CN107790887A - The femtosecond laser direct write preparation method of two-dimentional rhombus cycle micro-nano metal structure - Google Patents
The femtosecond laser direct write preparation method of two-dimentional rhombus cycle micro-nano metal structure Download PDFInfo
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- CN107790887A CN107790887A CN201711133535.6A CN201711133535A CN107790887A CN 107790887 A CN107790887 A CN 107790887A CN 201711133535 A CN201711133535 A CN 201711133535A CN 107790887 A CN107790887 A CN 107790887A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
- B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
- B23K26/355—Texturing
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Abstract
The invention discloses a kind of femtosecond laser direct write preparation method of two-dimentional rhombus cycle micro-nano metal structure, technical scheme comprises the following steps：The first step, the polishing and fixation of metal sample target；Second step, time delay, the dipulse femtosecond laser of square crossing polarization can be changed by obtaining；3rd step, the focal line of femtosecond laser；4th step, the regulation of metal sample target locus；5th step, focal line of the dipulse femtosecond laser through plano-convex post lens；6th step, the adjustment of metal sample target material surface；7th step, the preparation of two-dimentional rhombus cycle micro-nano metal structure；The present invention is mutually perpendicular to by the micro-nano processing platform generation two-beam polarization direction of femtosecond laser based on Michelson interference system building using near-infrared femto-second laser pulse, has time delay adjustable linear polarization femtosecond laser, this two-beam spatially collinearly transmits, wavelength is identical with repetition rate centered on its characteristic parameter, and preparation forms two-dimentional rhombus cycle micro-nano metal structure.
Description
Technical field
The present invention relates to femtosecond laser in a kind of two-dimentional rhombus cycle micro-nano metal structure of metal material surface direct write
Femtosecond laser direct write preparation method and processing unit (plant).The micro-nano processing platform built based on Michelson Interference Principle is tested,
Spatially conllinear transmission is formed by single beam femtosecond laser beam splitting, postpones variable two-beam femto-second laser pulse, two-beam on the time
Femtosecond laser is controlled the translational speed of target surfaces, obtained in material surface optical scanning by quartzy plano-convex post lens line focus
To a kind of new two-dimentional rhombus cycle micro-nano metal structure.The new micro nano structure, future is in novel metal nanometer
The design of photonic device, prepare etc. there is important potential application.
Background technology
Traditional micro nano structure technology mainly has nanometer embossing, electron beam lithography art, ion beam etching technology, light
Lithography etc., these technologies have penetrated into multiple departments of the national economy such as medical treatment, biology, the energy, aerospace, industry, national defence.
In recent years, greatly developing with laser technology, the birth of especially ultrafast femtosecond laser, level the earth have promoted laser in material
The development and application of surface direct write surface micronano structure preparation field.The preparation of micro nano structure is in microelectronics industry, advanced
The accuracy of plant equipment and feature are improved in the research of the high-tech areas such as machine-building important application, design and system
The research of the device of standby new sub-micron-size structures has become the research topic of researcher concern, improves Asia
The efficiency of micrometer structure technology of preparing is also the problem that research worker faces.【Patterned growth of
vertically aligned ZnO nanowire arrays on inorganic substrates at low
temperature without catalyst,J.Am.Chem.Soc.,2008,130(45):14958-14959；
Fabrication of two-and three-dimensional photonic crystals of titania with
submicrometer resolution by deep x-ray lithography,Journal of vacuum science&
technology B,2005,23(3):934-939；Two-photon polymerization initiators for
three-dimensional optical data storage and microfabrication,Nature,1999,31
(6722):52；Formation of free-standing micropyramidal colloidal crystals grown
on silicon substrate,Applied Physics Letters,2003,82(24):4283-4285.】.Traditional micro-nano
The preparation method of rice structure is typically necessary numerous and diverse operation sequence, requires harsher to material selection, and its regulation and control is micro-
The selective power of nanostructured morphologies feature is poor.For traditional preparation method, femtosecond laser can by lens moment
The femtosecond laser of high energy-flux density is formed to be focused in tiny area, at focusing.The ultrahigh peak power and ultrashort
The process that the femtosecond laser of pulsewidth prepares micro nano structure in material surface etching can be completed with a step, it is not necessary to numerous and diverse process and
Precision equipment (such as：Vacuum system, mask plate, mould and exposure).In terms of the processing and preparation of micro nano structure relative to
Its controllability of traditional processing aspect is strong, flexible, high efficiency, low cost simple to operate, can realize laser energy and material in moment
Surface interacts, so as to reach not damaged, high accuracy, the effect of hyperfine cold working.These advantages cause research work
The extensive concern of personnel, this direction and the forward position progressively developed into present laser, photoelectron and field of engineering technology are ground
Study carefully direction.At present, researcher is polytype in metal, semiconductor, polymer and transparent dielectric etc. using femtosecond laser
Material surface is successfully realized the preparation of micron, sub-micron even on nanoscale, and to the functional characteristic of micro nano structure
Furtherd investigate.
Nineteen sixty-five Birnbaum has found that laser can produce the grating perpendicular with incident light polarization direction in target material surface
Shape striated structure, and the cycle of striped be typically about the half of lambda1-wavelength, since then since researcher find that laser gathers successively
Focal plane nearby asks the light field of polarization state Two dimensional Distribution in the presence of sky, if laser energy density reaches material loss threshold value, in material
It can be induced in material surface and the internal zone of action and produce periodicity sub-wavelength magnitude micro-nano surface structure.
【Reflectivity in femtosecond-laser-induced structural changes of diamond-like
carbon film,Applied Physics A,2005,80(1):17-21；Continuous modulations of
femtosecond laser-induced periodic surface structures and scanned line-widths
on silicon by polarization changes,Optics Express,2013,21(13)；Ultrafast
femtosecond-laser-induced fiber Bragg gratings in air-hole microstructured
fibers for high-temperature pressure sensing,Optics letters,2010,35(9):1443-
5；Tuning the structural properties of femtosecond-laser-induced nanogratings,
Applied Physics A,2010,100(1):1-6.】.The research of mechanism produced by target material surface induces micro nano structure
In, for cycle and the phenomenon of lambda1-wavelength relatively of micro nano structure, several researchers have proposed classical scattering ripple
Theory, for micro-nano cycle striated structure close to the phenomenon of lambda1-wavelength half, several researchers have proposed second harmonic
Theory, the researcher also having are based on laser and propose COULOMB EXPLOSION, surface wave theory with surface wave interference.【Periodic
surface structures frozen into CO2laser-melted quartz,Appl.Phys.A,1982,29:9~
18；Formation of subwavelength periodic structures on tungsten induced by
ultrashort laser pulses,Opt.Lett.,2007,32(13):1932~1935；Origin of laser-
induced near-subwavelength ripples:interference between surface plasmons and
incident laser,ACS Nano,2009,3(12):4062~4070.】.Wherein classical scattering ripple theory and second harmonic
Theory because can not comprehensively, synthetically explain most of micro nano structure Forming Mechanisms in theory, and incident light and surface
Wave interference is theoretical because most of experimental phenomenas can be explained preferably, and is received and approved extensively by researcher.According to
This is theoretical, and when femtosecond laser incides processed sample surface, material surface electronics is excited by incident light, can be changed with moment
Its surface properties, and the incident interference of light, and then formed there is space periodic distribution, the transient state refractive-index grating of Local Characteristic,
Material surface etching produces the parallel groove of period profile, and the part that is not etched between groove forms the striped with period profile
Structure.If changing the energy of incident light, polarization, number of beams, femtosecond laser can be more complicated with induced synthesis in material surface
Two-dimensional structure.Further research confirms that these surface micronano structures can effectively improve the structure of material
Color, heat radiation, Water conductance【Super-hydrophobic PDMS surface with ultra-low adhesive
Force, Macromolecular Rapid Communications, 2005,26 (22):1805-1809；Laser turns
silicon superwicking,Optics Express,2010,18(7):6455-6460；Ultra-broadband
enhanced absorption of metal surfaces structured by femtosecond laser pulses,
Optics Express,2008,16(15):11259-11265；Making human enamel and dentin
surfaces superwetting for enhanced adhesion,Applied Physics Letters,2011,99
(19):193703.】.Future is in photoswitch, wave filter, all-optical integrated circuit, low threshold laser, the pole of High Efficiency Luminescence photoelectricity two
Pipe etc. has obtained extensive research and application.
The advantage of micro nano structure own characteristic is applied and sought it in material function and produces the basis of physical mechanism
Many researchers have been attracted to participate in the preparation research of novel micro nanometer rice structure in terms of Journal of Sex Research.It is engaged in the section of micro nano structure research
The characteristic that worker initially mainly have studied single beam laser induction micro nano structure is ground, it is found that micro nano structure can not only change
The schemochrome of material, and heat radiation and the viscosity property of material surface can be improved.Possess more photon frequency forbidden bands and
The two-dimentional micro nano structure of new physical characteristic, can with what is regulated and controled to the propagation properties in particular range of wavelengths
Can property.For example, the field such as the preparation of special optical element, the photoelectric properties of electronic component, information transfer has potential application
Space.【Colorizing metals with femtosecond laser pulses,Applied Physics
Letters,2008,92(4):409；Large electromagnetic stop bands in metallodielectric
photonic crystals,Appl.Phys.Lett.1995,67,2138–2140；Enabling high-temperature
nanophotonics for energy applications,2012,PNAS,109,2280-2285,Embedded
cavities and waveguides in three-dimensional silicon photonic crystals,Nature
Photon,2008,2,52–56.】。
The content of the invention
For the above situation, to overcome the defect of prior art, the purpose of the present invention is just to provide a kind of two-dimentional rhombus week
The femtosecond laser direct write preparation method of phase micro-nano metal structure, can effectively solve the problem that following technical problem：(1) how using having
Fixed delay, collinearly transmission is quick in metal surface by quartzy plano-convex post lens for the dipulse femtosecond laser of square crossing polarization
Preparation forms two-dimentional rhombus cycle micro-nano metal structure, and thinking, the technique for grasping wherein micro-nano system of processing design make
Method, realization device key issue；(2) how by adjusting the polarization state of two pulsed femtosecond laser, collinearly transmitting, conllinear poly-
Jiao, the sweep speed of energy proportioning, time delay characteristic and three-dimensional mobile translation stage between two-beam femtosecond laser are realized pair
Cycle of metal surface, shape characteristic micro nano structure etc., which carry out Effective Regulation, to be realized and efficiently prepares.
The technical scheme that the present invention solves is：
A kind of femtosecond laser direct write preparation method of two-dimentional rhombus cycle micro-nano metal structure, it is characterised in that including
Following steps：
The first step, the polishing and fixation of metal sample target
Metal sample target material surface is handled by mechanical polishing first with sand paper, then by the metal sample target
Material is placed in absolute alcohol, obtains the metal sample target of clean processing by being cleaned by ultrasonic, the metal sample target is fixed
On the luggage carrier of three-dimensional mobile accurate translation stage (19), three-dimensional mobile accurate translation stage is controlled to make metal sample target by computer
Material is accurate mobile on space three-dimensional direction；
Second step, time delay, the dipulse femtosecond laser of square crossing polarization can be changed by obtaining
The micro-nano processing platform of femtosecond laser based on Michelson interference system building, wherein a light path make femtosecond
Laser light half-wave plate produces the polarization direction linear polarization femtosecond laser perpendicular with former incident femto-second laser polarized direction, so
Two-way femtosecond laser can be generated with psec variable time delay, polarization square crossing, collinearly transmitted finally through closing beam piece
Dipulse femtosecond laser；
3rd step, the focal line of femtosecond laser
The dipulse femtosecond laser that second step obtains is existed by same quartzy piano convex cylindrical lens line focus, vertical irradiation
Metal sample target material surface, form Laser Focusing line；
4th step, the regulation of metal sample target locus
Three-dimensional mobile accurate translation stage is controlled in the locus in space three-dimensional direction by computer, and then adjusts metal-like
The relative position of product target and Laser Focusing line, makes the surface of metal sample target can gather all the time with laser in translation motion
The direction keeping parallelism of focal line；
5th step, focal line of the dipulse femtosecond laser through plano-convex post lens
The relative position of three-dimensional mobile accurate translation stage opposing metallic sample target is controlled by computer, and then can be adjusted
Femtosecond laser ablation at metal sample target material surface diverse location, sequentially forms many places ablation line, according to the size of ablation line
Size and then the position for determining dipulse femtosecond laser focal line；
6th step, the adjustment of metal sample target material surface
The objective table of three-dimensional mobile accurate translation stage is adjusted by computer, is flown along inverse direction of beam propagation adjustment dipulse
Second Laser Focusing line and the relative position of metal sample target, make dipulse femtosecond along the direction of propagation of dipulse femtosecond laser
The position of Laser Focusing line is in the micrometer range of front 0~200 of metal sample target material surface；
7th step, the preparation of two-dimentional rhombus cycle micro-nano metal structure
Collinearly transmitted in guarantee dipulse femtosecond laser, dual-beam can be through quartzy piano convex cylindrical lens focusing illumination to gold
In the case of belonging to sample target material surface formation dipulse femtosecond laser focal line, the three-dimensional mobile accurate translation stage of control first (moves
Dynamic precision is 1 micron), so as to control the relative distance between metal sample target material surface and dipulse femtosecond laser focal line；
Simultaneously by control the sweep speed of three-dimensional mobile accurate translation stage, incident femtosecond laser luminous power, the polarization state of femtosecond laser,
The focal line of femtosecond laser and the distance of metal sample target material surface, can prepare two-dimentional rhombus in metal sample target material surface
Cycle micro-nano metal structure.
The micro-nano processing platform of the femtosecond laser based on Michelson interference system building described in second step includes femtosecond
Laser, semi-transparent semi-reflecting lens, the speculum for changing laser propagation direction, half-wave plate, conjunction beam piece, one-dimensional precise movement are flat
Moving stage, attenuator and ccd spectrometers, each femto-second laser pulse of femto-second laser output pass through semi-transparent semi-reflecting lens beam splitting
For two dipulse femtosecond lasers with phase co-wavelength；One of path-splitting can change polarization direction by half-wave plate,
The polarization direction adjusted in the light path is polarized by horizontal direction polarization for vertical direction, multiple reflections in two path-splittings
Mirror can change the direction of propagation of light, by adjusting speculum, ensure two-beam linear polarization femtosecond laser spatially conllinear defeated
Go out, and finally converge at conjunction beam piece, realize the conllinear transmission of linear polarization femtosecond laser and angular polarization femtosecond laser, pass through shifting
Dynamic one-dimensional precise moves translation stage to control reflector position, to change the effective light path of dipulse femtosecond laser in the optical path
Difference, and then the time delay between dual-beam can be changed；The different capacity proportioning of two path-splittings is by adjusting attenuator come real
It is existing.
Described metal sample target is the metal materials such as tungsten, molybdenum, iron or titanium.
Described dipulse femtosecond laser is linear polarization femtosecond laser, and polarization direction is mutually perpendicular to, the arteries and veins of laser pulse
A width of 50 femtosecond, centre wavelength are 800 nanometers.
The sweep speed of three-dimensional precise movement translation stage is 0.02mm/s-0.1mm/s in 7th step.
It is the orthogonal linear polarization femtosecond laser in two-beam polarization direction from the femtosecond laser that is emitted in beam piece is closed, this two beam
Femtosecond laser spatially collinearly transmits, and through quartzy piano convex cylindrical lens line focus, is prepared in metal material surface induction micro-
The dipulse femtosecond laser postponed with picosecond time can be carried out line focus by structure, the quartzy piano convex cylindrical lens.
Described dipulse femtosecond laser time delay is less than 200 psecs.
The length of side of described two-dimentional rhombus cycle micro-nano metal structure is 650 nanometers, and the cycle is 590 nanometers.
The micro-nano cycle metal structure of described two-dimentional rhombus is in the range of Gold Films Irradiated by Femtosecond Laser, by adjusting three-dimensional essence
The sweep speed of close mobile translation stage, the caused micro nano structure with rhombus shape characteristic of induction in metal surface, therefore,
It is called the micro-nano metal structure of two-dimentional rhombus.
Beneficial effect of the present invention
(1) it is micro-nano by the femtosecond laser based on Michelson interference system building using near-infrared femto-second laser pulse
Processing platform produces two-beam polarization direction and is mutually perpendicular to, has time delay adjustable linear polarization femtosecond laser, and this two-beam exists
Spatially conllinear to transmit, wavelength is identical with repetition rate centered on its characteristic parameter, and it is micro-nano that preparation forms the two-dimentional rhombus cycle
Metal structure.The micro-nano processing platform that the present invention designs is easy, efficiency high, and cost is low.
(2) power ratio of two-beam femtosecond laser caused by the micro-nano processing platform of femtosecond laser, polarization state are utilized
Regulation and control and the regulation of variable delay time can simple adjustment, the designs of these parameters can use vitreous silica object lens to have
The linear polarization dipulse for having picosecond time to postpone carries out line focus, and single step realizes two-dimentional rhombus cycle micro-nano metal structure
Effective Regulation.
(3) present invention forms two same chromatic polarizations by the ingenious light-splitting method using the micro-nano processing platform of femtosecond laser
Square crossing, the double femto-second laser pulses of the adjustable linear polarization of time delay, it is convenient fast using piano convex cylindrical lens line focus mode
The two-dimentional rhombus cycle micro-nano metal structure of stripe direction bending fastly is prepared in metal surface direct write.With traditional two dimension
Periodic structure manufacturing process compares, and technical method proposed by the present invention is relatively easy, quick and easy, operability is high, technique
Simply, cost is low, efficiency high, overcomes numerous and diverse process caused by conventional light path design and fabrication technical method.
Brief description of the drawings
Fig. 1 is that the present invention is straight in metal surface with the conllinear linear polarization dipulse femtosecond laser for transmitting and having time delay
Write the index path for preparing two-dimentional rhombus cycle micro-nano metal structure.
The explanation of wherein optical element is respectively：1 represent femto-second laser, 20 represent centre wavelengths be 800 nanometers fly
Second laser, 2 represent semi-transparent semi-reflecting lens, and 3,4,5,8,9,10,15 represent speculum, and 7 represent half-wave plates, and 11 represent one-dimensional essences
Close mobile translation stage, 13 expression conjunction beam pieces, 14 expression plano-convex post lens (quartzy plano-convex post lens), 17 expression ccd spectrometers, 18
Metal sample target to be processed is represented, 19 represent three-dimensional mobile accurate translation stage, and 6,12,16 represent attenuator.
Fig. 2 is the large-area two-dimensional rhombus cycle micro-nano metal structure obtained in tungsten specimen material sample surfaces
Scanning electron microscopy picture.
Fig. 3 positions metal sample target uses tungsten specimen material, on the basis of light path in embodiment 1, adjusts double light
The laser power on road, it is respectively E to make the laser power after the femtosecond laser ECDC beam piece outgoing of double light pathh=0.9mJ, Ev=
0.13mJ, 200 microns away from object focal point of tungsten sample target surface is 10 psecs in time delay, translation stage scan velocity V=
The micro-nano metal structure scanning electron microscopy of two-dimentional rhombus that 0.04mm/s is obtained.
On the basis of Fig. 4 is light path in embodiment 1, make the femtosecond laser ECDC beam piece of double light path be emitted after laser work(
Rate is respectively Eh=0.095mJ, Ev=0.114mJ, 100 microns away from object focal point of tungsten sample target surface, it is 60 in time delay
Psec, translation stage scan velocity V=0.04mm/s, the micro-nano metal structure of rhombus two dimension is obtained on tungsten specimen material surface
Scanning electron microscopy.
Embodiment
The embodiment of the present invention is described in further detail with accompanying drawing with reference to embodiments.
Embodiment 1
As shown in figure 1, the femtosecond laser 20 that centre wavelength is 800 nanometers, pulsewidth is 50 femtoseconds is defeated from laser amplifier 1
Go out, be emitted femto-second laser polarized direction in the horizontal direction, be linearly polarized laser.By semi-transparent semi-reflecting lens 2, the femtosecond of single beam swashs
Light is converted into the orthogonal two-beam femtosecond laser in the direction of propagation, two-beam femtosecond laser through speculum 3,4,5,8,9,11 change
The direction of propagation, the final ECDC beam piece 13 of double beams laser merge, and adjust speculum, make the dual-beam after conjunction beam in the same direction along straight-line transmitting
Broadcast.Insert half-wave plate 7 in the optical path afterwards, the polarization direction in the light path is converted into vertical direction polarization by horizontal polarization,
Make linearly polarized light and the original polarization direction of outgoing perpendicular.Each incident pulse will be converted to after bundling device outgoing
Centered on wavelength is identical, the orthogonal dipulse femtosecond laser in polarization direction, their spatially collinearly transmission and through same
Individual quartzy plano-convex post lens 14 realize that light beam focuses on.By controlling three-dimensional mobile accurate translation stage 19, by metal-like to be processed
The surface of product target moves to 0~200 micron of distance after laser spot, adjusts sweep speed of the femtosecond laser in material surface afterwards
With the energy of two-beam, the quick preparation of two-dimentional rhombus cycle sub-micron metal micro-structural is finally realized in sample surfaces.
Embodiment 2
Using tungsten specimen material, on the basis of light path in embodiment 1, using the attenuator 6 and 12 of neutrality, regulation
The laser power of double light path, it is respectively E to make the laser power after the femtosecond laser ECDC beam piece outgoing of double light pathh=87mJ, Ev=
0.94mJ, 200 microns away from object focal point of tungsten sample target surface is 4 psecs in time delay, translation stage scan velocity V=
0.03mm/s, it is to put that two-dimensional and periodic array distribution rhombus knot Fig. 2 in wide area is obtained on tungsten specimen material surface
Big 5000 times of electron scanning micrograph.
Embodiment 3
Metal sample target uses tungsten specimen material, on the basis of light path in embodiment 1, using the decay of neutrality
Piece 6 and 12, adjust the laser power of double light path, make double light path femtosecond laser ECDC beam piece be emitted after laser power be respectively
Eh=0.9mJ, Ev=0.13mJ, 200 microns away from object focal point of tungsten sample target surface is 10 psecs in time delay, translation stage
Scan velocity V=0.04mm/s, it is 650 nanometers that the diamond structure length of side is obtained on tungsten specimen material surface, and the cycle is received for 590
The two-dimentional micro-nano metal structure scanning electron microscopy of rice, as shown in Figure 3.
Embodiment 4
Metal sample target uses tungsten specimen material, on the basis of light path in embodiment 1, using the decay of neutrality
Piece 6 and 12, adjust the laser power of double light path, make double light path femtosecond laser ECDC beam piece be emitted after laser power be respectively
Eh=0.095mJ, Ev=0.114mJ, 100 microns away from object focal point of tungsten sample target surface, it is 60 psecs in time delay, puts down
Moving stage scan velocity V=0.04mm/s, the micro-nano metal structure scanning electricity of rhombus two dimension is obtained on tungsten specimen material surface
Sub- micrograph, as shown in Figure 4.
Claims (8)
- A kind of 1. femtosecond laser direct write preparation method of two-dimentional rhombus cycle micro-nano metal structure, it is characterised in that including with Lower step：The first step, the polishing and fixation of metal sample targetMetal sample target material surface is handled by mechanical polishing first with sand paper, then put the metal sample target In in absolute alcohol, the metal sample target of clean processing is obtained by being cleaned by ultrasonic, the metal sample target is fixed on three On the luggage carrier of the mobile accurate translation stage (19) of dimension, three-dimensional mobile accurate translation stage is controlled metal sample target is existed by computer It is accurate mobile on space three-dimensional direction；Second step, time delay, the dipulse femtosecond laser of square crossing polarization can be changed by obtainingThe micro-nano processing platform of femtosecond laser based on Michelson interference system building, wherein a light path make femtosecond laser The polarization direction linear polarization femtosecond laser perpendicular with former incident femto-second laser polarized direction, such two-way are produced through half-wave plate Femtosecond laser can be generated with psec variable time delay, polarization square crossing, the double arteries and veins collinearly transmitted finally through beam piece is closed Rush femtosecond laser；3rd step, the focal line of femtosecond laserThe dipulse femtosecond laser that second step is obtained is by same quartzy piano convex cylindrical lens line focus, and vertical irradiation is in metal Sample target material surface, form Laser Focusing line；4th step, the regulation of metal sample target locusThree-dimensional mobile accurate translation stage is controlled in the locus in space three-dimensional direction by computer, and then adjusts metal sample target The relative position of material and Laser Focusing line, make the surface of metal sample target in translation motion can all the time with Laser Focusing line Direction keeping parallelism；5th step, focal line of the dipulse femtosecond laser through plano-convex post lensThe relative position of three-dimensional mobile accurate translation stage opposing metallic sample target is controlled by computer, and then femtosecond can be adjusted Laser ablation at metal sample target material surface diverse location, sequentially forms many places ablation line, according to the size of ablation line And then determine the position of dipulse femtosecond laser focal line；6th step, the adjustment of metal sample target material surfaceThe objective table of three-dimensional mobile accurate translation stage is adjusted by computer, is swashed along inverse direction of beam propagation adjustment dipulse femtosecond The relative position of light focal line and metal sample target, makes dipulse femtosecond laser along the direction of propagation of dipulse femtosecond laser The position of focal line is in the micrometer range of front 0~200 of metal sample target material surface；7th step, the preparation of two-dimentional rhombus cycle micro-nano metal structureCollinearly transmitted in guarantee dipulse femtosecond laser, dual-beam can be through quartzy piano convex cylindrical lens focusing illumination to metal-like In the case that product target material surface forms dipulse femtosecond laser focal line, three-dimensional mobile accurate translation stage (mobile essence is controlled first Spend for 1 micron), so as to control the relative distance between metal sample target material surface and dipulse femtosecond laser focal line；Simultaneously Pass through the sweep speed of the three-dimensional mobile accurate translation stage of control, incident femtosecond laser luminous power, the polarization state of femtosecond laser, femtosecond The focal line of laser and the distance of metal sample target material surface, can prepare the two-dimentional rhombus cycle in metal sample target material surface Micro-nano metal structure.
- 2. the femtosecond laser direct write preparation method of two-dimentional rhombus cycle micro-nano metal structure according to claim 1, its It is characterised by, the micro-nano processing platform of the femtosecond laser based on Michelson interference system building described in second step includes femtosecond Laser (1), semi-transparent semi-reflecting lens (2), the speculum (3,4,5,8,9,10,11,15) for changing laser propagation direction, half Wave plate (7), close beam piece (13), one-dimensional precise movement translation stage (10), attenuator (6,12,16) and ccd spectrometers (17), femtosecond Each femto-second laser pulse of laser (1) output is two by semi-transparent semi-reflecting lens (2) beam splitting has phase co-wavelength Dipulse femtosecond laser；One of path-splitting can change polarization direction by half-wave plate (7), adjust the polarization in the light path Direction is polarized by horizontal direction polarization for vertical direction, and multiple speculums in two path-splittings can change the propagation of light Direction, by adjusting speculum, the conllinear output of two-beam linear polarization femtosecond laser spatially is ensured, and finally closing beam piece (13) place converges, and realizes the conllinear transmission of linear polarization femtosecond laser and angular polarization femtosecond laser, is moved by mobile one-dimensional precise Dynamic translation stage (10) controls reflector position, come poor, the Jin Erneng that changes the effective light path of dipulse femtosecond laser in the optical path Enough change the time delay between dual-beam；The different capacity proportioning of two path-splittings is realized by adjusting attenuator (6,12).
- 3. the femtosecond laser direct write preparation method of two-dimentional rhombus cycle micro-nano metal structure according to claim 1 or 2, Characterized in that, described metal sample target is the metal materials such as tungsten, molybdenum, iron or titanium.
- 4. the femtosecond laser direct write preparation method of two-dimentional rhombus cycle micro-nano metal structure according to claim 1 or 2, Characterized in that, described dipulse femtosecond laser is linear polarization femtosecond laser, polarization direction is mutually perpendicular to, laser pulse Pulsewidth is 50 femtoseconds, and centre wavelength is 800 nanometers.
- 5. the femtosecond laser direct write preparation method of two-dimentional rhombus cycle micro-nano metal structure according to claim 1, its It is characterised by, the sweep speed of three-dimensional precise movement translation stage is 0.02mm/s-0.1mm/s in the 7th step.
- 6. the femtosecond laser direct write preparation method of two-dimentional rhombus cycle micro-nano metal structure according to claim 1 or 2, Characterized in that, the femtosecond laser being emitted from conjunction beam piece is the orthogonal linear polarization femtosecond laser in two-beam polarization direction, this Two beam femtosecond lasers spatially collinearly transmit, and through quartzy piano convex cylindrical lens line focus, induce and make in metal material surface The dipulse femtosecond laser postponed with picosecond time can be carried out line focus by standby micro-structural, the quartzy piano convex cylindrical lens.
- 7. the femtosecond laser direct write preparation method of two-dimentional rhombus cycle micro-nano metal structure according to claim 1 or 2, Characterized in that, described dipulse femtosecond laser time delay is less than 200 psecs.
- 8. the femtosecond laser direct write preparation method of two-dimentional rhombus cycle micro-nano metal structure according to claim 1 or 2, Characterized in that, the length of side of described two-dimentional rhombus cycle micro-nano metal structure is 650 nanometers, the cycle is 590 nanometers.
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101380693A (en) * | 2008-10-14 | 2009-03-11 | 南开大学 | Micro-nano structure preparation method on metallic material surface using femtosecond laser |
| CN103862171A (en) * | 2014-03-28 | 2014-06-18 | 南开大学 | Method for preparing two-dimensional periodic metal particle array structure through dual-wavelength femtosecond lasers |
| CN105108342A (en) * | 2015-09-18 | 2015-12-02 | 南开大学 | Method for preparing two-dimensional metallic photonic crystal structure in large area through femtosecond laser direct writing |
| CN105652355A (en) * | 2016-03-11 | 2016-06-08 | 华东师范大学 | Preparation method for plasma grating based on pulse polarization rotation |
| CN106216833A (en) * | 2016-08-10 | 2016-12-14 | 北京理工大学 | Method based on dynamic control laser machine semiconductor twin-stage surface texture |
| CN106735925A (en) * | 2017-03-21 | 2017-05-31 | 商丘师范学院 | A kind of femtosecond laser direct write preparation method of two-dimentional sub-micron butterfly metal micro structure |
-
2017
- 2017-11-16 CN CN201711133535.6A patent/CN107790887A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101380693A (en) * | 2008-10-14 | 2009-03-11 | 南开大学 | Micro-nano structure preparation method on metallic material surface using femtosecond laser |
| CN103862171A (en) * | 2014-03-28 | 2014-06-18 | 南开大学 | Method for preparing two-dimensional periodic metal particle array structure through dual-wavelength femtosecond lasers |
| CN105108342A (en) * | 2015-09-18 | 2015-12-02 | 南开大学 | Method for preparing two-dimensional metallic photonic crystal structure in large area through femtosecond laser direct writing |
| CN105652355A (en) * | 2016-03-11 | 2016-06-08 | 华东师范大学 | Preparation method for plasma grating based on pulse polarization rotation |
| CN106216833A (en) * | 2016-08-10 | 2016-12-14 | 北京理工大学 | Method based on dynamic control laser machine semiconductor twin-stage surface texture |
| CN106735925A (en) * | 2017-03-21 | 2017-05-31 | 商丘师范学院 | A kind of femtosecond laser direct write preparation method of two-dimentional sub-micron butterfly metal micro structure |
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109014566A (en) * | 2018-10-16 | 2018-12-18 | 北京理工大学 | A kind of method of simple control laser induced surface periodic structure arragement direction |
| CN109014566B (en) * | 2018-10-16 | 2021-04-06 | 北京理工大学 | Method for simply controlling arrangement direction of laser-induced surface periodic structure |
| CN109277692A (en) * | 2018-12-04 | 2019-01-29 | 湘潭大学 | Dimethyl silicone polymer surface micro-nano structure femtosecond double pulses regulate and control method |
| CN109807471A (en) * | 2019-02-01 | 2019-05-28 | 佛山科学技术学院 | A kind of laser mark printing device and method |
| CN109807471B (en) * | 2019-02-01 | 2024-03-26 | 佛山科学技术学院 | Laser marking device and method |
| CN112872591B (en) * | 2019-11-29 | 2021-12-14 | 中国科学技术大学 | System and method for quickly preparing high-length-diameter-ratio polymer microcolumn by femtosecond laser |
| CN112872591A (en) * | 2019-11-29 | 2021-06-01 | 中国科学技术大学 | System and method for quickly preparing high-length-diameter-ratio polymer microcolumn by femtosecond laser |
| WO2021256994A1 (en) * | 2020-06-19 | 2021-12-23 | National University Of Singapore | Apparatus and method for patterning a nanostructure in a target material |
| CN112108759A (en) * | 2020-09-04 | 2020-12-22 | 西安交通大学 | Double-beam interference system based on femtosecond laser large-breadth micro-nano manufacturing |
| CN112171065A (en) * | 2020-10-30 | 2021-01-05 | 南方科技大学 | Laser polishing system and method |
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