CN108746895B - Laser electrolysis's cutting device - Google Patents

Laser electrolysis's cutting device Download PDF

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Publication number
CN108746895B
CN108746895B CN201810528399.9A CN201810528399A CN108746895B CN 108746895 B CN108746895 B CN 108746895B CN 201810528399 A CN201810528399 A CN 201810528399A CN 108746895 B CN108746895 B CN 108746895B
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laser
tool electrode
electrode
workpiece
tool
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CN108746895A (en
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徐坤
戴学仁
张朝阳
朱浩
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Jiangsu University
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Jiangsu University
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H3/00—Electrochemical machining, i.e. removing metal by passing current between an electrode and a workpiece in the presence of an electrolyte
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H5/00—Combined machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Laser Beam Processing (AREA)

Abstract

The invention provides a cutting device for laser electrolysis, which comprises an electrolyte tank and a workpiece clamping block, wherein the electrolyte tank is internally provided with the workpiece clamping block; the tool electrode is arranged on the moving mechanism; the optical path adjusting device generates a rotating laser beam, the rotating laser beam is emitted from one end of the tool electrode, is emitted from the other end of the tool electrode and irradiates the surface to be processed of the workpiece; the workpiece surface and the tool electrode surface form a closed loop circuit. The tool electrode includes an electrode core, a cladding, a conductive layer, and a light transmissive window. The invention can reduce the loss of laser on the transmission path, promote the discharge of electrolysis products and the renewal of electrolyte, induce photoelectrochemical reaction and thermoelectrochemical reaction and improve the material erosion rate.

Description

Laser electrolysis's cutting device
Technical Field
The invention relates to the field of processing and manufacturing of fine structures, in particular to a cutting device for laser electrolysis.
Background
Metal microstructures and parts have been widely used in the fields of national defense, medical instruments, automobiles, information, and the like. The micro-machining technology corresponding to the micro-machining technology is the basis of manufacturing of micro-electro-mechanical systems and micro parts, is the support of product miniaturization, is widely valued by researchers at home and abroad, and is one of the most active research fields at present. For the machining of microstructures such as micro holes, narrow grooves, slits and the like widely existing in aerospace and precision instrument products, various micro-scale machining methods mainly including micro cutting and micro special machining technologies are developed at present, wherein the micro special machining technologies dominate and mainly include micro electric discharge machining, micro electrolytic machining, laser machining, LIGA (laser assisted machining), electron beam machining, ion beam machining and composite and combined machining of the micro electric discharge machining, the micro electrolytic machining, the laser machining, the LIGA technology, the electron beam machining and the ion beam machining.
The electrolytic wire cutting processing technology takes a wire electrode as a tool, and can realize the processing of a three-dimensional microstructure through relatively simple feeding motion. By combining the ultrashort pulse current technology, the processing gap can be reduced to micron or even submicron scale, and the preparation of the micro-component is realized. Bubbles and solid processing products are generated in the electrolytic processing process, and if the processing products cannot be discharged in time and are accumulated in a processing area, the local electrolyte components and concentration in the processing area are changed to a great extent, so that the processing stability is reduced, and even a processing short circuit is caused. In particular, when processing high aspect ratio structures, the processing products are likely to accumulate in the processing region, causing short circuits and making the processing impossible to continue.
Conventional electrolytic processing uses high pressure, high velocity electrolyte flow to carry away reaction products in order to effectively remove electrolysis products and ensure continued processing. However, in the micro electrolytic machining, the electrode may vibrate or even deform and damage due to the small size of the electrode itself and the high flushing pressure; and because the machining clearance is small, the on-way pressure loss of the electrolyte is large, and the disturbance and the updating capability of the electrolyte at a deeper position in the machining area by external flushing are very weak. At present, the ways of improving the discharge of electrolysis products and updating electrolyte in a machining gap in the micro-electrolysis wire cutting machining include axial reciprocating wire electrode conveying, intermittent wire electrode retreating, super-hydrophilic wire electrodes, special-shaped wire electrodes, low-frequency workpiece vibration and the like. The method can improve the processing stability and the processing precision to a certain extent, but the problem that solid processing products and air bubbles are attached to the surfaces of the electrode wire and the workpiece still exists in the processing process, so that the further improvement of the processing precision and the production efficiency of the process is limited. How to better solve the problem of timely and stable discharge of processed products in the processing process becomes the bottleneck of further development of the electrolytic wire cutting process.
