CN113210873A - Preparation method of metal nano-net based on electronic dynamic regulation and control - Google Patents
Preparation method of metal nano-net based on electronic dynamic regulation and control Download PDFInfo
- Publication number
- CN113210873A CN113210873A CN202110619429.9A CN202110619429A CN113210873A CN 113210873 A CN113210873 A CN 113210873A CN 202110619429 A CN202110619429 A CN 202110619429A CN 113210873 A CN113210873 A CN 113210873A
- Authority
- CN
- China
- Prior art keywords
- reflector
- femtosecond laser
- pulse
- metal
- processed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
Abstract
The invention relates to a preparation method of a metal nano-net based on electronic dynamic regulation and control, belonging to the technical field of laser application. Based on the idea of electronic dynamic regulation and control, the femtosecond laser double-pulse sequence with mutually vertical polarization directions, pulse delay within the range of 4ps-9ps and double-pulse total energy density within the range of 0.9-0.99 times of the ablation threshold of a metal material to be processed is used for direct writing processing, and a metal nano-mesh structure can be obtained under proper scanning parameters. Compared with the traditional processing method, the method has the advantages of no need of masks, templates and the like, simple process and low cost.
Description
Technical Field
The invention relates to a preparation method of a metal nano-net based on electronic dynamic regulation and control, belonging to the technical field of laser application.
Background
The metal nano net structure is a micro-nano structure with the size scale of nano magnitude, and the structure size of the metal nano net structure is between dozens of nanometers and dozens of nanometers. With the rapid development of micro-nano technology, the preparation of metal nano-network structure has received wide attention due to its wide application prospect in the fields of wettability, surface enhanced raman scattering, structural color surface, solar cell, etc. Currently, methods for preparing metal nano-mesh structures include template-assisted methods, vapor-liquid-solid direct growth methods, photolithography, and thin film deposition methods. However, these methods often require complicated process flow, expensive equipment and harsh processing environments, making the production of metal nano-networks costly.
In recent years, the femtosecond laser has a great role in the manufacturing field of metal micro-nano structures due to the capability of realizing nanoscale processing, flexible 3D processing and almost any material processing.
Disclosure of Invention
The invention aims to provide a method for preparing a metal nano-mesh structure by using femtosecond laser based on electronic dynamic regulation, which uses a femtosecond laser double-pulse sequence with mutually vertical polarization directions, pulse delay within the range of 4ps-9ps and double-pulse total energy density within the range of 0.9-0.99 times of the ablation threshold of a metal material to be processed to prepare the metal nano-mesh structure on the surface of the metal.
In order to achieve the above purpose, the invention provides the following technical scheme:
a preparation method of a metal nano-network structure based on electronic dynamic regulation comprises the following steps:
the method comprises the following steps: converting the femtosecond laser single pulse into a femtosecond laser double-pulse sequence with mutually vertical polarization directions through a combined light path of a Michelson interferometer and a quarter wave plate, adjusting the energy of two sub-pulses of the femtosecond laser double-pulse to be equal, and adjusting the total energy density of the double-pulse to be in the range of 0.9-0.99 times of the ablation threshold of the metal material to be processed; and then adjusting one arm of the optical path of the Michelson interferometer so that the pulse delay of the femtosecond laser double pulse is in the range of 4ps-9 ps.
Step two: and (3) vertically focusing the femtosecond laser double-pulse sequence obtained in the step one to the surface of the metal material to be processed through an optical lens, and controlling the metal material to be processed to move at a set moving speed, so that a metal nano-mesh structure can be obtained on the metal surface.
Furthermore, in the process of generating the femtosecond laser double-pulse sequence with mutually vertical polarization directions in the first step, the included angle between the optical axis of the quarter-wave plate and the polarization direction of the laser is 45 degrees.
In the second step, when the focusing lens is a plano-convex lens with a focal length of 100mm, the laser repetition frequency is 1000Hz, and the moving speed of the metal material to be processed is 200-500 μm/s.
