CN108000147B - A kind of laser jet stream composite polishing method and device - Google Patents
A kind of laser jet stream composite polishing method and device Download PDFInfo
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- CN108000147B CN108000147B CN201711284504.0A CN201711284504A CN108000147B CN 108000147 B CN108000147 B CN 108000147B CN 201711284504 A CN201711284504 A CN 201711284504A CN 108000147 B CN108000147 B CN 108000147B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/0093—Working by laser beam, e.g. welding, cutting or boring combined with mechanical machining or metal-working covered by other subclasses than B23K
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
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Abstract
The invention discloses a kind of laser jet stream composite polishing method and devices.This method and device make laser beam converge to workpiece to be processed surface and form laser beam focal spot by the condenser lens of adjusting laser polishing module；Nozzle ejection is flowed through by conveying polishing fluid for press pump, the jet beam impact of generation forms jet beam shock zone in workpiece to be processed surface；Guarantee that laser beam focal spot is Chong Die with jet beam shock zone by mechanical structure, and then change the relative position of jet beam shock zone, laser beam focal spot and workpiece to be processed, completes the composite polishing process on workpiece to be processed surface.This method and device solve conventional polishing technique there are thermal stress, the lower bottleneck problem of processing efficiency, improve Ultraprecise polished efficiency, while improving quality of finish.
Description
Technical field
The invention belongs to the Ultraprecise polished fields in field of machining, and in particular to a kind of laser jet stream composite polishing
Method and apparatus.
Background technique
Ultraprecise polished last procedure as ultraprecise finishing carries determining workpiece surface face type, improves
Workpiece surface machining accuracy, the reducing workpiece surface machining damage of the task.Existing Ultraprecise polished method has very much, such as magnetic current
Become polishing, ion beam polishing, air bag polishing, Jet Polishing, laser polishing etc..Compared to other polishing technologies, Jet Polishing and
Laser polishing has that machinable material range is wide, the unique advantages such as adaptable to workpiece shapes.
Oliver W. Fahnle of Dutch Delft university et al. proposes a kind of jet stream throwing for optical element polishing
Light technology [Fluid jet polishing of optical surfaces, Applied Optics, 1998,37,
6671-6673], which, which utilizes, is delivered to nozzle acceleration ejection for the polishing fluid for carrying abrasive material for press pump, forms flexible penetrates
Beam impacts workpiece surface generates minor material removal by the high velocity impact of abrasive material and workpiece.Patent " total flooding Jet Polishing
Device and method " (ZL201010586835.1) discloses a kind of submerged Jet Polishing method, and jet expansion and workpiece is equal
It is submerged in polishing fluid, is not in the rebound sputtering of polishing fluid, operates safer.
" green light and ultraviolet laser composite technique for polishing sapphire " (application number disclosed in Chinese patent literature library
200910037055.9) it is a kind of process with ultraviolet laser polishing sapphire wafer, focus the laser beam to workpiece
Surface generates material removal in the form of evaporating, melt etc., and make with small broken and photochemistry by photo-thermal coupling
It is removed with mechanism material." liquid auxiliary laser processing method and device " (application number 201710038812.9) is that one kind has
The liquid auxiliary laser processing method of quick scanning function, laser beam are projected by nozzle to work to be processed after mixing with liquid
Part, the liquid are to meet guide-lighting desired pure water, acid solution, aqueous slkali or salt water, and essence, which is appointed so, to be produced using laser
Green material removal, liquid itself do not generate material removal.
However, simple Jet Polishing and laser polishing still remains certain technical limitation.The material of Jet Polishing
Removal rate is low, causes polishing efficiency lower；Laser polishing directly generates material removal using the coupling of laser beam photo-thermal, can be right
Workpiece to be machined generates certain fuel factor, causes after processing to affect to a certain extent there are certain thermal stress in workpiece
Processing quality.
Summary of the invention
A technical problem to be solved by this invention is to provide a kind of laser jet stream composite polishing method, and the present invention is wanted
Another technical problem solved is to provide a kind of laser jet stream composite polishing device.