The machining gap of high-precision electrolytic wire cutting is usually only several micrometers to tens of micrometers, even can reach submicron level, machining products such as bubbles are distributed in the gap, and laser irradiates a machining area through the gap very difficultly.
Disclosure of Invention
Aiming at the defects in the prior art, the invention provides the laser electrolysis cutting device, which can reduce the loss of laser on a transmission path, promote the discharge of electrolysis products and the renewal of electrolyte, induce photoelectrochemical reaction and thermoelectrochemical reaction and improve the material erosion rate.
The present invention achieves the above-described object by the following technical means.
A cutting device for laser electrolysis comprises an electrolyte tank and a workpiece clamping block, wherein the electrolyte tank is internally provided with the workpiece clamping block, the workpiece clamping block is used for clamping a workpiece, the electrolyte tank is internally provided with electrolyte, and the cutting device further comprises a light path adjusting device, a tool electrode and a moving mechanism; the tool electrode is arranged on the moving mechanism; the optical path adjusting device generates a rotating laser beam, the rotating laser beam is emitted from one end of the tool electrode, is emitted from the other end of the tool electrode and irradiates the surface to be processed of the workpiece; the workpiece surface and the tool electrode surface form a closed loop circuit.
Further, the tool electrode comprises an electrode core, a cladding, a conductive layer and a light-transmitting window; the electrode core is cylindrical, the outer side of the electrode core is wrapped by a cladding, and the outer side of the cladding is wrapped by a conductive layer; and annular gaps are arranged on the cladding and the conducting layer, and light-transmitting windows are arranged in the annular gaps and used for irradiating laser on the surface to be processed of the workpiece through the light-transmitting windows.
Further, the refractive index n1 of the light-transmitting window material is larger than or equal to the refractive index n2 of the electrode core material and larger than the refractive index n3 of the cladding material.
Further, the optical path adjusting device comprises an optical rotation module, a reflecting mirror and a convex lens; laser passes through the optical rotation module, the reflector and the convex lens in sequence and is emitted into one end of the tool electrode.
Furthermore, the included angle α between the laser beam injected into one end of the tool electrode and the axis of the electrode core is less than or equal to pi/2-arcsin (n3/n 2).
Further, the moving mechanism comprises a tool electrode clamp, a three-axis feeding mechanism and a machine tool upright post; the machine tool is characterized in that a three-axis feeding mechanism is arranged on the machine tool stand column, a tool electrode clamp is installed on the three-axis feeding mechanism, and the tool electrode clamp clamps tool electrodes.
Further, the device also comprises a control system, and the control system is connected with the light path adjusting device and the moving mechanism.
Further, still include the vibration isolation platform, the electrolyte tank with moving mechanism installs respectively on the vibration isolation platform.
The invention has the beneficial effects that:
1. the laser electrolysis cutting device can enhance or induce electrochemical reaction through laser irradiation and impact, and improve the electrochemical reaction rate.
2. The laser electrolysis cutting device provided by the invention is used for irradiating and impacting a processing area by laser to bring about temperature rise in a processing gap, thereby being beneficial to improving the electrochemical reaction efficiency.
3. The laser electrolysis cutting device provided by the invention can impact and disturb a processing area through the shock wave effect of laser, promote the discharge of bubbles and insoluble processing products in a processing gap, and improve the updating efficiency of electrolyte.
4. The laser electrolytic cutting device of the invention transmits laser through the tool electrode, and is subjected to scattering and absorption of bubbles and insoluble processing products in order to reduce the transmission of the laser in the electrolyte.
