CN114043073A - Water-assisted laser processing system and method based on acoustic signal real-time monitoring - Google Patents
Water-assisted laser processing system and method based on acoustic signal real-time monitoring Download PDFInfo
- Publication number
- CN114043073A CN114043073A CN202111366614.8A CN202111366614A CN114043073A CN 114043073 A CN114043073 A CN 114043073A CN 202111366614 A CN202111366614 A CN 202111366614A CN 114043073 A CN114043073 A CN 114043073A
- Authority
- CN
- China
- Prior art keywords
- water
- assisted laser
- laser
- acoustic signal
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title claims abstract description 231
- 238000012545 processing Methods 0.000 title claims abstract description 219
- 238000012544 monitoring process Methods 0.000 title claims abstract description 61
- 238000000034 method Methods 0.000 title claims abstract description 41
- 230000007246 mechanism Effects 0.000 claims abstract description 280
- 230000008878 coupling Effects 0.000 claims abstract description 42
- 238000010168 coupling process Methods 0.000 claims abstract description 42
- 238000005859 coupling reaction Methods 0.000 claims abstract description 42
- 230000008569 process Effects 0.000 claims abstract description 35
- 238000003754 machining Methods 0.000 claims description 38
- 238000006073 displacement reaction Methods 0.000 claims description 31
- 239000002131 composite material Substances 0.000 claims description 27
- 230000033001 locomotion Effects 0.000 claims description 23
- 230000001276 controlling effect Effects 0.000 claims description 18
- 239000007788 liquid Substances 0.000 claims description 17
- 230000005540 biological transmission Effects 0.000 claims description 15
- 238000007493 shaping process Methods 0.000 claims description 15
- 239000005304 optical glass Substances 0.000 claims description 14
- 230000002829 reductive effect Effects 0.000 claims description 14
- 230000001681 protective effect Effects 0.000 claims description 11
- 230000001105 regulatory effect Effects 0.000 claims description 11
- 230000003287 optical effect Effects 0.000 claims description 8
- 238000003672 processing method Methods 0.000 claims description 7
- 238000013329 compounding Methods 0.000 claims description 5
- 150000001875 compounds Chemical class 0.000 claims description 4
- 206010063385 Intellectualisation Diseases 0.000 abstract description 6
- 230000002159 abnormal effect Effects 0.000 abstract description 3
- 239000007789 gas Substances 0.000 description 89
- 239000010979 ruby Substances 0.000 description 11
- 229910001750 ruby Inorganic materials 0.000 description 11
- 238000011084 recovery Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 6
- 230000009467 reduction Effects 0.000 description 6
- 230000002401 inhibitory effect Effects 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000007664 blowing Methods 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000011010 flushing procedure Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000000805 composite resin Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
- B23K26/142—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor for the removal of by-products
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
- B23K26/146—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor the fluid stream containing a liquid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
- B23K26/703—Cooling arrangements
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention provides a water-assisted laser processing system and method based on acoustic signal real-time monitoring, wherein the system comprises a laser generating mechanism, a jet flow generating mechanism, a water-assisted laser coupling mechanism, a processing workbench, an acoustic signal acquisition mechanism and a processing control mechanism; the acoustic signal acquisition mechanism is used for monitoring acoustic signals generated by the workpiece in the water-assisted laser processing process in real time and feeding the acoustic signals back to the processing control mechanism; and the processing control mechanism is used for controlling the laser generating mechanism, the jet flow generating mechanism and the processing workbench to adjust the output parameters according to the acoustic signals. According to the invention, the acoustic signal acquisition mechanism and the processing control mechanism are arranged, so that the corresponding output parameters of the system can be adjusted on line and in real time according to the acoustic signals released in the water-assisted laser processing process of the workpiece, and the high quality, high efficiency, high precision and intellectualization of the water-assisted laser processing of the workpiece are realized; and the abnormal conditions of all parts of the system can be detected according to the collected acoustic signals.
Description
Technical Field
The invention relates to the technical field of laser processing, in particular to a water-assisted laser processing system and method based on real-time monitoring of acoustic signals.
Background
As a common processing means, laser processing has been widely applied in the fields of aerospace, semiconductors, microelectronics, instruments and meters, and the like. Particularly, the water-assisted laser machining can scour and cool the corresponding position of the workpiece in the machining process, so that the water-assisted laser machining workpiece has the advantages of high quality, small taper, no recasting layer, no heat affected zone and the like, and has wide application prospect.
However, the existing water-assisted laser processing equipment generally processes the workpiece according to a preset program, and cannot perform online and real-time adjustment of output parameters according to the real-time change of the water-assisted laser processing equipment and the workpiece in the processing process, thereby affecting the processing efficiency and the processing quality of the workpiece.
Disclosure of Invention
The invention solves the problems that: how to realize the online and real-time adjustment of the output parameters of the water-assisted laser processing equipment so as to realize high-quality and high-efficiency laser processing.
In order to solve the above problems, the present invention provides a water-assisted laser processing system based on real-time monitoring of acoustic signals, comprising:
a laser generating mechanism for emitting laser light;
a jet generating mechanism for ejecting a jet of liquid;
a water-assisted laser coupling mechanism for coaxially compounding the laser with the jet to form a water-assisted laser compound energy beam;
the processing workbench is used for arranging and moving a workpiece, and the water-assisted laser composite energy beam passes through the water-assisted laser coupling mechanism and then acts on the workpiece to process the workpiece;
the acoustic signal acquisition mechanism is used for monitoring acoustic signals generated by the workpiece in the water-assisted laser processing process in real time and feeding the acoustic signals back to the processing control mechanism; and the processing control mechanism is used for controlling the laser generating mechanism, the jet flow generating mechanism and the processing workbench to adjust output parameters according to the acoustic signals.
Optionally, the water-assisted laser processing system based on real-time monitoring of acoustic signals further comprises an air supply mechanism arranged between the water-assisted laser coupling mechanism and the processing workbench, and the air supply mechanism is used for providing a protective air shield coaxial with the water-assisted laser composite energy beam; and the processing control mechanism is also used for controlling the gas supply mechanism to adjust the output parameters according to the acoustic signals.
Optionally, the water-assisted laser processing system based on real-time monitoring of acoustic signals further includes a laser transmission shaping mechanism disposed between the laser generation mechanism and the water-assisted laser coupling mechanism, and the laser transmission shaping mechanism is configured to adjust and guide the laser to the water-assisted laser coupling mechanism.
Optionally, the laser transmission shaping mechanism includes an optical lens group and a three-coordinate laser focus position adjusting structure, the optical lens group includes an aperture diaphragm, a beam expander, a reflector group, an axicon group and a focusing objective lens, and the laser emitted by the laser generating mechanism sequentially passes through the aperture diaphragm, the beam expander, the reflector group, the axicon group and the focusing objective lens to enter the water-assisted laser coupling mechanism; the focusing objective lens is arranged on the three-coordinate laser focus position adjusting structure and moves through the three-coordinate laser focus position adjusting structure.
Optionally, the jet flow generation mechanism comprises a high-pressure water pump, a water tank, a pipeline, a pressure monitor, an energy accumulator, an electromagnetic overflow valve and a filter, the pipeline is communicated with the water tank and one end of the filter, and the other end of the filter is communicated with the water-assisted laser coupling mechanism; the high-pressure water pump is arranged on the water tank or the pipeline so as to pump the liquid in the water tank to the water-assisted laser coupling mechanism through the pipeline and the filter in sequence; the pressure monitor, the accumulator and the electromagnetic overflow valve are all arranged on the pipeline between the high-pressure water pump and the filter.
