CN114161004A - Method for precisely machining turbine blade air film hole - Google Patents

Method for precisely machining turbine blade air film hole Download PDF

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Publication number
CN114161004A
CN114161004A CN202111412793.4A CN202111412793A CN114161004A CN 114161004 A CN114161004 A CN 114161004A CN 202111412793 A CN202111412793 A CN 202111412793A CN 114161004 A CN114161004 A CN 114161004A
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China
Prior art keywords
film hole
turbine blade
processing
air film
hole
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Pending
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CN202111412793.4A
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Chinese (zh)
Inventor
姜澜
邱兆岭
胡洁
刘威
柳海林
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Beijing Institute of Technology BIT
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Beijing Institute of Technology BIT
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Priority to CN202111412793.4A priority Critical patent/CN114161004A/en
Publication of CN114161004A publication Critical patent/CN114161004A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/38Removing material by boring or cutting
    • B23K26/382Removing material by boring or cutting by boring
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors

Abstract

The invention relates to a method for accurately machining a turbine blade air film hole, and belongs to the field of laser application. The invention aims to solve the technical problems of low roundness of an orifice, high roughness of a hole inner wall, non-uniform hole inner wall and the like in the process of drilling a hole on a turbine blade by using the traditional femtosecond laser. The invention firstly adopts the femtosecond laser double-pulse sequence with vertical polarization to process the micropores, and is applied to the preparation of the turbine blade air film hole, so as to prepare the micropores with high quality and high precision, and effectively improve the orifice roundness of the air film cooling hole and the uniformity of the hole wall.

