CN102500928A - Micro-water-column guiding laser micromachining device - Google Patents
Micro-water-column guiding laser micromachining device Download PDFInfo
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- CN102500928A CN102500928A CN2011103349152A CN201110334915A CN102500928A CN 102500928 A CN102500928 A CN 102500928A CN 2011103349152 A CN2011103349152 A CN 2011103349152A CN 201110334915 A CN201110334915 A CN 201110334915A CN 102500928 A CN102500928 A CN 102500928A
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Abstract
The invention relates to a micro-water-column guiding laser micromachining device, which comprises a supporting sleeve, a water tank, a nozzle and an optical focusing lens. The optical focusing lens is mounted in the supporting sleeve horizontally through a lens mount, and the lens mount is connected with a nozzle orifice center regulating mechanism in the Z direction. The water tank is mounted at the lower end opening of the supporting sleeve, and is connected with a high-pressure water system through a water inlet pipe joint. A quartz window is arranged in the middle of the top end of the water tank and faces the center of the lower end opening of the supporting sleeve, the nozzle is arranged in the middle of the bottom end of the water tank, and the focusing point of the optical focusing lens is located at the orifice center of the nozzle. The water tank is also connected with nozzle orifice center regulating mechanisms in the horizontal X direction and the Y direction. The micro-water-column guiding laser micromachining device is provided with the regulating mechanisms for coupling alignment of laser in the horizontal direction and the longitudinal direction, and accordingly three-dimension relative positions of the laser focal spot and the nozzle orifice center can be regulated accurately, and coupling effect of the focusing lens and optical fibers in water stream during water guiding laser micromachining is guaranteed.
Description
Technical field
The invention belongs to the precision processing technology field, be specifically related to laser micro-processing method and device.
Background technology
Along with the continuous development of accurate and Ultraprecision Machining, the compound mainstream technology that becomes the processing and manufacturing field gradually of laser and other process technology.Little water is led laser processing technology the focussed laser beam of specific wavelength is imported the swiftly flowing water bundle as optical fiber, and laser forms the high-energy line and is mapped to surface of the work after repeatedly total reflection takes place for water and air interface, and realization is to the microfabrication of workpiece.With the conventional laser micro-processing technology: the method for laser compound treating of ZL02138076.7 surface of friction pair; 200610039758.1 1 kinds of laser surface micro molding process of application number are compared; Because water bundle optical fiber jet has the homogenising effect, workpiece is had cooling, flushing action laser energy in process; Thereby water guiding laser micro-machining technology has the machining accuracy height, machining stress is minimum, the heat affected area is little, no hot slag, process neat in edge and working (machining) efficiency advantages of higher, but should technology for the accurate coupling of laser and water bundle optical fiber very high requirement be arranged.
The accurate coupling of laser and water bundle optical fiber is the key technology that realization water is led laser fine processing, also is the difficult point place that directly influences its technical application effect.
Summary of the invention
The purpose of this invention is to provide a kind of little water column simple in structure, reliable operation and guide laser micro-processing method and device, to solve the coupling adjustment problem of laser focusing and water bundle optical fiber.
The present invention is that the technical scheme that achieves the above object is:
A kind of little water column guiding laser fine processing unit (plant), it comprises supporting sleeve, water tank, nozzle and optical focusing lens; Level is installed optical focusing lens in the said supporting sleeve, and optical focusing lens is connected with Z direction nozzle bore center adjustment mechanism; Said supporting sleeve lower port is installed water tank, and said water tank connects high pressure water system through admitting pipe joint; The center, top of said water tank is for quartzy window, and over against supporting sleeve lower port center, center, the bottom of water tank is provided with nozzle, and the focus point of optical focusing lens just in time drops on the micropore center of nozzle; Said water tank also is connected with Y direction nozzle bore center adjustment mechanism with horizontal X.