The device for realizing the method comprises the following steps: the method comprises the steps of generating a femtosecond laser double-pulse sequence with mutually vertical polarization directions and pulse delay within the range of 4ps-10ps after a femtosecond laser, a first reflector, a second reflector, a first attenuation sheet, a third reflector, a one-dimensional translation table, a beam splitter, a second attenuation sheet, a quarter wave plate, a fourth reflector, a fifth reflector, an optical shutter, a sixth reflector, a seventh reflector and an eighth reflector, and scanning and processing the femtosecond laser double-pulse sequence on the surface of a metal material to be processed after the femtosecond laser, the first reflector, the second reflector, the fourth reflector, the fifth reflector, the optical shutter, the sixth reflector, the seventh reflector and the eighth reflector are focused by lenses to prepare the metal nano-mesh.
Has the advantages that:
based on the idea of electronic dynamic regulation and control, the femtosecond laser double-pulse sequence with mutually vertical polarization directions, pulse delay within the range of 4ps-9ps and double-pulse total energy density within the range of 0.9-0.99 times of the ablation threshold of a metal material to be processed is used for direct writing processing, and a metal nano-mesh structure can be obtained under proper scanning parameters. Compared with the traditional processing method, the method has the advantages of no need of masks, templates and the like, simple process and low cost.
Drawings
Fig. 1 is an optical path diagram of the processing method of the present invention.
Fig. 2 is an SEM image of a metal nano-network structure processed on the surface of a metal titanium material with a pulse delay of 4ps according to example 1 of the present invention, (a) is an image at a low magnification, and (b) is an enlarged image at a high magnification.
FIG. 3 is an SEM image of a metal nano-mesh structure processed on the surface of a titanium metal material with a pulse delay of 5ps according to example 2 of the present invention
FIG. 4 is an SEM image of a metal nano-mesh structure processed on the surface of a metal titanium material with a pulse delay of 6ps according to example 3 of the present invention
FIG. 5 is an SEM image of a metal nano-mesh structure processed on the surface of a titanium material with a pulse delay of 8ps according to example 4 of the present invention
FIG. 6 is an SEM image of a metal nano-mesh structure processed on the surface of a titanium material with a pulse delay of 9ps according to example 5 of the present invention
FIG. 7 is an SEM image of metal nanostructures fabricated on the surface of a titanium metal material with a pulse delay of 10ps according to example 6 of the present invention
The device comprises a 1-femtosecond laser, a 2-first reflector, a 3-second reflector, a 4-first attenuation sheet, a 5-third reflector, a 6-one-dimensional translation table, a 7-beam splitter, an 8-second attenuation sheet, a 9-quarter wave plate, a 10-fourth reflector, an 11-fifth reflector, a 12-optical shutter, a 13-sixth reflector, a 14-seventh reflector, a 15-eighth reflector, a 16-focusing lens, a 17-metal material to be processed and an 18-three-dimensional translation table.
Detailed Description
The following geometric figures and examples further illustrate the content of the invention.
Example 1:
a preparation method of a metal nano-net based on electronic dynamic regulation comprises the following specific steps:
in the step (1), a femtosecond laser 1 is used for generating a horizontally polarized femtosecond laser single pulse with the repetition frequency of 1000Hz and the wavelength of 800nm, and the femtosecond laser single pulse enters a Michelson interferometer structure light path through a first reflecting mirror 2 and a second reflecting mirror 3. The angle of the quarter-wave plate 9 is rotated to 0 degree, at the moment, two sub-pulses of double pulses generated by the Michelson interferometer are horizontally polarized, a fluorescent plate is placed in front of the emergent position of the Michelson interferometer to observe light spots after the two sub-pulses are overlapped in space, the time delay of the two sub-pulses is adjusted by adjusting the one-dimensional translation stage 6, when the light spots on the fluorescent plate after the two sub-pulses are overlapped in space begin to flicker continuously, the position where the light spots flicker most intensely is adjusted, and the time delay of the two sub-pulses is zero at the moment. The quarter-wave plate 9 is then rotated through an angle of 45 deg., at which the polarization direction of the sub-pulses of the transmission arm of the michelson interferometer changes from horizontal polarization to vertical polarization. The first attenuator 4 and the second attenuator 8 are then adjusted so that the energy of both sub-pulses is equal, both 0.325 muj. And then, the one-dimensional translation stage 6 is adjusted to move by 600 micrometers on the basis of the previous delay zero point, so that the wide composition difference of the two sub-pulses is 1200 micrometers, and the delay time of the two sub-pulses is 4 ps. And (2) obtaining the femtosecond laser double-pulse sequence which has mutually vertical polarization directions, equal sub-pulse energy and 4ps pulse delay through the step (1).