Drawings
FIG. 1 is a schematic diagram of a cutting apparatus for laser electrolysis according to the present invention.
Fig. 2 is a schematic view of the laser light transmission along the tool electrode according to the present invention.
FIG. 3 is a schematic diagram of the operation of the laser electrolysis cutting device according to the present invention.
FIG. 4 is a schematic diagram of mass transfer flow in a gap between work pieces being processed without the application of laser light.
FIG. 5 is a schematic diagram of mass transfer flow in the gap of a work piece being machined while a pulsed laser is irradiating the work surface.
FIG. 6 is a schematic diagram of mass transfer flow in the gap of the workpiece after the laser pulse ends.
In the figure:
1-a vibration isolation platform; 2-a support block; 3-an electrolyte tank; 4-an electrolyte; 5-a workpiece clamping block; 6-a workpiece; 7-a power supply; 8-a tool electrode; 9-optical path adjusting means; 10-a tool electrode holder; 11-a three-axis feed mechanism; 12-machine tool column; 13-a control system; 14-a light transmissive window; 15-a conductive layer; 16-an electrode core; 17-a cladding layer; 18-an optical rotation module; 19-a mirror; a 20-convex lens; 21-bubbles; 22-insoluble processed product.
Detailed Description
The invention will be further described with reference to the following figures and specific examples, but the scope of the invention is not limited thereto.
As shown in fig. 1, the laser electrolysis cutting device according to the present invention includes an electrolyte tank 3 and a workpiece clamping block 5, wherein the workpiece clamping block 5 is disposed in the electrolyte tank 3, a workpiece 6 is clamped on the workpiece clamping block 5, an electrolyte 4 is disposed in the electrolyte tank 3, and the laser electrolysis cutting device further includes a light path adjusting device 9, a tool electrode 8 and a moving mechanism; the electrolyte tank 3 and the moving mechanism are respectively arranged on the vibration isolation platform 1. A supporting block or a translation device can be arranged between the electrolyte tank 3 and the vibration isolation platform 1. Because the clearance of the laser electrolysis cutting processing is usually only several micrometers to tens of micrometers, even can reach submicron level, the vibration isolation platform 1 is used for ensuring the precision requirement and preventing the processing error caused by vibration.
The tool electrode 8 is arranged on the moving mechanism, and the moving mechanism drives the tool electrode 8 to move spatially; the optical path adjusting device 9 generates a rotating laser beam, which is emitted from one end of the tool electrode 8, is emitted from the other end of the tool electrode 8, and is irradiated on the surface to be processed of the workpiece 6; the surface of the workpiece 6 and the surface of the tool electrode 8 form a closed loop circuit with the power supply 7, and the closed loop circuit is used for electrolyzing the surface to be processed of the workpiece 6. The device further comprises a control system 13, and the control system 13 is connected with the light path adjusting device 9 and the moving mechanism.
As shown in fig. 2, the tool electrode 8 includes an electrode core 16, a cladding 17, a conductive layer 15, and a light-transmissive window 14; the electrode core 16 is cylindrical, the outer side of the electrode core 16 is wrapped by a cladding 17, and the outer side of the cladding 17 is wrapped by a conductive layer 15; and annular gaps are arranged on the cladding 17 and the conductive layer 15, and a light transmission window 14 is arranged in each annular gap and used for irradiating laser on the surface to be processed of the workpiece 6 through the light transmission window 14. Typically, the workpiece 6 is connected to the positive pole of the power source 7 and the conductive layer in the tool electrode 8 is connected to the negative pole of the power source 7. The refractive index n of the material of the light-transmitting window 141Refractive index n of material not less than 16 of electrode core2>Cladding 17 material refractive index n3The included angle between the laser beam injected into one end of the tool electrode 8 and the axial line of the electrode core 16 is α (pi/2-arcsin (n)3/n2) )., the light-transmitting window 14 is used to replace the cladding 17 and the conducting layer 15 at the position where the laser is required to irradiate from the tool electrode, the conducting layer 15 is required to be conductive, when the included angle α (n3/n2)) between the laser and the axis of the electrode core 16 after entering the electrode core 16 is not more than (pi/2-arcsin), the laser is totally reflected at the interface of the electrode core 16 and the cladding 17, so that the laser can be transmitted in the tool electrode 8, when the laser is transmitted to the interface of the light-transmitting window 14 with higher refractive index of the material, the total reflection phenomenon disappears, the laser will enter the processing area through the light-transmitting window 14, and the light-transmitting window 14 is.