Optionally, the water-assisted laser coupling mechanism includes a joint, an optical glass window, and a nozzle structure, the nozzle structure has a high-pressure-resistant water cavity inside, and the joint communicates the filter and the high-pressure-resistant water cavity; the optical glass window is arranged at one end of the nozzle structure, and the laser entering the water-assisted laser coupling mechanism is emitted out through the optical glass window, the high-pressure-resistant water cavity and the other end of the nozzle structure in sequence.
Optionally, the gas supply mechanism comprises a gas pressure regulating structure, a gas supply structure, a gas pipe and a coaxial gas supply structure, which are sequentially communicated, and the gas pressure regulating structure is arranged on the gas supply structure or the gas pipe; the coaxial gas supply structure is arranged between the nozzle structure and the processing workbench and is coaxially arranged with the nozzle structure.
Optionally, the machining workbench comprises a multi-axis displacement platform and a positioning jig arranged on the multi-axis displacement platform, and the positioning jig is used for fixing the workpiece; and the positioning jig is suitable for moving relative to the multi-axis displacement platform, and/or the multi-axis displacement platform and the positioning jig are suitable for moving relative to the ground.
In order to solve the above problems, the present invention further provides a water-assisted laser processing method based on real-time monitoring of acoustic signals, wherein the water-assisted laser processing system based on real-time monitoring of acoustic signals comprises:
acquiring an acoustic signal generated by a workpiece in the water-assisted laser processing process through an acoustic signal acquisition mechanism of the water-assisted laser processing system based on acoustic signal real-time monitoring;
and controlling a processing control mechanism of the water-assisted laser processing system based on real-time monitoring of the acoustic signal to adjust the output parameters of at least one of the laser generating mechanism, the jet flow generating mechanism, the processing workbench and the gas supply mechanism according to the acoustic signal.
Optionally, according to the acoustic signal, controlling a processing control mechanism of the water-assisted laser processing system based on real-time monitoring of the acoustic signal to adjust an output parameter of at least one of the laser generating mechanism, the jet generating mechanism, the processing workbench and the gas supply mechanism includes:
when the frequency of the acoustic signal suddenly and irregularly jumps to a large extent, the processing control mechanism is controlled to stop the laser generating mechanism, the jet flow generating mechanism and the gas supply mechanism;
when the average frequency value of the acoustic signal is greatly increased and the average amplitude value is gradually reduced, controlling the processing control mechanism to reduce the output power of the laser generating mechanism, reduce the output pressure of the jet flow generating mechanism, increase the output pressure of the gas supply mechanism and stop the processing workbench;
when the frequency average value of the acoustic signal is integrally and slowly reduced and the amplitude average value is slowly increased, the processing control mechanism is controlled to improve the output power of the laser generating mechanism, reduce the output pressure of the jet flow generating mechanism, improve the output pressure of the gas supply mechanism and slow down the movement of the processing workbench;
when the frequency average value of the acoustic signal is suddenly reduced by a large margin, the amplitude average value is reduced by a large margin, the processing control mechanism is controlled to reduce the output power of the laser generating mechanism, improve the output pressure of the jet flow generating mechanism, reduce the output pressure of the gas supply mechanism and accelerate the movement of the processing workbench.
Compared with the prior art, the invention has the following beneficial effects: the water-assisted laser processing system based on acoustic signal real-time monitoring is provided with an acoustic signal acquisition mechanism and a processing control mechanism, so that characteristic parameters such as amplitude, frequency and the like of acoustic signals released in the water-assisted laser processing process of a workpiece are acquired and obtained through the acoustic signal acquisition mechanism, the water-assisted laser processing process of the workpiece is monitored in real time, the processing process is sensed, and the acoustic signals are fed back to the processing control mechanism; the processing control mechanism adjusts output parameters such as laser parameters, jet flow parameters and motion parameters of the water-assisted laser processing system based on real-time monitoring of the acoustic signals on line and in real time according to characteristic parameters such as amplitude and frequency of the acoustic signals fed back by the acoustic signal acquisition mechanism, so that the processing process of the workpiece is accurately controlled, the quality and efficiency of water-assisted laser processing of the workpiece are improved, and high quality, high efficiency, high precision and intellectualization of water-assisted laser processing of the workpiece are realized. And moreover, the acoustic signal acquisition mechanism is used for acquiring acoustic signals and detecting abnormal conditions of all parts of the water-assisted laser processing system based on real-time monitoring of the acoustic signals, so that corresponding parts of the water-assisted laser processing system based on real-time monitoring of the acoustic signals can be maintained and replaced in time, and the safety and reliability of the workpiece processing process are improved.
Drawings
FIG. 1 is a block diagram of a water-assisted laser processing system based on real-time monitoring of acoustic signals according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a water-assisted laser processing system based on real-time monitoring of acoustic signals according to an embodiment of the present invention;
fig. 3 is a flowchart of a water-assisted laser processing method based on real-time monitoring of acoustic signals in an embodiment of the present invention.
Description of reference numerals:
1-a laser generating mechanism; 2-jet flow generation mechanism, 21-high pressure water pump, 211-motor, 212-pump body, 22-water tank, 23-pipeline, 24-pressure monitor, 25-energy accumulator, 26-electromagnetic overflow valve, 27-filter; 3-water assisted laser coupling mechanism, 31-joint, 32-optical glass window, 33-nozzle structure, 331-ruby nozzle; 4-processing a working table, 41-a multi-axis displacement platform and 42-a positioning jig; 5-acoustic signal acquisition mechanism, 51-low impedance acoustic signal receiver, 52-signal amplifier, 53-acoustic signal converter; 6-a processing control mechanism, 61-an acoustic feedback signal processing structure, 62-a laser parameter control structure, 63-a hydraulic parameter control structure, 64-a motion parameter control structure and 65-a gas parameter control structure; 7-gas supply mechanism, 71-gas pressure regulating structure, 72-gas supply structure, 73-gas pipe, 74-coaxial gas supply structure; 8-laser transmission shaping mechanism, 81-optical lens group, 811-aperture diaphragm, 812-beam expander, 813-reflector group, 814-axicon group, 815-focusing objective lens, 82-three-coordinate laser focus position adjusting structure, 821-horizontal nanometer displacement platform, 822-vertical spiral lifting platform; 9-workpiece.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below.
Referring to fig. 1 and 2, an embodiment of the present invention provides a water-assisted laser processing system based on real-time monitoring of an acoustic signal, including:
a laser generating mechanism 1 for emitting laser light;
a jet generating mechanism 2 for ejecting a jet of liquid;
the water-assisted laser coupling mechanism 3 is used for coaxially compounding laser and jet flow to form a water-assisted laser compound energy beam;
the processing workbench 4 is used for arranging and moving the workpiece 9, and the water-assisted laser composite energy beam passes through the water-assisted laser coupling mechanism 3 and then acts on the workpiece 9 to process the workpiece 9;
the acoustic signal acquisition mechanism 5 is used for monitoring acoustic signals generated by the workpiece 9 in the water-assisted laser processing process in real time and feeding the acoustic signals back to the processing control mechanism 6; the processing control mechanism 6 is used for controlling the laser generating mechanism 1, the jet flow generating mechanism 2 and the processing workbench 4 to adjust output parameters according to the acoustic signals.
In the embodiment, the water-assisted laser processing system based on acoustic signal real-time monitoring is used for realizing water-assisted laser processing of microstructures such as resin-based composite materials, ceramic-based composite materials, metals and semiconductors and materials (workpieces 9) with large component differences, and is particularly applied to the fields of micro-processing of hole and groove structures on blades and cooling bodies of aerospace engines, structural members of airplanes and satellites, semiconductor wafers, substrates and the like; and when the workpiece 9 is subjected to water-assisted laser processing, the water-assisted laser processing system based on acoustic signal real-time monitoring simultaneously carries out real-time monitoring on acoustic signals released by the workpiece 9 in the water-assisted laser processing process so as to sense the processing process of the workpiece 9 and carry out online adjustment on output parameters of the water-assisted laser processing system based on acoustic signal real-time monitoring, thereby realizing high-quality, high-efficiency and high-precision water-assisted laser processing.