And (2) enabling the femtosecond laser double-pulse sequence obtained in the step (1) to reach a focusing lens 16 through a fifth reflector 11, an optical shutter 12, a sixth reflector 13, a seventh reflector 14 and an eighth reflector 15, and focusing the femtosecond laser double-pulse sequence on the surface of a metal material 17 to be processed through the focusing lens 16, wherein the metal material to be processed is metal titanium in the embodiment, the focusing lens is a plano-convex lens with a focal length of 100mm in the embodiment, the diameter of a beam before the beam reaches the focusing lens is 4mm, the diameter of a beam waist is about 38 mu m after focusing, the total energy of the femtosecond laser double-pulse sequence is 0.65 mu J, the energy density after focusing is 0.117J/cm ^2, and the total energy is smaller than the ablation threshold value of the metal titanium material, namely 0.119J/cm ^ 2. The optical shutter 12 is opened, and the three-dimensional translation stage 18 is controlled to move at the speed of 350 μm/s, so that the metal nano-mesh structure shown in fig. 2 can be prepared.
As shown in fig. 2, which is an SEM image of a metal nano-network structure processed on the surface of a metal titanium material according to an example of the present invention, (a) is a view at a low magnification, and (b) is an enlarged view at a high magnification. The diameter of the nanonet is measured mostly between 50nm and 100 nm.
As shown in fig. 1, the apparatus for implementing the method is as follows:
the second laser 1 used in the invention is a laser produced by American spectral Physics (Spectrum Physics) company, the central wavelength of the laser is 800nm, the pulse width is 50fs, the maximum repetition frequency is 1000Hz, the maximum energy of a single side is 3mJ, the light intensity distribution is Gaussian, and the laser at the outlet is horizontally polarized.
The metal material used in this embodiment is metal titanium, and the present invention is not limited to the metal titanium material, and other metal materials may be used.
The energy of the two sub-pulses of the double pulse is adjusted by using the first attenuation sheet 4 and the second attenuation sheet 8, and the energy of the two sub-pulses is required to be equal. In the embodiment, the total energy density of the used femtosecond laser double-pulse sequence is 0.117J/cm ^2, the total energy density required to be used is strictly less than the ablation threshold of the metal material and cannot be too small, and when the total energy density is greater than or equal to the ablation threshold of the metal material, other sub-wavelength structures can be generated, so that the prepared metal nano-mesh structure is damaged; when the total energy density is far smaller than the ablation threshold of the metal material, the micro-nano structure cannot be obtained on the surface of the metal material. The present invention is not limited to the above energy density, and it is only necessary that the total energy density is in the range of 0.9 to 0.99 times the ablation threshold of the metal material to be processed.
In this embodiment, the focusing lens is a plano-convex lens with a focal length of 100mm, and is used for focusing the femtosecond laser double-pulse sequence beam on the surface of the metal material to be processed. The invention is not limited to the focusing lens being a plano-convex lens with a focal length of 100mm, and other focal lengths of convex lenses or processed objective lenses are possible.
The present invention uses a three-dimensional translation stage 18 to control the movement of the metallic material to be processed. In this example, a plano-convex lens having a focal length of 100mm was used, and the moving speed of the metal material was 350 μm/s. The invention is not limited to the movement speed, and only needs to process the metal nano-net on the surface of the material under other suitable processing parameters, and the movement speed of the metal material to be processed can be within the range of 200-.
Example 2:
the other steps are the same as example 1, except that: and (2) the delay time of the two sub-pulses in the step (1) is 5 ps.
The metal nano-network structure shown in figure 3 is prepared.
Fig. 3 is an SEM image of a metal nano-network processed on the surface of a metal titanium material according to an embodiment of the present invention under a high magnification. The diameter of the nanonet is measured mostly between 60nm and 150 nm.
Example 3:
the other steps are the same as example 1, except that: and (2) the delay time of the two sub-pulses in the step (1) is 6 ps.