Further, the nozzle bore center adjustment mechanism of said Z direction comprises adjustment screw, adjusting nut and locking nut; On the tube wall of supporting sleeve, being provided with circumferentially evenly distributes three regulates window; Said adjustment screw puts in the pipe from regulating window; Be connected the lens mount of optical focusing lens; The adjustment screw outer end is assemblied in the inner groove of adjusting nut, and the adjusting nut screw thread is assemblied on the supporting sleeve, and is locked by locking nut.Rotation drive adjustment screw with adjusting nut moves up and down, thereby can regulate the axial location of lens mount.
Said horizontal X and Y direction nozzle bore center adjustment mechanism comprise back-up block, micrometer adjusting screw and hold-down screw, and said back-up block vertically is fixed on the side of supporting sleeve lower port, and is positioned at the outside of water tank; Said micrometer adjusting screw level is connected on the back-up block, has four, is oppositely arranged on horizontal X direction and Y direction in twos, top conflict water tank sidewall; Said hold-down screw axially connects and fixedly water tank and supporting sleeve.
In the little water column guiding of the present invention laser fine processing unit (plant); Carry out the control method that X Y plane is coupled and aligned between laser focal spot and the nozzle bore center and be (is example with the directions X): unclamp hold-down screw slightly; Regulate micrometer adjusting screw and adjust the directions X relative position at nozzle bore center and laser focal spot center; Energy meter through being placed under the water bundle optical fiber detects the efficient that laser energy is conducted in coupling; The most effective X that making is coupled conducts laser energy is the required X that is coupled and aligned to the position to relative position, regulates the Y direction relative position (the same directions X of control method) that is coupled and aligned required then.After X, Y direction are all adjusted to the right place, tighten hold-down screw.
After XY plane coupling position is adjusted; The control method that the Z direction is coupled and aligned between laser focal spot and the nozzle bore center is: through the axial location of adjustment adjusting nut; Driving adjustment screw, lens mount and optical focusing lens moves up and down together; The Z that adjusts laser focal spot center and nozzle bore center is to relative position; Detect the efficient that laser energy is conducted in coupling through the energy meter that is placed under the water bundle optical fiber simultaneously, the most effective Z of feasible coupling conduction laser energy is the required Z that is coupled and aligned to relative position to relative position.After the Z direction is adjusted to the right place, tighten locking nut.
It is thus clear that; This device is owing to designed the governor motion that the laser coupled of horizontal direction and short transverse is aimed at; Promptly be installed in mechanism for axial adjusting and the end face guiding mechanism radially on the supporting sleeve; Realize the accurate adjustment of laser focal spot and the three-dimensional relative position at nozzle bore center, guarantee water lead laser fine process in the coupling effect of laser focusing and water bundle optical fiber.That the present invention has is simple in structure, machining accuracy is high, machining stress is minimum, the heat affected area is little, no hot slag double teeming, reliable operation, cost are low, be easy to the characteristics making and adjust, in manufacture fields such as microelectronics, aviation manufacturing, machinery, medical science, has fine popularizing application prospect.
Description of drawings
Fig. 1 is the structural representation of little water column guiding laser fine processing unit (plant).
Wherein: 1-supporting sleeve, 2-adjustment screw, 3-adjusting nut, 4-locking nut; 5-back-up block, 6-micrometer adjusting screw, 7-water tank, 8-water bundle optical fiber; 9-nozzle, 10-sealing gasket, 11-water cavity, 12-admitting pipe joint; 13-hold-down screw, 14-quartzy window, 15-lens mount, 16-optical focusing lens.
The specific embodiment
Further specify structure of the present invention below in conjunction with accompanying drawing:
As shown in Figure 1; This little water column guiding laser fine processing unit (plant) comprises supporting sleeve 1, water tank 7, nozzle 9 and optical focusing lens 16 etc.; Be horizontally installed with optical focusing lens 16 in the said supporting sleeve 1, optical focusing lens 16 is connected with the nozzle bore center adjustment mechanism of Z direction.Said supporting sleeve 1 lower port is installed water tank 7, and water tank connects pressurized water source through admitting pipe joint 12.The center, top of water tank 7 is for quartzy window 14, and over against supporting sleeve 1 lower port center, center, the bottom of water tank 7 is provided with nozzle 9, and the focus point of optical focusing lens 16 just in time drops on the micropore center of nozzle.Water tank 7 also is connected with the nozzle bore center adjustment mechanism of horizontal X and Y direction.