Specifically, the water-assisted laser processing system based on real-time monitoring of acoustic signals emits laser light (laser beam) through a laser generating mechanism 1 (e.g., laser) and ejects a liquid (e.g., water) jet through a jet generating mechanism 2. The water-assisted laser coupling mechanism 3 forms a water-assisted laser composite energy beam for processing a workpiece 9 arranged on the processing workbench 4 by coaxially compounding the laser emitted by the laser generating mechanism 1 and the jet ejected by the jet generating mechanism 2 (namely, the laser and the central axis of the jet coincide). And the machining table 4 can effect movement of the workpiece 9 to move the workpiece 9 to a position to be machined. The acoustic signal acquisition mechanism 5 is used for acquiring and obtaining characteristic parameters such as amplitude, frequency and the like of acoustic signals released in the water-assisted laser processing process of the workpiece 9, so as to monitor the water-assisted laser processing process of the workpiece 9 in real time, sense the processing progress (such as processing depth, processing width and the like) and feed back the processing progress to the processing control mechanism 6; the processing control mechanism 6 adjusts output parameters such as laser parameters of the laser generating mechanism 1, jet parameters of the jet generating mechanism 2, motion parameters of the processing workbench 4 and the like of the water-assisted laser processing system based on real-time monitoring of the acoustic signals on line and in real time according to characteristic parameters such as amplitude, frequency and the like of the acoustic signals fed back by the acoustic signal acquisition mechanism 5 so as to accurately control the processing process of the workpiece 9, improve the quality and efficiency of water-assisted laser processing of the workpiece 9 and realize high quality, high efficiency, high precision and intellectualization of the water-assisted laser processing of the workpiece 9. And, gather acoustic signal through acoustic signal acquisition mechanism 5, still can be used to detect the abnormal conditions of each part of water-aided laser processing system based on acoustic signal real-time supervision to in time maintain, change the corresponding part of water-aided laser processing system based on acoustic signal real-time supervision, promote security, the reliability of work piece 9 course of working.
In some embodiments, the laser generating mechanism 1 has two output modes. One output mode of the laser generating mechanism 1 is: the fundamental frequency output center wavelength is 1064nm, the pulse width is 70-100 ns, the pulse frequency adjusting range is 1 kHz-150 kHz, the peak value average power is 150W, and the spatial light output is realized; another output mode of the laser generating mechanism 1 is: the center wavelength of double frequency output is 532nm, the pulse width is 70-100 ns, the pulse frequency adjusting range is 1 kHz-150 kHz, the peak average power is 75W, and the space light output is realized.
Optionally, as shown in fig. 1 and fig. 2, the water-assisted laser processing system based on real-time monitoring of acoustic signals further includes an air supply mechanism 7 disposed between the water-assisted laser coupling mechanism 3 and the processing workbench 4, where the air supply mechanism 7 is configured to provide a protective air shield coaxial with the water-assisted laser composite energy beam; the processing control mechanism 6 is also used for controlling the air supply mechanism 7 to adjust the output parameters according to the acoustic signals.
In the embodiment, the air supply mechanism 7 is arranged to provide air flow surrounding the water-assisted laser composite energy beam for the water-assisted laser composite energy beam, so that a layer of protective air hood is formed outside the water-assisted laser composite energy beam and is ejected out towards the machining workbench 4 (workpiece 9) along with the water-assisted laser composite energy beam, and on one hand, the protective air hood is used for blowing away liquid deposited on the surface of the workpiece 9 and inside a machining forming structure in the machining process of the workpiece 9, further flushing and cooling the machining area of the workpiece 9 and inhibiting the formation of a heat affected zone and a recasting layer in the machining process of the workpiece 9; and on the other hand, the device is used for inhibiting the entrainment of the water-assisted laser composite energy beam to the air so as to effectively prolong the stable working length of the water-assisted laser composite energy beam. Therefore, the quality and the efficiency of the water-assisted laser processing of the workpiece 9 are further improved.
The processing control mechanism 6 is also used for controlling the air supply mechanism 7 to adjust the output parameters according to the acoustic signals. When the workpiece 9 is subjected to water-assisted laser processing, the acoustic signal acquisition mechanism 5 is used for acquiring and obtaining characteristic parameters such as amplitude, frequency and the like of an acoustic signal released in the water-assisted laser processing process of the workpiece 9 so as to monitor the water-assisted laser processing process of the workpiece 9 in real time, sense the processing process and feed back the processing process to the processing control mechanism 6; the processing control mechanism 6 adjusts output parameters such as laser parameters of the laser generating mechanism 1, jet flow parameters of the jet flow generating mechanism 2, motion parameters of the processing workbench 4, gas parameters of the gas supply mechanism 7 and the like of the water-assisted laser processing system based on real-time monitoring of the acoustic signals on line and in real time according to characteristic parameters such as amplitude, frequency and the like of the acoustic signals fed back by the acoustic signal acquisition mechanism 5, so that the processing progress of the workpiece 9 is accurately controlled, the quality and efficiency of water-assisted laser processing of the workpiece 9 are improved, and high quality, high efficiency, high precision and intellectualization of the water-assisted laser processing of the workpiece 9 are realized.
Optionally, as shown in fig. 1 and fig. 2, the water-assisted laser processing system based on real-time monitoring of acoustic signals further includes a laser transmission shaping mechanism 8 disposed between the laser generating mechanism 1 and the water-assisted laser coupling mechanism 3, and the laser transmission shaping mechanism 8 is configured to adjust and guide laser to the water-assisted laser coupling mechanism 3.
In this embodiment, the laser transmission shaping mechanism 8 is used for adjusting and guiding the laser emitted by the laser generating mechanism 1, so as to ensure that the laser is smoothly incident into the water-assisted laser coupling mechanism 3.
Optionally, with reference to fig. 1 and fig. 2, the laser transmission shaping mechanism 8 includes an optical lens group 81 and a three-dimensional laser focus position adjusting structure 82, the optical lens group 81 includes an aperture stop 811, a beam expander 812, a mirror group 813, an axicon group 814 and a focusing objective 815, and laser emitted by the laser generating mechanism 1 sequentially passes through the aperture stop 811, the beam expander 812, the mirror group 813, the axicon group 814 and the focusing objective 815 and enters the water-assisted laser coupling mechanism 3; the focus objective 815 is disposed on the three-coordinate laser focus position adjustment structure 82, and is moved by the three-coordinate laser focus position adjustment structure 82.
In this embodiment, the aperture stop 811 is used to filter out stray light at the edge of the laser beam emitted by the laser generating mechanism 1; the beam expander 812 is used for expanding the diameter of the laser beam after the stray light is filtered out, so that the focusing objective 815 focuses the light spot of the laser beam to a smaller size; the reflector group 813 is used for adjusting the direction of the laser beam so as to reflect the laser beam generated by the laser generating mechanism 1 to the water-assisted laser coupling mechanism 3 (or the axicon group 814 and the focusing objective 815); the axicon group 814 is composed of a pair of axicons, the conical surfaces of which are arranged opposite to each other, and is used for converting the parallel incident laser beam with spatial gaussian distribution generated by the laser generating mechanism 1 into the parallel emergent laser beam with bessel distribution, so that the laser beam is more suitable for processing; the focusing objective 815 is used to focus the laser beam into the water-assisted laser coupling mechanism 3, so that the water-assisted laser coupling mechanism 3 coaxially combines the laser and the jet flow. The three-coordinate laser focus position adjusting structure 82 comprises a horizontal nano displacement platform 821 and a vertical spiral lifting platform 822, and the focusing objective 815 is fixed on the horizontal nano displacement platform 821 or the vertical spiral lifting platform 822; the three-coordinate laser focus position adjusting structure 82 realizes the multidirectional movement of the focusing objective 815 through the corresponding movement of the horizontal nanometer displacement platform 821 or the vertical spiral lifting platform 822, and the position adjusting range of the focusing objective 815 is increased, so that the adjusting range of the focusing objective 815 to laser beams is increased. In some embodiments, the horizontal nano-displacement platform 821 has a movement range of 5mm × 5mm in the horizontal plane, and the vertical spiral lifting platform 822 has a movement stroke of 5mm in the vertical direction; and the middle of the horizontal nano-displacement platform 821 is provided with a through hole with the diameter of 50mm for fixing the vertical spiral lifting platform 822, and the focusing objective lens 815 is fixed on the vertical spiral lifting platform 822 through a thread pair arranged in the vertical spiral lifting platform 822.
