CN108213718A - A kind of femtosecond laser regulates and controls GemSbnTekCrystalline state nanostructured geometric shape method - Google Patents
A kind of femtosecond laser regulates and controls GemSbnTekCrystalline state nanostructured geometric shape method Download PDFInfo
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- CN108213718A CN108213718A CN201810009815.4A CN201810009815A CN108213718A CN 108213718 A CN108213718 A CN 108213718A CN 201810009815 A CN201810009815 A CN 201810009815A CN 108213718 A CN108213718 A CN 108213718A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/046—Automatically focusing the laser beam
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
- B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
- B23K26/0624—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1ns or less
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/361—Removing material for deburring or mechanical trimming
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/60—Preliminary treatment
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Abstract
A kind of femtosecond laser regulates and controls GemSbnTekCrystalline state nanostructured geometric shape method, belongs to femtosecond laser application field.This method induces amorphous ge by multiple-pulse femto-second laser pulsemSbnTekOn the basis of thin-film material wetting removal effect prepares multidimensional crystalline state nanostructured, by controlling incident femto-second laser pulse polarization state, the control to multidimensional nanostructured geometric shape is realized.When using the irradiation of linear polarization femto-second laser pulse, gained crystalline state nanostructured is in anisotropic spindle geometric shape, and long axis direction is perpendicular to incident laser linear polarization；When using the irradiation of circular polarization femto-second laser pulse, gained crystalline state nanostructured is in isotropic spheroidal geometric shape.This method is simple and effective, and by the adjusting of laser polarization state, accurate control generates the geometric shape of nanostructured, so as to control the optic response of dielectric nanostructures.This method has vital application prospect in the control of large area, low-loss photon application glazing.
Description
Technical field
The present invention relates to femtosecond laser application field more particularly to a kind of control femtosecond laser multi-pulse induction are amorphous
GemSbnTekThe method of film preparation crystalline state nanostructured geometric shape regulation and control.
Background technology
Meta Materials are widely paid close attention to once it is found that causing extensive people, it is generally recognized that Meta Materials are through artificial compound
Prepared has the physical characteristic composite construction that nature does not have.At present, Meta Materials are mostly by being less than optical wavelength
Structure is arranged in material surface in a repetitive fashion, and this structure can be the materials such as metal, dielectric.In recent years, based on expensive
The Meta Materials substitute of metal surface plasmon resonance characteristic causes the extensive concern of academia, to overcome noble metal structures
In the absorption loss for the free carrier that optical frequency is shown.Transparent dielectric based on electric field and magnetic field rice formula resonance is received
Rice structure provides a kind of effective low-loss alternative structure for noble metal Meta Materials surface.As a kind of typical ultrafast phase
Become material, GemSbnTekConversion rate is turned with its good thermal stability, height and high rewrite cycle characteristic is widely used in
Optical disc storage and non-effumability Electronic saving field.Under condition of different temperatures, GST can be between amorphous state and crystalline state
Mutually conversion, and the property differences such as higher optics, electricity are showed, it can be widely applied to photonic propulsion, photoelectronics, heat radiation
In source and Photobiology device, there is huge application and potentiality to be exploited.So far, the manufacture of many nanostructureds is emerged
Method is used to prepare functional nanostructure surface, including electron beam lithography, dry method deep etching, laser direct-writing, multiple-beam interference and
Duplicating molded technology etc..Numerous studies show that shape, size, direction, arrangement and the surrounding of Meta Materials surface nano-structure are situated between
Matter environment directly decides manipulation and responding ability of the Meta Materials surface to electromagnetic wave.Thus, to substrate surface dielectric nanometer
The preparation of structure and morphology control become the emphasis and difficult point in current Meta Materials surface field.Processing method usually exists and adds at present
The shortcomings of work efficiency rate is low, of high cost, complex procedures, and in numerous processing methods, femtosecond laser direct writing technology is high-precision with its
The processing method that the unique advantage of degree, high scalability and high controllability becomes the great prospect of surface nano-structure.Growing
Laser technology causes laser light source to reach unprecedented selection and controllability in terms of energy, time, space, further promotees
Into the development of laser micro/nano manufacturing technology.In document " Laser printing of silicon nanoparticles
In with resonant optical electric and magnetic responses ", Zywietz et al. passes through femtosecond
Laser-induced material shifts the preparation that nano silicon particles are realized in receptor surface.However this processing method is to processing conditions
It is required that it is harsh, need additional receiver.