Description

Method for precisely machining turbine blade air film hole
Technical Field
The invention relates to a method for accurately machining a turbine blade air film hole, and belongs to the field of laser application.
Background
The turbine blade is a core component of an aircraft engine, and in order to improve the working performance of the turbine blade, the film cooling technology applied to the turbine blade of the aircraft engine is always a problem of great concern. The machining of the cooling micropores is the key of the air film cooling technology, and a large number of challenges exist in the machining of the cooling micropores, such as no microcracks, no heat affected zone, minimized recasting layers and the like.
Ultrafast laser with ultrashort pulse duration (-10)-15s), extremely high energy density (>1014W/cm2) And the like, can effectively inhibit heat from diffusing to the surrounding environment, reduce thermal strain, and draw wide attention in precision manufacturing. Compared with the traditional hole making method, the ultrafast laser can remarkably reduce or eliminate the defects of microcracks and delamination between a Thermal Barrier Coating (TBC) and a bonding layer (BC) and a recast layer, and is one of the effective modes of micro-hole processing at present.
However, some problems associated with ultrafast laser drilling are emerging. In the literature "Applied Surface Science, 2021, 537: 148001', processing a micropore structure on the surface of the high-temperature alloy with the thermal barrier coating by respectively using linearly polarized and circularly polarized femtosecond lasers; in the literature "Ceramics International, 2021, 47: 11465-. However, the microporous structure prepared by the method has the defects of rough inner wall of the hole, non-uniform inner wall of the micropore, large taper of the micropore, poor roundness of the orifice and the like, and is difficult to be effectively applied to the preparation of the turbine blade air film hole of the aero-engine.
Disclosure of Invention
The invention aims to solve the technical problems of low orifice roundness, high hole inner wall roughness, uneven hole inner wall and the like in the traditional femtosecond laser hole making process of a turbine blade, and provides a method for accurately processing a turbine blade air film hole
The purpose of the invention is realized by the following technology:
a method for precisely machining a turbine blade film hole comprises the following steps:
the method comprises the following steps: the YVO4 crystal is added into a processing optical path, but not limited to other devices for generating vertical polarization femtosecond laser double pulses, the femtosecond laser can be shaped into two sub-pulse sequences with mutually vertical polarization directions after vertically incident through the crystal, the time delay of the sub-pulses is changed by changing the thickness of the crystal, the time delay range is 0.2ps-20ps, and the energy ratio of the two sub-pulses is kept to be 1: 1.
Step two: focusing the vertical polarization femtosecond double-pulse sequence obtained in the first step on the surface of a workpiece through a plano-convex lens to carry out micropore processing; according to the requirements of the aperture and the depth of the aperture, scanning a rotary cutting path is realized by presetting software of a six-axis translation table; observing the processing process in real time through a coaxial imaging system; and discharging the scraps generated by micropore processing through a coaxial blowing system.
Further, in the first step, the femtosecond laser should vertically irradiate the YVO4 crystal to ensure that two sub-pulses with mutually perpendicular polarizations are generated; an included angle of 45 degrees is kept between the direction of the optical axis of the crystal and the polarization direction of the light beam, and the energy ratio of the two sub-pulses is kept to be 1: 1; ensuring that the thickness of the crystal meets the requirement that the incident femtosecond laser with different wavelengths generates double pulses with the delay range of about 0.2ps-20 ps.
And step two, the imaging system needs to keep the imaging focal plane of the CCD camera and the focal plane of the light beam on the same plane.
Applying compressed air as shielding gas by the coaxial blowing system, wherein the pressure of the shielding gas is 0.1-0.5 Mpa;
the device for realizing the method comprises the following steps: the device comprises a femtosecond laser, a first reflector, a second reflector, a YVO4 crystal, a third reflector, a fourth reflector, an attenuation sheet, an optical shutter, a dichroic mirror, a beam splitter, an optical filter, a zoom lens, a CCD camera, a plano-convex lens, a coaxial blowing head, a six-axis translation stage and an air compressor; laser emitted by the femtosecond laser passes through the first reflector, the second reflector, the YVO4 crystal, the third reflector, the fourth reflector, the attenuation sheet, the optical shutter and the dichroic mirror, is focused by the plano-convex lens and acts on the surface of the sample to process a gas film hole, and parameters of the six-axis translation stage, the femtosecond laser and the blowing system are called through software programming in the processing process.