Optionally, as shown in fig. 1 and fig. 2, the jet flow generating mechanism 2 includes a high-pressure water pump 21, a water tank 22, a pipeline 23, a pressure monitor 24, an accumulator 25, an electromagnetic overflow valve 26, and a filter 27, where the pipeline 23 communicates the water tank 22 with one end of the filter 27, and the other end of the filter 27 communicates with the water-assisted laser coupling mechanism 3; the high-pressure water pump 21 is arranged on the water tank 22 or the pipeline 23 to pump the liquid in the water tank 22 to the water-assisted laser coupling mechanism 3 through the pipeline 23 and the filter 27 in sequence; a pressure monitor 24, an accumulator 25 and an electromagnetic spill valve 26 are arranged on the line 23 between the high-pressure water pump 21 and a filter 27.
In this embodiment, the high pressure water pump 21 includes a motor 211 (e.g., a three-phase motor) and a pump body 212, and the motor 211 drives the pump body 212 to pump the liquid (e.g., water) in the water tank 22 into the pipeline 23 and toward the filter 27; the filter 27 is used for connecting and communicating the pipeline 23 and the water-assisted laser coupling mechanism 3, and is used for filtering impurities in water flowing to the water-assisted laser coupling mechanism 3 through the pipeline 23 and the filter 27, so that the quality of water-assisted laser processing is ensured. The pressure monitor 24 is used for monitoring the hydraulic pressure in the pipeline 23 in real time, so that the processing control mechanism 6 can control the output pressure of the high-pressure water pump 21 according to the processing requirement (for example, by controlling the high-pressure water pump 21 to perform pressure reduction or pressure increase); the accumulator 25 is used for storing part of the hydraulic pressure when the pressure in the pipeline 23 is too high, and the electromagnetic overflow valve 26 is used for discharging part of the hydraulic pressure when the pressure in the pipeline 23 is too high, so that the normal work of the jet flow generating mechanism 2 is ensured.
Optionally, the water tank 22 and the pipeline 23 are made of corrosion-resistant materials.
Optionally, as shown in fig. 1 and fig. 2, the water-assisted laser coupling mechanism 3 includes a joint 31, an optical glass window 32, and a nozzle structure 33, where the nozzle structure 33 has a high-pressure-resistant water cavity inside, and the joint 31 communicates the filter 27 with the high-pressure-resistant water cavity; the optical glass window 32 is arranged at one end of the nozzle structure 33, and laser entering the water-assisted laser coupling mechanism 3 sequentially passes through the optical glass window 32 and the high-pressure-resistant water cavity and is emitted out from the other end of the nozzle structure 33.
In this embodiment, the optical glass window 32 of the water-assisted laser coupling mechanism 3 is used for transmitting the laser beam focused by the focusing objective 815 to the high-pressure-resistant water chamber inside the nozzle structure 33. The side wall of the nozzle structure 33 is provided with a through hole for communicating the high pressure resistant water chamber with the joint 31 (such as a leakage-proof joint), and one end of the joint 31 far away from the nozzle structure 33 is communicated with the filter 27, so that the jet flow generating mechanism 2 provides high pressure liquid flow to the high pressure resistant water chamber, that is, the high pressure liquid generated by the jet flow generating mechanism 2 is guided into the high pressure resistant water chamber through the joint 31. The high pressure liquid flow in the high pressure resistant water chamber is coaxially combined with the laser transmitted to the inside of the nozzle structure 33 and emitted from the end of the nozzle structure 33 away from the optical glass window 32. In some embodiments, the spraying portion of the nozzle structure 33 employs a ruby nozzle 331, the ruby nozzle 331 is used to discharge the liquid in the high pressure resistant water chamber in the form of a fine jet having a diameter of 30 μm to 200 μm (i.e., the outlet diameter of the ruby nozzle 331 is 30 μm to 200 μm), and the laser light is emitted through the ruby nozzle 331 in coaxial combination with the fine jet.
Alternatively, as shown in fig. 1 and fig. 2, the gas supply mechanism 7 includes a gas pressure regulating structure 71, and a gas supply structure 72, a gas pipe 73, and a coaxial gas supply structure 74 that are sequentially communicated, wherein the gas pressure regulating structure 71 is disposed on the gas supply structure 72 or the gas pipe 73; the coaxial gas supply structure 74 is provided between the nozzle structure 33 and the processing table 4, and is provided coaxially with the nozzle structure 33.
In the present embodiment, the coaxial gas supply structure 74 is a hollow cylindrical structure, is provided between the outlet of the nozzle structure 33 and the processing table 4, and is provided coaxially with the nozzle structure 33. The gas supply structure 72 (e.g., a gas cylinder, a gas pump, etc.) is in turn in communication with a coaxial gas supply structure 74 via a gas tube 73, wherein the sidewall of the coaxial gas supply structure 74 is provided with a through hole to communicate with the gas tube 73. The gas pressure regulating structure 71 (e.g., a regulating valve or the like) regulates the pressure of the gas flow entering the coaxial gas supply structure 74 by regulating the flow rate of the gas (gas flow) input into the gas pipe 73 by the gas supply structure 72, or the like. In the process that the water-assisted laser composite energy beam penetrates through the coaxial gas supply structure 74 and is emitted to the machining workbench 4, the gas supply structure 72 provides gas flow surrounding the water-assisted laser composite energy beam to the coaxial gas supply structure 74 through the gas pipe 73, a layer of protective gas hood is formed on the outer side of the water-assisted laser composite energy beam, and the protective gas hood is emitted towards the machining workbench 4 (namely towards the workpiece 9) along with the water-assisted laser composite energy beam, so that on one hand, the protective gas hood is used for blowing away liquid deposited on the surface of the workpiece 9 and inside a machining forming structure in the machining process of the workpiece 9, further flushing and cooling the machining area of the workpiece 9 and inhibiting the formation of a heat influence area and a recasting layer in the machining process of the workpiece 9; and on the other hand, the device is used for inhibiting the entrainment of the water-assisted laser composite energy beam to the air so as to effectively prolong the stable working length of the water-assisted laser composite energy beam. Therefore, the quality and the efficiency of the water-assisted laser processing of the workpiece 9 are further improved. In some embodiments, the composition of the gas flow supplied by the gas supply structure 72 to the coaxial gas supply structure 74 is adjustable (by the gas supply mechanism 7 providing gases of different compositions). When processing workpieces 9 of different materials, the air supply structure 72 capable of outputting different air flows is adopted.
Optionally, as shown in fig. 1 and fig. 2, the machining table 4 includes a multi-axis displacement platform 41 and a positioning fixture 42 disposed on the multi-axis displacement platform 41, where the positioning fixture 42 is used to fix the workpiece 9; and the positioning jig 42 is adapted to move relative to the multi-axis displacement platform 41, and/or the multi-axis displacement platform 41 and the positioning jig 42 are adapted to move relative to the ground.
