CN109277692A - Dimethyl silicone polymer surface micro-nano structure femtosecond double pulses regulate and control method - Google Patents
Dimethyl silicone polymer surface micro-nano structure femtosecond double pulses regulate and control method Download PDFInfo
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- CN109277692A CN109277692A CN201811476741.1A CN201811476741A CN109277692A CN 109277692 A CN109277692 A CN 109277692A CN 201811476741 A CN201811476741 A CN 201811476741A CN 109277692 A CN109277692 A CN 109277692A
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Abstract
The present invention relates to a kind of dimethyl silicone polymer surface micro-nano structure femtosecond double pulses to regulate and control method, belongs to femtosecond laser application field；The present invention is based on local transient state is electronic-controlled, it is modulated to the pulse train comprising two subpulses in the time domain by the traditional femtosecond laser of optical delay bundle of lines, so that the pulse spacing is adjustable, laser energy can be adjusted with the attenuator of continuously adjustable simultaneously, be overlapped two-beam spatially by semi-transparent semi-reflecting lens.The mobile rate of Precision Machining platform is controlled, femtosecond laser is every fixed distance in a polydimethyl siloxane material surface action set of pulses pair；It is assisted using ultrasound bath, the sample after etching is thoroughly cleaned up in deionized water.The concave surface micro-structure that surface is smooth and surface periodic nanometer fringe contrast is controllable can be processed by adjusting pulse parameter (pulse spacing, pulse energy) in the present invention.And have many advantages, such as high efficiency, low cost, concave surface micro-nano structure morphology controllable.
Description
Technical field
The present invention relates to a kind of dimethyl silicone polymer (PDMS) surface micro-nano structure femtosecond double pulses to regulate and control method,
The pulse spacing adjustability of femtosecond double pulses is wherein utilized, so that the periodic nanometer fringe contrast on the surface PDMS of processing
Degree is controllable, belongs to femtosecond laser application field.
Background technique
The micro nano structure of material surface plays the role of critically important, these performance packets for the performance for controlling material surface
It includes: optical property, mechanical performance, wetting property, chemical property, biological property etc..The pattern and size of surface micro-nano structure are straight
The performance for influencing material surface is connect, how the morphology and size of material surface micro-nano structure is regulated and controled, preparation has good
The material surface of performance is a great challenge.Femtosecond laser is a kind of one of ideal minute manufacturing tool, since it is super
High peak power and ultrashort pulse width even internal on the surface of the material can process three-dimensional micro-nano structure using it.By
Thermal diffusion process is inhibited in the ultra-short pulse width of femtosecond laser, so femtosecond laser can be shown not generating to sub-surface layer
It writes and changes surface topography and structure in the case where influencing, unique surface micro-nano knot is obtained with by control laser parameter etc.
Structure.However, the physical process of femtosecond laser induction surface micro-nano structure is extremely complex, the mechanism of action is not yet clarified, and right
In surface micro-nano structure control methods there are also certain limitation, mainly adjusting laser energy, pulse width, polarization state
Deng, it is therefore desirable to explore new control methods and its inherent mechanism.
Summary of the invention
The purpose of the present invention is solve material to provide a kind of PDMS surface micro-nano structure femtosecond double pulses regulation method
Expect the limited problem of the control methods of surface micro-nano structure.This method is based on surface by using femtosecond laser optical delay line
Plasma exciatiaon regulation, realizes the controllable regulation to PDMS nano surface striped.
Idea of the invention is that being regulated and controled based on electronics Local Transient, after being focused using femtosecond laser linearly polarized light by object lens
The surface PDMS is acted on, first pulse is more crucial for entire etching process in the electron density of PDMS surface excitation, the
Excitation generates surface plasma excimer (SPPs) under two impulse actions, to form radially-arranged ladder-like temperature ladder
Degree, can be obtained the controllable periodic nanometer striated structure of fringe contrast by the regulation of pulse spacing and laser energy.
