work top 902, and fixture 901 is arranged in
On work top 902, micro-nano workbench 9 is capable of workpiece 9 in three sides of X, Y, Z axis
To hi-Fix, fixture 901 is in tilted layout, and workpiece can be made to have inclining along the circumferential direction
Rake angle ground is processed, and described angle of inclination is 12-72 °.Additionally, work top 901 and folder
Tool 902, through anticorrosion and insulation processing, prevents from occurring corrosion in carrying out compound processing course
And charged potential danger.
Described ccd video camera 504, graduated scale mirror 503, filter lens 502, regulation mirror 501,
Visible transmission laser mirror 4, focus lamp 6, regulation device 7, nozzle 802, fixture 901
It is sequentially arranged from top to bottom with work top 902 and there is same vertical centrage.
Described injection liquid filtration cycle system 10 includes spraying liquid case 1001, grade one filter
1002, accumulator 1003, pump group 1004, Pressure gauge 1005, secondary filter 1006 and stream
Amount controller 1007, injection liquid case 1001 by pipeline successively with pump group 1004, single filter
Device 1002, accumulator 1003 and secondary filter 1006 connect, and further with injection apparatus
The nozzle 802 of 8 connects, and pipeline is additionally provided with Pressure gauge 1005 and flow controller 1007, its
In, Pressure gauge 1005 is for realizing the real-time monitoring of operating pressure, and accumulator 1003 is used for preventing
Pump group 1004 and total system during only high pressure damages injection liquid filtration cycle system 10 control
Converter in power supply 12.Injection liquid case 1001 is also connected with micro-nano workbench 9 by pipeline,
To reclaim injection liquid.Additionally, the micro-nano technology device of the laser composite injection liquid bundle of the present invention
Use double-filtration, be divided into grade one filter 1002 and secondary filter 1006 that injection liquid is entered
Row filters, and had the most both avoided impurity plug nozzle 802, and had decreased again because of in spraying liquid bunch 803
Impurity cause laser energy loss.
The described pulse power 11 is connected with the nozzle 801 of injection apparatus 8, the described pulse power 11
Being preferably nanosecond class pulse generator for EDM, the nonlinear characteristic of the current efficiency of nanosecond class pulse generator for EDM obtains
To strengthening so that the locality that anode workpiece is dissolved improves, and machining accuracy is also improved；Arteries and veins
Rush in power supply 11 and be provided with ammeter, be used for measuring Electrolyzed Processing electric current.
Described laser pulse sequence actuator 1, laser system 2, laser beam are coaxial with spraying liquid bunch
Observation regulator control system 5, micro-nano workbench 9, injection liquid filtration cycle system 10, the pulse power
11 all electrically connect with overall system control power supply 12.
The micro-nano processing method of the laser composite injection liquid bundle of the present invention comprises the steps:
1) device detection: include the detection of electric circuit inspection, light path, injection liquid filtration cycle system inspection
Surveying, concrete operations are as follows:
Electric circuit inspection: check and guarantee laser system 2, laser pulse sequence modulator 1, laser
Bundle and spraying liquid bunch coaxially observe regulator control system 5, injection apparatus 8, injection liquid filtration cycle system
10, micro-nano workbench 9 is connected normally with total system control power supply 12, there is not the hidden of short circuit
Suffer from；
Light path detects: opens laser system 2, is positioned over by detection piece on micro-nano workbench 9, in advance
First process detection piece, after confirming that laser optical path is smooth and easy, detection piece is taken from micro-nano workbench 9
Under；
Injection liquid filtration cycle system detection: distilled water is joined injection liquid filtration cycle system
In 10, open injection liquid filtration cycle system 10, confirm that pipeline is smooth, spray liquid filtration cycle
System 10 normally works；Add injection liquid, open the pump of injection liquid filtration cycle system 10
Organize 1004 heel row except remaining distilled water in pipeline；
2) laser beam and spraying liquid bunch coaxially observe regulation and control: coaxial with spraying liquid bunch by laser beam
Laser beam and spraying liquid bunch are adjusted to coaxially, specifically comprise the following steps that by observation regulator control system 5
Regulating part is positioned over the top of injection apparatus 8, opens laser system 2, laser system 2
The laser beam produced arrives focus lamp 6 through visible transmission laser mirror 4 reflection, goes forward side by side one
Step is beaten and is formed through hole on regulating part surface, is approximately considered through hole center and is laser spot center；
The center of the central point aligned through holes of the screen graticule of regulation CCD camera 504, such as Fig. 2 institute
Showing, now the central point of the screen graticule of CCD camera 504 is laser spot center, moves
Open regulating part；Opening the pump group 1004 in injection liquid filtration cycle system 10, hydraulic pressure is sprayed in regulation,
Making spraying liquid bunch stable, regulation Z-direction makes the upper of laser spot center and nozzle 801
Surface co-planar, as shown in Figure 3；With the central point of the screen graticule of CCD camera 504 it is again
Benchmark regulation regulation device 7, calibrates spraying liquid bunch center；
3) Compound Machining: the laser processing parameter of regulation laser system 2, injection liquid filtration cycle
Hydraulic pressure and the pulse of the pulse power 11 and voltage parameter are sprayed in the processing of system 10；By adjusting
Workpiece is fixed on work top 902 by fixture 901 with attitude to be processed, swashs workpiece
The micro-nano technology of photoreactivation spraying liquid bunch.