In this embodiment, the positioning jig 42 is disposed on the multi-axis displacement platform 41 and is adapted to move in the horizontal direction and the vertical direction with respect to the multi-axis displacement platform 41; and/or the positioning jig 42 is fixed on the multi-axis displacement platform 41, and the multi-axis displacement platform 41 is suitable for moving in the horizontal direction and the vertical direction relative to the ground. The positioning fixture 42 (e.g., a clamp, a vacuum chuck, etc.) is used for clamping or adsorbing the fixed workpiece 9, so as to position the fixed workpiece 9. In the process of processing the workpiece 9 by the water-assisted laser, the workpiece 9 is moved by moving the multi-axis displacement platform 41 or the positioning jig 42, so that the workpiece 9 is moved to a position to be processed; moreover, different water-assisted laser processing paths can be realized by moving the processing workbench 4 and the workpiece 9 relative to the water-assisted laser composite energy beam, so that the workpiece 9 can be conveniently processed into corresponding shapes.
With reference to fig. 1 to 3, a water-assisted laser processing method based on real-time monitoring of acoustic signals, which uses the water-assisted laser processing system based on real-time monitoring of acoustic signals, specifically includes the following steps:
700, acquiring an acoustic signal generated by a workpiece 9 in the water-assisted laser processing process through an acoustic signal acquisition mechanism 5 of the water-assisted laser processing system based on acoustic signal real-time monitoring;
and 800, controlling a processing control mechanism 6 of the water-assisted laser processing system based on real-time monitoring of the acoustic signal to adjust output parameters of at least one of the laser generating mechanism 1, the jet flow generating mechanism 2, the processing workbench 4 and the gas supply mechanism 7 according to the acoustic signal.
When the workpiece 9 is subjected to water-assisted laser processing through the water-assisted laser processing system based on the real-time monitoring of the acoustic signals, the water-assisted laser processing system based on the real-time monitoring of the acoustic signals realizes the high quality, high efficiency, high precision and intellectualization of the water-assisted laser processing of the workpiece 9 by implementing the water-assisted laser processing method based on the real-time monitoring of the acoustic signals. Specifically, the processing method includes acquiring and obtaining characteristic parameters such as amplitude, frequency and the like of an acoustic signal released in the water-assisted laser processing process of the workpiece 9 through an acoustic signal acquisition mechanism 5, so as to monitor the water-assisted laser processing process of the workpiece 9 in real time and sense the processing progress (such as processing depth, processing width and the like); then, the acoustic signal acquisition mechanism 5 feeds the acquired and acquired acoustic signal back to the processing control mechanism 6, and the processing control mechanism 6 performs online and real-time adjustment on at least one of output parameters such as laser parameters, jet parameters, motion parameters and gas parameters of the water-assisted laser processing system based on real-time monitoring of the acoustic signal according to characteristic parameters such as amplitude and frequency of the acoustic signal fed back by the acoustic signal acquisition mechanism 5 so as to accurately control the processing process of the workpiece 9, improve the quality and efficiency of water-assisted laser processing of the workpiece 9, and realize high quality, high efficiency, high precision and intellectualization of the water-assisted laser processing of the workpiece 9. Wherein, still can detect the unusual circumstances based on each part of water helps laser beam machining system of acoustic signal real-time supervision according to acoustic signal to in time maintain, change the corresponding part of water helps laser beam machining system based on acoustic signal real-time supervision, promote security, the reliability of work piece 9 course of working.
Optionally, as shown in fig. 1 and fig. 2, the acoustic signal collecting mechanism 5 includes a low impedance acoustic signal receiver 51, a signal amplifier 52, and an acoustic signal converter 53. The low-impedance acoustic signal receiver 51 is used for receiving acoustic signals generated in the water-assisted laser processing process of the workpiece 9, the signal amplifier 52 is used for amplifying the acoustic signals received by the low-impedance acoustic signal receiver 51, and the acoustic signal converter 53 is used for converting the amplified acoustic signals into electrical signals and feeding the electrical signals back to the processing control mechanism 6. In some embodiments, the low impedance acoustic signal receiver 51 is configured to receive acoustic signals having an intensity of-50 dB to 70dB and a frequency of 100Hz to 30kHz generated during water assisted laser machining of the workpiece 9.
Optionally, as shown in fig. 1 and fig. 2, the processing control mechanism 6 includes an acoustic feedback signal processing structure 61, a laser parameter control structure 62, a hydraulic parameter control structure 63, a motion parameter control structure 64, and a gas parameter control structure 65.
The acoustic feedback signal processing structure 61 can convert the electric signal obtained by converting the acoustic signal converter 53 of the acoustic signal acquisition mechanism 5 into characteristic indexes such as processing depth, processing width and the like of the workpiece 9, so as to realize online monitoring of the processing process; and the electric signal is fed back and transmitted to the laser parameter control structure 62, the hydraulic parameter control structure 63, the motion parameter control structure 64 and the gas parameter control structure 65, so that the on-line and real-time adjustment of each output parameter of the water-assisted laser processing system based on the real-time monitoring of the acoustic signal is realized. Specifically, the laser parameter control structure 62 is configured to control the laser generating mechanism 1 to adjust output parameters such as laser output pulse width, power, output, pulse delay, and the like; the hydraulic parameter control structure 63 is used for controlling the jet flow generation mechanism 2 to realize the adjustment of output parameters such as liquid pressure, transport frequency and the like; the motion parameter control structure 64 is used for controlling the processing workbench 4 to realize the adjustment of output parameters such as the displacement track, the displacement speed and the like of the workpiece 9; the gas parameter control structure 65 is used for controlling the gas supply mechanism 7 to realize the adjustment of output parameters such as gas components and pressure.
Optionally, as shown in fig. 1 to fig. 3, before step 700, the method for water-assisted laser processing based on real-time monitoring of acoustic signals further includes the following steps:
step 100, starting the laser generating mechanism 1 to emit laser with a first preset power.
Specifically, the laser generating mechanism 1, the aperture stop 811, the machining table 4, the machining control mechanism 6, and the like are started. The laser generating mechanism 1 emits laser (laser beam) with a first preset power for observing the position of the laser beam, so that the position of the laser beam can be adjusted conveniently in the subsequent steps. In some embodiments, the first preset power is lower than 100 mW.
Step 200, adjusting the laser transmission shaping mechanism 8 so that the laser beam passes through the center of each lens of the optical lens group 81 of the laser transmission shaping mechanism 8 and then is coaxial with the optical glass window 32 and the nozzle structure 33 of the water-assisted laser coupling mechanism 3.
Specifically, the laser transmission shaping mechanism 8 is adjusted according to the current position of the laser beam in step 100, so as to adjust the position of the laser beam until the laser beam passes through the center of each lens of the optical lens group 81 of the laser transmission shaping mechanism 8 and then is coaxial with the optical glass window 32 and the nozzle structure 33 of the water-assisted laser coupling mechanism 3.
Step 300, starting the jet flow generation mechanism 2 to jet the liquid jet flow at a first preset pressure, and coaxially compounding the laser and the jet flow to form a water-assisted laser compound energy beam.
Specifically, the jet flow generation mechanism 2 is started, the water outlet pressure of the high-pressure water pump 21 is set to a first preset pressure (for example, 1Mpa), and water is supplied to the high-pressure resistant water cavity. Meanwhile, whether the fine jet flow emitted from the nozzle structure 33 has scattering phenomenon is observed, and if yes, the nozzle structure 33 is replaced with a new one; if not, the height of the vertical spiral elevating platform 822, that is, the height of the focusing objective 815 is adjusted, so that the focal plane of the laser beam focused by the focusing objective 815 is coplanar with the upper surface entrance of the injection part (such as the ruby nozzle 331) of the nozzle structure 33, and the laser and the jet flow are coaxially combined to form a water-assisted laser composite energy beam and are emitted from the ruby nozzle 331.