Invention content
The object of the present invention is to provide a kind of control femtosecond laser multi-pulse induction amorphous gesmSbnTekFilm preparation is brilliant
The method of state nano-structure morphology develops a kind of full dielectric Meta Materials method of surface finish of femtosecond laser controllable preparation, into one
Step is expanded in nanoscale to the practical application in terms of electromagnetic wave manipulation and response.
Idea of the invention is that act on amorphous ge by using Gaussian Profile femtosecond laser multi-pulsemSbnTekFilm
Surface based on surface periodic structure Production conditions, i.e., irradiates under the action condition of 1.2~2.5 times of multiple-pulse threshold energies
Sample surface.According to gauss laser Energy distribution feature, material surface is divided into two objects by the pulse energy being deposited on film
Conversion zone is managed, center is more than thin film ablation threshold region, and material is thermally isolated with substrate generation, and one side material occurs to melt simultaneously
Reduce surface area under the action of Rayleigh unstability with the state that tends towards stability, finally solidify to form single nanostructured at center；
On the other hand cut circular membrane material is in Rayleigh unstability and multiple-pulse femtosecond laser induction surface periodic structure
The nanostructured arranged perpendicular to laser polarization direction is formed under the combined influence of generation mechanism under the conditions of linearly polarized laser.And
For gaussian-shape femto-second laser pulse Laser edge region, under linear polarization multiple-pulse Femtosecond-Laser Pulse Excitation due to incident laser with
The interference of surface plasma wave forms the surface periodic structure perpendicular to laser polarization direction, i.e. external waviness structure.
Finally multi-dimensional surface ripple struction-periodic arrangement nanostructured-mono- nanostructured is formd in entire laser action region
Composite construction.The processing conditions of multiple-pulse provides necessary mechanism of action for structural form regulation and control, institute's shape under front and continued impulse action
Into micro-nano structure under post laser impulse action electric field distribution generate feedback effect.Under linearly polarized laser effect, swashing
Cardioelectric field distribution is along grating under the initial raster structure function formed in Photon action process the so that post laser zone of action
Distribution arrangement that is, perpendicular to laser polarization direction, produces orientation enhancing, so that central film material is under laser action
Melt, cohesion is the spinning that long axis is parallel to external waviness structure direction under the thermal stress disturbance on laser polarization direction
Capitate nanostructured.Under circularly polarized laser effect, middle cardioelectric field is distributed isotropism, under the action of wetting removal effect, laser
Action center region forms isotropic nanostructured.
The purpose of the present invention is what is be achieved through the following technical solutions：
A kind of femtosecond laser regulates and controls GemSbnTekCrystalline state nanostructured geometric shape method, this method include the following steps：
Step 1, sample prepare, and the amorphous of 20~70nm is deposited by magnetically controlled sputter method in substrate surface
GemSbnTekFilm；
Step 2, laser energy are adjusted：Laser energy is adjusted using half-wave plate-polarizer combination and neutral density attenuator
The ablation threshold for being more than deposit film sample is allowed to, and laser energy can continuously adjust, preferably, pulse energy is adjusted to
1.2~2.5 times of certain pulses number ablation threshold；
Processed sample is fixed on sextuple translation stage by step 3, by being imaged CCD observations, adjusts light path, it is ensured that swash
Light incident direction is vertical with processed sample surface；
Step 4 adjusts different linear polarizations or to laser under linear polarization multiple-pulse Femtosecond-Laser Pulse Excitation
Polarization state carries out regulation and control in circular polarization state；
Under the conditions of linear polarization Femtosecond-Laser Pulse Excitation, laser action area surface configuration is distributed along gaussian-shape laser, from
Edge shows external waviness structure-periodic arrangement nanostructured-single nanoparticle composite construction, wherein surface wave to center
Line structure and the orientation of periodic arrangement nanostructured are perpendicular to linearly polarized laser direction, and periodic arrangement nanostructured is in
Long axis is perpendicular to the anisotropy ellipsoid geometric shape of laser polarization direction, and single nanoparticle presentation long axis in center is perpendicular to laser
The anisotropy spindle geometric shape of polarization direction；
Under circular polarization state multiple-pulse Femtosecond-Laser Pulse Excitation, laser action area surface configuration is distributed along gaussian-shape laser,
Evenly distributed nanostructured-single nanoparticle composite construction is presented from edge to center, wherein evenly distributed nanostructured is in
Isotropic spherical geometric shape is also presented in existing isotropic spherical structure, center single nanoparticle；
Further, in step 4, the regulation and control method of the laser polarization state includes the following steps：
(1) half-wave plate is added in the optical path, is adjusted half-wave plate optical axis and is obtained with initial laser polarization direction angle along difference
The linear polarization femto-second laser pulse in direction；
(2) mechanical switch is opened, by imaging CCD, laser is focused on material by achromatism double glued planoconvex spotlights
Surface；
(3) adjustment incident laser frequency and control machinery switch on-time so that arteries and veins of the incident laser pulse to set
Number irradiation is rushed to processed sample surface, pulse number is 100~500；
(4) different linearly polarized laser directions femto-second laser pulse effect under, processed sample surface process it is each to
Different in nature surface；
Or quarter-wave plate is added in the optical path, it is in initial laser polarization direction by adjusting wave plate optical axis direction
45 ° of angles obtain circular polarization state femtosecond laser.Under the action of multiple-pulse circular polarization femtosecond laser, processed in sample surface several
What form isotropism and composite nanostructure arranged in a uniform.
Preferably, by being programmed to the sextuple mobile platform mobile process, to adjacent two laser exposure spots
Position is controlled, and can obtain evenly arranged composite nanostructure array.
Preferably, the processing object lens select focal length as the bis- glued planoconvex spotlights of 100mm.
Preferably, described carry out plating Ge in processed sample surfacemSbnTekThe method that film process uses magnetron sputtering,
Thickness range is 20nm~70nm.
Preferably, the processed sample choice of the substrates silicon, silica or SOI materials.
Advantageous effect
The present invention proposes a kind of method of full dielectric nanostructures, and accurately controls the geometric form of nanostructured
State optimizes its optic response.The low-loss of full dielectric nanostructures provides condition, while can for the excitation of strong magnetic resonance
Preferable optic response is shown instead of high ohmic loss of the plasmon nanostructure in visible light wave range.The it is proposed of the present invention
The preparation of development and Meta Materials for full dielectric nano-photonics devices has vital application value.
Description of the drawings
Fig. 1 is femtosecond laser regulation and control Ge in specific embodimentmSbnTekCrystalline state nanostructured geometric shape processes index path：
Label：1- femto-second lasers；The first half-wave plates of 2-；3- polarizers；4- neutral density attenuators；5- mechanical switch；
6- dichroscopes；7- beam splitters；8- illuminates white light source；9- planoconvex spotlights；10- is imaged CCD；The second half-wave plates of 11-；12- tetra- divides
One of wave plate；13- processes object lens；14- samples to be processed；15- 6 DOF mobile platforms.
Fig. 2 is the process flow diagram of the method for the present invention.
Specific embodiment
Below in conjunction with the accompanying drawings and embodiment is described further the present invention.
In present embodiment, amorphous ge is induced using different polarization states multiple-pulse femtosecond lasermSbnTekFilm preparation
Multidimensional crystalline state nanostructured and the method regulated and controled to its geometric shape, specific processing light path are as shown in Figure 1.It processes light path
Femto-second laser pulse is generated for femto-second laser 1, femto-second laser pulse declines by the first half-wave plate 2, polarizer 3, neutral density
Subtract piece 4, after mechanical switch 5, through processing object lens after the second half-wave plate 11, quarter-wave plate 12 after being reflected by dichroscope 6
13 focus on 14 surface of sample, and sample 14 to be processed is fixed on sextuple mobile platform 15；The illumination process of white light source 8 beam splitter 7,
It is processed that 14 back reflection light of sample is irradiated to after dichroscope 6, the second half-wave plate 11, quarter-wave plate 12 and processing object lens 13
Object lens 13, quarter-wave plate 12, the second half-wave plate 11, dichroscope 6, it is incident after planoconvex spotlight 9 by beam splitter reflection 7
Into imaging CCD10.
The femto-second laser parameter used in experimentation is as follows：Centre wavelength is 800nm, pulse width 35fs, is weighed
Complex frequency is 1kHz, linear polarization；The amorphous ge of sample to be processed to be deposited with 20-70nm thickness in substrate in experimentmSbnTekIt is thin
Film.
Femto-second laser 1 is using the laser of U.S.'s spectrum physics (Spectrum Physics) company production, laser wave
Long 800nm, pulse width 35fs, repetition rate 1KHz, pulse ceiling capacity 3mJ, light distribution are gaussian-shape, linear polarization.
Neutral density attenuator 4 is arrived using Daheng's photoelectricity GCC-3030 circle neutral density gradual filters in visible ray
The ratio of absorption/reflection light and transmitted light by adjusting the rotation angle of eyeglass, can be changed in infrared light district to change optical attenuation
Size, laser energy adjustable range be 1% -90%.
Mechanical switch 5 can control Laser exposure dwell times, when switch responds using the SH05 of Thorlabs companies production
Between be 1ms.
Specific embodiment one：
To process different shape crystalline state Ge2Sb2Te5For the full dielectric composite nanostructure of anisotropy geometric shape, adopt
With the present invention multiple-pulse femtosecond laser regulate and control method, used femto-second laser pulse be linear polarization, specific procedure of processing
It is as follows：
Adjust light path, it is ensured that laser light incident direction is vertical with processed sample surface；
(1) sample preparation：The present embodiment by the method for magnetron sputtering 10mm × 10mm × 1mm silica sample
50nm thickness Ge is plated in sheet2Sb2Te5Film；
(2) energy is adjusted：It is combined using the first half-wave plate 2 and polarizer 3 and neutral density attenuator 4 adjusts laser energy
It is allowed to be more than and is processed 1.1 μ J of sample film ablated surface threshold value, and laser energy can continuously adjust；
(3) the double glued planoconvex spotlights 13 for being 100mm using focal length are focused femto-second laser pulse, are processed sample
14 are fixed on sextuple mobile platform 15, by being imaged the observation of CCD8, adjust light path and cause incident laser perpendicular to sample 14
Surface；
(4) it is 1kHz to keep 1 pulse frequency of fs-laser system, sets 5 opening time of mechanical switch as 100ms so that
It is 100 to be irradiated to sample surface umber of pulse；
(5) the second half-wave plate optical axis and initial laser polarization direction angle are adjusted for step-length with 10 ° so that laser polarization side
It being continuously adjusted to 20 ° for step-length, α angles increase to 180 ° from 0 °, under different linearly polarized laser directions, i.e., different α angles, to quilt
Processing sample surface is irradiated, and obtains ripple struction direction and nanostructured long axis direction with laser polarization direction consecutive variations
External waviness structure-periodic arrangement nanostructured-single nanoparticle composite construction.
Embodiment 2：
Crystalline state Ge is prepared to eliminate linear polarization multiple-pulse2Sb2Te5Composite nanostructure anisotropy makes its presentation each to same
Property geometric shape for, multiple-pulse femtosecond using the present invention swash processing polarization regulation and control method, used femto-second laser pulse
For circular polarization state, specific procedure of processing is as follows：
Other steps are same as Example 1, the difference lies in：Add in the optical path before the progress of step (2) energy adjustment
Enter quarter-wave plate 12, adjust quarter-wave plate 12 so that 45 ° of wave plate optical axis direction and former laser polarization direction angle from
And obtain circular polarization femto-second laser pulse.
In step (5) with circular polarization state femto-second laser pulse under the conditions of be processed, by changing incident pulse energy
Size obtains the evenly arranged nano particle-single nanoparticle composite construction being gradually reduced with pulse energy increased in size,
Various sizes of nano particle is isotropism spherical structure, and anisotropy is eliminated, and nanostructured presents isotropic
Geometry.
Above-described specific descriptions have carried out further specifically the purpose, technical solution and advantageous effect of invention
It is bright, it should be understood that the above is only a specific embodiment of the present invention, the protection model being not intended to limit the present invention
It encloses, all within the spirits and principles of the present invention, any modification, equivalent substitution, improvement and etc. done should be included in the present invention
Protection domain within.
Claims (4)
1. a kind of femtosecond laser regulates and controls GemSbnTekCrystalline state nanostructured geometric shape method, which is characterized in that including following step
Suddenly：
Step 1, sample preparation：In the amorphous ge of substrate surface plating 20~70nm thicknessmSbnTekFilm；
Step 2, laser energy are adjusted：Laser energy is adjusted using half-wave plate-polarizer combination and neutral density attenuator to be allowed to
More than the ablation threshold of deposit film sample, and laser energy can continuously adjust, preferably, pulse energy is adjusted to more arteries and veins
Rush ablation threshold 1.2~2.5 times；
Processed sample is fixed on sextuple translation stage by step 3, by being imaged CCD observations, adjusts light path, it is ensured that laser enters
It is vertical with processed sample surface to penetrate direction；
Step 4 adjusts different linear polarizations or to laser polarization under linear polarization multiple-pulse Femtosecond-Laser Pulse Excitation
State carries out regulation and control in circular polarization state；
Under the conditions of linear polarization Femtosecond-Laser Pulse Excitation, laser action area surface configuration is distributed along gaussian-shape laser, from edge
External waviness structure-periodic arrangement nanostructured-single nanoparticle composite construction, wherein external waviness knot is showed to center
Structure and the orientation of periodic arrangement nanostructured are perpendicular to linearly polarized laser direction, and periodic arrangement nanostructured is in long axis
Perpendicular to the anisotropy ellipsoid geometric shape of laser polarization direction, long axis is presented perpendicular to laser polarization in center single nanoparticle
The anisotropy spindle geometric shape in direction；
Under circular polarization state multiple-pulse Femtosecond-Laser Pulse Excitation, laser action area surface configuration is distributed along gaussian-shape laser, from side
Evenly distributed nanostructured-single nanoparticle composite construction is presented to center in edge, wherein evenly distributed nanostructured is presented respectively
To the spherical structure of the same sex, isotropic spherical geometric shape is also presented in center single nanoparticle.