Claims (13)
1. the micro-nano technology device of a laser composite injection liquid bundle, it is characterised in that:
Described micro-nano technology device include laser pulse sequence actuator (1), laser system (2),
Laser beam adjusts system (3), visible transmission laser mirror (4), laser beam and injection liquid
Bundle coaxially observe regulator control system (5), focus lamp (6), regulation device (7), injection apparatus (8),
Micro-nano workbench (9), injection liquid filtration cycle system (10), the pulse power (11) and entirety
Control system power supply (12), wherein,
Described laser pulse sequence modulator (1) is connected with laser system (2)；
The laser that described laser system (2) produces arrives after laser beam adjusts system (3)
Visible transmission laser mirror (4)；
Described laser beam regulator control system coaxial with spraying liquid bunch (5) include regulate mirror (501),
Filter lens (502), graduated scale mirror (503) and ccd video camera (504)；
Described regulation device (7) center is provided with through hole, regulation device (7) and injection apparatus (8)
Fixing connection；
Described injection apparatus (8) includes glass window (801), nozzle (802), injection liquid
Bundle (803), glass window (801) is arranged on the housing of injection apparatus (8), nozzle (802)
Being arranged in the inside of injection apparatus (8) housing, nozzle (802) sprays spraying liquid bunch (803),
Described micro-nano workbench (9) includes fixture (901) and work top (902), fixture
(901) it is arranged on work top (902)；
Described ccd video camera (504), graduated scale mirror (503), filter lens (502),
Regulation mirror (501), visible transmission laser mirror (4), focus lamp (6), regulation device
(7), nozzle (802), fixture (901) and work top (902) cloth the most successively
Put and there is same vertical centrage；
Described injection liquid filtration cycle system (10) includes spraying liquid case (1001), one-level mistake
Filter (1002), accumulator (1003), pump group (1004), Pressure gauge (1005), two
Level filter (1006) and flow controller (1007), injection liquid case (1001) is by pipe
Road successively with pump group (1004), grade one filter (1002), accumulator (1003) and two grades
Filter (1006) connects, and is connected with the nozzle (802) of injection apparatus (8) further,
Pressure gauge (1005) and flow controller (1007), injection liquid case (1001) it is additionally provided with on pipeline
Also it is connected with micro-nano workbench (9) by pipeline；
The described pulse power (11) is connected with the nozzle (801) of injection apparatus (8)；
Described laser pulse sequence actuator (1), laser system (2), laser beam and injection liquid
Bundle coaxially observe regulator control system (5), micro-nano workbench (9), injection liquid filtration cycle system (10),
The pulse power (11) all electrically connects with overall system control power supply (12).
The micro-nano technology device of laser composite injection liquid bundle the most according to claim 1, its feature
It is:
Described laser system (2) is fs-laser system.
The micro-nano technology device of laser composite injection liquid bundle the most according to claim 1, its feature
It is:
Described spraying liquid bunch (803) is electrolytic solution, and described electrolytic solution is acid or neutral molten
Liquid, concentration is 5%-30%, and medium is distilled water or deionized water.