Laser jet stream composite polishing method of the invention the following steps are included:
A. workpiece to be processed surface is placed on positioning plate downward, and is fixed by fixed plate；
B. laser polishing module is placed in above workpiece to be processed, Jet Polishing module is placed in workpiece to be processed
Lower section；
C. the condenser lens for adjusting laser polishing module makes laser beam converge to workpiece to be processed lower surface and forms laser
Beam focal spot；
D. Jet Polishing module flows through nozzle for press pump conveying polishing fluid and sprays, and the jet beam of generation is impacted in be added
Work workpiece lower surface forms jet beam shock zone；
E. laser polishing module is adjusted respectively, the spatial position of Jet Polishing module makes laser beam focal spot and jet beam rushes
It hits area coincidence, carries out any the material removal of workpiece to be processed lower surface, complete the composite polishing process of this point；
F. the relative position for changing jet beam shock zone, laser beam focal spot and workpiece to be processed, completes workpiece to be processed
The composite polishing process of lower surface.
In the step c, by adjusting the relative distance of condenser lens and workpiece to be processed, so that at laser beam focal spot
Laser beam energy be less than or equal to generate workpiece to be processed material removal less laser energy value of threshold.Avoid the laser beam in work
The defects of being cracked inside part.
In the step f, changing the relative position of jet beam shock zone, laser beam focal spot and workpiece to be processed
In the process, laser beam focal spot is remained with jet beam shock zone and is overlapped.
In the step f, change jet beam shock zone, laser beam focal spot and workpiece relative position a method
It is mobile workpiece to be processed, another method is the incidence by changing laser beam and jet beam on workpiece to be processed lower surface
Angle and incoming position, while laser beam focal spot and jet beam shock zone are moved, laser beam focal spot and jet beam in moving process
Shock zone remains coincidence.
Composite polishing device for laser jet stream composite polishing method of the invention includes laser polishing module, fixation
Plate, positioning plate, workbench and Jet Polishing module；Wherein, the laser polishing module includes successively putting along optical path direction
Laser light source, switch, polariscope, reflecting mirror, neutral density mirror and the condenser lens set, laser polishing module emit laser beam；
The Jet Polishing module includes fluid reservoir, polishing fluid, stirring motor, nozzle, pipeline I, pipeline II and for press pump；
Its connection relationship is: being provided with through-hole on workbench, positioning plate, workpiece to be processed position are fixed with around through-hole
In the center of positioning plate, the lower surface of workpiece to be processed is located in the space surrounded by positioning plate and workbench；Work to be processed
Part is clamped between fixed plate and positioning plate；Fixed plate is fixedly connected by screw with positioning plate；
The laser polishing module is placed in the top of workpiece to be processed, and Jet Polishing module is placed under workpiece to be processed
Side；
The fluid reservoir is located at the lower section of workbench, and is fixedly connected with workbench；Filled with throwing in fluid reservoir
Light liquid, stirring motor is installed on liquid storage pot bottom, for homogenizing polishing fluid；It is equipped on the outside of fluid reservoir for press pump, pipeline I
One end is connected to for press pump, and the other end protrudes into fluid reservoir from bottom；One end of pipeline II is connected to for press pump, and the other end is from upper
Portion protrudes into fluid reservoir and is connected to the nozzle of fluid reservoir center；Polishing fluid is extracted from fluid reservoir by pipeline I for press pump
And nozzle ejection is delivered to by pipeline II, form jet beam；
Neutral density mirror, condenser lens, positioning plate, workbench, fluid reservoir and the nozzle is concentric setting.
Laser jet stream composite polishing method and device of the invention is by laser polishing module and the organic knot of Jet Polishing module
It closes, guarantees that the two material removal area is overlapped by mechanical structure, effectively increase polishing efficiency, solve single polishing technology
The lower problem of processing efficiency；Meanwhile the characteristics of constantly updating iteration using jet beam, by the material chips generated in polishing and
When take away, and polishing fluid can play the role of good circulating cooling, can effectively eliminate the fuel factor generated in polishing process, avoid
Thermal stress is generated to workpiece to be processed, quality of finish is higher.