2. a kind of femtosecond laser regulation and control Ge according to claim 1mSbnTekCrystalline state nanostructured geometric shape method,
It is characterized in that：In step 4, the regulation and control method of the laser polarization state includes the following steps：
(1) half-wave plate is added in the optical path, is adjusted half-wave plate optical axis and is obtained with initial laser polarization direction angle along different directions
Linear polarization femto-second laser pulse；
(2) mechanical switch is opened, by imaging CCD, laser is focused on material surface by achromatism double glued planoconvex spotlights；
(3) adjustment incident laser frequency and control machinery switch on-time so that pulse of the incident laser pulse to set
Number irradiation is 100~500 to sample surface, pulse number is processed；
(4) under the effect of different linearly polarized laser directions femto-second laser pulse, anisotropy is processed in processed sample surface
Surface；
Or quarter-wave plate is added in the optical path, it is in 45 ° by adjusting wave plate optical axis direction and initial laser polarization direction
Angle obtains circular polarization state femtosecond laser；Under the action of multiple-pulse circular polarization femtosecond laser, geometry is processed in sample surface
Form isotropism and composite nanostructure arranged in a uniform.
It is 3. according to claim 1, it is characterised in that：It forms sediment on selected substrate surface, silica, silicon or SOI materials
Product amorphous gemSbnTekThe method that film uses magnetron sputtering, thickness range are 20nm~70nm, m, n, and the selection of k values passes through
Target material composition used in magnetron sputtering controls.
4. a kind of femtosecond laser regulation and control Ge according to claim 1mSbnTekCrystalline state nanostructured geometric shape method,
It is characterized in that：The crystalline state nanostructured geometric shape regulation and control method is to make by using Gaussian Profile femtosecond laser multi-pulse
For amorphous gemSbnTekFilm surface, based on surface periodic structure Production conditions, in 1.2~2.5 times of multiple-pulse threshold values
Sample surface is irradiated under the action condition of energy；According to gauss laser Energy distribution feature, the pulse energy being deposited on film
Material surface is divided into two physical reactions regions, center is more than thin film ablation threshold region, and material is thermally isolated with substrate generation,
One side material occurs to melt and reduces surface area under the action of Rayleigh unstability with the state that tends towards stability, and is finally coagulated at center
Solid is into single nanostructured；On the other hand cut circular membrane material is in Rayleigh unstability and multiple-pulse femtosecond laser
It induces and is formed under the conditions of linearly polarized laser perpendicular to laser polarization side under the combined influence of surface periodic structure generation mechanism
To the nanostructured of arrangement.
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| CN110280776A (en) * | 2019-04-15 | 2019-09-27 | 清华大学 | Gold nanorods enhancing shaping methods and its system based on intra two-pulse laser |
| CN110385529A (en) * | 2019-07-09 | 2019-10-29 | 湖南工业大学 | A kind of spiral bevel gear femtosecond laser system of processing and its precise and tiny modification method |
| WO2021052105A1 (en) * | 2019-09-18 | 2021-03-25 | 清华大学 | Femtosecond laser based high catalytic activity gold nanorod preparation method and system |
| US11110448B1 (en) | 2019-09-18 | 2021-09-07 | Tsinghua University | Method for preparing gold nanorods having high catalytic activity by using femtosecond laser |
| CN111007586A (en) * | 2019-12-18 | 2020-04-14 | 中国工程物理研究院上海激光等离子体研究所 | Preparation method of large-size nano periodic grating |
| CN112894149A (en) * | 2021-01-21 | 2021-06-04 | 北京理工大学 | Ultrafast continuous three-dimensional imaging system and method for ablating object by ultrashort pulse laser |
| CN112894149B (en) * | 2021-01-21 | 2021-11-30 | 北京理工大学 | Ultrafast continuous three-dimensional imaging system and method for ablating object by ultrashort pulse laser |
| US11313971B1 (en) | 2021-01-21 | 2022-04-26 | Beijing Institute Of Technology | Three-dimensional imaging system and method |
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