Preferably, the parameters of the femtosecond laser when processing the gas film hole are as follows: the pulse width of the laser is 210fs-630fs, the power is 0.1-30W, the wavelength is 515nm or 1030nm, and the repetition frequency is 1-200 kHz; pressure intensity range of the blowing system: 0.1-0.6 MPa; punching by adopting a scanning rotary cutting mode, presetting a scanning path of a six-axis translation table in a control system as concentric circular ring layer-by-layer scanning, setting the scanning speed to be 0.1-2 mm/s, setting the diameter range to be 0.25-1.4mm, and setting scanning for 10-100 circles to draw a complete rotary cutting path; according to actual processing tests, determining the material removal amount of each layer of rotary cutting path under different process parameters, and determining the single-layer feeding amount to be 0.01-0.8 mm; determining the number of scanning layers to be 10-200 according to the thickness of a workpiece to be processed; and determining technological parameters of each air film hole according to the processing diameter and the processing depth, so that the preparation of the air film hole is realized.
Advantageous effects
1. Compared with the traditional processing method, the method can effectively improve the uniformity of the hole wall, the roundness of the hole opening and the hole diameter precision, and reduce the roughness of the inner wall of the micropore, the microcrack of a recast layer and other defects.
2. Compared with percussion type punching, the rotary cutting scanning punching mode can flexibly adjust the aperture of the cooling micropores, and the roundness of the processed micropore orifices is higher; the substrate material and the laser focus have relative motion, so that the adverse effects caused by debris interference, plasma shielding effect and the like generated in the processing process can be effectively avoided.
3. In the present invention, YVO4 crystal is taken as an example, but not limited to, other devices for generating a vertically polarized femtosecond laser double pulse. By adding YVO4 crystal into the light path, the traditional femtosecond laser is divided into two sub-pulses with mutually vertical polarization directions, so that the polarization removal phenomenon on the side wall of the micropore can be effectively improved, and the roundness of the micropore outlet and the uniformity of the micropore are improved; the time delay between the sub-pulses is adjusted by changing the thickness of the crystal, so that the ultra-fast heat conduction and energy coupling in the metal material are adjusted and controlled, and the processing quality and the processing high precision are improved.
Drawings
FIG. 1 is a light path diagram of the processing method of the present invention.
FIG. 2 shows the shapes of the orifice and the wall of the cooling micro-hole of the superalloy, and the pulse delay is 4 ps.
FIG. 3 is the hole opening and hole wall morphology of the superalloy cooling micropores with thermal barrier coating.
FIG. 4 is the orifice and wall morphology of superalloy cooling micropores with a pulse delay of 0.2 ps.
FIG. 5 shows the shapes of the orifice and the wall of the cooling micro-hole of the superalloy, and the pulse delay is 8 ps.
FIG. 6 is a diagram of the orifice and wall morphology of superalloy cooling micropores with a pulse delay of 20 ps.
FIG. 7 shows the morphology of a cooling micro-hole array on the surface of a superalloy: (a) inlet appearance, (b) outlet appearance, phi 0.5 mm; (c) inlet morphology, (d) outlet morphology, phi 1.0 mm.
Wherein, 1-femtosecond laser; 2-a first mirror; 3-a second mirror; 4-YVO4 crystal; 5-a third mirror; 6-a fourth mirror; 7-an attenuation sheet; 8-optical shutter; 9-dichroic mirror; 10-a beam splitter; 11-an illumination source; 12-an optical filter; 13-a zoom lens; 14-a CCD camera; 15-plano-convex lens; 16-coaxial blowheads; 17-processing the sample; 18-a six-axis translation stage; 19-air compressor.
Detailed Description
The invention will be further explained with reference to the drawings and the embodiments.
Example 1:
a preparation method of a turbine blade air film hole based on electronic dynamic regulation comprises the following specific steps:
the method comprises the following steps of (1) determining required technological parameters according to the property of a workpiece material and the size of a micropore to be machined, and performing programming and software setting, wherein the diameter of the micropore is set to be 0.3mm in the example.
Step (2) generating linearly polarized light having a wavelength of 1030nm using a femtosecond laser 1The femtosecond laser, the energy density of which can be controlled by the laser itself or by the attenuation sheet 7 in the optical path; in order to improve the processing efficiency, the energy density of the beam focused by the plano-convex lens 15 is usually about 100 to 150 times of the ablation threshold of the workpiece to be processed (for example, the ablation threshold of nickel-based superalloy is 0.39J/cm)2Left and right).
And (3) vertically transmitting the femtosecond laser generated in the step (2) through the first reflecting mirror 2 and the second reflecting mirror 3 to a YVO4 crystal 4 with the thickness of 6mm, rotating the crystal to enable the optical axis direction of the crystal to keep an included angle of 45 degrees with the polarization direction of the femtosecond laser, and generating a double-pulse sequence with mutually vertical polarization, about 4ps pulse delay and 1:1 energy ratio.