Detailed description of the invention
Fig. 1 is laser jet stream composite polishing device structural schematic diagram of the invention；
Fig. 2 is the BK7 workpiece surface appearance figure under the electron microscope before polishing；
Fig. 3 is the BK7 workpiece surface appearance figure under the electron microscope after polishing；
Fig. 4 is the fused silica workpiece surface appearance figure under the electron microscope before polishing；
Fig. 5 is the fused silica workpiece surface appearance figure under the electron microscope after polishing；
In figure, 1. laser polishing module, 2. laser light source, 3. switch, 4. laser beam, 5. polariscope, 6. reflecting mirror
7. 11. positioning plate of neutral density mirror 8. condenser lens, 9. workpiece to be processed, 10. fixed plate, 12. workbench
13. 18. pipeline of fluid reservoir 14. polishing fluid, 15. stirring motor, 16. nozzle, 17. jet beam, I 19. pipeline II
20. for 21. Jet Polishing module of press pump.
Specific embodiment
The present invention will be described in detail with reference to the accompanying drawings and examples.
Following embodiment is merely to illustrate the present invention, and not limitation of the present invention.Related person skilled in the art exists
It in the case where not departing from the spirit and scope of the present invention, can also make a variety of changes, replacement and variant, therefore same technology
Scheme also belongs to scope of the invention.
Laser jet stream composite polishing method of the invention the following steps are included:
A. workpiece to be processed surface is placed on positioning plate downward, and is fixed by fixed plate；
B. laser polishing module is placed in above workpiece to be processed, Jet Polishing module is placed in workpiece to be processed
Lower section；
C. the condenser lens for adjusting laser polishing module makes laser beam converge to workpiece to be processed lower surface and forms laser
Beam focal spot；
D. Jet Polishing module flows through nozzle for press pump conveying polishing fluid and sprays, and the jet beam of generation is impacted in be added
Work workpiece lower surface forms jet beam shock zone；
E. laser polishing module is adjusted respectively, the spatial position of Jet Polishing module makes laser beam focal spot and jet beam rushes
It hits area coincidence, carries out any the material removal of workpiece to be processed lower surface, complete the composite polishing process of this point；
F. the relative position for changing jet beam shock zone, laser beam focal spot and workpiece to be processed, completes workpiece to be processed
The composite polishing process of lower surface.
In the step c, by adjusting the relative distance of condenser lens and workpiece to be processed, so that at laser beam focal spot
Laser beam energy be less than or equal to generate workpiece to be processed material removal less laser energy value of threshold.
In the step f, changing the relative position of jet beam shock zone, laser beam focal spot and workpiece to be processed
In the process, laser beam focal spot is remained with jet beam shock zone and is overlapped.
In the step f, change jet beam shock zone, laser beam focal spot and workpiece relative position a method
It is mobile workpiece to be processed, another method is the incidence by changing laser beam and jet beam on workpiece to be processed lower surface
Angle and incoming position, while laser beam focal spot and jet beam shock zone are moved, laser beam focal spot and jet beam in moving process
Shock zone remains coincidence.