Step 400, fixing the workpiece 9 on the machining workbench 4, and moving the workpiece 9 to a machining position through the machining workbench 4; and the acoustic signal acquisition mechanism 5 and the processing control mechanism 6 are started.
Specifically, the workpiece 9 is placed on the positioning jig 42 of the machining table 4, and the machining table 4 is started to move the workpiece 9 to the position to be machined; and starting the acoustic signal acquisition mechanism 5 and the processing control mechanism 6 so as to sense the water-assisted laser processing process of the workpiece 9 in time, thereby performing online adjustment on each output parameter of the water-assisted laser processing system based on real-time acoustic signal monitoring and realizing high-quality, high-efficiency and high-precision water-assisted laser processing.
And 500, starting the air supply mechanism 7 to output air flow, and wrapping the air flow with the water-assisted laser composite energy beam to form a protective air cover.
Specifically, the gas supply mechanism 7 and the gas pressure regulating structure 71 are activated to input a gas flow of a certain pressure (preset pressure) to the coaxial gas supply structure 74. The airflow wraps the water-assisted laser composite energy beam to form a protective gas hood, and the protective gas hood is ejected from the ruby nozzle 331 along with the water-assisted laser composite energy beam. When workpieces 9 made of different materials are processed, the gas supply structure 72 capable of outputting different gas flows is adopted, for example, if the workpieces 9 are made of resin-based and ceramic-based composite materials, the gas supply structure 72 adopts an argon bottle; if the workpiece 9 is made of metal material, the gas supply structure 72 adopts an oxygen cylinder; if the workpiece 9 is a semiconductor material such as silicon wafer or gallium arsenide, the gas supply structure 72 employs a nitrogen gas cylinder.
And step 600, setting the output parameters of the laser generating mechanism 1, the jet flow generating mechanism 2 and the gas supply mechanism 7 as initial processing parameters.
Specifically, the laser generating mechanism 1, the jet flow generating mechanism 2 and the gas supply mechanism 7 operate at initial processing parameters to perform water-assisted laser processing on the workpiece 9.
Optionally, as shown in fig. 1 to fig. 3, after step 800, the method for water-assisted laser processing based on real-time monitoring of acoustic signals further includes the following steps:
and 900, after the workpiece 9 is machined, taking down the workpiece 9 from the machining workbench 4, and sequentially shutting down the laser generating mechanism 1, the jet flow generating mechanism 2, the machining workbench 4, the acoustic signal collecting mechanism 5, the gas supply mechanism 7 and the machining control mechanism 6.
Optionally, step 800 comprises:
when the frequency of the acoustic signal suddenly and irregularly jumps to a large extent, the processing control mechanism 6 is controlled to shut down the laser generating mechanism 1, the jet flow generating mechanism 2 and the gas supply mechanism 7.
Specifically, in the water-assisted laser processing process, if the frequency of the acoustic signal acquired by the acoustic signal acquisition mechanism 5 suddenly and irregularly jumps to a large extent, it indicates that the ejection part (ruby nozzle 331) of the nozzle structure 33 is damaged; at this time, the acoustic feedback signal processing structure 61 sends out a shutdown signal to the laser generating mechanism 1, the jet generating mechanism 2, and the gas supply mechanism 7, so as to replace the ruby nozzle 331. The water-assisted laser machining of the workpiece 9 is resumed after the ruby nozzle 331 is replaced.
When the average frequency value of the acoustic signal is greatly increased and the average amplitude value is gradually decreased, the processing control mechanism 6 is controlled to decrease the output power of the laser generating mechanism 1, decrease the output pressure of the jet flow generating mechanism 2, increase the output pressure of the air supply mechanism 7, and shut down the processing workbench 4.
Specifically, in the water-assisted laser machining process, the frequency average value of the acoustic signal acquired by the acoustic signal acquisition mechanism 5 is greatly increased, and the amplitude average value is gradually decreased, which indicates that too much liquid (water) deposits on the surface of the workpiece 9, the acoustic feedback signal processing structure 61 sends a power reduction signal to the laser generation mechanism 1, sends an air pressure lifting signal to the gas parameter control structure 65, sends a hydraulic pressure reduction signal to the jet flow generation mechanism 2, and sends a pause movement signal to the multi-axis displacement platform 41 of the machining workbench 4. After the frequency average value and the amplitude average value of the acoustic signal gradually recover to the initial state of the processing, a power recovery signal is sent to the laser generating mechanism 1, an air pressure recovery signal is sent to the gas parameter control structure 65, a hydraulic recovery signal is sent to the jet flow generating mechanism 2, a moving start signal is sent to the multi-axis displacement platform 41, and the processing is restarted.
When the frequency average value of the acoustic signal is gradually reduced and the amplitude average value is gradually increased, the processing control mechanism 6 is controlled to increase the output power of the laser generating mechanism 1, reduce the output pressure of the jet flow generating mechanism 2, increase the output pressure of the air supply mechanism 7 and slow down the movement of the processing workbench 4.
Specifically, in the water-assisted laser processing process, if the frequency average value of the acoustic signal acquired by the acoustic signal acquisition mechanism 5 is wholly and slowly reduced and the amplitude average value is slowly increased, it is indicated that a step-shaped structure appears inside the processing structure of the workpiece 9, water flow starts to silt up, laser energy cannot penetrate into the workpiece 9, the acoustic feedback signal processing structure 61 sends a power appropriate lifting signal to the laser generation mechanism 1, sends an air pressure lifting signal to the gas parameter control structure 65, sends a hydraulic pressure reduction signal to the jet flow generation mechanism 2, and sends a movement slowing signal to the multi-axis displacement platform 41. After the frequency average value and the amplitude average value of the acoustic signal gradually recover to the initial processing state, a power recovery signal is sent to the laser generating mechanism 1, an air pressure recovery signal is sent to the gas parameter control structure 65, a hydraulic recovery signal is sent to the jet flow generating mechanism 2, and a movement recovery signal is sent to the multi-axis displacement platform 41.
When the average frequency value of the acoustic signal is suddenly and greatly reduced and the average amplitude value is greatly reduced, the processing control mechanism 6 is controlled to reduce the output power of the laser generating mechanism 1, increase the output pressure of the jet flow generating mechanism 2, reduce the output pressure of the air supply mechanism 7 and accelerate the movement of the processing workbench 4.
Specifically, in the water-assisted laser machining process, if the frequency average value of the acoustic signal acquired by the acoustic signal acquisition mechanism 5 is suddenly and greatly reduced and the amplitude average value is greatly reduced, it indicates that the workpiece 9 is penetrated by the water-assisted laser composite energy beam, the acoustic feedback signal processing structure 61 sends a power proper reduction signal to the laser generation mechanism 1, sends an air pressure proper reduction signal to the gas parameter control structure 65, sends a hydraulic lifting signal to the jet generation mechanism 2, sends a movement acceleration signal to the multi-axis displacement platform 41, and continues machining.
Although the present disclosure has been described above, the scope of the present disclosure is not limited thereto. Various changes and modifications may be effected therein by one of ordinary skill in the pertinent art without departing from the spirit and scope of the present disclosure, and these changes and modifications are intended to be within the scope of the present disclosure.