The micro-nano technology device of laser composite injection liquid bundle the most according to claim 1, its feature
It is:
The material of described injection apparatus (8) entirety is corrosion-resistant stainless steel；Glass window (801)
Material be optical glass；The material of nozzle (802) is gem or diamond.
The micro-nano technology device of laser composite injection liquid bundle the most according to claim 1, its feature
It is:
Described fixture (901) is in tilted layout, and angle of inclination is 12-72 °；Described work top
And fixture (902) is through anticorrosion and insulation processing (901).
The micro-nano technology device of laser composite injection liquid bundle the most according to claim 1, its feature
It is:
The described pulse power (11) is nanosecond class pulse generator for EDM.
7. use the micro-nano technology according to the laser composite injection liquid bundle described in any one of claim 1-6
The laser composite injection liquid bundle of device micro-nano processing method, it is characterised in that:
This micro-nano processing method is that the laser beam utilizing laser system (2) to produce is with injection apparatus (8)
The spraying liquid bunch produced carries out micro-nano technology as medium on workpiece.
The micro-nano processing method of laser composite injection liquid bundle the most according to claim 7, its feature
It is:
Comprise the steps:
1) device detection: include the detection of electric circuit inspection, light path, injection liquid filtration cycle system inspection
Survey；
2) laser beam and spraying liquid bunch coaxially observe regulation and control: coaxial with spraying liquid bunch by laser beam
Laser beam and spraying liquid bunch are adjusted to coaxially, specifically comprise the following steps that by observation regulator control system (5)
Regulating part is positioned over the top of injection apparatus (8), opens laser system (2), swash
The laser beam that photosystem (2) produces arrives through visible transmission laser mirror (4) reflection
Focus lamp (6), and beat further at regulating part surface formation through hole, it is laser spot center；
The center of the central point aligned through holes of the screen graticule of regulation CCD camera (504), now
The central point of the screen graticule of CCD camera (504) is laser spot center, removes regulation
Part；Opening the pump group (1004) in injection liquid filtration cycle system (10), hydraulic pressure is sprayed in regulation,
Making spraying liquid bunch stable, regulation Z-direction makes laser spot center and nozzle (801)
Upper surface is coplanar；Adjust on the basis of the central point of the screen graticule of CCD camera (504) again
Joint regulation device (7), calibrates spraying liquid bunch center；
3) Compound Machining: the laser processing parameter of regulation laser system (2), injection liquid filter
Hydraulic pressure and the pulse of the pulse power (11) and voltage parameter are sprayed in the processing of blood circulation (10)；
By adjusting fixture (901), workpiece is fixed on work top (902) with attitude to be processed,
Workpiece is carried out the micro-nano technology of laser composite injection liquid bundle.
The micro-nano processing method of laser composite injection liquid bundle the most according to claim 8, its feature
It is:
The concrete operations of described device detection are as follows:
Electric circuit inspection: check and guarantee laser system (2), laser pulse sequence modulator (1),
Laser beam and spraying liquid bunch coaxially observe regulator control system (5), injection apparatus (8), injection liquid
Filtration cycle system (10), micro-nano workbench (9) and total system control power supply (12) even
Connect normal, there is not the hidden danger of short circuit；
Light path detects: open laser system (2), detection piece is positioned over micro-nano workbench (9)
On, detection piece is pre-machined, after confirming that laser optical path is smooth and easy, by detection piece from micro-nano workbench
(9) take off on；
Injection liquid filtration cycle system detection: distilled water is joined injection liquid filtration cycle system
(10) in, open injection liquid filtration cycle system (10), confirm that pipeline is smooth, spray liquid mistake
Filter blood circulation (10) normally works；Add injection liquid, open injection liquid filtration cycle system
Pump group (1004) heel row of system (10) is except remaining distilled water in pipeline.
10. according to the micro-nano technology device of the laser composite injection liquid bundle described in any one of claim 1-6
Application in processing micropore.
11. application according to claim 10, it is characterised in that:
Described micropore is engine blade air film hole, and the draw ratio of described micropore is maximum up to 20:1.
12. according to the micro-nano processing method of the laser composite injection liquid bundle described in any one of claim 7-9
Application in micropore.
13. application according to claim 12, it is characterised in that:
Described micropore is engine blade air film hole, and the draw ratio of described micropore is maximum up to 20:1.
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