CN109861061A - Realize the femtosecond laser temporal shaping pulse active control method that near-field nanometer focuses - Google Patents

Realize the femtosecond laser temporal shaping pulse active control method that near-field nanometer focuses Download PDF

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CN109861061A
CN109861061A CN201910261209.6A CN201910261209A CN109861061A CN 109861061 A CN109861061 A CN 109861061A CN 201910261209 A CN201910261209 A CN 201910261209A CN 109861061 A CN109861061 A CN 109861061A
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femtosecond laser
pulse
graphene
reflecting
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杜广庆
陈烽
樊焕荣
杨青
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Xian Jiaotong University
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Xian Jiaotong University
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Abstract

The present invention relates to a kind of femtosecond laser temporal shaping pulse active control methods realizing near-field nanometer and focusing.Solves the problems such as laser co-focusing lack of resolution, STED relies on fluorescent material and the regulation flexibility of the nano-focusing of surface plasma is poor.Firstly, obtaining the modified composite Nano ball material of graphene by processing;Secondly, femtosecond laser pulse is decomposed into a series of femto-second laser pulse column separated from each other in time domains using femtosecond laser temporal shaping optical system;The modified composite Nano ball material of graphene is irradiated finally, being arranged using the femto-second laser pulse obtained, localization near field enhancement effect occurs in the modified composite Nano ball material of graphene and target material contact surface region.This method is not necessarily to consider the structure snd size parameter of the modified composite Nano ball of graphene, only need to can realize the active control to near-field nanometer focusing by the time of multiple-pulse in regulation femtosecond laser temporal shaping pulse and polarization combination and energy distribution.

Description

Realize the femtosecond laser temporal shaping pulse active control method that near-field nanometer focuses
Technical field
The invention belongs near field optic fields, and in particular to a kind of femtosecond laser temporal shaping realizing near-field nanometer and focusing Pulse active control method.
Background technique
Optical nano, which focuses on the fields such as micro- physics, chemistry and biomedicine etc., detection, nanometer manufacture, has many dive Application value, such as space high-resolution imaging, nano-photoetching, photo-thermal therapy, Surface enhanced Raman spectroscopy, single-molecule detection etc. Deng becoming the focus of people's research in recent years.
Existing optical nano focusing technology includes laser co-focusing, stimulated emission depletion (STED) focus and surface etc. from Daughter nano-focusing (SP) etc..Although the prior art has obtained tremendous development on theoretical and engineer application, or more Or there are many defects less.
Laser co-focusing is that the detection light emitted from a point light source passes through lens focus to being observed on object, if object Body is just in focus, then reflected light should be converged by former lens returns to light source.It can be to object by mobile lens system It is scanned, to realize the high-resolution nanometer imaging of resolution ratio 100nm or so.But macromolecular, nano particle etc. are received When the object of meter ruler cun (characteristic size < 50nm) is imaged, which is unable to satisfy resolution requirement.
Stimulated emission depletion (STED) reduces the hair of effective fluorescence introducing a branch of loss light in a manner of stimulated emission Light area, may be implemented the spatial resolution of super diffraction limit, and STED is mainly used in nanometer imaging, fine structure photoetching, surpasses The fields such as high density storage.But the technology needs fluorescent material auxiliary to realize high-resolution optics nano-focusing, due to fluorescence Material has damage very serious to biological cell, neuron etc., such as fluorescent powder may be such that cell becomes in biomedicine Property, therefore its application range is restricted.
Nano-focusing based on surface plasma is by laser irradiation micro-nano plasmon structures, in specific incident wavelength Micro- junction structure surface electronic can generate surface plasma resonance, and generate spatial altitude localization in micro-nano structure adjacent domain Near field focus hot spot.Spectrum, spatial distribution of this near field focus light etc. and the size, shape, arrangement mode of micro-nano structure are close Cut phase is closed.In order to realize target application such as super-resolution imaging, nanometer waveguide, nano-photoetching, single-molecule detection, surface enhanced drawing Graceful spectrum, photo-thermal therapy etc. need to design and the Wavelength matched surface plasma resonance micro-nano structure of feature.Different are answered With environment, the resonant wavelength of designed micro-nano structure can all shift, and application flexibility, popularity is all restricted, A kind of nano-focusing method for thus developing surface plasma based on laser active control is expected to ask technology described above Topic is effectively solved.