Claims (10)
1. A water-assisted laser processing system based on real-time monitoring of acoustic signals, comprising:
a laser generating mechanism (1) for emitting laser light;
a jet generating means (2) for ejecting a jet of liquid;
a water-assisted laser coupling mechanism (3) for coaxially compounding the laser with the jet to form a water-assisted laser compound energy beam;
the machining workbench (4) is used for arranging and moving a workpiece (9), and the water-assisted laser composite energy beam passes through the water-assisted laser coupling mechanism (3) and then acts on the workpiece (9) to machine the workpiece (9);
the acoustic signal acquisition mechanism (5) is used for monitoring acoustic signals generated by the workpiece (9) in the water-assisted laser machining process in real time and feeding the acoustic signals back to the machining control mechanism (6); and the processing control mechanism (6) is used for controlling the laser generating mechanism (1), the jet flow generating mechanism (2) and the processing workbench (4) to adjust output parameters according to the acoustic signals.
2. The water-assisted laser processing system based on real-time acoustic signal monitoring as claimed in claim 1, further comprising a gas supply mechanism (7) arranged between the water-assisted laser coupling mechanism (3) and the processing workbench (4), wherein the gas supply mechanism (7) is used for providing a protective gas shield coaxial with the water-assisted laser composite energy beam; and the processing control mechanism (6) is also used for controlling the gas supply mechanism (7) to adjust the output parameters according to the acoustic signals.
3. The water-assisted laser processing system based on real-time acoustic signal monitoring as claimed in claim 1 or 2, further comprising a laser transmission shaping mechanism (8) disposed between the laser generating mechanism (1) and the water-assisted laser coupling mechanism (3), wherein the laser transmission shaping mechanism (8) is used for adjusting and guiding the laser to the water-assisted laser coupling mechanism (3).
4. The water-assisted laser processing system based on real-time acoustic signal monitoring as claimed in claim 3, wherein the laser transmission shaping mechanism (8) comprises an optical lens group (81) and a three-coordinate laser focus position adjusting structure (82), the optical lens group (81) comprises an aperture stop (811), a beam expander (812), a reflector group (813), an axicon group (814) and a focusing objective lens (815), and the laser emitted by the laser generating mechanism (1) sequentially enters the water-assisted laser coupling mechanism (3) through the aperture stop (811), the beam expander (812), the reflector group (813), the axicon group (814) and the focusing objective lens (815); the focusing objective lens (815) is arranged on the three-coordinate laser focus position adjusting structure (82) and is moved by the three-coordinate laser focus position adjusting structure (82).
5. A water-assisted laser processing system based on real-time acoustic signal monitoring as claimed in claim 3, wherein the jet generating mechanism (2) comprises a high-pressure water pump (21), a water tank (22), a pipeline (23), a pressure monitor (24), an accumulator (25), an electromagnetic overflow valve (26) and a filter (27), the pipeline (23) is communicated with the water tank (22) and one end of the filter (27), and the other end of the filter (27) is communicated with the water-assisted laser coupling mechanism (3); the high-pressure water pump (21) is arranged on the water tank (22) or the pipeline (23) to pump the liquid in the water tank (22) to the water-assisted laser coupling mechanism (3) through the pipeline (23) and the filter (27) in sequence; the pressure monitor (24), the accumulator (25) and the electromagnetic spill valve (26) are all arranged on the pipeline (23) between the high-pressure water pump (21) and the filter (27).
6. The water-assisted laser processing system based on real-time acoustic signal monitoring as claimed in claim 5, wherein the water-assisted laser coupling mechanism (3) comprises a joint (31), an optical glass window (32) and a nozzle structure (33), the nozzle structure (33) is internally provided with a high pressure resistant water cavity, and the joint (31) is communicated with the filter (27) and the high pressure resistant water cavity; the optical glass window (32) is arranged at one end of the nozzle structure (33), and the laser entering the water-assisted laser coupling mechanism (3) sequentially passes through the optical glass window (32), the high-pressure-resistant water cavity and is emitted from the other end of the nozzle structure (33).
7. The water-assisted laser processing system based on real-time acoustic signal monitoring as claimed in claim 6, wherein the gas supply mechanism (7) comprises a gas pressure regulating structure (71) and a gas supply structure (72), a gas pipe (73) and a coaxial gas supply structure (74) which are communicated in sequence, and the gas pressure regulating structure (71) is arranged on the gas supply structure (72) or the gas pipe (73); the coaxial gas supply structure (74) is arranged between the nozzle structure (33) and the processing table (4) and is arranged coaxially with the nozzle structure (33).
8. The water-assisted laser processing system based on real-time monitoring of acoustic signals as claimed in any one of claims 1-2 and 4-7, characterized in that the processing workbench (4) comprises a multi-axis displacement platform (41) and a positioning jig (42) arranged on the multi-axis displacement platform (41), the positioning jig (42) being used for fixing the workpiece (9); and the positioning jig (42) is suitable for moving relative to the multi-axis displacement platform (41), and/or the multi-axis displacement platform (41) and the positioning jig (42) are suitable for moving relative to the ground.
9. A water-assisted laser processing method based on real-time monitoring of acoustic signals, which adopts the water-assisted laser processing system based on real-time monitoring of acoustic signals as claimed in any one of claims 1 to 8, and comprises:
acquiring an acoustic signal generated by a workpiece (9) in the water-assisted laser processing process through an acoustic signal acquisition mechanism (5) of the water-assisted laser processing system based on acoustic signal real-time monitoring;
and controlling a processing control mechanism (6) of the water-assisted laser processing system based on real-time monitoring of the acoustic signal to adjust the output parameters of at least one of the laser generating mechanism (1), the jet flow generating mechanism (2), the processing workbench (4) and the gas supply mechanism (7) according to the acoustic signal.