The optical path adjusting device 9 comprises an optical rotation module 18, a reflecting mirror 19 and a convex lens 20; the laser beam is emitted to one end of the tool electrode 8 through the optical rotation module 18, the reflecting mirror 19 and the convex lens 20 in sequence. The laser can be a pulse laser or a laser beam. The optical rotation module 18 can realize the rotation or the deflection of the laser incidence direction around the axis of the tool electrode 8 through the control system 13.
The moving mechanism comprises a tool electrode clamp 10, a three-axis feeding mechanism 11 and a machine tool upright 12; the machine tool is characterized in that a three-axis feeding mechanism 11 is arranged on the machine tool upright post 12, a tool electrode clamp 10 is installed on the three-axis feeding mechanism 11, and the tool electrode clamp 10 clamps the tool electrode 8. To reduce vibration, typically the tool electrode 8 is clamped at both ends by the tool electrode clamp 10, and the light-transmissive window 14 may be located in the middle of the tool electrode 8.
As shown in fig. 3, 4, 5 and 6, the working process of the invention is as follows:
when the included angle α between the laser and the axis of the electrode core 16 is not more than (pi/2-arcsin (n3/n2)) after the laser enters the electrode core 16, the laser is totally reflected at the interface of the electrode core 16 and the cladding 17, so the laser can be transmitted in the tool electrode 8, when the laser is transmitted to the interface of the light-transmitting window 14 with higher refractive index of the material, the total reflection phenomenon disappears, the laser enters the processing area through the light-transmitting window 14, the laser entering the electrode core 16 can keep the incident angle unchanged through the adjustment of the light path adjusting device 9, the incident direction can rotate or swing around the axis of the tool electrode 8, the three-axis feeding mechanism 11 drives the tool electrode 8 to reciprocate through the tool electrode clamp 10, the laser can irradiate the whole processing area, and different positions of the processing area are irradiated and impacted.
When the control system 13 controls the three-dimensional feeding mechanism 11 to drive the tool electrode 8 to perform axial reciprocating motion and feeding motion for processing, the irradiation and impact of laser in the whole processing area not only effectively promote the discharge of electrolyte products and the update of the electrolyte 4 in a processing gap, but also effectively improve the dissolution rate of a workpiece, and improve the production efficiency and the processing quality, because the axial reciprocating motion and the feeding motion of the tool electrode 8 enable the electrolyte 4 in the electrolyte tank 3 to flow, the discharge of the electrolyte products and the update of the electrolyte are facilitated.
In the implementation process of electrolytic cutting, laser is transmitted to the processing surface of the workpiece 6 through the light path adjusting device 9 and the tool electrode 8, so that the material erosion rate of the workpiece is improved. Since the period of the pulsed laser is often much shorter than the period of the reciprocating motion of the tool electrode, the motion of the tool electrode can be regarded as a constant speed within a single period of the pulsed laser. As shown in fig. 4, taking the tool electrode 8 moving upward at a constant speed as an example, when no laser is applied, the electrolyte 4 in the machining gap is driven to flow due to the constant speed movement in the machining gap of the tool electrode 8, so that bubbles 21 and a part of insoluble machining products 22 generated by electrolytic machining are forced to be discharged from the machining gap above the machining area, and fresh electrolyte enters the machining gap from below the machining area; as shown in fig. 5, when the pulsed laser irradiates the processing surface, the temperature and pressure of the electrolyte on the processing surface rapidly rise, which not only promotes the bubbles 21 in the region to rapidly diffuse outward, but also effectively drives the insoluble processing products 22 to discharge out of the processing gap along with the electrolyte 4; as shown in fig. 6, after the laser pulse is finished, the electrolyte in the gap is rapidly cooled and contracted to form a negative pressure, and the fresh electrolyte 4 is promoted to enter the machining gap. Through the rotation or deflection of the laser incidence direction around the axis of the tool electrode 8 and the reciprocating motion of the tool electrode 8, the laser pulse irradiates different positions of the processing surface, the effect of uniform irradiation of the processing area is shown on the statistical result, and the production efficiency and the processing precision of cutting processing are improved.