Step (4) enabling the femtosecond laser pulse sequence generated in the step (3) to reach a plano-convex lens 15 through a third reflector 5, a fourth reflector 6 and a dichroic mirror 9, and focusing the laser pulse sequence through the plano-convex lens 15 to act on the surface of a workpiece for micropore processing; the punching process is observed in real time through an imaging system (composed of a beam splitter 10, an illumination light source 11, an optical filter 12, a zoom lens 13 and a CCD industrial camera 14); the chips produced during the process are discharged by a coaxial blowing system (consisting of a blowing head 16 and an air compressor 19).
Calling parameters of the femtosecond laser 1, the six-axis translation table 18 and the coaxial blowhead through a software control system; the pulse width and wavelength parameters of the femtosecond laser are fixed, and the parameters such as laser energy, laser repetition frequency and the like are adjusted according to the material properties of different workpieces, so that the optimal laser parameters are determined; and (4) processing micro holes with different sizes is realized by operating a preset scanning track through the six-axis translation table. Through adjustment pressure of blowing, the chip removal efficiency in the course of working is improved, and then the efficiency of punching is improved.
As shown in fig. 2, (a), (b) and (c) respectively show the entrance, exit and sidewall topography of the micro-hole processed by vertical polarized femtosecond laser rotational-cut scanning with a pulse delay of 4 ps. The femtosecond laser vertical polarization double-pulse cooling micro-hole machining quality is good, the roundness of the inlet and the outlet of the micro-hole is high, the uniform recasting layer area of the hole wall is greatly reduced, and the defects of micro-cracks, no heat influence area and the like are overcome. The technical requirements of the turbine blade air film hole are met.
As shown in FIG. 3, the same technical method is adopted to carry out micropore processing on a high-temperature alloy sample with a thermal barrier coating, the processed micropores have good quality, no edge breakage is generated around the pores, and no delamination phenomenon is generated at the boundary of the coating, the bonding layer and the substrate at the side wall, and the technical requirements of the turbine blade air film pores are met.
Therefore, the processing quality and the processing precision can be effectively improved by processing the turbine blade air film hole by adopting the vertical polarization femtosecond laser pulse sequence; the air film hole can be achieved by optimizing the process parameters: the aperture precision is better than 0.01mm, the aperture difference between an inlet and an outlet is less than 0.02mm, the hole roundness is better than 95%, the roughness of the inner wall of the hole is less than 0.4 mu m, and the processed surface is complete (a recast layer is minimized, and the hole has no microcracks, delamination and edge breakage).
Example 2
The other steps are the same as example 1, except that: in the step (3), the time delay of the two sub-pulses is 0.2 ps.
Cooling micropores as shown in fig. 4 were prepared.
FIG. 4 is an SEM image of the openings and sidewalls of cooling micro-holes machined in the surface of a superalloy according to an embodiment of the present invention. The inlet diameter of the micropores was measured to be 0.335mm and the outlet diameter of the micropores was measured to be around 0.36 mm.
Example 3
The other steps are the same as example 1, except that: in the step (3), the time delay of the two sub-pulses is 8 ps.
Cooling micropores as shown in fig. 5 were prepared.
FIG. 5 is an SEM image of the openings and sidewalls of cooling micro-holes machined in the surface of a superalloy according to an embodiment of the present invention. The inlet diameter of the micropores was measured at 0.337mm and the outlet diameter of the micropores at 0.35 mm.
Example 4
The other steps are the same as example 1, except that: and (4) delaying the two sub-pulses in the step (3) by 20 ps.
Cooling micropores as shown in fig. 6 were prepared.
FIG. 6 is an SEM image of the openings and sidewalls of cooling micro-holes machined in the surface of a superalloy according to an embodiment of the present invention. The inlet diameter of the micropores was measured at 0.334mm and the outlet diameter of the micropores at 0.352 mm.
Example 5
By adopting the method of the invention, the cooling micropore array is prepared on the surface of the high-temperature alloy.
The processing equipment and the femtosecond laser processing parameters are the same as those of the embodiment 1, except that: the diameters of the micropores in the step (1) are respectively set to be 0.5mm and 1 mm.
An array of cooling microwells as shown in figure 7 was prepared.
As shown in fig. 7, which is an optical microscope image of the cooling micro-hole array, it can be found that the circularity of the inlet and outlet of the cooling micro-hole array is greatly improved compared to the cooling micro-hole array processed by the conventional linear polarized femtosecond; through measurement, the aperture precision of the processed cooling micropores is superior to 0.01mm, the hole roundness is superior to 95%, the aperture difference between an inlet and an outlet is less than 0.02mm, and the technical requirements of turbine blade air film holes are met.
The above detailed description is intended to illustrate the objects, aspects and advantages of the present invention, and it should be understood that the above detailed description is only exemplary of the present invention and is not intended to limit the scope of the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the scope of the present invention.