As shown in Figure 1, the composite polishing device for laser jet stream composite polishing method of the invention includes laser polishing
Module 1, fixed plate 10, positioning plate 11, workbench 12 and Jet Polishing module 21；Wherein, the laser polishing module 1 is wrapped
Laser light source 2, switch 3, polariscope 5, reflecting mirror 6, neutral density mirror 7 and the condenser lens 8 being sequentially placed along optical path direction are included,
Laser polishing module 1 emits laser beam 4；The Jet Polishing module 21 includes fluid reservoir 13, polishing fluid 14, stirring motor
15, nozzle 16, pipeline I 18, pipeline II 19 and for press pump 20；
Its connection relationship is: being provided with through-hole on workbench 12, positioning plate 11, work to be processed are fixed with around through-hole
Part 9 is located at the center of positioning plate 11, and the lower surface of workpiece to be processed 9 is located at the space surrounded by positioning plate 11 and workbench 12
In；Workpiece to be processed 9 is clamped between fixed plate 10 and positioning plate 11；Fixed plate 10 connects by the way that screw and positioning plate 11 are fixed
It connects；
The laser polishing module 1 is placed in the top of workpiece to be processed 9, and Jet Polishing module 21 is placed in workpiece to be processed
9 lower section；
The fluid reservoir 13 is located at the lower section of workbench 12, and is fixedly connected with workbench 12；In fluid reservoir 13
Filled with polishing fluid 14, stirring motor 15 is installed on 13 bottom of fluid reservoir, for homogenizing polishing fluid 14；In the outside of fluid reservoir 13
It is equipped with for press pump 20, one end of pipeline I 18 is connected to for press pump 20, and the other end protrudes into fluid reservoir 13 from bottom；Pipeline II 19
One end be connected to for press pump 20, the other end from top protrude into fluid reservoir 13 and with the nozzle 16 of 13 center of fluid reservoir connect
It is logical；Polishing fluid 14 is extracted from fluid reservoir 13 and nozzle 16 is delivered to by pipeline II 19 by pipeline I 18 for press pump 20 sprays,
Form jet beam 17；
Neutral density mirror 7, condenser lens 8, positioning plate 11, workbench 12, fluid reservoir 13 and the nozzle 16 is same
Axle center setting.
Embodiment 1
Using 100 × 100mm with a thickness of 10mm BK7 as workpiece to be processed 9, measure its initial surface pattern such as Fig. 2 institute
Show, initial surface roughness Sq value is 7.032nm.It selects the BK7 workpiece of same material, size as spot part is adopted, is placed
It on positioning plate 11, and is fixed by fixed plate 10, individually opens laser polishing module, 2 energy modulation of laser light source is minimum, it will
Laser beam 4, which focuses to, adopts spot part lower surface.2 energy of laser light source is incrementally increased, and detects and adopts whether spot part surface face type occurs
Variation.If not changing, 2 energy of laser light source is further increased, until face type changes, with laser light source at this time
Parameter is as the machined parameters during laser jet stream composite polishing.
Spot part will be adopted and replace with BK7 workpiece to be processed 9,9 surface of workpiece to be processed is placed in downward on positioning plate 11, and by
Fixed plate 10 is fixed；Laser polishing module 1 is placed in 9 top of workpiece to be processed, Jet Polishing module 21 is placed in be added
9 lower section of work workpiece；The condenser lens 8 for adjusting laser polishing module 1, makes laser beam 4 converge to 9 lower surface of workpiece to be processed and is formed
Laser beam focal spot；Jet Polishing module 21 flows through the ejection of nozzle 16, the jet beam 17 of generation for the conveying polishing fluid 14 of press pump 20
It impacts in 9 lower surface of workpiece to be processed, forms jet beam shock zone；Laser polishing module 1, Jet Polishing module are adjusted respectively
21 spatial position is overlapped laser beam focal spot with jet beam shock zone, carries out any material of 9 lower surface of workpiece to be processed
The composite polishing process of this point is completed in removal；It is opposite with workpiece to be processed 9 to change jet beam shock zone, laser beam focal spot
The composite polishing process of workpiece to be processed lower surface is completed in position.
BK7 workpiece surface appearance after composite polishing is as shown in figure 3, surface roughness Sq value drops to 1.756nm, explanation
Composite polishing method of the invention effectively increases BK7 workpiece surface precision.
Embodiment 2
The implementation steps of the present embodiment are substantially the same manner as Example 1, and the main distinction is, workpiece to be processed material is to melt stone
English, the laser light source energy in polishing process is different, and the surface topography of fused quartz workpiece is as shown in figure 4, surface before composite polishing
Roughness Sq value is 140.5nm；The surface topography of fused quartz workpiece is as shown in figure 5, surface roughness Sq value is after composite polishing
4.388nm illustrates that composite polishing method of the invention effectively increases the surface accuracy of fused quartz workpiece.