The metal nano-network structure shown in fig. 4 is prepared.
Fig. 4 is an SEM image of a metal nano-network processed on the surface of a metal titanium material according to an embodiment of the present invention at a high magnification. The diameter of the nanonet is measured mostly between 80nm and 150 nm.
Example 4:
the other steps are the same as example 1, except that: and (2) the delay time of the two sub-pulses in the step (1) is 8 ps.
The metal nano-network structure shown in fig. 5 is prepared.
Fig. 5 is an SEM image of a metal nano-network processed on the surface of a metal titanium material according to an embodiment of the present invention under a high magnification. The nano-mesh structure produced at this time is not the nano-mesh with relatively uniform length and width as in examples 1-3, but the nano-mesh is in a strip shape. The nanonet holes were measured to have a major minor diameter between 100nm and 200nm and a major diameter between 300nm and 450 nm.
Example 5:
the other steps are the same as example 1, except that: and (2) the delay time of the two sub-pulses in the step (1) is 9 ps. The metal nano-network structure shown in fig. 6 is prepared.
Fig. 6 is an SEM image of a metal nano-network processed on the surface of a metal titanium material according to an embodiment of the present invention under a high magnification. The nano-mesh structure produced in this case is not the nano-mesh with relatively uniform length and width as in examples 1-3, but is a strip-shaped nano-mesh, and the short diameter of the nano-mesh is mostly between 100nm and 200nm, and the long diameter of the nano-mesh is mostly between 300nm and 500 nm.
Example 6:
the other steps are the same as example 1, except that: and (2) the delay time of the two sub-pulses in the step (1) is 10 ps. The metal nanostructure as shown in fig. 7 was prepared.
Fig. 7 is an SEM image of a metal nano-network processed on the surface of a metal titanium material according to an embodiment of the present invention at a high magnification. The nano-mesh structure produced at this time is not the nano-mesh with relatively uniform length and width in examples 1-3, nor the nano-mesh with long strip shape in examples 4-5, and the nano-structure produced at this time is mainly a nano-stripe structure in a single direction, and is not a nano-mesh structure, so that the nano-mesh structure cannot be obtained under the pulse delay in this example.
The above detailed description is intended to illustrate the objects, aspects and advantages of the present invention, and it should be understood that the above detailed description is only exemplary of the present invention and is not intended to limit the scope of the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (4)
1. A preparation method of a metal nano-network structure based on electronic dynamic regulation is characterized by comprising the following steps: the method comprises the following steps:
the method comprises the following steps: converting the femtosecond laser single pulse into a femtosecond laser double-pulse sequence with mutually vertical polarization directions through a combined light path of a Michelson interferometer and a quarter wave plate, adjusting the energy of two sub-pulses of the femtosecond laser double-pulse to be equal, and adjusting the total energy density of the double-pulse to be in the range of 0.9-0.99 times of the ablation threshold of the metal material to be processed; then adjusting one arm of a Michelson interferometer light path to enable the pulse delay of the femtosecond laser double pulses to be within the range of 4ps-9 ps;
step two: and (3) vertically focusing the femtosecond laser double-pulse sequence obtained in the step one to the surface of the metal material to be processed through an optical lens, and controlling the metal material to be processed to move at a set moving speed, so that a metal nano-mesh structure can be obtained on the metal surface.
2. The method for preparing a metal nano-network structure based on electronic dynamic regulation as claimed in claim 1, wherein: in the process of generating the femtosecond laser double-pulse sequence with mutually vertical polarization directions, the included angle between the optical axis of the quarter-wave plate and the polarization direction of the laser is 45 degrees.
3. The method for preparing a metal nano-network structure based on electronic dynamic regulation as claimed in claim 1, wherein: in the second step, when the focusing lens is a plano-convex lens with a focal length of 100mm, the laser repetition frequency is 1000Hz, and the moving speed of the metal material to be processed is 200-500 μm/s.