The purpose of the present invention is what is be achieved through the following technical solutions:
A kind of PDMS surface micro-nano structure femtosecond double pulses regulation method, comprising the following steps:
Step 1: traditional femtosecond laser is modulated in the time domain comprising two by the basic skills of shaping pulse
The femtosecond laser of subpulse, the pulse spacing adjustable extent between two subpulses are 0~5ps；
It is allowed to be greater than processed sample surfaces Step 2: continuously adjustable attenuator is added in the optical path and adjusts laser energy
Ablation threshold, the energy range of two subpulses are 0~9mW, energy ratio 1:1；
Step 3: being focused using the focusing objective len that numeric aperture values are 0.3 to femtosecond double pulses；
Step 4: setting Precision Machining platform movement speed as 2000 μm/s, so that femtosecond laser exists every a distance
Sample surfaces act on a pair of of pulse, to generate a photo damage centered on femto-second laser pulse effect focus on sample
Area ultimately forms crater dot matrix paracycle of extensive irregular arrangement；
Step 5: by the pulse spacing of adjusting femtosecond double pulses, pulse energy, the surface for obtaining different-shape is micro-
Micro-nano structure.
The target material as target is dimethyl silicone polymer (PDMS).
The femtosecond double pulses etching is the condition fixed in pulse train gross energy and subpulse energy proportion
Under, by adjusting the pulse spacing of two subpulses, pair of the periodic nanometer striped in the micro-structure of ablation concave surface can be regulated and controled
Degree of ratio；When two sub- pulse energies are 1mW, when two sub- pulse spacings are 0ps, processed concave structure has periodically
Nanometer striped；When two sub- pulse spacings are 0.2ps and 0.8ps, the smooth concave structure array in surface can get.
A kind of device realized in the surface PDMS processing micro-nano structure array femtosecond double pulses, comprising: fly
Second laser 1, spectroscope 2, high-precision flat moving stage and can accurate translation reflecting mirror 3, the attenuator 4 of continuously adjustable is reflective
Mirror 5, reflective mirror 6, the attenuator 7 of continuously adjustable, semi-transparent semi-reflecting lens 8, focusing objective len 9, sample 10, D translation platform 11.Even
Connect relationship: the light beam that femto-second laser 1 issues is divided into two-beam by spectroscope 2, wherein light beam through high-precision flat moving stage and
Can accurate translation reflecting mirror 3, this platform can change the propagation distance of light, and pass through the attenuator 4 of continuously adjustable；It is another
Shu Guang passes through the attenuator 7 of reflecting mirror 5, reflecting mirror 6 and continuously adjustable, and then two-beam exists by a semi-transparent semi-reflecting lens 8
Spatially it is overlapped.10 surface of sample is vertically focused on finally by focusing objective len 9.Sample is fixed on to be controlled by computer program
D translation platform 11 on.Dipulse effect after focusing can process different spacing on the surface of the material on target material
Dot-matrix array.
The present invention has the advantages that
1) processing efficiency and precision of the present invention are very high, propose a kind of fast using high repetition frequency femtosecond double pulses
The method of speed scanning, can prepare within an hour micro-nano knot paracycle that up to 1,000,000 independent ablation concave surfaces are smooth
The array that structure unit is constituted.
2) the invention proposes a kind of methods for preparing micro-nano structure using femtosecond double pulses dynamic control, lead to
Crossing optical delay line makes the pulse spacing adjustable, while laser energy can be adjusted by continuously adjustable attenuator, by regulating and controlling to fly
The PDMS surface transient electronics of second laser excitation controls the form of surface micro-nano structure, efficiently can accurately process micro-nano structure.
3) present invention irradiates the surface of machined material by femtosecond double pulses, and first pulse adds on the surface of the material
Work generates class lens arrangement, and second pulse regulation generates the gradient fields being distributed along spot center, so that material is in second arteries and veins
Punching effect is lower to generate periodic nanometer striped, and makes periodic nanometer striped by adjusting pulse spacing and pulse energy
Contrast is adjustable.
4) present invention is regulated and controled the contrast of periodic nanometer striped, can be changed by the pulse spacing of two subpulses of adjusting
Become finished surface structure, obtains smooth ablation concave surface micro-structure and the ablation concave surface micro-structure with periodic nanometer striped, it is real
The finely regulating for having showed femtosecond laser greatlys improve the machining accuracy and processing efficiency of material surface processing, in biological medicine
Etc. have vital application value.
Of the present invention is that a kind of obtained efficient preparation of forward position femtosecond double pulses processing technology is extensive quasi-
The method of periodic micro/nano structure array, this method can prepare within an hour up to 1,000,000 independent ablation concave surface light
The array that sliding micro-nano structure unit paracycle is constituted.The PDMS surface transient electronics that the present invention passes through regulation femtosecond laser excitation
The form of surface micro-nano structure is controlled, the periodic nanometer fringe contrast generated is made by adjusting pulse spacing and pulse energy
It spends adjustable, and obtains and smooth ablation concave surface micro-structure and have the ablation concave surface micro-structure of nanometer striated structure, realize femtosecond and swash
The finely regulating of light.
Detailed description of the invention
Fig. 1 is the processing index path that femtosecond double pulses regulate and control the preparation of PDMS surface micro-nano structure.
Wherein, 1 is femto-second laser；2 be spectroscope；3 for high-precision flat moving stage and can accurate translation reflecting mirror；4 are
The attenuator of continuously adjustable；5 be reflective mirror；6 be reflective mirror；7 be the attenuator of continuously adjustable；8 be semi-transparent semi-reflecting lens；9
For focusing objective len；10 be sample；11 be D translation platform.
Specific embodiment
Structural principle and working principle of the invention are described in detail with reference to the accompanying drawing.
Referring to Fig.1, when realizing the present invention, femtosecond double pulses micro-nano technology platform is first built, femto-second laser 1 is sent out
Light beam out is divided into two-beam by spectroscope 2, wherein light beam through high-precision flat moving stage and can accurate translation reflecting mirror 3,
This platform can change the propagation distance of light, and pass through the attenuator 4 of continuously adjustable；Another light beam is by reflecting mirror 5, reflection
Mirror 6 and the attenuator of continuously adjustable 7, then two-beam is spatially overlapped by a semi-transparent semi-reflecting lens 8.Finally by poly-
Focus objective lens 9 vertically focus on 10 surface of sample.Sample is fixed on the D translation platform 11 by computer program control.
The femto-second laser parameter used in experimentation is as follows: central wavelength 800nm, pulse width 30fs, weight
Complex frequency is 1kHz, linear polarization.
Embodiment 1
A kind of PDMS surface micro-nano structure femtosecond double pulses regulation method, the specific steps are as follows:
Step 1: traditional femtosecond laser is modulated in the time domain comprising two by the basic skills of shaping pulse
The femtosecond laser of subpulse, the pulse spacing between two subpulses are 0ps；
It is allowed to be greater than processed sample table Step 2: the attenuator that continuously adjustable is added in the optical path adjusts laser energy
The ablation threshold in face, the energy of two subpulses are 1mW, energy ratio 1:1；
Step 3: being focused using the focusing objective len that numeric aperture values are 0.3 to femtosecond double pulses；
Step 4: setting Precision Machining platform movement speed as 2000 μm/s, so that femtosecond laser exists every a distance
Sample surfaces act on a pair of of pulse, to generate a photo damage centered on femto-second laser pulse effect focus on sample
Area ultimately forms crater dot matrix paracycle of extensive irregular arrangement；
Step 5: by the pulse spacing of adjusting femtosecond double pulses, pulse energy, the surface for obtaining different-shape is micro-
Micro-nano structure.
Realize femtosecond double pulses in processing light path schematic diagram such as 1 institute of attached drawing of the surface PDMS processing micro-nano structure array
Show, specific process is as follows:
1) femtosecond double pulses irradiation sample is utilized, optical path is adjusted, it is ensured that laser light incident direction and institute's processed sample table
Face is vertical；
2) by control high-precision flat moving stage and can accurate translation reflecting mirror, the pulse spacing of two subpulses is adjusted
For 0ps；
3) energy of two subpulses is made to be 1mW by adjusting attenuator, pulse energy ratio is set as 1:1；
4) computer control D translation platform is moved with the speed of 2000 μm/s relative to laser spot, is processed on sample
20 μm of lattice array is divided between out.
Processing result: obtaining the ablation concave surface micro structure array with periodic nanometer striped, and diameter is 9.63 μm, depth
It is 1.69 μm.
Embodiment 2
A kind of PDMS surface micro-nano structure femtosecond double pulses regulation method, the specific steps are as follows:
Step 1: traditional femtosecond laser is modulated in the time domain comprising two by the basic skills of shaping pulse
The femtosecond laser of subpulse, the pulse spacing between two subpulses are 0.8ps；
It is allowed to be greater than processed sample table Step 2: the attenuator that continuously adjustable is added in the optical path adjusts laser energy
The ablation threshold in face, the energy of two subpulses are 1mW, energy ratio 1:1；
Step 3: being focused using the focusing objective len that numeric aperture values are 0.3 to femtosecond double pulses；
Step 4: setting Precision Machining platform movement speed as 2000 μm/s, so that femtosecond laser exists every a distance
Sample surfaces act on a pair of of pulse, to generate a photo damage centered on femto-second laser pulse effect focus on sample
Area ultimately forms crater dot matrix paracycle of extensive irregular arrangement；
Step 5: by the pulse spacing of adjusting femtosecond double pulses, pulse energy, the surface for obtaining different-shape is micro-
Micro-nano structure.
Realize femtosecond double pulses in processing light path schematic diagram such as 1 institute of attached drawing of the surface PDMS processing micro-nano structure array
Show, specific process is as follows:
1) femtosecond double pulses irradiation sample is utilized, optical path is adjusted, it is ensured that laser light incident direction and institute's processed sample table
Face is vertical；
2) by control high-precision flat moving stage and can accurate translation reflecting mirror, the pulse spacing of two subpulses is adjusted
For 0.8ps；
3) energy of two subpulses is made to be 1mW by adjusting attenuator, pulse energy ratio is set as 1:1；
4) computer control D translation platform is moved with the speed of 2000 μm/s relative to laser spot, is processed on sample
20 μm of lattice array is divided between out.
Processing result: obtaining the smooth micro structure array in ablation concave surface, and diameter is 7.46 μm, and depth is 0.884 μm.
Embodiment 3
A kind of PDMS surface micro-nano structure femtosecond double pulses regulation method, the specific steps are as follows:
Step 1: traditional femtosecond laser is modulated in the time domain comprising two by the basic skills of shaping pulse
The femtosecond laser of subpulse, the pulse spacing between two subpulses are 0.2ps；
It is allowed to be greater than processed sample table Step 2: the attenuator that continuously adjustable is added in the optical path adjusts laser energy
The ablation threshold in face, the energy of two subpulses are 1mW, energy ratio 1:1；
Step 3: being focused using the focusing objective len that numeric aperture values are 0.3 to femtosecond double pulses；
Step 4: setting Precision Machining platform movement speed as 2000 μm/s, so that femtosecond laser exists every a distance
Sample surfaces act on a pair of of pulse, to generate a photo damage centered on femto-second laser pulse effect focus on sample
Area ultimately forms crater dot matrix paracycle of extensive irregular arrangement；
Step 5: by the pulse spacing of adjusting femtosecond double pulses, pulse energy, the surface for obtaining different-shape is micro-
Micro-nano structure.
Realize processing light path schematic diagram such as 1 institute of attached drawing in the surface PDMS processing micro-nano structure array femtosecond double pulses
Show, specific process is as follows:
1) femtosecond double pulses irradiation sample is utilized, optical path is adjusted, it is ensured that laser light incident direction and institute's processed sample table
Face is vertical；
2) by control high-precision flat moving stage and can accurate translation reflecting mirror, the pulse spacing of two subpulses is adjusted
For 0.2ps；
3) energy of two subpulses is made to be 1mW by adjusting attenuator, pulse energy ratio is set as 1:1；
4) computer control D translation platform is moved with the speed of 2000 μm/s relative to laser spot, is processed on sample
20 μm of lattice array is divided between out.
Processing result: obtaining the smooth micro structure array in ablation concave surface, and diameter is 5.8 μm, and depth is 0.727 μm.
Claims (3)
1. dimethyl silicone polymer surface micro-nano structure femtosecond double pulses regulate and control method, it is characterised in that: specific steps are such as
Under:
Step 1: traditional femtosecond laser is modulated in the time domain comprising two sub- arteries and veins by the basic skills of shaping pulse
The femtosecond laser of punching, the pulse spacing adjustable extent between two subpulses are 0 ~ 5ps；
It is allowed to be greater than processed sample surfaces Step 2: the attenuator that continuously adjustable is added in the optical path adjusts laser energy
Ablation threshold, the energy range of two subpulses are 0 ~ 9mW, energy ratio 1:1；
Step 3: being focused using the focusing objective len that numeric aperture values are 0.3 to femtosecond double pulses；
Step 4: setting Precision Machining platform movement speed as 2000mm/s, so that femtosecond laser is every a distance in sample
Surface action a pair of pulse, to generate a photo damage area centered on femto-second laser pulse effect focus on sample, most
End form at extensive irregular arrangement crater dot matrix paracycle；
Step 5: obtaining the surface micro-nano knot of different-shape by the pulse spacing of adjusting femtosecond double pulses, pulse energy
Structure.