Summary of the invention
In order to solve above-mentioned laser co-focusing lack of resolution, STED is relied on fluorescent material and surface plasma Nano-focusing regulation flexibility it is poor, the problems such as application range is limited, the invention proposes a kind of bases for exempting from glimmering material auxiliary In the high-resolution nano-focusing method of femtosecond laser shaped pulse active control.This method utilizes the pulse of femtosecond laser temporal shaping The modified composite Nano ball material of graphene is irradiated, in nanosphere material surface excitating surface plasma resonance, and in its proximity The near field focus hot spot of domain generation spatial altitude localization.
One layer of noble metal film is deposited first on silica nanosphere, and legal system is restored using hydrazine hydrate method and carbonizatin method Obtain the modified composite Nano ball material of graphene.Regulate and control the electronics of the modified composite Nano ball material of graphene by temporal shaping pulse The fermi level of excitation and graphene, so that surface etc. can be generated in the micro- junction structure surface electronic of specific incident wavelength by realizing The active control of ion resonance, the final regulation realized to near-field nanometer focal beam spot spectrum, spatial characteristics.This hair can Laser co-focusing lack of resolution is effectively solved, STED is relied on fluorescent material and the nano-focusing of surface plasma Regulate and control the problems such as flexibility is poor, and application range is limited, this method is not necessarily to consider the structure and ruler of the modified composite Nano ball of graphene Very little parameter need to only be distributed just by the time of multiple-pulse in regulation femtosecond laser temporal shaping pulse and polarization combination and energy The active control to near-field nanometer focusing may be implemented.
The technical solution of the invention is as follows provides a kind of femtosecond laser temporal shaping pulse realizing near-field nanometer and focusing Active control method, comprising the following steps:
The modified composite Nano ball material of S1, graphene;
Noble metal film is deposited in dielectric nanometer ball surface, and in noble metal film outer layer growing graphene, obtains graphene Modified composite Nano ball material;
S2, the femto-second laser pulse for obtaining temporal shaping;
Femtosecond laser pulse is decomposed into a system by the femtosecond laser temporal shaping optical system built using optical element Femto-second laser pulse column separated from each other in column time domain;
S3, it is arranged using the femto-second laser pulse that step S2 is obtained to the modified composite Nano ball material of the graphene of step S1 preparation Material is irradiated, and localization near field enhancing effect occurs in the modified composite Nano ball material of graphene and rapidoprint contact surface region It answers.
Further, by adjusting the optical element in step S2, common femto-second laser pulse is passed through into optical delay line It is reconfigured in the time domain, obtains the pulse spacing, the multiple-pulse column that energy parameter is redistributed.
Further, electrostatic methods are added to change Fermi's energy of graphene also by mixing in step S1.
Further, it in step S1, by electron beam evaporation plating in dielectric nanometer ball surface noble metal-coating film, is formed Composite nano materials;
Graphene is grown on composite nano materials surface as follows:
S101, graphene oxide is prepared;
S102, graphene oxide is added dropwise in composite nano materials;
S103, the modified composite nano materials of graphene have been made using hydrazine hydrate method and carbonizatin method reduction.
Further, above-mentioned dielectric nanosphere is the material that the forbidden bandwidths such as silica are greater than 2eV;The noble metal For precious metal materials such as gold or silver.
Further, in order to enhance localization near field conspicuousness, the growth number of plies of graphene is greater than 1 less than 10, and electricity is situated between The radius of matter nanosphere is 35nm~65nm;The thickness of noble metal film is between 10nm~25nm.
Further, in step S2,
The femtosecond laser temporal shaping optical system includes the n optical unit set gradually along optical path;
Each optical unit include the first semi-transparent semi-reflecting lens, the second semi-transparent semi-reflecting lens and be located at the first semi-transparent semi-reflecting lens it is anti- Penetrate and/or transmitted light path in optic extension line;The optic extension line is between the burst length in reflection and/or transmitted light beam Regulated and controled every, pulse polarization state and pulse energy, second semi-transparent semi-reflecting lens will be by anti-after the adjusting of optic extension line It penetrates and transmitted light carries out conjunction beam;
The first semi-transparent semi-reflecting lens in first optical unit are located in the emitting light path of femtosecond laser, the latter optics list The first semi-transparent semi-reflecting lens in member are located in the emitting light path of previous the second semi-transparent semi-reflecting lens of optical unit.Femtosecond laser beam is logical First semi-transparent semi-reflecting lens is crossed, reflected light returns through the opposite reflecting mirror of two panels mirror surface and imports main optical path;Transmitted light is through light It learns delay line and imports main optical path;Converge light beam in main optical path to continue to pass through the 2nd, the 3rd in the same way ... n-th semi-transparent half Anti- mirror, n converge on road light beam and eventually enter into near-field nanometer focusing system.
Further, each optical unit further includes the first reflecting mirror to, the second reflecting mirror pair and third reflecting mirror pair;Institute The first reflecting mirror is stated to being located in the reflected light path of the first semi-transparent semi-reflecting lens, second reflecting mirror is semi-transparent semi-reflecting to being located at first In the transmitted light path of mirror, the third reflecting mirror is to the emitting light path and next optical unit for being located at the second semi-transparent semi-reflecting lens In the input path of one semi-transparent semi-reflecting lens;
The reflecting mirror that every group of reflecting mirror is 90 ° to opposite including two mirror surfaces and angle;
The optic extension line includes quarter wave plate and attenuator, the 1KHz pulse train for exporting to femtosecond laser Time interval is regulated and controled, and the pulse of femtosecond laser temporal shaping is obtained.
Further, the optical maser wavelength of the femtosecond laser is 700~900nm;Irradiation time is 1~3h in step S3; The average output power of the femtosecond laser is 3W, and pulse width is 50~100fs.
The present invention also provides a kind of femtosecond laser temporal shaping optical system, be characterized in that including along optical path according to N optical unit of secondary setting;
Each optical unit include the first semi-transparent semi-reflecting lens, the second semi-transparent semi-reflecting lens and be located at the first semi-transparent semi-reflecting lens it is anti- Penetrate and/or transmitted light path in optic extension line;The optic extension line is between the time of reflection and/or transmitted pulse light beam Regulated and controled every, polarization state and energy, second semi-transparent semi-reflecting lens are by the reflected impulse light after the adjusting of optic extension line Beam and transmitted pulse light beam close beam;
The first semi-transparent semi-reflecting lens in first optical unit are located in the emitting light path of femtosecond laser, the latter optics list The first semi-transparent semi-reflecting lens in member are located in the emitting light path of previous the second semi-transparent semi-reflecting lens of optical unit.
Further, each optical unit further includes the first reflecting mirror to, the second reflecting mirror pair and third reflecting mirror pair;Institute The first reflecting mirror is stated to being located in the reflected light path of the first semi-transparent semi-reflecting lens, second reflecting mirror is semi-transparent semi-reflecting to being located at first In the transmitted light path of mirror, the third reflecting mirror is to the emitting light path and next optical unit for being located at the second semi-transparent semi-reflecting lens In the input path of one semi-transparent semi-reflecting lens;
The reflecting mirror that every group of reflecting mirror is 90 ° to opposite including two mirror surfaces and angle;
The optic extension line includes quarter wave plate and attenuator.
Compared with prior art, the present invention at least has the advantages that
1, this method is using the modified composite Nano ball material of femtosecond laser temporal shaping pulsed irradiation graphene, in nanosphere Material surface excitating surface plasma resonance, and the near field focus hot spot of spatial altitude localization is generated in its adjacent domain.It is logical Cross active of the time shaped pulse realization to surface plasma resonance can be generated in the micro- junction structure surface electronic of specific incident wavelength Regulation, the final regulation realized to near-field nanometer focal beam spot spectrum, spatial characteristics.This hair can effectively solve the problem that laser is total Focus resolution is insufficient, and STED relies on fluorescent material and the regulation flexibility of the nano-focusing of surface plasma is poor, answers The problems such as being limited with range, this method are not necessarily to consider the structure snd size parameter of the modified composite Nano ball of graphene, need to only pass through The time of multiple-pulse and polarization combination and energy distribution can be realized near field in regulation femtosecond laser temporal shaping pulse The active control of nano-focusing process.
2, common 1KHz femto-second laser pulse is carried out weight by adjusting multiple optical delay units by the present invention in the time domain Combination nova, the adjustable femtosecond laser temporal shaping pulse of the multi-parameters such as obtained pulse energy, pulse polarization state, pulse spacing.
3, the present invention is swashed using the electronics of the grapheme modified modified composite Nano ball material of femtosecond laser temporal shaping pulse State is sent out, to realize to the active control that can generate surface plasma resonance in the micro- junction structure surface electronic of specific incident wavelength.
4, the present invention changes Fermi's energy of graphene by way of additional electrostatic, to realize in specific incident wavelength Micro- junction structure surface electronic can generate the active control of surface plasma resonance.
5, for the number of plies of graphene of the present invention between 1 to 10 layers, silica radius is 35nm~65nm, noble metal film Thickness between 10nm~25nm, the preparation of the class formation may be implemented in existing technique.
Detailed description of the invention
Fig. 1 is the temporal shaping femtosecond laser multi-pulse schematic diagram that the present invention is obtained by active control;
Fig. 2 is embodiment optical shaping system schematic diagram;The optical element of black background color is semi-transparent semi-reflecting lens, grey in figure The optical element of background color is optic extension line, and the optical element of no background color is reflecting mirror;
Fig. 3 is an optical unit index path in embodiment optical shaping system;
Appended drawing reference in figure are as follows: the first reflecting mirror pair of 1-, the second reflecting mirror pair of 2-, 3- third reflecting mirror pair, 4- the first half Saturating semi-reflective mirror, the second semi-transparent semi-reflecting lens of 5-, 6- optic extension line, 7- reflecting mirror;
Fig. 4 be strength process schematic diagram;
Fig. 5 a is resonant wavelength 1.2um, is not covered with graphene illustraton of model;
Fig. 5 b is resonant wavelength 1.8um, is not covered with graphene illustraton of model;
Fig. 6 a is resonant wavelength 1.2um, covers graphene illustraton of model;
Fig. 6 b is resonant wavelength 1.8um, covers graphene illustraton of model;
Fig. 7 is that covering graphene distinguishes 0,2,4,6 layers of composite Nano ball spectrogram.
Specific embodiment
Below by drawings and examples, technical scheme of the present invention will be described in further detail.
The present invention provides a kind of femtosecond laser shaped pulse active control methods realizing near-field nanometer and focusing, any By growing graphene on the modified composite Nano ball material surface of graphene in medium, changing Fermi in graphene can The enhancing for realizing localization utilizes the modified composite Nano ball material of active control temporal shaping femto-second laser pulse irradiation graphene After treat rapidoprint and carry out micro-nano technology, by adjusting the pulse spacing of temporal shaping femtosecond laser and energy parameter to reality The femtosecond laser shaped pulse active control effect that existing near-field nanometer focuses.Avoid optical near-field nano-focusing application in by Refractive index in material it is different and caused by resonant wavelength drift the problem of keeping the technique of processing undesirable or even failure.