4. Apparatus for implementing the method according to any of claims 1 to 4, characterized in that: the method comprises the following steps: the method comprises the steps of generating a femtosecond laser double-pulse sequence with mutually vertical polarization directions and pulse delay within the range of 4ps-10ps after a femtosecond laser, a first reflector, a second reflector, a first attenuation sheet, a third reflector, a one-dimensional translation table, a beam splitter, a second attenuation sheet, a quarter wave plate, a fourth reflector, a fifth reflector, an optical shutter, a sixth reflector, a seventh reflector and an eighth reflector, and scanning and processing the femtosecond laser double-pulse sequence on the surface of a metal material to be processed after the femtosecond laser, the first reflector, the second reflector, the fourth reflector, the fifth reflector, the optical shutter, the sixth reflector, the seventh reflector and the eighth reflector are focused by lenses to prepare the metal nano-mesh.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110619429.9A CN113210873B (en) | 2021-06-03 | 2021-06-03 | Preparation method of metal nano-net based on electronic dynamic regulation and control |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110619429.9A CN113210873B (en) | 2021-06-03 | 2021-06-03 | Preparation method of metal nano-net based on electronic dynamic regulation and control |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113210873A true CN113210873A (en) | 2021-08-06 |
| CN113210873B CN113210873B (en) | 2022-04-05 |
Family
ID=77082521
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110619429.9A Active CN113210873B (en) | 2021-06-03 | 2021-06-03 | Preparation method of metal nano-net based on electronic dynamic regulation and control |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN113210873B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114161004A (en) * | 2021-11-25 | 2022-03-11 | 北京理工大学 | Method for precisely machining turbine blade air film hole |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1859894A1 (en) * | 2005-03-02 | 2007-11-28 | Sumitomo Electric Industries, Ltd. | Material treatment method by laser ablation and material treated by the treatment method |
| US20090191489A1 (en) * | 1998-03-02 | 2009-07-30 | Torbjorn Sandstrom | Pattern generator |
| CN103934576A (en) * | 2014-04-15 | 2014-07-23 | 北京理工大学 | Method for inducting two-dimensional periodic structure on surface of material through femtosecond laser |
| CN104668778A (en) * | 2015-01-27 | 2015-06-03 | 吉林大学 | Hot-working die surface multipoint combination type bionic machining device and strengthening repair method |
| CN105108342A (en) * | 2015-09-18 | 2015-12-02 | 南开大学 | Method for preparing two-dimensional metallic photonic crystal structure in large area through femtosecond laser direct writing |
| US20160158886A1 (en) * | 2013-07-22 | 2016-06-09 | Kitty KUMAR | Interferometric laser processing |
| CN106735925A (en) * | 2017-03-21 | 2017-05-31 | 商丘师范学院 | A kind of femtosecond laser direct write preparation method of two-dimentional sub-micron butterfly metal micro structure |
| CN109014566A (en) * | 2018-10-16 | 2018-12-18 | 北京理工大学 | A kind of method of simple control laser induced surface periodic structure arragement direction |
| CN111168233A (en) * | 2020-02-14 | 2020-05-19 | 南京理工大学 | Method for inducing periodic structure on surface of optical glass by picosecond laser |
| CN111250874A (en) * | 2020-02-14 | 2020-06-09 | 南京理工大学 | Method for inducing periodic structure on surface of semiconductor material by multi-pulse picosecond laser |
-
2021
- 2021-06-03 CN CN202110619429.9A patent/CN113210873B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20090191489A1 (en) * | 1998-03-02 | 2009-07-30 | Torbjorn Sandstrom | Pattern generator |
| EP1859894A1 (en) * | 2005-03-02 | 2007-11-28 | Sumitomo Electric Industries, Ltd. | Material treatment method by laser ablation and material treated by the treatment method |
| US20160158886A1 (en) * | 2013-07-22 | 2016-06-09 | Kitty KUMAR | Interferometric laser processing |
| CN103934576A (en) * | 2014-04-15 | 2014-07-23 | 北京理工大学 | Method for inducting two-dimensional periodic structure on surface of material through femtosecond laser |
| CN104668778A (en) * | 2015-01-27 | 2015-06-03 | 吉林大学 | Hot-working die surface multipoint combination type bionic machining device and strengthening repair method |
| CN105108342A (en) * | 2015-09-18 | 2015-12-02 | 南开大学 | Method for preparing two-dimensional metallic photonic crystal structure in large area through femtosecond laser direct writing |
| CN106735925A (en) * | 2017-03-21 | 2017-05-31 | 商丘师范学院 | A kind of femtosecond laser direct write preparation method of two-dimentional sub-micron butterfly metal micro structure |
| CN109014566A (en) * | 2018-10-16 | 2018-12-18 | 北京理工大学 | A kind of method of simple control laser induced surface periodic structure arragement direction |
| CN111168233A (en) * | 2020-02-14 | 2020-05-19 | 南京理工大学 | Method for inducing periodic structure on surface of optical glass by picosecond laser |
| CN111250874A (en) * | 2020-02-14 | 2020-06-09 | 南京理工大学 | Method for inducing periodic structure on surface of semiconductor material by multi-pulse picosecond laser |
Non-Patent Citations (3)
| Title |
|---|
| XUESONG SHI: "《Temporal femtosecond pulse shaping dependence of laser-induced periodic surface structures in fused silica》", 《JOURNAL OF APPLIED PHYSICS》 * |
| 刘树青等: "飞秒激光诱导周期性表面结构及其应用", 《科学通报》 * |
| 崔静: "《飞秒激光诱导TC4 表面微观组织研究》", 《激光与红外》 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114161004A (en) * | 2021-11-25 | 2022-03-11 | 北京理工大学 | Method for precisely machining turbine blade air film hole |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113210873B (en) | 2022-04-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108015410B (en) | Amorphous Ge based on femtosecond laser inductionmSbnTekMethod for preparing crystalline nano structure by thin film | |
| CN108568594B (en) | Method based on class plasmonic lenses effect regulation crystal silicon external waviness structure | |
| CN108213718B (en) | A kind of femtosecond laser regulation GemSbnTekCrystalline state nanostructure geometric shape method | |
| CN106905966B (en) | A method of single layer molybdenum disulfide quantum dot is prepared based on dynamic control | |
| CN105108342B (en) | Method for preparing two-dimensional metallic photonic crystal structure in large area through femtosecond laser direct writing | |
| CN109434289B (en) | Femtosecond laser manufacturing method for tunable phase-change nano-structure super surface | |
| CN105182523A (en) | STED super-resolution microscope based on first-order Bessel beams and adjustment method thereof | |
| CN106735925B (en) | A kind of femtosecond laser direct write preparation method of two dimension sub-micron butterfly metal micro structure | |
| CN103878496A (en) | Method for efficiently processing high-quality micro hole with large ratio of pit-depth to pit-diameter through femtosecond laser | |
| CN106216833B (en) | Method based on dynamic control laser machine semiconductor twin-stage surface texture | |
| CN103862171A (en) | Method for preparing two-dimensional periodic metal particle array structure through dual-wavelength femtosecond lasers | |
| CN107790887A (en) | The femtosecond laser direct write preparation method of two-dimentional rhombus cycle micro-nano metal structure | |
| CN109702323B (en) | Depth continuously adjustable near 4 pi solid angle femtosecond laser direct writing processing method and application | |
| CN110640305A (en) | Super-hydrophobic surface preparation system based on femtosecond laser space-time shaping | |
| CN107971628A (en) | Method based on femtosecond laser dynamic control customization copper surface periodic structure | |
| CN113210873B (en) | Preparation method of metal nano-net based on electronic dynamic regulation and control | |
| Ahsan et al. | Formation mechanism of nanostructures in soda–lime glass using femtosecond laser | |
| CN110014224A (en) | The femtosecond laser high efficient production device of infrared anti-reflection micro-structure | |
| Koch et al. | Direct-write subwavelength structuring with femtosecond laser pulses | |
| CN111474616A (en) | Method for preparing sub-wavelength metal grating by wide-beam femtosecond laser double pulses | |
| CN110421265B (en) | Method and device for processing sub-wavelength periodic structures with different shapes by femtosecond laser | |
| CN109822214B (en) | Method for regulating and controlling periodic structure of surface of zinc oxide film based on grating auxiliary enhancement | |
| Zayarny et al. | Nonlinear absorption mechanisms during femtosecond laser surface ablation of silica glass | |
| CN112355483A (en) | Method for preparing submicron concentric rings on silicon surface by femtosecond laser | |
| Heins et al. | Shock-induced concentric rings in femtosecond laser ablation of glass |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |