CN109277692B - Femtosecond laser double-pulse regulation and control method for polydimethylsiloxane surface micro-nano structure - Google Patents
Femtosecond laser double-pulse regulation and control method for polydimethylsiloxane surface micro-nano structure Download PDFInfo
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Abstract
The invention relates to a polydimethylsiloxane surface micro-nano structure femtosecond laser double-pulse regulation and control method, belonging to the field of femtosecond laser application; based on local transient electronic regulation, the traditional femtosecond laser is modulated into a pulse chain comprising two sub-pulses in a time domain through an optical delay line, so that the pulse interval is adjustable, meanwhile, the laser energy can be adjusted by an attenuation sheet which can be continuously adjusted, and two beams of light are overlapped in space through a semi-transparent semi-reflecting mirror. Controlling the moving speed of the precision processing platform, and enabling the femtosecond laser to act a group of pulse pairs on the surface of the polydimethylsiloxane material at fixed intervals; and (3) completely cleaning the etched sample in deionized water by using ultrasonic water bath assistance. By adjusting pulse parameters (pulse interval and pulse energy), the invention can process the concave microstructure with smooth surface and controllable surface periodic nanometer stripe contrast. And has the advantages of high efficiency, low cost, controllable appearance of the concave micro-nano structure and the like.
Description
Technical Field
The invention relates to a femtosecond laser double-pulse regulation and control method for a Polydimethylsiloxane (PDMS) surface micro-nano structure, wherein the pulse interval adjustability of femtosecond laser double pulses is utilized to enable the contrast of periodic nano-stripes on the processed PDMS surface to be controllable, and the method belongs to the field of femtosecond laser application.
Background
The micro-nano structure on the surface of the material plays an important role in controlling the properties of the surface of the material, and the properties comprise: optical properties, mechanical properties, wettability, chemical properties, biological properties, etc. The shape and size of the surface micro-nano structure directly influence the performance of the material surface, and how to regulate and control the shape and size of the material surface micro-nano structure is a great challenge to prepare the material surface with good performance. The femtosecond laser is one of ideal micro-nano manufacturing tools, and due to the ultrahigh peak power and the ultrashort pulse width, a three-dimensional micro-nano structure can be processed on the surface of a material or even in the material. The ultrashort pulse width of the femtosecond laser inhibits the thermal diffusion process, so that the femtosecond laser can change the surface appearance and structure without obviously influencing a sub-surface layer, and a unique surface micro-nano structure can be obtained by controlling laser parameters and the like. However, the physical process of femtosecond laser induced surface micro-nano structure is very complex, the action mechanism is not clarified yet, and the regulation and control mode of the surface micro-nano structure has certain limitation, mainly adjusting laser energy, pulse width, polarization state and the like, so that a new regulation and control mode and an internal mechanism thereof need to be explored.
Disclosure of Invention
The invention aims to provide a femtosecond laser double-pulse regulation and control method for a PDMS surface micro-nano structure, and solves the problem of limited regulation and control modes of the material surface micro-nano structure. The method adopts a femtosecond laser optical delay line, and realizes controllable regulation and control of the PDMS surface nanometer stripe based on surface plasma excitation regulation and control.
The invention has the idea that based on electronic local transient regulation, femtosecond laser linear polarized light is focused by an objective lens and then acts on the surface of PDMS, the electron density excited on the surface of PDMS by a first pulse is more critical to the whole etching process, surface plasmons (SPPs) are excited under the action of a second pulse, so that a radial-distributed step-shaped temperature gradient is formed, and a periodic nano stripe structure with controllable stripe contrast can be obtained through regulation and control of pulse intervals and laser energy.
The purpose of the invention is realized by the following technical scheme:
a femtosecond laser double-pulse regulation and control method for a PDMS surface micro-nano structure comprises the following steps:
step one, modulating a traditional femtosecond laser into a femtosecond laser comprising two sub-pulses on a time domain through a basic pulse shaping method, wherein the adjustable range of a pulse interval between the two sub-pulses is 0-5 ps;
adding a continuous adjustable attenuation sheet in the light path to adjust the laser energy to be larger than the ablation threshold of the surface of the processed sample, wherein the energy range of the two sub-pulses is 0-9 mW, and the energy ratio is 1: 1;
focusing the femtosecond laser double pulses by using a focusing objective lens with a numerical aperture value of 0.3;
setting the moving speed of the precision processing platform to be 2000 mu m/s, so that the femtosecond laser acts a pair of pulses on the surface of the sample at intervals, and a photo-damage area is generated on the sample by taking the acting focus of the femtosecond laser pulses as the center, and finally, a large-scale irregularly arranged quasi-periodic crater dot matrix is formed;
and fifthly, obtaining surface micro-nano structures with different shapes by adjusting the pulse interval and the pulse energy of the femtosecond laser double pulses.
The target material used as the target material is Polydimethylsiloxane (PDMS).
The femtosecond laser double-pulse etching is characterized in that under the condition that the total energy of a pulse sequence and the energy ratio of sub-pulses are fixed, the contrast of periodic nano-stripes in an ablated concave microstructure can be regulated and controlled by adjusting the pulse interval of the two sub-pulses; when the energy of the two sub-pulses is 1mW, and the interval between the two sub-pulses is 0ps, the processed concave surface structure has periodic nanometer stripes; when the two sub-pulses are spaced at 0.2ps and 0.8ps, a concave structure array with a smooth surface can be obtained.
The device for processing the femtosecond laser double pulses of the micro-nano structure array on the PDMS surface comprises: the device comprises a femtosecond laser 1, a spectroscope 2, a high-precision translation stage, a reflector 3 capable of translating precisely, an attenuation sheet 4 capable of being adjusted continuously, a reflector 5, a reflector 6, an attenuation sheet 7 capable of being adjusted continuously, a semi-transparent semi-reflecting mirror 8, a focusing objective 9, a sample 10 and a three-dimensional translation stage 11. Connection relation: a light beam emitted by the femtosecond laser 1 is divided into two beams of light by a spectroscope 2, wherein one beam of light passes through a high-precision translation stage and a reflector 3 capable of precisely translating, and the platform can change the propagation distance of the light and passes through an attenuation sheet 4 capable of being continuously adjusted; the other beam of light passes through a reflector 5, a reflector 6 and a continuously adjustable attenuation sheet 7, and then the two beams of light are spatially coincident through a half mirror 8. Finally, the sample is focused vertically onto the surface of the sample 10 by the focusing objective 9. The sample is fixed on a three-dimensional translation stage 11 controlled by a computer program. The focused double pulses act on the surface of the material, and lattice arrays with different intervals can be processed on the target material.
The invention has the advantages that:
1) the invention has very high processing efficiency and precision, provides a method for rapidly scanning by using high-repetition-frequency femtosecond laser double pulses, and can prepare an array consisting of up to 100 ten thousand independent ablation concave smooth quasi-periodic micro-nano structure units within 1 hour.
2) The invention provides a method for preparing a micro-nano structure by utilizing femtosecond laser double-pulse electronic dynamic regulation, pulse intervals are adjustable through an optical delay line, meanwhile, laser energy can be adjusted through a continuous adjustable attenuation sheet, the form of the surface micro-nano structure is controlled by regulating PDMS (polydimethylsiloxane) surface transient electrons excited by femtosecond laser, and the micro-nano structure can be efficiently and accurately processed.
3) The surface of a processed material is irradiated by femtosecond laser double pulses, a lens-like structure is processed on the surface of the material by the first pulse, a gradient field distributed along the center of a light spot is generated by the second pulse regulation, so that the material generates periodic nano-stripes under the action of the second pulse, and the contrast of the periodic nano-stripes is adjustable by regulating the pulse interval and the pulse energy.
4) According to the invention, the pulse interval of the two sub-pulses is adjusted, the contrast of the periodic nano-stripe is regulated, the processed surface structure can be changed, the smooth ablated concave microstructure and the ablated concave microstructure with the periodic nano-stripe are obtained, the fine regulation and control of the femtosecond laser are realized, the processing precision and the processing efficiency of material surface treatment are greatly improved, and the method has a vital application value in the aspects of biological medicine and the like.
The invention relates to a method for efficiently preparing a large-scale quasi-periodic micro-nano structure array by a front edge femtosecond laser double-pulse processing technology, which can prepare an array formed by up to 100 ten thousand independent ablation quasi-periodic micro-nano structure units with smooth concave surfaces within 1 hour. The invention controls the form of the surface micro-nano structure by regulating and controlling the PDMS surface transient electrons excited by the femtosecond laser, and regulates the generated periodic nano stripe contrast by regulating the pulse interval and the pulse energy, and obtains a smooth ablation concave microstructure and an ablation concave microstructure with a nano stripe structure, thereby realizing the fine regulation and control of the femtosecond laser.
Drawings
FIG. 1 is a processing light path diagram for preparing a micro-nano structure on the surface of PDMS through femtosecond laser double-pulse regulation.
Wherein, 1 is a femtosecond laser; 2 is a spectroscope; 3, a high-precision translation stage and a reflector capable of precisely translating; 4 is a continuously adjustable attenuation sheet; 5 is a reflector; 6 is a reflector; 7 is a continuously adjustable attenuation sheet; 8 is a semi-transparent semi-reflecting mirror; 9 is a focusing objective lens; 10 is a sample; and 11 is a three-dimensional translation stage.
Detailed Description
The structural and operational principles of the present invention are described in detail below with reference to the accompanying drawings.
Referring to fig. 1, when the invention is realized, a femtosecond laser double-pulse micro-nano processing platform is firstly built, a light beam emitted by a femtosecond laser 1 is divided into two beams of light by a spectroscope 2, wherein one beam of light passes through a high-precision translation stage and a reflector 3 capable of precisely translating, the platform can change the propagation distance of the light and passes through an attenuation sheet 4 capable of being continuously adjusted; the other beam of light passes through a reflector 5, a reflector 6 and a continuously adjustable attenuation sheet 7, and then the two beams of light are spatially coincident through a half mirror 8. Finally, the sample is focused vertically onto the surface of the sample 10 by the focusing objective 9. The sample is fixed on a three-dimensional translation stage 11 controlled by a computer program.
The parameters of the femtosecond laser used in the experimental process are as follows: a central wavelength of 800nm, a pulse width of 30fs, a repetition frequency of 1kHz, and linear polarization.
Example 1
A femtosecond laser double-pulse regulation and control method for a PDMS surface micro-nano structure comprises the following specific steps:
step one, modulating a traditional femtosecond laser into a femtosecond laser comprising two sub-pulses on a time domain by a basic pulse shaping method, wherein the pulse interval between the two sub-pulses is 0 ps;
step two, adding a continuously adjustable attenuation sheet in the light path to adjust the laser energy to be larger than the ablation threshold of the surface of the processed sample, wherein the energy of the two sub-pulses is 1mW, and the energy ratio is 1: 1;
focusing the femtosecond laser double pulses by using a focusing objective lens with a numerical aperture value of 0.3;
setting the moving speed of the precision processing platform to be 2000 mu m/s, so that the femtosecond laser acts a pair of pulses on the surface of the sample at intervals, and a photo-damage area is generated on the sample by taking the acting focus of the femtosecond laser pulses as the center, and finally, a large-scale irregularly arranged quasi-periodic crater dot matrix is formed;
and fifthly, obtaining surface micro-nano structures with different shapes by adjusting the pulse interval and the pulse energy of the femtosecond laser double pulses.
The schematic diagram of a processing light path for processing a micro-nano structure array on the surface of PDMS by femtosecond laser double pulses is shown in the attached drawing 1, and the specific processing process is as follows:
1) irradiating a sample by femtosecond laser double pulses, adjusting a light path, and ensuring that the incident direction of the laser is vertical to the surface of the processed sample;
2) the pulse interval of the two sub-pulses is adjusted to 0ps by controlling a high-precision translation stage and a reflector capable of precisely translating;
3) the energy of the two sub-pulses is 1mW by adjusting the attenuation sheet, and the pulse energy ratio is set to be 1: 1;
4) the computer controlled three-dimensional translation stage moved at 2000 μm/s relative to the laser focus to machine an array of spots on the sample spaced 20 μm apart.
And (3) processing results: an ablated concave microstructure array with periodic nano-stripes was obtained with a diameter of 9.63 μm and a depth of 1.69 μm.
Example 2
A femtosecond laser double-pulse regulation and control method for a PDMS surface micro-nano structure comprises the following specific steps:
step one, modulating a traditional femtosecond laser into a femtosecond laser comprising two sub-pulses on a time domain by a basic pulse shaping method, wherein the pulse interval between the two sub-pulses is 0.8 ps;
step two, adding a continuously adjustable attenuation sheet in the light path to adjust the laser energy to be larger than the ablation threshold of the surface of the processed sample, wherein the energy of the two sub-pulses is 1mW, and the energy ratio is 1: 1;
focusing the femtosecond laser double pulses by using a focusing objective lens with a numerical aperture value of 0.3;
setting the moving speed of the precision processing platform to be 2000 mu m/s, so that the femtosecond laser acts a pair of pulses on the surface of the sample at intervals, and a photo-damage area is generated on the sample by taking the acting focus of the femtosecond laser pulses as the center, and finally, a large-scale irregularly arranged quasi-periodic crater dot matrix is formed;
and fifthly, obtaining surface micro-nano structures with different shapes by adjusting the pulse interval and the pulse energy of the femtosecond laser double pulses.
The schematic diagram of a processing light path for processing a micro-nano structure array on the surface of PDMS by femtosecond laser double pulses is shown in the attached drawing 1, and the specific processing process is as follows:
1) irradiating a sample by femtosecond laser double pulses, adjusting a light path, and ensuring that the incident direction of the laser is vertical to the surface of the processed sample;
2) the pulse interval of the two sub-pulses is adjusted to 0.8ps by controlling a high-precision translation stage and a reflector capable of precisely translating;
3) the energy of the two sub-pulses is 1mW by adjusting the attenuation sheet, and the pulse energy ratio is set to be 1: 1;
4) the computer controlled three-dimensional translation stage moved at 2000 μm/s relative to the laser focus to machine an array of spots on the sample spaced 20 μm apart.
And (3) processing results: an array of microstructures with smooth ablated pits was obtained with a diameter of 7.46 μm and a depth of 0.884 μm.
Example 3
A femtosecond laser double-pulse regulation and control method for a PDMS surface micro-nano structure comprises the following specific steps:
step one, modulating a traditional femtosecond laser into a femtosecond laser comprising two sub-pulses on a time domain by a basic pulse shaping method, wherein the pulse interval between the two sub-pulses is 0.2 ps;
step two, adding a continuously adjustable attenuation sheet in the light path to adjust the laser energy to be larger than the ablation threshold of the surface of the processed sample, wherein the energy of the two sub-pulses is 1mW, and the energy ratio is 1: 1;
focusing the femtosecond laser double pulses by using a focusing objective lens with a numerical aperture value of 0.3;
setting the moving speed of the precision processing platform to be 2000 mu m/s, so that the femtosecond laser acts a pair of pulses on the surface of the sample at intervals, and a photo-damage area is generated on the sample by taking the acting focus of the femtosecond laser pulses as the center, and finally, a large-scale irregularly arranged quasi-periodic crater dot matrix is formed;
and fifthly, obtaining surface micro-nano structures with different shapes by adjusting the pulse interval and the pulse energy of the femtosecond laser double pulses.
The schematic diagram of a processing light path for processing a micro-nano structure array femtosecond laser double pulse on the PDMS surface is shown in the attached figure 1, and the specific processing process is as follows:
1) irradiating a sample by femtosecond laser double pulses, adjusting a light path, and ensuring that the incident direction of the laser is vertical to the surface of the processed sample;
2) the pulse interval of the two sub-pulses is adjusted to 0.2ps by controlling a high-precision translation stage and a reflector capable of precisely translating;
3) the energy of the two sub-pulses is 1mW by adjusting the attenuation sheet, and the pulse energy ratio is set to be 1: 1;
4) the computer controlled three-dimensional translation stage moved at 2000 μm/s relative to the laser focus to machine an array of spots on the sample spaced 20 μm apart.
And (3) processing results: an array of microstructures with smooth ablated concavities was obtained, 5.8 μm in diameter and 0.727 μm in depth.
Claims (2)
1. The method for regulating and controlling the micro-nano structure of the polydimethylsiloxane surface by femtosecond laser double pulses is characterized by comprising the following steps: the method comprises the following specific steps:
step one, modulating a traditional femtosecond laser into a femtosecond laser comprising two sub-pulses on a time domain through a basic pulse shaping method, wherein the adjustable range of a pulse interval between the two sub-pulses is 0-5 ps;
adding a continuously adjustable attenuation sheet into the light path to adjust the laser energy to be larger than the ablation threshold of the surface of the processed sample, wherein the energy range of the two sub-pulses is 0-9 mW, and the energy ratio is 1: 1;
focusing the femtosecond laser double pulses by using a focusing objective lens with a numerical aperture value of 0.3;
setting the moving speed of the precision processing platform to be 2000 mu m/s, so that the femtosecond laser acts a pair of pulses on the surface of the sample at intervals, and a photo-damage area is generated on the sample by taking the acting focus of the femtosecond laser pulses as the center, and finally, a large-scale irregularly arranged quasi-periodic crater dot matrix is formed;
and fifthly, obtaining surface micro-nano structures with different shapes by adjusting the pulse interval and the pulse energy of the femtosecond laser double pulses.
2. The method for regulating and controlling the femtosecond laser double pulses of the polydimethylsiloxane surface micro-nano structure according to the claim 1, wherein the contrast of the periodic nanometer stripes in the concave microstructure can be regulated and controlled by regulating the pulse interval of two sub-pulses of the femtosecond laser.
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