The present invention is not limited to the above-described embodiments, and any obvious improvements, substitutions or modifications can be made by those skilled in the art without departing from the spirit of the present invention.

Claims (7)

1. A cutting device for laser electrolysis comprises an electrolyte tank (3) and a workpiece clamping block (5), wherein the workpiece clamping block (5) is arranged in the electrolyte tank (3), a workpiece (6) is clamped on the workpiece clamping block (5), and electrolyte (4) is arranged in the electrolyte tank (3), and the cutting device is characterized by further comprising a light path adjusting device (9), a tool electrode (8) and a moving mechanism;
the tool electrode (8) is arranged on the moving mechanism; the light path adjusting device (9) generates a rotating laser beam, the rotating laser beam is emitted from one end of the tool electrode (8), is emitted from the other end of the tool electrode (8), and is irradiated on a surface to be processed of the workpiece (6); the workpiece (6) surface and the tool electrode (8) surface form a closed loop circuit; the tool electrode (8) comprises an electrode core (16), a cladding (17), a conductive layer (15) and a light-transmitting window (14); the electrode core (16) is cylindrical, the outer side of the electrode core (16) is wrapped by a cladding (17), and the outer side of the cladding (17) is wrapped by a conductive layer (15); and annular gaps are arranged on the cladding (17) and the conducting layer (15), and light-transmitting windows (14) are arranged in the annular gaps and used for irradiating laser on the surface to be processed of the workpiece (6) through the light-transmitting windows (14).
2. Laser electrolytic cutting device according to claim 1, characterized in that the material of the light-transmissive window (14) has a refractive index n1The refractive index n of the material of the electrode core (16) is not less than2>Refractive index n of cladding (17) material3。
3. The laser electrolytic cutting device according to claim 1, characterized in that the optical path adjusting device (9) comprises an optical rotation module (18) and a mirror (19) and a convex lens (20); laser sequentially passes through the optical rotation module (18), the reflector (19) and the convex lens (20) and is emitted into one end of the tool electrode (8).
4. The laser electrolytic cutting apparatus according to claim 1, wherein the laser beam injected into the end of the tool electrode (8) is at an angle α ≦ (π/2-arcsin (n) relative to the axis of the electrode core (16)3/n2))，n2Is the refractive index of the material of the electrode core (16), n3Is the refractive index of the cladding (17) material.
5. The laser electrolytic cutting device according to claim 1, wherein the moving mechanism comprises a tool electrode holder (10), a three-axis feeding mechanism (11), and a machine tool column (12); the machine tool is characterized in that a three-axis feeding mechanism (11) is arranged on the machine tool stand column (12), a tool electrode clamp (10) is installed on the three-axis feeding mechanism (11), and the tool electrode clamp (10) clamps a tool electrode (8).
6. The laser electrolytic cutting device according to any one of claims 1 to 5, further comprising a control system (13), wherein the control system (13) is connected with the light path adjusting device (9) and the moving mechanism.
7. The laser electrolytic cutting apparatus according to any one of claims 1 to 5, further comprising a vibration isolation platform (1), wherein the electrolyte tank (3) and the moving mechanism are respectively mounted on the vibration isolation platform (1).
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CN106424987B (en) * 2016-12-06 2018-10-09 江苏大学 The coaxial combined machining method and device that pipe electrode electric discharge is irradiated with laser
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