Claims (9)

1. A method for accurately machining a turbine blade air film hole is characterized by comprising the following steps: and adjusting the laser beam to generate a vertical polarization femtosecond laser double pulse with time delay for processing the air film hole on the turbine blade.
2. The method of precisely machining the film hole of the turbine blade as set forth in claim 1, wherein: the method for generating the vertical polarization femtosecond laser double pulse with time delay comprises the following steps: a femtosecond laser time domain shaping device is added in a processing light path to generate two sub-pulses with mutually vertical polarization.
3. The method of precisely machining the film hole of the turbine blade as set forth in claim 1, wherein: the energy ratio of the double pulses is 1: 1.
4. The method of precisely machining the film hole of the turbine blade as set forth in claim 1, wherein: the time delay ranges from 0.2ps to 20 ps.
5. The method of precisely machining the film hole of the turbine blade as set forth in claim 1, wherein: the method for processing the air film hole comprises the following steps: focusing a vertical polarization femtosecond double-pulse sequence on the surface of a workpiece through a plano-convex lens to carry out micropore processing; according to the requirements of the aperture and the depth of the aperture, the six-axis translation table is adjusted to scan the rotary cutting path; observing the processing process in real time through a coaxial imaging system; and discharging the scraps generated by micropore processing through a coaxial blowing system.
6. The method for precisely machining the air film hole of the turbine blade as claimed in claim 2, wherein: the femtosecond laser time domain shaping device comprises: YVO4 crystal, michelson interferometer, and optical 4f system.
7. An apparatus for implementing the method according to any one of claims 1 to 6, characterized in that: the method comprises the following steps: the device comprises a femtosecond laser, a first reflector, a second reflector, a YVO4 crystal, a third reflector, a fourth reflector, an attenuation sheet, an optical shutter, a dichroic mirror, a beam splitter, an optical filter, a zoom lens, a CCD camera, a plano-convex lens, a coaxial blowing head, a six-axis translation stage and an air compressor; laser emitted by the femtosecond laser passes through the first reflector, the second reflector, the YVO4 crystal, the third reflector, the fourth reflector, the attenuation sheet, the optical shutter and the dichroic mirror, is focused by the plano-convex lens and then acts on the surface of the sample to process the air film hole.
8. The apparatus of claim 7, wherein: an included angle of 45 degrees is kept between the optical axis direction of the YVO4 crystal and the polarization direction of the light beam, and the energy ratio of two sub-pulses is kept to be 1: 1.
9. The apparatus of claim 7, wherein: the parameters of the femtosecond laser when processing the air film hole are as follows: the pulse width of the laser is 210fs-630fs, the power is 0.1-30W, the wavelength is 515nm or 1030nm, and the repetition frequency is 1-200 kHz; pressure intensity range of the blowing system: 0.1-0.6 MPa; punching by adopting a scanning rotary cutting mode, presetting a scanning path of a six-axis translation table in a control system as concentric circular ring layer-by-layer scanning, setting the scanning speed to be 0.1-2 mm/s, setting the diameter range to be 0.25-1.4mm, and setting scanning for 10-100 circles to draw a complete rotary cutting path; according to actual processing tests, determining the material removal amount of each layer of rotary cutting path under different process parameters, and determining the single-layer feeding amount to be 0.01-0.8 mm; determining the number of scanning layers to be 10-200 according to the thickness of a workpiece to be processed; and determining technological parameters of each air film hole according to the processing diameter and the processing depth, so that the preparation of the air film hole is realized.
CN202111412793.4A 2021-11-25 2021-11-25 Method for precisely machining turbine blade air film hole Pending CN114161004A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114888429A (en) * 2022-06-10 2022-08-12 星控激光科技(上海)有限公司 Device for laser processing of engine flame tube air film hole based on five-axis numerical control machine tool
CN115055844A (en) * 2022-08-17 2022-09-16 西北工业大学 Femtosecond laser processing system and method for preparing turbine blade air film hole
CN116174946A (en) * 2023-04-20 2023-05-30 西北工业大学 Femtosecond laser processing method for special-shaped air film hole with complex expansion port
CN116984759A (en) * 2023-09-27 2023-11-03 中国航发沈阳黎明航空发动机有限责任公司 Integrated processing method for gas film hole of turbine blade with thermal barrier coating