2. dimethyl silicone polymer surface micro-nano structure femtosecond double pulses according to claim 1 regulate and control method, institute
The micro-nano structure array said is irregular array paracycle.
3. dimethyl silicone polymer surface micro-nano structure femtosecond double pulses according to claim 1 regulate and control method,
It is characterized in that, by adjusting the pulse spacing of two subpulses of femtosecond laser, the periodicity that can regulate and control in the micro-structure of concave surface is received
The contrast of rice striped.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109861061A (en) * | 2019-04-02 | 2019-06-07 | 西安交通大学 | Realize the femtosecond laser temporal shaping pulse active control method that near-field nanometer focuses |
| CN110280776A (en) * | 2019-04-15 | 2019-09-27 | 清华大学 | Gold nanorods enhancing shaping methods and its system based on intra two-pulse laser |
| CN114515901A (en) * | 2022-01-21 | 2022-05-20 | 广州大学 | Preparation method of silicon nanospheres |
| CN114591527A (en) * | 2022-03-07 | 2022-06-07 | 南京理工大学 | Preparation method of polymer film surface periodic structure regulated by laser wavefront |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101177664A (en) * | 2007-11-28 | 2008-05-14 | 江苏大学 | Method and device for transplantation of femtosecond laser nucleus |
| CN102000912A (en) * | 2010-09-21 | 2011-04-06 | 中国科学院理化技术研究所 | Laser micro-nano machining system and method |
| CN103862171A (en) * | 2014-03-28 | 2014-06-18 | 南开大学 | Method for preparing two-dimensional periodic metal particle array structure through dual-wavelength femtosecond lasers |
| CN103934576A (en) * | 2014-04-15 | 2014-07-23 | 北京理工大学 | Method for inducting two-dimensional periodic structure on surface of material through femtosecond laser |
| CN106735925A (en) * | 2017-03-21 | 2017-05-31 | 商丘师范学院 | A kind of femtosecond laser direct write preparation method of two-dimentional sub-micron butterfly metal micro structure |
| CN107790887A (en) * | 2017-11-16 | 2018-03-13 | 商丘师范学院 | The femtosecond laser direct write preparation method of two-dimentional rhombus cycle micro-nano metal structure |
-
2018
- 2018-12-04 CN CN201811476741.1A patent/CN109277692B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101177664A (en) * | 2007-11-28 | 2008-05-14 | 江苏大学 | Method and device for transplantation of femtosecond laser nucleus |
| CN102000912A (en) * | 2010-09-21 | 2011-04-06 | 中国科学院理化技术研究所 | Laser micro-nano machining system and method |
| CN103862171A (en) * | 2014-03-28 | 2014-06-18 | 南开大学 | Method for preparing two-dimensional periodic metal particle array structure through dual-wavelength femtosecond lasers |
| CN103934576A (en) * | 2014-04-15 | 2014-07-23 | 北京理工大学 | Method for inducting two-dimensional periodic structure on surface of material through femtosecond laser |
| CN106735925A (en) * | 2017-03-21 | 2017-05-31 | 商丘师范学院 | A kind of femtosecond laser direct write preparation method of two-dimentional sub-micron butterfly metal micro structure |
| CN107790887A (en) * | 2017-11-16 | 2018-03-13 | 商丘师范学院 | The femtosecond laser direct write preparation method of two-dimentional rhombus cycle micro-nano metal structure |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109861061A (en) * | 2019-04-02 | 2019-06-07 | 西安交通大学 | Realize the femtosecond laser temporal shaping pulse active control method that near-field nanometer focuses |
| CN110280776A (en) * | 2019-04-15 | 2019-09-27 | 清华大学 | Gold nanorods enhancing shaping methods and its system based on intra two-pulse laser |
| CN114515901A (en) * | 2022-01-21 | 2022-05-20 | 广州大学 | Preparation method of silicon nanospheres |
| CN114591527A (en) * | 2022-03-07 | 2022-06-07 | 南京理工大学 | Preparation method of polymer film surface periodic structure regulated by laser wavefront |
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