CN103862171B - Dual wavelength femtosecond laser prepares the method for two-dimension periodic metallic particles array structure - Google Patents

Dual wavelength femtosecond laser prepares the method for two-dimension periodic metallic particles array structure Download PDF

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CN103862171B
CN103862171B CN201410122538.XA CN201410122538A CN103862171B CN 103862171 B CN103862171 B CN 103862171B CN 201410122538 A CN201410122538 A CN 201410122538A CN 103862171 B CN103862171 B CN 103862171B
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femtosecond laser
frequency
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CN103862171A (en
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杨建军
丛佳
赵波
周剑雄
黄智林
朱晓农
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Nankai University
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/60—Preliminary treatment

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Lasers (AREA)

Abstract

Dual wavelength femtosecond laser prepares the method for two-dimension periodic metallic particles array structure.The present invention proposes to utilize the method and the implement device that focus on two-tone femtosecond laser pulse and prepare two-dimension periodic particle array structure in metal surface, and its feature is that metal grain structure distributes in periodicity sub-micrometer scale on two-dimensional direction.By the two-tone femtosecond laser adopting frequency doubling non-linear's technology to realize different characteristic parameter, after Bing Jinggong road or time delay along separate routes by same optical element conllinear focusing illumination on sample, the two-dimensionally periodic structure pattern of formation is by changing the azimuth of frequency-doubling crystal and the power ratio etc. of two-color laser carries out Effective Regulation.Advantage of the present invention is: the Combination Design utilizing femtosecond laser different wave length and polarization characteristic, realizes the preparation of sub-micrometer scale two-dimension periodic metallic particles array structure quickly and easily.The two-tone femtosecond laser novel preparation method that the present invention proposes has potential important application at material micro-nano rice manufacture field.

Description

Dual wavelength femtosecond laser prepares the method for two-dimension periodic metallic particles array structure
Technical field:
The present invention relates to femtosecond laser prepares two-dimension periodic sub-micrometer scale particle array structure method and processing unit (plant) at metal material surface, apply the physical effect that femto-second laser pulse changes with laser wavelength of incidence and polarization state at metal surface inducing periodic sub-wavelength striated structure, belong to ultrafast laser application and micro-nano manufacture field, future may have important potential application in the Design & preparation of the novel nano photonic device relevant with surface plasma wave (Surfaceplasmonpolaritons---SPPs) etc.
Background technology:
In recent years, the fast development of femtosecond laser technology and commercial devices thereof and reach its maturity and attracted the extensive concern of researcher in subjects field, the feature such as the burst length particularly had due to femto-second laser pulse is short, peak power is high and Focal intensity is large, makes it detecting with ultrafast process, is with a wide range of applications in basic scientific research and the advanced manufacturing technology development and application etc. such as Strong-field physics, non-linear micro-imaging, laser deep welding, material modification and high-accuracy processing.