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013035048A (en) * 2011-08-10 2013-02-21 Disco Corp Laser beam machining apparatus
CN105108342A (en) * 2015-09-18 2015-12-02 南开大学 Method for preparing two-dimensional metallic photonic crystal structure in large area through femtosecond laser direct writing
CN105458530A (en) * 2016-01-29 2016-04-06 孙树峰 Device and method for machining aviation engine blade film hole through femtosecond lasers
CN108723586A (en) * 2018-06-14 2018-11-02 清华大学 A kind of polymer microchannel processing method based on space-time shaping femtosecond laser
CN111331263A (en) * 2020-03-28 2020-06-26 北京工业大学 Device and method for accurately preparing turbine blade cooling hole by picosecond laser
CN111474616A (en) * 2019-01-24 2020-07-31 中国科学院长春光学精密机械与物理研究所 Method for preparing sub-wavelength metal grating by wide-beam femtosecond laser double pulses
CN112355483A (en) * 2020-10-30 2021-02-12 北京理工大学 Method for preparing submicron concentric rings on silicon surface by femtosecond laser
CN113210873A (en) * 2021-06-03 2021-08-06 北京理工大学 Preparation method of metal nano-net based on electronic dynamic regulation and control

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013035048A (en) * 2011-08-10 2013-02-21 Disco Corp Laser beam machining apparatus
CN105108342A (en) * 2015-09-18 2015-12-02 南开大学 Method for preparing two-dimensional metallic photonic crystal structure in large area through femtosecond laser direct writing
CN105458530A (en) * 2016-01-29 2016-04-06 孙树峰 Device and method for machining aviation engine blade film hole through femtosecond lasers
CN108723586A (en) * 2018-06-14 2018-11-02 清华大学 A kind of polymer microchannel processing method based on space-time shaping femtosecond laser
CN111474616A (en) * 2019-01-24 2020-07-31 中国科学院长春光学精密机械与物理研究所 Method for preparing sub-wavelength metal grating by wide-beam femtosecond laser double pulses
CN111331263A (en) * 2020-03-28 2020-06-26 北京工业大学 Device and method for accurately preparing turbine blade cooling hole by picosecond laser
CN112355483A (en) * 2020-10-30 2021-02-12 北京理工大学 Method for preparing submicron concentric rings on silicon surface by femtosecond laser
CN113210873A (en) * 2021-06-03 2021-08-06 北京理工大学 Preparation method of metal nano-net based on electronic dynamic regulation and control

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
张晓兵 等: "《激光加工小孔技术》", 30 September 2020 *
李迎 等: "《大学物理》", 30 April 2019 *

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114888429A (en) * 2022-06-10 2022-08-12 星控激光科技(上海)有限公司 Device for laser processing of engine flame tube air film hole based on five-axis numerical control machine tool
CN114888429B (en) * 2022-06-10 2023-07-14 星控激光科技(上海)有限公司 Device for processing flame tube air film hole of engine based on five-axis numerical control machine tool
CN115055844A (en) * 2022-08-17 2022-09-16 西北工业大学 Femtosecond laser processing system and method for preparing turbine blade air film hole
CN116174946A (en) * 2023-04-20 2023-05-30 西北工业大学 Femtosecond laser processing method for special-shaped air film hole with complex expansion port
CN116984759A (en) * 2023-09-27 2023-11-03 中国航发沈阳黎明航空发动机有限责任公司 Integrated processing method for gas film hole of turbine blade with thermal barrier coating
CN116984759B (en) * 2023-09-27 2023-12-15 中国航发沈阳黎明航空发动机有限责任公司 Integrated processing method for gas film hole of turbine blade with thermal barrier coating

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Application publication date: 20220311