Claims (5)
1. a kind of laser jet stream composite polishing method, which is characterized in that the composite polishing method the following steps are included:
A. workpiece to be processed surface is placed on positioning plate downward, and is fixed by fixed plate；
B. laser polishing module is placed in above workpiece to be processed, Jet Polishing module is placed in below workpiece to be processed；
C. the condenser lens for adjusting laser polishing module makes laser beam converge to workpiece to be processed lower surface and forms laser beam coke
Spot；
D. Jet Polishing module flows through nozzle for press pump conveying polishing fluid and sprays, and the jet beam of generation is impacted in workpiece to be processed
Lower surface forms jet beam shock zone；
E. laser polishing module is adjusted respectively, the spatial position of Jet Polishing module makes laser beam focal spot and jet beam shock zone
Be overlapped, carry out workpiece to be processed lower surface any material removal, complete this point composite polishing process；
F. the relative position for changing jet beam shock zone, laser beam focal spot and workpiece to be processed, completes workpiece to be processed following table
The composite polishing process in face.
2. laser jet stream composite polishing method according to claim 1, it is characterised in that: in the step c, pass through tune
Save the relative distance of condenser lens and workpiece to be processed so that laser beam energy at laser beam focal spot be less than or equal to generate to
The less laser energy value of threshold of workpieces processing material removal.
3. laser jet stream composite polishing method according to claim 1, it is characterised in that: in the step f, changing
During the relative position of jet beam shock zone, laser beam focal spot and workpiece to be processed, laser beam focal spot and jet beam are rushed
It hits region and remains coincidence.
4. laser jet stream composite polishing method according to claim 1, it is characterised in that: in the step f, change is penetrated
Beam impacts region, laser beam focal spot and workpiece a method of relative position be mobile workpiece to be processed, another method
It is the incidence angle and incoming position by changing laser beam and jet beam on workpiece to be processed lower surface, while moves laser beam
Focal spot and jet beam shock zone, laser beam focal spot is remained with jet beam shock zone in moving process is overlapped.
5. a kind of device for laser jet stream composite polishing method described in claim 1, it is characterised in that: the device
Including laser polishing module (1), fixed plate (10), positioning plate (11), workbench (12) and Jet Polishing module (21)；It is described
Laser polishing module (1) include the laser light source (2) set gradually along optical path direction, switch (3), polariscope (5), reflecting mirror
(6), neutral density mirror (7) and condenser lens (8), laser polishing module (1) emit laser beam (4)；The Jet Polishing mould
Block (21) include fluid reservoir (13), polishing fluid (14), stirring motor (15), nozzle (16), pipeline I (18), pipeline II (19) and
For press pump (20)；
Its connection relationship is: workbench is provided with through-hole on (12), and positioning plate (11), work to be processed are fixed with around through-hole
Part (9) is located at the center of positioning plate (11), and the lower surface of workpiece to be processed (9) is located at by positioning plate (11) and workbench (12)
In the space surrounded；Workpiece to be processed (9) is clamped between fixed plate (10) and positioning plate (11)；Fixed plate (10) passes through screw
It is fixedly connected with positioning plate (11)；
The laser polishing module (1) is placed in the top of workpiece to be processed (9), and Jet Polishing module (21) is placed in work to be processed
The lower section of part (9)；
The fluid reservoir (13) is located at the lower section of workbench (12), and is fixedly connected with workbench (12)；Fluid reservoir
(13) polishing fluid (14) are filled in, stirring motor (15) is installed on fluid reservoir (13) bottom, for homogenizing polishing fluid (14)；?
It is equipped on the outside of fluid reservoir (13) for press pump (20), one end of pipeline I (18) is connected to for press pump (20), and the other end is stretched from bottom
Enter in fluid reservoir (13)；One end of pipeline II (19) is connected to for press pump (20), and the other end protrudes into fluid reservoir (13) simultaneously from top
It is connected to the nozzle (16) of fluid reservoir (13) center；It is extracted from fluid reservoir (13) for press pump (20) by pipeline I (18)
Polishing fluid (14) is simultaneously delivered to nozzle (16) ejection by pipeline II (19), is formed jet beam (17)；
Neutral density mirror (7), condenser lens (8), positioning plate (11), workbench (12), fluid reservoir (13) and the nozzle
It (16) is concentric setting.
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| CN110421489B (en) * | 2019-08-14 | 2023-12-15 | 苏州科技大学 | Focused ultrasonic abrasive jet flow composite polishing device and method |
| CN110936021B (en) * | 2019-12-25 | 2023-12-19 | 浙江工业大学 | Scanning type laser composite chemical polishing device and method |
| CN114227546B (en) * | 2021-08-30 | 2023-05-23 | 浙江工业大学 | Polishing method and device for realizing surface fine structure |
| CN113814882B (en) * | 2021-08-30 | 2023-01-10 | 浙江工业大学 | Laser-assisted polishing method and device |
| CN114346337B (en) * | 2022-01-21 | 2024-05-14 | 江苏大学 | Abrasive particle-assisted laser electrolysis self-coupling collaborative alignment punching method and system |
| CN116652837B (en) * | 2023-07-31 | 2023-10-03 | 烟台大学 | Diamond coating polishing equipment and method |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0087793A1 (en) * | 1982-03-01 | 1983-09-07 | Achthal-Maschinenbau GmbH | Process for polishing preground surfaces on workpieces of glass |
| EP0535620A1 (en) * | 1991-10-02 | 1993-04-07 | ANNA HÜTTE GmbH | Method for patterning and polishing glass workpieces, in particular made of lead crystal |
| JP2005209291A (en) * | 2004-01-23 | 2005-08-04 | Alps Electric Co Ltd | Magnetic head device and its manufacturing method |
| WO2008028293A1 (en) * | 2006-09-06 | 2008-03-13 | Lightmachinery Inc. | Fluid jet polishing with constant pressure pump |
| CN105033865A (en) * | 2015-07-08 | 2015-11-11 | 北京林业大学 | Four-axis jet polishing machine |
| CN105583524A (en) * | 2015-12-18 | 2016-05-18 | 江苏大学 | Precise laser polishing device and method thereof |
| CN107363486A (en) * | 2017-08-08 | 2017-11-21 | 北京航空航天大学 | A kind of method of electric knife surface laser cutting polishing integral processing |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL1018943C2 (en) * | 2001-09-13 | 2003-03-14 | Tno | Method and device for polishing a workpiece surface. |
-
2017
- 2017-12-07 CN CN201711284504.0A patent/CN108000147B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0087793A1 (en) * | 1982-03-01 | 1983-09-07 | Achthal-Maschinenbau GmbH | Process for polishing preground surfaces on workpieces of glass |
| EP0535620A1 (en) * | 1991-10-02 | 1993-04-07 | ANNA HÜTTE GmbH | Method for patterning and polishing glass workpieces, in particular made of lead crystal |
| JP2005209291A (en) * | 2004-01-23 | 2005-08-04 | Alps Electric Co Ltd | Magnetic head device and its manufacturing method |
| WO2008028293A1 (en) * | 2006-09-06 | 2008-03-13 | Lightmachinery Inc. | Fluid jet polishing with constant pressure pump |
| CN105033865A (en) * | 2015-07-08 | 2015-11-11 | 北京林业大学 | Four-axis jet polishing machine |
| CN105583524A (en) * | 2015-12-18 | 2016-05-18 | 江苏大学 | Precise laser polishing device and method thereof |
| CN107363486A (en) * | 2017-08-08 | 2017-11-21 | 北京航空航天大学 | A kind of method of electric knife surface laser cutting polishing integral processing |
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