Particularly in ultrahigh precision processing, process and preparation field, femto-second laser pulse as a kind of can to materials and devices realize institutional framework on micro-nano-scale change and functional characteristic regulation and control emerging means and be subject to the extensive concern of countries in the world scientist.The processing technology adopting optics, electron beam and ion beam exposure to carry out mask etching with tradition is compared, the micro-nano processing of femtosecond laser and technology of preparing have simple to operate, flexible, speed is fast, cost is low and precision advantages of higher, progressively develops into the forward position research direction in present laser, photoelectron and mechanical engineering field.At present, people utilize femtosecond laser successfully to achieve the processing even on nanoscale of micron, sub-micron, preparation and making to metal, semiconductor, polymer and transparent dielectric etc.Particularly a large amount of recently experimental studies shows: when the low-yield femtosecond laser of single bundle by after optical focus with repeat or scan mode irradiate specimen material surface or inner time, the striped of One Dimension Periodic or quasi periodic arrangement is there will be in hot spot overlay area, groove or class optical grating construction, its space periodic changes along with incident femtosecond laser energy and pulse number, and can much smaller than laser wavelength of incidence, fringe spatial orientation is then closely related with the polarization state of incident laser [Pulsenumberdependenceoflaser-inducedperiodicsurfacestruc turesforfemtosecondlaserirradiationofsilicon, JournalofAppliedPhysics2010, 108:034903, Formationofextraordinarilyuniformperiodicstructuresonmet alsinducedbyfemtosecondlaserpulses, JournalofAppliedPhysics2006,100:023511, Femtosecond-laser-inducednanostructureformedonhardthinfi lmsofTiNandDLC, Appl.Phys.A, 2003,76:983-985].Simultaneously; for this peculiar physical phenomenon; people also give the deep theoretical research of a large amount of system; and in succession propose multiple physical models such as " self-organizing, second harmonic and surface wave interference " and analyzed and simulate [Self-organizedpatternformationuponfemtosecondlaserablati onbycircularlypolarizedlight; 2006,252:4702-4706; FormationofnanogratingsonthesurfaceofaZnSecrystalirradia tedbyfemtosecondlaserpulses, PhysicalReviewB, 2005,72:125429; SurfaceElectromagneticwavesinoptics, OpticalEngineering, 31:718-730].Comparatively speaking, wherein incident laser with its material surface induce produce interference theory between plasma wave (SPPs) can the better experimental phenomena that observes of pragmatize, therefore current it accepted by most people.
Meanwhile, by large quantity research, people also find that femtosecond laser can the effectively multiple efficacies of reinforcing material and physical and chemical performance [Chen Feng, Zhang Dongshi etc. at these cycles that metal and semiconductor surface induction produce or aperiodicity micro nano structure, the method of preparing metal surface superhydrophobic microstructure by femto-second laser, patent of invention number: 200910021923; Yang Jianjun, Zhang Nan, Yang Yang etc., utilize laser to prepare the method for micro-structural target raising laser threat warner impulse coupling coefficient, patent of invention number:
201110087843; BrighterLightSourcesfromBlackMetal:SignificantIncreasein EmissionEfficiencyofIncandescentLightSourcesPhysicalRevi ewLetters, 2009,102:234301], thus greatly expand and improve application potential and the value of materials and devices, in Solar use, high sensitivity photodetection, solid state lighting and medical device are prepared etc., there is boundless practical application space.
But it is emphasized that at this: in the research process in the past about the micro-nano processing of femtosecond laser, great majority experiment is all select to adopt the femto-second laser pulse of single centre wavelength as incident light source, and be that the one-dimensional space distributes in the periodic stripe structure of material surface mainly induced synthesis.In order to expand surface texture type prepared by femtosecond laser further; nearest people propose the femtosecond pulse of phase co-wavelength to be divided into multi-beam laser; then their space interference principle is utilized to prepare two-dimension periodic micro-nano structure [Fabricationofatwo-dimensionalperiodicmicroflowerarraybyt hreeinterferedfemtosecondlaserpulsesonAl:ZnOthinfilms at semiconductor material surface; NewJournalofPhysics; 2010,12:043025; Enhancedopticalabsorptanceofmetalsusinginterferometricfe mtosecondablation, OpticsExpress, 2007,15:13838-13843; Jia Xin, Jia Tianqing, femtosecond laser beam prepares the system and method for asymmetric micro-nano compounding period style, patent of invention number: 201310172920; Chen Jianwen, Gao Hongyi, Xie Honglan etc., the equipment of forming two-dimension nano size periodic structure by fs laser single pulse, patent of invention number: 03142107].Because these experimental techniques are mainly concerned with the multiple-beam interference situation of single wavelength, therefore actual light path design and equipment more complicated, and the two-dimensional structure space periodic that preparation is formed also will be subject to the impact of optical interference circuit precision adjustment.
Summary of the invention:
Technical problem to be solved by this invention is: how to utilize the femto-second laser pulse of two kinds of different wave lengths to prepare the submicron particles array structure of two-dimensional and periodic arrangement fast at metal material surface, grasp thought of design, manufacturing process, implement device and key element etc. wherein, thus realize orientation to metal surface submicrometer structure array, size and space periodic and carry out Effective Regulation.
The present invention, by the ingenious Combination Design utilizing femtosecond laser different wave length and polarization characteristic, adopts simple experimental device just can prepare orientation and size all changeable sub-micrometer scale two-dimension periodic metal lattice structure quickly and easily in metal surface.Compared with traditional two-dimensionally periodic structure manufacturing process, the technical method that the present invention proposes is relatively simple, quick and easy, operability is high, overcomes numerous and diverse operation that conventional light path design and fabrication technical method brings.
Technical scheme of the present invention:
Dual wavelength femtosecond laser prepares the method for two-dimension periodic metallic particles array structure, the mixing that the present invention's application bbo crystal frequency doubling technology realizes fundamental frequency and frequency multiplication dual wavelength femto-second laser pulse exports, and both are after conllinear or the transmission of shunt variable time delay, again with collinear manner through same optical element focusing illumination in metal surface, preparation formed have two-dimension periodic distribution sub-micrometer scale particle array structure.In addition, by changing the key parameters such as the phase matching angle of the power ratio of dual-wavelength laser pulse, time delay and frequency-doubling crystal, realizing the cycle to micro structure array, size and orientation to regulate and control, providing new method for preparing two-dimension periodic micro-nano structure at solid material and device surface rapid processing.The concrete operation step of the inventive method is:
The first step, the making of metallic target sample and fixing
After metal solid target surfaces is carried out mechanical grinding and polishing, metallic target sample is totally obtained with deionized water ultrasonic cleaning, then in air ambient, metallic target sample is fixed on three-dimensional precise mobile platform, and controls to realize moving the precision of sample on space three-dimensional (x-y-z) direction by computer;
The material of described metallic target sample is molybdenum or tungsten metal material.
Second step, the acquisition of dual wavelength femtosecond laser and transmission
By femto-second laser pulse vertical irradiation that laser instrument is exported on BBO nonlinear crystal, obtain the dual wavelength femto-second laser pulse of fundamental frequency and frequency-doubled signal mixing output, then by both after the transmission of conllinear fixed light path or along separate routes time variable delay light path, with collinear manner after same optical focusing element vertical irradiation at metallic target sample surfaces;
3rd step, the adjustment of metallic target sample surfaces
Control three-dimensional precise mobile platform, enabling above-mentioned metallic target sample carry out precision along the vertical direction with being parallel to laser beam to move, adjusting metallic target sample surfaces gradient simultaneously and making metallic target sample finished surface in whole processing moving process, keep mutually vertical all the time with laser propagation direction;
4th step, the determination of concentrating element focal position
Select incident femtosecond laser power to be 10 milliwatts, then along the direction progressively mobile example being parallel to beam propagation, form serial ablation pit at metallic target sample surfaces, and determine according to the situation of change of ablation dimple size the focal position focusing on femtosecond laser beam;
5th step, the location of metallic target sample surfaces
Three-dimensional precise mobile platform is regulated to make metallic target sample surfaces move in 300 ~ 600 micrometer ranges in focus front from the focal position of concentrating element along inverse direction of beam propagation;
6th step, the preparation of periodic array in two dimensions structure
All can under concentrating element be irradiated to sample surfaces situation in the pulse of guarantee two-tone femtosecond laser, controlling three-dimensional precise mobile platform makes metallic target sample carrying out two-dimensional movement scanning perpendicular in the plane of beam direction, and by regulating fundamental frequency and double-frequency laser power, polarization state, distance between sample surfaces and focus, thus prepare different two-dimension periodic array of particles distributions at metallic target sample surfaces.
The concrete grammar obtaining the generation of dual wavelength femtosecond laser described in second step is: based on the bbo crystal frequency doubling non-linear technology of I class o+o → e phase matched pattern, the femto-second laser pulse that laser instrument produces is converted into the dual wavelength femtosecond laser that fundamental frequency and frequency-doubled signal export simultaneously, and changes its phase matched angle by the azimuth rotating bbo crystal.When phase matched is optimum state, the dual wavelength femtosecond laser obtained is linear polarization, and both polarization directions are mutually vertical, and when phase matched off-target angle, the double-frequency laser of acquisition still retention wire polarization but basic frequency laser becomes elliptical polarization.