10. The water-assisted laser processing method based on real-time monitoring of the acoustic signal as claimed in claim 9, wherein controlling the processing control mechanism (6) of the water-assisted laser processing system based on real-time monitoring of the acoustic signal to adjust the output parameters of at least one of the laser generating mechanism (1), the jet generating mechanism (2), the processing workbench (4) and the gas supply mechanism (7) according to the acoustic signal comprises:
when the frequency of the acoustic signal suddenly and irregularly jumps to a large extent, the processing control mechanism (6) is controlled to shut down the laser generating mechanism (1), the jet flow generating mechanism (2) and the gas supply mechanism (7);
when the frequency average value of the acoustic signal is greatly improved and the amplitude average value is gradually reduced, controlling the processing control mechanism (6) to reduce the output power of the laser generating mechanism (1), reduce the output pressure of the jet flow generating mechanism (2), increase the output pressure of the gas supply mechanism (7) and stop the processing workbench (4);
when the frequency average value of the acoustic signal is integrally and slowly reduced and the amplitude average value is slowly increased, the processing control mechanism (6) is controlled to increase the output power of the laser generating mechanism (1), reduce the output pressure of the jet flow generating mechanism (2), increase the output pressure of the gas supply mechanism (7) and slow down the movement of the processing workbench (4);
when the frequency average value of the acoustic signal is suddenly and greatly reduced, the amplitude average value is greatly reduced, the processing control mechanism (6) is controlled to reduce the output power of the laser generating mechanism (1), improve the output pressure of the jet flow generating mechanism (2), reduce the output pressure of the gas supply mechanism (7) and accelerate the movement of the processing workbench (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111366614.8A CN114043073A (en) | 2021-11-18 | 2021-11-18 | Water-assisted laser processing system and method based on acoustic signal real-time monitoring |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111366614.8A CN114043073A (en) | 2021-11-18 | 2021-11-18 | Water-assisted laser processing system and method based on acoustic signal real-time monitoring |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114043073A true CN114043073A (en) | 2022-02-15 |
Family
ID=80209925
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111366614.8A Pending CN114043073A (en) | 2021-11-18 | 2021-11-18 | Water-assisted laser processing system and method based on acoustic signal real-time monitoring |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114043073A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114918535A (en) * | 2022-05-30 | 2022-08-19 | 武汉大学 | Multi-factor experimental device for water jet assisted laser machining and experimental method using multi-factor experimental device |
| CN117245250A (en) * | 2023-11-07 | 2023-12-19 | 陕西渥特镭铯机械制造有限公司 | Acoustic monitoring device and method for water-guided laser processing |
Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101328584A (en) * | 2007-06-19 | 2008-12-24 | 上海海事大学 | Laser cladding real time monitoring system |
| CN203076788U (en) * | 2012-12-24 | 2013-07-24 | 中国科学院沈阳自动化研究所 | Laser shock strengthening device of blisk |
| JP2013215786A (en) * | 2012-04-10 | 2013-10-24 | Toshiba Corp | Laser processing device, laser processing system, and laser processing method |
| JP2014113597A (en) * | 2012-12-06 | 2014-06-26 | Panasonic Corp | Laser processing device |
| US20160327522A1 (en) * | 2014-02-17 | 2016-11-10 | Mitsubishi Electric Corporation | Abnormal sound detection device, abnormal processing-machine-sound detection system, and abnormal sound detection method |
| US20170087667A1 (en) * | 2015-09-30 | 2017-03-30 | Kabushiki Kaisha Toshiba | Laser processing apparatus, laser processing method and distance measurement method |
| CN108406098A (en) * | 2018-03-07 | 2018-08-17 | 哈尔滨工业大学 | The femtosecond laser of pulse regulation and control-nanosecond electrolysis jet flow Machining System and method |
| CN110125540A (en) * | 2019-05-15 | 2019-08-16 | 哈尔滨工业大学 | A kind of method, system and its equipment of water guiding laser processing workpiece |
| WO2019162464A1 (en) * | 2018-02-23 | 2019-08-29 | Avonisys Ag | A method of machining a bore extending from an outer wall of a workpiece with liquid-jet guided laser beam |
| US20200061743A1 (en) * | 2018-08-24 | 2020-02-27 | Fanuc Corporation | Laser processing system, jet observation apparatus, laser processing method, and jet observation method |
| CN112739490A (en) * | 2018-09-25 | 2021-04-30 | 沙特阿拉伯石油公司 | Laser tool for removing scale |
| CN112719646A (en) * | 2020-12-23 | 2021-04-30 | 睿驰隆科技(武汉)有限公司 | Real-time monitoring method for welding quality in continuous laser welding process |
| CN214161805U (en) * | 2020-12-10 | 2021-09-10 | 上海柏楚数控科技有限公司 | Laser processing quality monitoring system |
-
2021
- 2021-11-18 CN CN202111366614.8A patent/CN114043073A/en active Pending
Patent Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101328584A (en) * | 2007-06-19 | 2008-12-24 | 上海海事大学 | Laser cladding real time monitoring system |
| JP2013215786A (en) * | 2012-04-10 | 2013-10-24 | Toshiba Corp | Laser processing device, laser processing system, and laser processing method |
| JP2014113597A (en) * | 2012-12-06 | 2014-06-26 | Panasonic Corp | Laser processing device |
| CN203076788U (en) * | 2012-12-24 | 2013-07-24 | 中国科学院沈阳自动化研究所 | Laser shock strengthening device of blisk |
| US20160327522A1 (en) * | 2014-02-17 | 2016-11-10 | Mitsubishi Electric Corporation | Abnormal sound detection device, abnormal processing-machine-sound detection system, and abnormal sound detection method |
| US20170087667A1 (en) * | 2015-09-30 | 2017-03-30 | Kabushiki Kaisha Toshiba | Laser processing apparatus, laser processing method and distance measurement method |
| WO2019162464A1 (en) * | 2018-02-23 | 2019-08-29 | Avonisys Ag | A method of machining a bore extending from an outer wall of a workpiece with liquid-jet guided laser beam |
| CN108406098A (en) * | 2018-03-07 | 2018-08-17 | 哈尔滨工业大学 | The femtosecond laser of pulse regulation and control-nanosecond electrolysis jet flow Machining System and method |
| US20200061743A1 (en) * | 2018-08-24 | 2020-02-27 | Fanuc Corporation | Laser processing system, jet observation apparatus, laser processing method, and jet observation method |
| CN112739490A (en) * | 2018-09-25 | 2021-04-30 | 沙特阿拉伯石油公司 | Laser tool for removing scale |
| CN110125540A (en) * | 2019-05-15 | 2019-08-16 | 哈尔滨工业大学 | A kind of method, system and its equipment of water guiding laser processing workpiece |
| CN214161805U (en) * | 2020-12-10 | 2021-09-10 | 上海柏楚数控科技有限公司 | Laser processing quality monitoring system |
| CN112719646A (en) * | 2020-12-23 | 2021-04-30 | 睿驰隆科技(武汉)有限公司 | Real-time monitoring method for welding quality in continuous laser welding process |
Non-Patent Citations (1)
| Title |
|---|
| 张毅等: "《移动机器人技术基础与制作》", 31 January 2013, 哈尔滨工业大学出版社, pages: 33 - 34 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114918535A (en) * | 2022-05-30 | 2022-08-19 | 武汉大学 | Multi-factor experimental device for water jet assisted laser machining and experimental method using multi-factor experimental device |
| CN117245250A (en) * | 2023-11-07 | 2023-12-19 | 陕西渥特镭铯机械制造有限公司 | Acoustic monitoring device and method for water-guided laser processing |
| CN117245250B (en) * | 2023-11-07 | 2024-05-07 | 陕西渥特镭铯机械制造有限公司 | Acoustic monitoring device and method for water-guided laser processing |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN114043073A (en) | Water-assisted laser processing system and method based on acoustic signal real-time monitoring | |
| CN108526627B (en) | Laser-electrochemical composite micromachining method and device for semiconductor material | |
| CN113751900B (en) | Water-guided laser drilling system and method | |
| Knappe et al. | Scaling ablation rates for picosecond lasers using burst micromachining | |
| CN106238918A (en) | The ceramic etching system of a kind of ultrasonic wave added laser and method | |
| CN110280914B (en) | Laser ultrasonic technology assisted pulse laser boring device and method | |
| CN111548023B (en) | Method for finely processing glass surface by using red light nanosecond laser | |
| CN105904105B (en) | Laser drilling device and method for improving hole taper | |
| CN110883424B (en) | Water-guide laser flexible micro-machining system and method | |
| WO2017043460A1 (en) | Laser processing method and laser processing device for minimizing incidence of self-burning | |
| CN103358028A (en) | Method and system for scribing brittle ultrathin piece by water jet and laser | |
| CN109175733B (en) | Device and method for improving laser drilling quality based on online detection technology | |
| CN105195903B (en) | A kind of micro- water knife processing unit (plant) of laser punched for turbo blade | |
| JP3871240B2 (en) | Hybrid processing equipment | |
| CN112475613B (en) | Laser processing device for water-gas coaxial auxiliary galvanometer scanning | |
| CN114161004A (en) | Method for precisely machining turbine blade air film hole | |
| Zhang et al. | Laser drilling assisted with jet electrochemical machining for the minimization of recast and spatter | |
| CN110102897B (en) | Laser cleaning and laser welding integrated equipment and method for curved surface thin-wall structure | |
| CN203390389U (en) | System for etching fragile material ultrathin sheet with water jet and laser | |
| CN111943499B (en) | Ultra-fast laser precision cutting method based on ultrasonic nitrogen jet | |
| JP2010120038A (en) | Laser beam machining apparatus and method | |
| CN110625273A (en) | Laser processing method and device | |
| KR20190011470A (en) | Cemented carbide, high-quality laser micro-discharge complex processing device | |
| CN105772955A (en) | Device and method for improving taper of through hole through liquid scattering | |
| JP2006218544A (en) | Hybrid machining device and method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |