CN101380693A - Micro-nano structure preparation method on metallic material surface using femtosecond laser - Google Patents
Micro-nano structure preparation method on metallic material surface using femtosecond laser Download PDFInfo
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Abstract
The invention discloses a method for preparing a micron/nano structure on the surface of a metal material by using femtosecond laser. The preparation steps thereof are as follows: after mechanical grinding and polishing are carried out on the surface of the metal material, then the surface is ultrasonically washed by ionized water; a femtosecond laser technique is adopted: in the air environment, a 10*micro objective is used for vertically focusing an incident femtosecond laser pulse on the surface of the material; the radius of a laser beam at the focus position is 5 microns; besides, the surface of the material is adjusted to the position which has 10 to 250 microns to the focus plane of the objective along the reverse direction of the beam, thus being capable of generating the micron/nano structure on the surface of the metal material by inducing. The method has the advantages of simple technique, being convenient and practical, no pollution and being capable of improving and enhancing the thermal radiation efficiency of the material in a broad spectrum range.
Description
(1) technical field
The present invention relates to prepare the method for little/micro-nano structure, particularly a kind of method of utilizing femtosecond laser to prepare little/micro-nano structure at metal material surface at metal material surface.
(2) background technology
Along with current energy supply situation in short supply day by day, seek the development of new energy and improve the extensive concern that the material energy conversion efficiency has been subjected to countries in the world.As a kind of important renewable energy, hot photovoltaic cell relies on the heat-electric conversion performance of its uniqueness, more and more is subjected to domestic and international researchers' attention.In this technology, the radiation characteristic of thermal source has a very important role to whole system.In fact, high-quality heat radiator will greatly improve the heat-photoelectric transformation efficiency of hot photovoltaic system.In addition, it is most important for many photoelectric cells and products thereof to be equipped with good heat abstractor, for example: the laser crystal in the solid state laser need be placed in the metal coolant jacket with better heat dispersion usually, make gain media have a constant lower temperature, thereby could guarantee the normal operation of laser instrument.Equally, the heat radiation of chip (CPU) also is a very important problem in the computer, and the cooling system of a relative poor efficiency will seriously reduce the operating efficiency of chip.Therefore, how to develop the important topic that the interior high efficiency metal fever irradiation device of wide spectral band has become the present stage scientific research.
One of main means that address this problem at present are by producing little/micro-nano structure in the metal surface, realizing the enhancing or the change of its optical characteristics.Reported utilize the metal surface little/micro-nano structure changes its thermal-radiating document to be had: US5079473 discloses employing electrochemical method and chemical vapour deposition (CVD) technology process diameter 200-400 nanometer, degree of depth 2-4 micron on tungsten system thin slice a series of apertures, and the sub-micron cavity structure that records sample surfaces under the 1400K hot conditions has the obvious suppression effect to infra-red radiation, thereby can improve the visible light luminous efficiency of incandescent lamp effectively.US6433303 discloses the use optical mask and diffraction optical element is divided into multiple beam with ultra-short pulse laser or PRK, focuses it on the metal surface then.Thereby prepare the dome-type microcavity array.In addition, people such as Germany scientist M.Kreiter [Thermally induced emission of light from a metallic diffractiongrating, mediated by surface palsmons, Optics Communication, 1999,168:117-122] reported that the photoresist of application holography and the hybrid technology cycle of having realized of ion beam etching are the diffraction grating making of 485 nanometers on golden film.They find in sample is heated to 700 ℃ angle actinometry: for wavelength is the radiant light of 710 nanometers only just has enhancing in specific angular position heat radiation peak value, and the physical mechanism that this phenomenon attribution surface plasma that is the sample surfaces thermal excitation and radiation light-wave are intercoupled.People [Thermophotovoltaic generation with selective radiators based on tungstensurface gratings such as Japanology person H.Sai, Applied Physics Letters, 2004,85 (16): 3399-3401] proposed to utilize electron beam lithography to produce the two-dimensional grating structure that the cycle that is made of the rectangle microcavity is the 1-2 micron on the single-crystal tungsten surface, test result under the high-temperature condition shows that the sample radiation spectrum is attended by needle pattern near infrared band and occurs, and has obviously optionally spectrum enhancement effect.In addition, people such as French scientist M.Laroche [Highly directionalradiation generated by a tungsten thermal source, Optics Letters, 2005,30 (19): 2623-2625] utilizing the optical exposure technology is 3 microns in the smooth surface cycle of etching of tungsten, the lamelliform optical grating construction that the degree of depth is about 0.125 micron, experiment measuring has obtained this metal micro structure and has had unusual high directivity in the heat radiation of near infrared band, this means that the electromagnetic field on the thermal source plane has bigger spatial coherence.
In sum, these existing research reports all are to utilize the little/micro-nano structure of metal surface to realize control to its thermal-radiating directionality, coherence and spectral selection, it also all is interior generation of spectral region that concentrates on a certain arrowband that its heat radiation that observes experimentally strengthens phenomenon, and the enhancing thermoradiation efficiency in wide spectral range yet there are no relevant report.In addition, in above-mentioned these researchs, the metal surface is little/and the processing and making process of micro-nano structure mainly is the planar technology that depends on traditional exposure technique (lithography), its shortcoming is a series of numerous and diverse programs such as the essential mask projection of little process, corrosion and deposition, and material category and processing graphic pattern have significant limitation.
(3) summary of the invention
The objective of the invention is problem at above-mentioned existence, provide a kind of technology simple, convenient and practical and pollution-free, can improve and the femtosecond laser that utilizes of reinforcing material radiation efficiency prepare the method for little/micro-nano structure at metal material surface at wide spectral range.
Technical scheme of the present invention:
A kind of method of utilizing femtosecond laser to prepare little/micro-nano structure at metal material surface is characterized in that preparation process is as follows:
1) metal material surface is carried out mechanical grinding and the polishing after, clean with the deionized water ultrasonic cleaning, in air ambient, be fixed in then on the three-dimensional precise mobile platform, and realize above-mentioned metal material moving on the locus by computer control;
2) be main optical path with the femtosecond laser beam, as auxiliary optical path, adjust He-Ne Lasers and femtosecond laser beam co-propagate, and make both can be overlapped on light path, then together through the above-mentioned metal material surface of vertical arrival behind the focus lamp with helium neon laser beam;
3) close or stop femtosecond laser beam, have only feasible this moment helium neon laser beam to shine a certain position on above-mentioned material surface, placing a beam splitter with miter angle along backlight Shu Fangxiang on away from the light path of focus lamp then, make and carry out separating on the space with former incident beam, and adopt photodetector its collection and real time imagery from above-mentioned metal material surface reflection and through the laser beam that focus lamp is returned;
4) above-mentioned metal material is moved in perpendicular to the two dimensional surface of incoming laser beam, by observing the variation of spot size in the imaging system, adjust the horizontal tilt degree of processing platform, make the whole surface of above-mentioned metal material vertical mutually with incoming laser beam;
5) adjust the residing position of above-mentioned metal material on the direction of incident beam along being parallel to, making observed spot size minimum from imaging system;
6) close or stop helium neon laser beam, make femtosecond laser beam shine directly into above-mentioned metal material surface, and above-mentioned material is moved forward or backward along being parallel to the incoming laser beam direction by controlling three-dimensional processing platform, whenever after moving the step-length of a setting, only there be 1-3 femto-second laser pulse that above-mentioned metal material is ablated;
7) with the above-mentioned metal material of the microscopic area size that femtosecond laser causes ablation to its surface after each moving, therefrom seek and obtain the pairing metal material surface of minimum ablated area locus, be femtosecond laser beam through the focal position behind the focus lamp, and above-mentioned metal material surface moved to this position by controlling three-dimensional processing platform;
8) the above-mentioned metal material that will be positioned on the focus lamp focal plane moves the distance of a setting along backlight Shu Fangxiang, and makes that above-mentioned metal material surface can keep vertical mutually with incoming laser beam in whole moving process;
9) keep the femtosecond laser beam direction of incident constant, the control machine table makes above-mentioned metal material carry out two-dimentional motion scan in perpendicular to the plane on the beam direction, and, prepare dissimilar little/micro-nano structures at above-mentioned metal material surface by changing incident laser energy.
Described metal material is titanium-nickel alloy.
The parameter of described femtosecond laser is: pulse recurrence frequency 1 KHz, pulse width 50 femtoseconds, pulse center wavelength 800 nanometers, light beam polarization direction are linear polarization.
Described focus lamp is 10 * microcobjective.
Described metal material is 500 microns along being parallel to beam direction to front or rear mobile scope, and moving step length is the 5-10 micron.
Described metal material is the 10-250 micron along the setpoint distance that backlight Shu Fangxiang departs from the focus lamp focal plane.
In the described two-dimentional motion scan process between the adjacent laser scoring apart from 10-50 micron, motion scan speed 0.2-2 mm/second.
Described incident laser energy is regulated in little joule of scope of 50-300, induce the little/micro-nano structure of generation to have three types at metal material surface, comprise class raster-like sub-wavelength structure and the cellular low-light grid of class-nano-pore composite construction that the coralloid micro-cavity structure of class, nano particle cover.
Advantage of the present invention is: 1) because the femto-second laser pulse duration is extremely short, be about 50 femtoseconds, even therefore less pulsed laser energy also can have high peak power.Single peak-power of laser pulse reaches as high as 4 * 10 among the present invention
10Watt, can cause on the one hand and be attended by many nonlinear physics effects in the femtosecond laser mechanism, thereby make the metal surface can self-organizing form difform little/micro-nano structure; On the other hand, the supper-fast pulse duration will cause the material heat-conduction effect in the laser action process fundamentally being weakened and eliminating, thereby makes the spatial dimension of Laser Processing can be controlled at sub-micron or nanometer scale.Compare with traditional plane exposure technical matters, femtosecond laser technology of the present invention is convenient, quick and need not other subsidiary conditions, but the sample surfaces self-organizing forms the little/micro-nano structure of variform, plurality of advantages such as contamination-free generation in the whole processing and fabricating engineering.2) the surperficial little/micro-nano structure of existing at present document and patent report is mainly concentrated the thermal-radiating influence of metal material and is occurred in some relative narrow spectral bandwidths (about 400 nanometers) scope, and the heat radiation enhancement effect has tangible spectral selection.Material radiation efficiency with surperficial little/micro-nano structure described in the present invention can all be significantly improved in 7-16 micron wide spectral range and strengthen.For example: for the metal or alloy surface of class coralliform micro-cavity structure, the radiation efficiency of its enhancing all can keep 90% in the wide spectral range of 7-16 micron, so high material radiation efficiency is expected at hot photovoltaic system, and aspects such as broadband high-efficiency light source and heat abstractor have important extensive use.
(4) description of drawings
Fig. 1 is the scanned photograph of the embodiment of the invention 1 obtained titanium alloy material surface class coralliform micro-cavity structure.
Fig. 2 is the scanned photograph of the class raster-like sub-wavelength structure of the embodiment of the invention 2 obtained titanium alloy material nano surface particles coverings.
Fig. 3 is the scanned photograph of the cellular low-light grid of the embodiment of the invention 3 obtained titanium alloy material surface classes-nano-pore composite construction.
Fig. 4 is the embodiment of the invention 1,2,3 obtained specimen material surfaces are little/the micro-nano structure zone in the X-ray photoelectric of titanium elements can spectrogram.
Fig. 5 is the embodiment of the invention 1,2,3 obtained specimen material surfaces are little/the micro-nano structure zone in the X ray photoelectricity of nickel element can spectrogram.
Fig. 6 is that the embodiment of the invention 1 pairing material strengthens the radiation efficiency spectrogram.
Fig. 7 is that the embodiment of the invention 2 pairing materials strengthen the radiation efficiency spectrogram.
Fig. 8 is that the embodiment of the invention 3 pairing materials strengthen the radiation efficiency spectrogram.
Fig. 9 is the pairing radiation efficiency spectrogram of handling without femtosecond laser of plane titanium alloy material.
(5) specific embodiment
Embodiment 1:
1) with 10 * 10 * 2mm
3Titanium-nickel alloy material polish step by step with 400-800 waterproof abrasive paper after, clean with the deionized water ultrasonic cleaning, then it is fixed in air ambient on the three-dimensional precise mobile platform, and realizes above-mentioned material moving on the locus by computer control;
2) with the femtosecond laser beam be main optical path, with helium neon laser beam as auxiliary optical path, adjust He-Ne Lasers and femtosecond laser beam co-propagate, and make both can be overlapped on light path, then together through 10 * focus lamp after vertically arrive above-mentioned metal material surface, the femtosecond laser parameter is: pulse recurrence frequency 1 KHz, pulse width 50 femtoseconds, pulse center wavelength 800 nanometers, light beam polarization direction are linear polarization;
3) close femtosecond laser beam, have only feasible this moment helium neon laser beam to shine a certain position on above-mentioned material surface, placing a beam splitter with miter angle along backlight Shu Fangxiang on away from the light path of focus lamp then, make and carry out separating on the space with former incident beam, and adopt photodetector (CCD) its collection and real time imagery from above-mentioned metal material surface reflection and through the laser beam that focus lamp is returned;
4) above-mentioned metal material is moved in perpendicular to the two dimensional surface of incoming laser beam, by observing the variation of spot size in the imaging system, adjust the horizontal tilt degree of processing platform, make the whole surface of above-mentioned metal material vertical mutually with incoming laser beam;
5) adjust the residing position of above-mentioned metal material on the direction of incident beam along being parallel to, making observed spot size minimum from imaging system;
6) close helium neon laser beam, make femtosecond laser beam shine directly into above-mentioned metal material surface, and make above-mentioned material move forward 500 microns along being parallel to the incoming laser beam direction by controlling three-dimensional processing platform, whenever behind the mobile 5-10 micron, only there be 1-3 femto-second laser pulse that above-mentioned metal material is ablated;
7) with the above-mentioned metal material of the microscopic area size that femtosecond laser causes ablation to its surface after each moving, therefrom seek and obtain the pairing metal material surface of minimum ablated area locus, be femtosecond laser beam through the focal position behind the focus lamp, and above-mentioned metal material surface moved to this position by controlling three-dimensional processing platform;
8) the above-mentioned metal material that will be positioned on the focus lamp focal plane moves the 10-250 micron along backlight Shu Fangxiang, and makes that above-mentioned metal material surface can keep vertical mutually with incoming laser beam in whole moving process;
9) keep the femtosecond laser beam direction of incident constant, the control machine table makes above-mentioned metal material carry out two-dimentional motion scan in perpendicular to the plane on the beam direction, set single pulse energy and be between 300 little joules, adjacent laser scoring apart from 10-50 micron, motion scan speed 0.2-2 mm/second, can produce the little/micro-nano structure of the coralloid micro-cavity structure of class at titanium-nickel alloy material spatial induction.
With above-mentioned titanium alloy material, can be observed by SEM in the laser irradiation area of sample surfaces and formed a kind of peculiar fine structure, as shown in Figure 1 with micro-cavity structure surface.It is densely arranged the forming of cylindrical cavity of being differed by numerous sizes, the opening direction of these cavitys trends towards random distribution, the diameter of cavity changes between the 2-35 micron, and the degree of depth is about several microns, and the edge distribution of microcavity many tiny protruding touching in irregular shape; Further microexamination shows that these protruding touching are actually aggregative by many solid particles that are of a size of nanometer scale, the coarse inwall of these micro-cavity structures and the peripheral protruding surface area that has greatly increased metal sample that touches thereof, make it be similar to a kind of absorber of loose structure, be " the coralloid micro-cavity structure of class ".
With above-mentioned titanium alloy material with micro-cavity structure surface, adopt X-ray photoelectric energy disperse spectroscopy that the chemical composition of this surperficial micro-cavity structure is analyzed, test result is shown in Fig. 4 (b) and Fig. 5 (b).Obviously, its main component is a corresponding metal oxide: titanium dioxide and nickel sesquioxide.Fig. 4 (a) and Fig. 5 (a) are the X-ray photoelectric energy disperse spectroscopy test results without the metal material of femtosecond laser processing.
With above-mentioned titanium alloy material with micro-cavity structure surface, be placed in the infrared fourier spectrometer and heating, on perpendicular to the direction of metal surface, carry out the thermal radiation optical spectrum measurement then.The radiation efficiency of material can compare the back by standard blackbody radiation spectral line under actual radiant light spectral line that records and the uniform temp and obtain.Figure 7 shows that and measure the thermal emissivity rate curve that obtains under two kinds of different temperatures (T=373K and T=333K are represented by solid line and dotted line respectively) condition; In addition, we have also carried out the heat-radiating properties test to the plane titanium-nickel alloy material without laser treatment, and measurement result as shown in Figure 9.By comparative analysis, we find the titanium-nickel alloy material on this micro-cavity structure surface, in the spectral region of 7-16 micron, not only has thermal emissivity rate up to 90%, compare with the planar metal material of handling without femtosecond laser, approximately improved 4 times, and the radiation efficiency of this enhancing changes along with wavelength hardly, that is the titanium-nickel alloy material on micro-cavity structure surface all has very high radiation efficiency in the wide spectral range of near infrared band.
Embodiment 2:
Except that incident femtosecond laser single pulse energy is adjusted to 50 little joules, the other technologies step is all identical with embodiment 1 with process conditions.In this case, experiment is observed through the postradiation titanium alloy material surface self-organizing of femtosecond laser and has been produced periodic striated micro-structural, and its atomic force micrograph as shown in Figure 2.The stripe direction of this micro-structural is perpendicular to the polarization direction and the sample scanning direction of incident laser, and the equispaced of striped is 630 nanometers, about 150 nanometers of striped height, about 290 nanometers of width.What is more important, on the little striped of this sub-wave length grating shape, a large amount of solid particles in irregular shape have been covered, their physical dimension distribution about being between tens to 200 nanometers, can produce the class raster-like sub-wavelength structure that nano particle covers at titanium-nickel alloy material spatial induction greatly.
By adopting the test and the analysis of X-ray photoelectric energy disperse spectroscopy, the chemical composition of this sub-wave length grating shape micro-structure surface also is proved to be corresponding metal oxide: titanium dioxide and nickel sesquioxide, measurement result is shown in Fig. 4 (d) and Fig. 5 (d).
We to this raster-like little/titanium-nickel alloy material on micro-nano structure surface carried out the thermal radiation optical spectrum measurement, measurement result is as shown in Figure 7.When sample temperature T=373K, shown in solid line, its radiation efficiency in 7-16 micron waveband scope drops to 60% with the increase of wavelength gradually by 90%; When T=333K, shown in dotted line, along with the increase of wavelength, its radiation efficiency drops to 50% gradually by 60%.However, this little/radiation efficiency of micro-nano structure metal surface all improved about 2-4 doubly than the planar metal sample of handling without femtosecond laser; In addition, Fig. 7 also shows: though the radiation efficiency of this enhancing under two very close temperature conditions, also can separate significantly, this instruction card mask have raster-like little/material on micro-nano structure surface strengthens radiation efficiency variations in temperature had stronger sensitivity characteristic.
Embodiment 3:
Except that incident femto-second laser pulse energy adjustment is that the other technologies step is all identical with embodiment 1 with process conditions 150 little joules.In this case, experiment is observed through the postradiation titanium of femtosecond laser-nickel alloy material surface self-organizing and has been produced a kind of cellular composite construction of being made up of sub-wave length grating and nano-pore of class, and its scanning electron micrograph as shown in Figure 3.Similar to the situation among the embodiment 2, the stripe direction in this composite construction is perpendicular to laser polarization direction and sample scanning direction, but the fringe spacing changes between the 400-600 nanometer, and the contraction in length of every group of striped is about 1 micron.In addition, compare with the microcavity situation among the embodiment 1, cavity size in this composite structure obviously diminishes, diameter is about 500 nanometers, and their distribution densities spatially also become comparatively sparse, can produce the cellular low-light grid of class-nano-pore composite construction at titanium-nickel alloy material spatial induction.
By adopting X-ray photoelectric energy disperse spectroscopy to test, this kind cellular little/chemical composition on micro-nano structure surface also is proved to be corresponding metal oxide: titanium dioxide and nickel sesquioxide, measurement result is shown in Fig. 4 (c) and Fig. 5 (c).
We to this surface have class cellular little/titanium-nickel alloy material of micro-nano structure carried out the thermal radiation optical spectrum measurement, measurement result is as shown in Figure 8.When sample temperature T=373K, shown in solid line, its radiation efficiency in 7-16 micron waveband scope drops to 50% with the increase of wavelength gradually by 90%; When T=333K, shown in dotted line, along with the increase of wavelength, its radiation efficiency drops to 50% gradually by 80%.However, this little/radiation efficiency of micro-nano structure metal surface all improved about 3-4 doubly than undressed planar metal sample.The downward trend of radiation efficiency curve in the near-infrared spectral measurement scope shown in Fig. 8 shows: it still has certain dependence to radiation wavelength.In addition, the long wave part of the radiation efficiency on this compound declining/micro-nano structure surface in spectral measurement ranges is no longer responsive to variations in temperature, and this situation has similitude with the heat radiation of the planar metal sample without the femtosecond laser processing shown in Figure 9.
Claims (8)
1. method of utilizing femtosecond laser to prepare little/micro-nano structure at metal material surface is characterized in that preparation process is as follows:
1) metal material surface is carried out mechanical grinding and the polishing after, clean with the deionized water ultrasonic cleaning, in air ambient, be fixed in then on the three-dimensional precise mobile platform, and realize above-mentioned metal material moving on the locus by computer control;
2) be main optical path with the femtosecond laser beam, as auxiliary optical path, adjust He-Ne Lasers and femtosecond laser beam co-propagate, and make both can be overlapped on light path, then together through the above-mentioned metal material surface of vertical arrival behind the focus lamp with helium neon laser beam;
3) close or stop femtosecond laser beam, have only feasible this moment helium neon laser beam to shine a certain position on above-mentioned material surface, placing a beam splitter with miter angle along backlight Shu Fangxiang on away from the light path of focus lamp then, make and carry out separating on the space with former incident beam, and adopt photodetector its collection and real time imagery from above-mentioned metal material surface reflection and through the laser beam that focus lamp is returned;
4) above-mentioned metal material is moved in perpendicular to the two dimensional surface of incoming laser beam, by observing the variation of spot size in the imaging system, adjust the horizontal tilt degree of processing platform, make the whole surface of above-mentioned metal material vertical mutually with incoming laser beam;
5) adjust the residing position of above-mentioned metal material on the direction of incident beam along being parallel to, making observed spot size minimum from imaging system;
6) close or stop helium neon laser beam, make femtosecond laser beam shine directly into above-mentioned metal material surface, and above-mentioned material is moved forward or backward along being parallel to the incoming laser beam direction by controlling three-dimensional processing platform, whenever after moving the step-length of a setting, only there be 1-3 femto-second laser pulse that above-mentioned metal material is ablated;
7) with the above-mentioned metal material of the microscopic area size that femtosecond laser causes ablation to its surface after each moving, therefrom seek and obtain the pairing metal material surface of minimum ablated area locus, be femtosecond laser beam through the focal position behind the focus lamp, and above-mentioned metal material surface moved to this position by controlling three-dimensional processing platform;
8) the above-mentioned metal material that will be positioned on the focus lamp focal plane moves the distance of a setting along backlight Shu Fangxiang, and makes that above-mentioned metal material surface can keep vertical mutually with incoming laser beam in whole moving process;
9) keep the femtosecond laser beam direction of incident constant, the control machine table makes above-mentioned metal material carry out two-dimentional motion scan in perpendicular to the plane on the beam direction, and, prepare dissimilar little/micro-nano structures at above-mentioned metal material surface by changing incident laser energy.
2. the method for utilizing femtosecond laser to prepare little/micro-nano structure at metal material surface according to claim 1 is characterized in that: described metal material is titanium-nickel alloy.
3. the method for utilizing femtosecond laser to prepare little/micro-nano structure at metal material surface according to claim 1 is characterized in that: described femtosecond laser parameter is: pulse recurrence frequency 1 KHz, pulse width 50 femtoseconds, pulse center wavelength 800 nanometers, light beam are linearly polarized light.
4. the method for utilizing femtosecond laser to prepare little/micro-nano structure at metal material surface according to claim 1 is characterized in that: described focus lamp is the microcobjective of 10x.
5. the method for utilizing femtosecond laser to prepare little/micro-nano structure at metal material surface according to claim 1 is characterized in that: described metal material is 500 microns along being parallel to beam direction to front or rear mobile scope, and moving step length is the 5-10 micron.
6. the method for utilizing femtosecond laser to prepare little/micro-nano structure at metal material surface according to claim 1 is characterized in that: described metal material is the 10-250 micron along the setpoint distance that backlight Shu Fangxiang departs from the focus lamp focal plane.
7. the method for utilizing femtosecond laser to prepare little/micro-nano structure at metal material surface according to claim 1 is characterized in that: in the described two-dimentional motion scan process between the adjacent laser scoring apart from 10-50 micron, sweep speed 0.2-2 mm/second.
8. the method for utilizing femtosecond laser to prepare little/micro-nano structure at metal material surface according to claim 1, it is characterized in that: described incident laser energy is regulated in little joule of scope of 50-300, induce the little/micro-nano structure of generation to have three types at metal material surface, comprise class raster-like sub-wavelength structure and the cellular low-light grid of class-nano-pore composite construction that the coralloid micro-cavity structure of class, nano particle cover.
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