The nozzle bore center adjustment mechanism of Z direction comprises adjustment screw 2, adjusting nut 3 and locking nut 4.On the tube wall of supporting sleeve 1, being provided with circumferentially evenly distributes three regulates window; Adjustment screw 2 puts in the pipe from regulating window; The lens mount that connects optical focusing lens; Adjustment screw 2 outer ends are assemblied in the inner groove of adjusting nut 3, and the adjusting nut screw thread is assemblied on the supporting sleeve, and by locking nut 4 lockings.
The nozzle bore center adjustment mechanism of horizontal X and Y direction comprises back-up block 5, micrometer adjusting screw 6 and hold-down screw 13.Back-up block 5 vertically is fixed on the side of supporting sleeve 1 lower port, and is positioned at the outside of water tank.Micrometer adjusting screw 6 levels are connected on the back-up block 5, have four, are oppositely arranged on horizontal X direction and Y direction in twos, and the top is against water tank 7 sidewalls.Four hold-down screw 13 axially connections and fixedly water tank and supporting sleeve.
Laser beam (among the figure shown in the arrow) is imported by the supporting sleeve top, through optical focusing lens, passes the thin water layer of the water cavity 11 of a quartzy window and a pressurization, be focused the center of micropore of nozzle after, be coupled in the little water column of low pressure.Pass through the total reflection guiding laser beam at interface between the water and air from little water column of nozzle outflow.Simultaneously, little water column can cool off the part that is cut on the workpiece and burns heat, removes melted material.The high pressure pure water gets into water cavity from hydraulic system, and the ejection of micropore on diamond nozzles forms water bundle optical fiber, and its effective length reaches several millimeters to tens millimeters, this be only can along could accomplish the little processing of conventional laser of processing can't realize.
The present invention should note following several aspect when the three-dimensional relative position of adjusting laser focal spot and nozzle bore center and practical implementation Laser Processing:
1. because nozzle orifice size and focused spot size are all very little, and horizontal direction displacement adjustment amount is also very little, should unclamp slightly when therefore unclamping screw 13, can only slightly regulate during adjustment screw 6;
2. between lens mount 15 and the supporting sleeve 1, quality of fit requires highly between adjustment screw 2 and adjusting nut 3 inner grooves, leaves enough glade plane spaces and get final product, should not be excessive;
3. when guaranteeing that focal beam spot is little, should reduce the angle of divergence of laser beam on the focus point as far as possible, guarantee the spreading rate of laser in little water column;
4. regulate and stablize enough hydraulic pressure, guarantee the good water bundle optical fiber property of little water column.
Claims (3)
1. a little water column is guided the laser fine processing unit (plant), and it comprises supporting sleeve (1), water tank (7), nozzle (9) and optical focusing lens (16); It is characterized in that: scioptics seat (15) level is installed optical focusing lens (16) in said supporting sleeve (1), and lens mount (15) is connected with Z direction nozzle bore center adjustment mechanism on the supporting sleeve (1); In said supporting sleeve lower port water tank (7) is installed, said water tank connects high pressure water system through admitting pipe joint (12); The center, top of said water tank is for quartzy window (14), and over against supporting sleeve lower port center, center, the bottom of water tank is provided with nozzle (9), and the focus point of optical focusing lens just in time drops on the micropore center of nozzle; Said water tank also with supporting sleeve (1) on horizontal X be connected with Y direction nozzle bore center adjustment mechanism.
2. little water column guiding laser fine processing unit (plant) according to claim 1 is characterized in that: said Z direction nozzle bore center adjustment mechanism comprises adjustment screw (2), adjusting nut (3) and locking nut (4); On the tube wall of supporting sleeve (1), being provided with circumferentially evenly distributes three regulates window; Said adjustment screw (2) puts in the pipe from regulating window; The lens mount (15) that connects optical focusing lens; Adjustment screw (2) outer end is assemblied in the inner groove of adjusting nut (3), and adjusting nut (3) screw thread is assemblied on the supporting sleeve, and is locked by locking nut (4).
3. little water column guiding laser fine processing unit (plant) according to claim 1 and 2; It is characterized in that: said horizontal X and Y direction nozzle bore center adjustment mechanism comprise back-up block (5), micrometer adjusting screw (6) and hold-down screw (13); Said back-up block (5) vertically is fixed on the side of supporting sleeve lower port, and is positioned at the outside of water tank; Said micrometer adjusting screw (6) level is connected on the back-up block, has four, is oppositely arranged on horizontal X direction and Y direction in twos, top conflict water tank sidewall; Said hold-down screw (13) axially connects and fixedly water tank and supporting sleeve.
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| CN2011103349152A CN102500928A (en) | 2011-10-31 | 2011-10-31 | Micro-water-column guiding laser micromachining device |
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| CN2011103349152A CN102500928A (en) | 2011-10-31 | 2011-10-31 | Micro-water-column guiding laser micromachining device |
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Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102909473A (en) * | 2012-11-06 | 2013-02-06 | 哈尔滨哈飞航空技术发展有限公司 | Water-guided laser focal spot alignment apparatus of leaf spring-type flexible hinge |
| CN103008880A (en) * | 2012-12-20 | 2013-04-03 | 哈尔滨哈飞航空技术发展有限公司 | Cross-shaped flexible hinge water jet guided laser focal spot aligning device |
| CN104375516A (en) * | 2014-11-17 | 2015-02-25 | 北京首量科技有限公司 | Optical calibrating device with solar tracking function |
| CN104526892A (en) * | 2014-12-23 | 2015-04-22 | 苏州凯锝微电子有限公司 | Wafer cutting device |
| CN105880849A (en) * | 2016-06-27 | 2016-08-24 | 哈尔滨工业大学 | Micro-nano machining method and device for laser composite ejection liquid beam |
| CN107107266A (en) * | 2015-01-30 | 2017-08-29 | 株式会社牧野铣床制作所 | Laser machine and alignment method of adjustment |
| CN107457482A (en) * | 2017-09-13 | 2017-12-12 | 华中科技大学 | A kind of array type optical waveguide liquid jet device and method |
| CN108031986A (en) * | 2017-12-29 | 2018-05-15 | 苏州德龙激光股份有限公司 | Devices and methods therefor based on ultrashort pulse Water Jet Guided Laser processing diamond |
| CN109866028A (en) * | 2019-04-19 | 2019-06-11 | 山东大学 | A kind of jet stream constraint femtosecond laser ultra-precision processing system and method |
| CN111408838A (en) * | 2020-05-09 | 2020-07-14 | 桂林电子科技大学 | Jet-assisted laser modulation low-damage processing carbon fiber composite material system and method |
| CN111822888A (en) * | 2019-04-22 | 2020-10-27 | 中国科学院沈阳自动化研究所 | Laser processing device for parabolic streamline hole |
| CN111826514A (en) * | 2019-04-22 | 2020-10-27 | 中国科学院沈阳自动化研究所 | Light-water coaxial laser shock peening device |
| CN112705839A (en) * | 2020-12-31 | 2021-04-27 | 桂林电子科技大学 | Water-guided laser device based on positioning coupling |
| CN116727844A (en) * | 2023-06-21 | 2023-09-12 | 北京工业大学 | Water-guide laser water jet stabilization enhancement coupling device |
| CN117086479A (en) * | 2023-08-28 | 2023-11-21 | 中国机械总院集团哈尔滨焊接研究所有限公司 | Rotary disc type jet device for water-guided laser processing system and working method |
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Cited By (23)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102909473B (en) * | 2012-11-06 | 2015-04-22 | 哈尔滨哈飞航空技术发展有限公司 | Water-guided laser focal spot alignment apparatus of leaf spring-type flexible hinge |
| CN102909473A (en) * | 2012-11-06 | 2013-02-06 | 哈尔滨哈飞航空技术发展有限公司 | Water-guided laser focal spot alignment apparatus of leaf spring-type flexible hinge |
| CN103008880A (en) * | 2012-12-20 | 2013-04-03 | 哈尔滨哈飞航空技术发展有限公司 | Cross-shaped flexible hinge water jet guided laser focal spot aligning device |
| CN103008880B (en) * | 2012-12-20 | 2015-06-10 | 哈尔滨哈飞航空技术发展有限公司 | Cross-shaped flexible hinge water jet guided laser focal spot aligning device |
| CN104375516A (en) * | 2014-11-17 | 2015-02-25 | 北京首量科技有限公司 | Optical calibrating device with solar tracking function |
| CN104375516B (en) * | 2014-11-17 | 2017-07-25 | 北京首量科技股份有限公司 | A kind of optical alignment means of solar tracking |
| CN104526892A (en) * | 2014-12-23 | 2015-04-22 | 苏州凯锝微电子有限公司 | Wafer cutting device |
| CN107107266B (en) * | 2015-01-30 | 2019-09-20 | 株式会社牧野铣床制作所 | Laser machine |
| CN107107266A (en) * | 2015-01-30 | 2017-08-29 | 株式会社牧野铣床制作所 | Laser machine and alignment method of adjustment |
| CN105880849A (en) * | 2016-06-27 | 2016-08-24 | 哈尔滨工业大学 | Micro-nano machining method and device for laser composite ejection liquid beam |
| CN107457482A (en) * | 2017-09-13 | 2017-12-12 | 华中科技大学 | A kind of array type optical waveguide liquid jet device and method |
| CN108031986A (en) * | 2017-12-29 | 2018-05-15 | 苏州德龙激光股份有限公司 | Devices and methods therefor based on ultrashort pulse Water Jet Guided Laser processing diamond |
| CN109866028A (en) * | 2019-04-19 | 2019-06-11 | 山东大学 | A kind of jet stream constraint femtosecond laser ultra-precision processing system and method |
| WO2020211164A1 (en) * | 2019-04-19 | 2020-10-22 | 山东大学 | Jet-constrained femtosecond laser ultra-precision machining system and method |
| CN111822888A (en) * | 2019-04-22 | 2020-10-27 | 中国科学院沈阳自动化研究所 | Laser processing device for parabolic streamline hole |
| CN111826514A (en) * | 2019-04-22 | 2020-10-27 | 中国科学院沈阳自动化研究所 | Light-water coaxial laser shock peening device |
| CN111822888B (en) * | 2019-04-22 | 2021-11-16 | 中国科学院沈阳自动化研究所 | Laser processing device for parabolic streamline hole |
| CN111408838A (en) * | 2020-05-09 | 2020-07-14 | 桂林电子科技大学 | Jet-assisted laser modulation low-damage processing carbon fiber composite material system and method |
| CN112705839A (en) * | 2020-12-31 | 2021-04-27 | 桂林电子科技大学 | Water-guided laser device based on positioning coupling |
| CN112705839B (en) * | 2020-12-31 | 2024-05-28 | 桂林电子科技大学 | Water guide laser device based on positioning coupling |
| CN116727844A (en) * | 2023-06-21 | 2023-09-12 | 北京工业大学 | Water-guide laser water jet stabilization enhancement coupling device |
| CN116727844B (en) * | 2023-06-21 | 2024-02-23 | 北京工业大学 | Water-guide laser water jet stabilization enhancement coupling device |
| CN117086479A (en) * | 2023-08-28 | 2023-11-21 | 中国机械总院集团哈尔滨焊接研究所有限公司 | Rotary disc type jet device for water-guided laser processing system and working method |
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Application publication date: 20120620 |