The concrete grammar adopting conllinear fixed light path to realize the transmission of dual wavelength femtosecond laser described in second step is: produced and output dual wavelength femto-second laser pulse to BBO frequency-doubling crystal by the femtosecond laser vertical irradiation that laser instrument exports, then both are with collinear manner transmission and by after dichroic mirror reflects, through same optical element obtain focus on and vertical irradiation at metallic target sample surfaces.
The method adopting time variable delay light path along separate routes to realize the transmission of dual wavelength femtosecond laser described in second step is:
(1) first, the femto-second laser pulse that laser instrument exports is formed the identical laser pulse of two energy after beam splitter, and both are introduced respectively in different time delay light paths, wherein adopt BBO frequency multiplication and filtering technique to realize only having the output of frequency multiplication femtosecond laser in an arm light path, and another arm light path keep the transmission of fundamental frequency femtosecond laser;
(2) the dual wavelength femtosecond laser after two-arm separately time variable delay optic path, arrive a common optical focusing element, and vertical irradiation is at metallic target sample surfaces after strength retrogression by dichroscope after closing bundle again with conllinear transmission means.
Wherein, two-arm light path is regulated to make the basic frequency laser being irradiated to metallic target sample surfaces be-50 psec < Δ τ <260 psecs relative to double-frequency laser pulse time delay scope.
The method of the adjustment fundamental frequency described in the 6th step and frequency multiplication femtosecond laser power is: by utilizing the combination of neutral filter or 1/2 wave plate and polarizer to realize the control to dual-wavelength laser power.
Described metallic target Sample Scan speed is 0.005 mm/second to 0.4 mm/second.
Described optical focusing element is microcobjective or optical lens.
The reflectivity of described dichroscope to fundamental frequency femtosecond laser is less than 5%, and is greater than 60% to the reflectivity of frequency multiplication femtosecond laser.
In the process preparing periodic array in two dimensions structure, when dual wavelength femto-second laser pulse is linear polarization, the power ratio scope of required frequency multiplication and basic frequency laser is 1< γ <7; When frequency multiplication femtosecond laser is linear polarization, fundamental frequency femtosecond laser is elliptical polarization, the power ratio scope of required frequency multiplication and basic frequency laser is about 0.8< γ <3.
When regulating the phase matching angle off-target state of frequency-doubling crystal, the basic frequency laser exported after him becomes elliptical polarization, and double-frequency laser retention wire polarization but its polarization direction change, thus realize the inclination regulation and control of particle array structure orientation within the scope of ± 35 °.
The periodic array in two dimensions structure prepared at metallic target sample surfaces is actually and is formed in space crossed composition by the cycle striped of two mutually perpendicular directions, wherein long period variation scope is 230 ~ 300 nanometers, variation of short period scope is 580 ~ 640 nanometers, and the change in size scope of the metallic particles intersected to form is 200 ~ 550 nanometers.
Sample translational speed scope described in above-mentioned 6th step is in 0.005 ~ 0.4 mm/second, and minimum mobile accuracy is 1 micron, and the distance range between adjacent two scan lines is 2 ~ 100 microns.
Described adjustment bbo crystal azimuth is by perpendicular to incident laser plane internal rotation, the angle theta turned between frequency-doubling crystal o axle and incident basic frequency laser polarization direction realizes, angle, grain arrangement is selected when optimum phase matching situation as with reference to zero point, and its excursion is θ=-35 ° ~ 35 °.
Advantage of the present invention and beneficial effect:
(1) fundamental frequency that the near-infrared femto-second laser pulse applying linear polarization produces through bbo crystal and frequency multiplication dual wavelength femto-second laser pulse, after focusing on collinear manner, vertical irradiation forms at metal sample spatial induction the submicron particles array structure that two-dimension periodic distributes.Present invention process is simple, and cost is low, and efficiency is high, and can large area realize.
(2) utilize BBO frequency-doubling crystal to produce different wave length and the polarization state Combination Design of fundamental frequency and double-frequency laser pulse, complete the two-dimensionally periodic structure write of sub-micrometer scale at sample surfaces single step, and the space periodic of two-dimensional structure is different in both direction.
(3) by turning frequency-doubling crystal azimuth perpendicular to incident laser plane internal rotation, the polarization characteristic of outputting dual wavelength laser thereafter and power ratio can be caused to change, thus realize material surface being formed to the shape characteristics such as the space arrangement direction of periodic array in two dimensions structure and cycle easily and carry out Effective Regulation.
Accompanying drawing explanation
The dual wavelength femtosecond laser conllinear transmission index path that Fig. 1 designs for the present invention.
The dual wavelength femtosecond laser transmission time variable delay index path along separate routes that Fig. 2 designs for the present invention.
Label declaration in Fig. 1 and Fig. 2 is: 1 represents femto-second laser, 2 represent that centre wavelength is the femtosecond laser of 800 nanometers, 3 represent that centre wavelength is the completely reflecting mirror of 800 nanometer femtosecond lasers, 4 represent that centre wavelength is the neutral filter of 800 nanometers, 5 represent BBO frequency-doubling crystal, 6 represent two-tone femtosecond laser, 7 represent dichroscope, 8 represent optical focusing element, 9 represent metallic target sample, 10 represent three-dimensional precise mobile platform, 11 represent that centre wavelength is 800 nanometer laser beam splitters, 12 represent Adjustable time delay line, 13 represent that centre wavelength is the optical filter of 400 nanometer lasers.
Fig. 3 is the two-dimension periodic submicron particles array structure prepared, wherein A is embodiment 3 is optimum Match angle θ=0 ° at bbo crystal, namely when incident light polarization direction is parallel with bbo crystal o direction of principal axis, the two-dimension periodic submicron particles array structure that metal molybdenum surface is formed, B is the amplification detail view of A.
Fig. 4 is that embodiment 4 is in bbo crystal azimuth offset from best phase coupling angle, namely during θ ≠ 0 °, metal molybdenum forms the situation of change of periodic array in two dimensions structure direction on the surface, in figure, the upper left corner is labeled as the angle theta between frequency-doubling crystal o axle and incident basic frequency laser polarization direction, wherein, A is the situation of angle theta=-25 °, and B is the situation of angle theta=35 °.
Fig. 5 be embodiment 5 general power be 6 milliwatts, the two-dimensional sub-wavelength periodic structure distribution situation that formed on the surface in metal molybdenum when delaying 56 psec of 400 nanometer double-frequency lasers.
Detailed description of the invention:
Elaborate below in conjunction with the detailed description of the invention of accompanying drawing to the present invention's " dual wavelength femtosecond laser prepares the method for two-dimension periodic metallic particles array structure ".
Embodiment 1
Light channel structure as shown in Figure 1, after the femtosecond laser 2 that femto-second laser 1 produces incides completely reflecting mirror 3, its reverberation is surperficial to BBO frequency-doubling crystal 5 through neutral filter 4 vertical irradiation, the dual wavelength femtosecond laser 6 produced afterwards is through dichroscope 7, incide concentrating element 8, two-tone femtosecond laser after line focus is irradiated to metallic target sample 9 surface be fixed on three-dimensional precise mobile platform 10, the submicron particles array structure of induced synthesis two-dimension periodic distribution.
Wherein, the concrete following characteristics parameter of laser pulse exported is produced from femto-second laser: repetition rate 1000 hertz, pulse width are 50 femtoseconds, centre wavelength is 800 nanometers, horizontal linear polarization.They impinge perpendicularly on thickness after completely reflecting mirror and neutral filter is on the BBO frequency doubling non-linear crystal of 1 millimeter, and is 400 nanometer frequency-doubled signals based on I class o+o → e phase matched pattern generation output center wavelength and remains the mixing dual wavelength femto-second laser pulse that centre wavelength is 800 nanometer fundamental frequency signals.Both conllinear transmission are also incided on dichroscope with 45° angle, realize light beam again focus on after obtaining different reflection efficiencies through 4 x Microscope Objectives.Sample surfaces moved to 300 ~ 600 microns of distances before laser spot by controlling three-dimensional precise mobile platform, and with the sweep speed of 0.01 ~ 0.4 mm/second along mobile example in the plane vertical with direction of beam propagation, finally realize the quick preparation of two-dimension periodic submicron particles array structure at sample surfaces.
Embodiment 2
Light channel structure as shown in Figure 2, the femtosecond laser 2 that femto-second laser 1 produces forms two laser pulses after beam splitter 11, then two different light paths are entered respectively, femtosecond laser wherein in an arm light path just arrives dichroscope 7 after neutral filter 4, the femtosecond laser of another arm light path enters Adjustable time delay line 12 after completely reflecting mirror 3 and neutral filter 4, then the elapsed time postpones rear vertical irradiation on BBO frequency-doubling crystal 5, dichroscope 7 is arrived again afterwards through optical filter 13, two-way laser becomes the dual wavelength femto-second laser pulse of conllinear transmission respectively after dichroscope 7 transmittance and reflectance, their vertical irradiations after optical element 8 focuses on are surperficial to the metallic target sample 9 be fixed on three-dimensional precise mobile platform 10, the submicron particles array structure of induced synthesis two-dimension periodic distribution.
Wherein, from the repetition rate 1000 hertz that femto-second laser exports, pulse width is 50 femtoseconds, centre wavelength is the horizontal linear polarization femto-second laser pulse of 800 nanometers, the femto-second laser pulse that formation two energy are equal to after beam splitter also enters the paths of two different directions respectively, femtosecond laser wherein in an arm light path is only obtain suitable intensity modulation by attenuator, femtosecond laser in another arm light path by vertical irradiation after Adjustable time delay line is then on the BBO frequency doubling non-linear crystal of 1 millimeter to thickness, and based on I class o+o → e phase matched pattern, to produce output center wavelength be 400 nanometers and centre wavelength is the mixing dual wavelength femtosecond laser of 800 nanometers, then adopt 400 nm filter to be filtered by basic frequency laser thus realize only having the transmission of frequency multiplication femtosecond laser.The different wave length femto-second laser pulse propagated in two-arm light path finally realize after bundling device conllinear transmission, then through one 4 x Microscope Objectives focus on after vertical irradiation to sample surfaces.Sample surfaces moved to 300 ~ 600 microns of distances before laser spot by controlling three-dimensional precise mobile platform, and with the sweep speed of 0.01 ~ 0.4 mm/second along mobile example in the plane vertical with direction of beam propagation, finally realize the quick preparation of two-dimension periodic submicron particles array structure at sample surfaces.
Embodiment 3
On light path basis in example 1, neutral filter is adopted to be decayed by the fundamental frequency femtosecond laser power incided on bbo crystal, and the azimuth rotating bbo crystal is to obtain maximum shg efficiency, namely crystal o axle is now realized parallel with incident basic frequency laser polarization direction, thus cause residue 800 nanometer laser exported thereafter to keep original linear polarization, and 400 nanometer double-frequency lasers are also linear polarization, and both polarization directions are mutually vertical.After dichroic mirror reflects, the general power of dual wavelength femtosecond laser is 2 milliwatts, sample surfaces is placed on 400 micrometer position before laser spot.Obtain the scanning electron microscopy picture of processing effect when Figure 3 shows that Sample Scan speed is 0.04 mm/second, wherein multiplication factor is respectively 20,000 and 60,000 times.Known from this figure: the oval metal grain structure of formation presents obvious two-dimensional and periodic array distribution, namely transversely Λ=616 nanometer and 236 nanometers are respectively with the space periodic of longitudinal arrangement, oval particle size is in the two directions approximately Φ=(448,230) nanometer.
Embodiment 4
On the device basic of example 1, keep inciding the experiment parameters such as dual wavelength femtosecond laser general power, sample position and the sweep speed on material surface constant, but now by turning the azimuth of bbo crystal at the plane internal rotation perpendicular to incident laser, make its o axle relative to the run-off the straight of incident basic frequency laser linear polarization, thus cause the polarization direction exporting double-frequency laser to be rotated, and also there is respective change in shg efficiency thereupon; In addition, because the angle of now frequency-doubling crystal o axle and incident basic frequency laser polarization direction is not equal to zero, then in frequency multiplication process, incident basic frequency laser can produce the orthogonal e light in polarization direction and o light component in crystal, thus impact is from the polarization characteristic of the residue basic frequency laser after crystal outgoing, namely now it becomes elliptical polarized light.Therefore, not change although say in the dual-wavelength laser general power in such cases from bbo crystal outgoing, wherein the power ratio and polarization state etc. of fundamental frequency and double-frequency laser all change.Figure 4 shows that when rotating bbo crystal o axle and incident ray polarization direction angle and being respectively θ=-25 ° and 35 °, the two-dimensional periodic structure distribution that metal molybdenum is formed on the surface, wherein there is inverse/clockwise inclination relative to the situation in example 3 in the space arrangement direction of array structure, and the two-dimensional space cycle is respectively Λ=(682,284) nanometer and (698,290) nanometer.
Embodiment 5
On light path basis in example 2, first the fundamental frequency femto-second laser pulse that laser instrument exports is entered two different time delay light paths after beam splitter, wherein place bbo crystal in an arm light path and adopt filtering technique to realize only having output and the propagation of frequency multiplication femtosecond laser, and another arm light path keeps the transmission of original fundamental frequency femtosecond laser, both are converted into conllinear transmission means by bundling device, and vertical irradiation is surperficial at metal sample after common optical element focuses on.Adjustment two-arm dual wavelength femtosecond laser is linear polarization and polarization direction is mutually vertical, wherein the power ratio of frequency multiplication and basic frequency laser is about 2:1, and the basic frequency laser arriving sample surfaces is-10 psec < Δ τ <220 psecs relative to the time delay scope of double-frequency laser.Figure 5 shows that the two-dimensional sub-wavelength structure distribution that general power is 6 milliwatts, 400 nanometer double-frequency lasers are formed on the surface in metal molybdenum when delaying 56 psec, the cycle is respectively Λ=654 and 239 nanometers.
The above is only the preferred embodiment of the present invention, it should be pointed out that for those skilled in the art, under the prerequisite not departing from original inventive principle, can also do some improvement and and change.If the basic preparation principle of design is identical with this method, then these improve and change and also should be considered as in protection scope of the present invention.

Claims (8)

1. dual wavelength femtosecond laser prepares the method for two-dimension periodic metallic particles array structure, it is characterized in that the concrete steps of the method are as follows:
The first step, the making of metallic target sample and fixing
After metal solid target surfaces is carried out mechanical grinding and polishing, metallic target sample is totally obtained with deionized water ultrasonic cleaning, then in air ambient, metallic target sample is fixed on three-dimensional precise mobile platform, and controls to realize moving the precision of sample on space three-dimensional (x-y-z) direction by computer;
Second step, the acquisition of dual wavelength femtosecond laser and transmission
By femto-second laser pulse vertical irradiation that laser instrument is exported on BBO nonlinear crystal, obtain the dual wavelength femto-second laser pulse of fundamental frequency and frequency-doubled signal mixing output, then by both after the transmission of conllinear fixed light path or along separate routes time variable delay light path, by same concentrating element with collinear manner vertical irradiation at metallic target sample surfaces;
3rd step, the adjustment of metallic target sample surfaces
Control three-dimensional precise mobile platform, enabling above-mentioned metallic target sample carry out precision along the vertical direction with being parallel to laser beam to move, adjusting metallic target sample surfaces gradient simultaneously and making metallic target sample finished surface in whole processing moving process, keep mutually vertical all the time with laser propagation direction;
4th step, the determination of concentrating element focal position
Select incident femtosecond laser power to be 10 milliwatts, then along the direction progressively mobile example being parallel to beam propagation, form serial ablation pit at metallic target sample surfaces, and determine according to the situation of change of ablation dimple size the focal position focusing on femtosecond laser beam;
5th step, the location of metallic target sample surfaces
Three-dimensional precise mobile platform is regulated to make metallic target sample surfaces move in 300 ~ 600 micrometer ranges in focus front from the focal position of concentrating element along inverse direction of beam propagation;
6th step, the preparation of periodic array in two dimensions structure
All can under concentrating element be irradiated to sample surfaces situation in the pulse of guarantee two-tone femtosecond laser, controlling three-dimensional precise mobile platform makes metallic target sample carrying out two-dimensional movement scanning perpendicular in the plane of beam direction, and by regulating fundamental frequency and double-frequency laser power, polarization state, distance between sample surfaces and focus, thus prepare different two-dimension periodic array of particles distributions at metallic target sample surfaces.
2. method according to claim 1, is characterized in that exporting from laser instrument and impinge perpendicularly on laser signal frequency-doubling crystal is the femto-second laser pulse of linear polarization.
3. method according to claim 1, it is characterized in that the concrete grammar of the acquisition of dual wavelength femtosecond laser described in second step is: the femto-second laser pulse that laser instrument exports is converted into based on frequency doubling non-linear's technology of bbo crystal the dual wavelength femtosecond laser that fundamental frequency and frequency-doubled signal export simultaneously, and realizes the regulation and control to double wave laser polarization state by the azimuth rotating bbo crystal.
4. method according to claim 1, it is characterized in that realizing the transmission of dual wavelength femtosecond laser and the concrete grammar that focuses on is through conllinear fixed light path described in second step: the dual wavelength femtosecond laser exported from frequency-doubling crystal obtains energy attenuation in various degree after dichroic mirror reflects, then both after same optical element focuses on vertical irradiation at metallic target sample surfaces.
5. method according to claim 1, the method that it is characterized in that passing through described in second step time variable delay light path acquisition dual wavelength femtosecond laser is along separate routes:
(1) based on Michelson's interferometer principle, the time delay light path of two different directions is entered after the femto-second laser pulse beam splitting that laser instrument is exported, wherein make only have frequency multiplication femtosecond laser to export by employing BBO frequency-doubling crystal and spectral filtering technology in an arm light path, and another arm light path keeps the transmission of original incident femtosecond laser; In addition, by placing attenuator to realize the energy adjustment to dual wavelength femtosecond laser in every arm light path;
(2) dual wavelength femtosecond laser is after the respective time variable delay light path of two-arm, time upper separate front and back is converted into but the transmission means of spatially conllinear after closing bundle by dichroscope, and through common optical element focusing illumination at metallic target sample surfaces;
(3) regulate the variable optical path delay wire system of two-arm light path, make the basic frequency laser being irradiated to metallic target sample surfaces be-50 psec < Δ τ <260 psecs relative to double-frequency laser pulse time delay scope.
6. method according to any one of claim 1 to 5, is characterized in that the metallic target sample motion scan speed described in the 5th step is 0.005 mm/second to 0.4 mm/second.
7. method according to any one of claim 1 to 5, it is characterized in that preparing in two-dimensionally periodic structure process, when dual wavelength femtosecond laser is linear polarization, required frequency multiplication and basic frequency laser power ratio scope are 1< γ <7; When frequency multiplication femtosecond laser is linear polarization, fundamental frequency femtosecond laser is elliptical polarization, the power ratio scope of required frequency multiplication and basic frequency laser is 0.8< γ <3; And can realize the inclination regulation and control of particle array structure orientation within the scope of ± 35 °.
8. method according to any one of claim 1 to 5, it is characterized in that the periodic array in two dimensions structure prepared at metallic target sample surfaces is actually to be formed in space crossed composition by the cycle striped of two mutually perpendicular directions, wherein long period variation scope is 230 ~ 300 nanometers, variation of short period scope is 580 ~ 640 nanometers, and the metal particle size excursion intersected to form is 200 ~ 500 nanometers.
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