The present embodiment realizes the femtosecond laser temporal shaping pulse active control method that near-field nanometer focuses, including following step It is rapid:
S1, a layer thickness is plated on the silica nanosphere that radius is 35~65nm using existing disclosed technology is 10 The noble metal films such as the gold, silver of~25nm form composite Nano ball material;
Grapheme material is wrapped up on composite Nano ball later and forms the modified composite Nano ball material of graphene, the present embodiment It is realized especially by following methods:
S101, using Hummers oxidizing process, prepare graphene oxide, be washed with deionized water to neutrality, take the oxygen of 20mg Graphite alkene is diluted to 300ml with deionized water, and ultrasound 1 hour in supersonic cleaning machine, and it is molten to obtain graphene oxide dispersion APTES (anhydrous ethylene: APTES=is added after then dispersing the processed 20mg silica of HF acid with anhydrous ethylene in liquid 800:1) open stirring 4 hours in 35 degrees Celsius of waters bath with thermostatic control;
S102, while be kept stirring, diluted graphene oxide is added dropwise in modification silica, then 35 Degree Celsius constant temperature quickly stirs to be centrifuged afterwards for 24 hours;
S103, by upper step centrifugation after product washed with acetone after in 40 degrees Celsius of drying in oven, so in retort 400 degrees Celsius are carbonized 4 hours, and product after the centrifugation of upper step is diluted with deionized water, with successively spent after the reduction of hydrazine reduction method from Sub- water, ethyl alcohol, acetone respectively wash 3 times drying, have just obtained the modified composite Nano ball of graphene.
S2, the femto-second laser pulse that temporal shaping is obtained by optical shaping system arrange;
The present embodiment uses optical shaping system as shown in Figure 3, and above-mentioned optical shaping system includes successively setting along optical path Set n optical unit.Figure it is seen that each optical unit includes the first semi-transparent semi-reflecting lens 4, the second semi-transparent semi-reflecting lens 5, the first reflecting mirror in 4 reflected light path of the first semi-transparent semi-reflecting lens to 1 with optical delay line 6, be located at it is first semi-transparent semi-reflecting The second reflecting mirror in 4 transmitted light path of mirror is to 2 and optical delay line 6, the third in 5 emitting light path of the second semi-transparent semi-reflecting lens Reflecting mirror is to 3;Above-mentioned optical delay line 6 include 1/4 slide and attenuator, for by the first semi-transparent semi-reflecting lens 4 reflection or The laser pulse of transmission carries out time interval and energy adjustment;5 pairs of above-mentioned second semi-transparent semi-reflecting lens are adjusted by optical delay line 6 Laser pulse carry out conjunction beam.The first semi-transparent semi-reflecting lens 4 in first optical unit are located in the emitting light path of femtosecond laser, The first semi-transparent semi-reflecting lens 4 in the latter optical unit are located at previous optical unit third reflecting mirror in 3 emitting light path. First reflecting mirror is to the 1, second reflecting mirror to 2 and third reflecting mirror to the reflection that 3 include that two mirror surfaces are opposite and are arranged in 90 ° Mirror 7.
It is provided with optical delay line in the present embodiment in transmitted light path and reflected light path, it can also be in other embodiments It is arranged just for transmission or reflection optical path, and the position of optical delay line can be between two reflecting mirrors or any one After after a reflecting mirror.The quantity of 1/4 slide and attenuator in optical delay line and and attenuation parameter can be according to practical need Setting is asked, to obtain delay time and the different delay optical path of energy.
Femtosecond laser beam is by the first semi-transparent semi-reflecting lens 4 in first optical unit, and reflected light is through the first reflecting mirror Main optical path is imported back through the second semi-transparent semi-reflecting lens 5 to 1 and optical delay line 6;Transmitted light is through the second reflecting mirror to 2 and light Pass through the second semi-transparent semi-reflecting lens 5 remittance main optical path after learning delay line 6;Converge light beam continuation in main optical path to pass through in the same way 2nd, the 3rd ... n-th of semi-transparent semi-reflecting lens, n converge on road light beam and eventually enter into near-field nanometer focusing system.
S3, the graphene modification to step S1 preparation is arranged again using the femto-second laser pulse of the step S2 temporal shaping obtained It closes nanometer ball material to be irradiated, localization near field enhancement effect occurs in contact surface.
700~900nm of wavelength of the present embodiment laser, average output power 3W, pulse width are 50~100fs, are shone Penetrating the time is 1~3h.
The mathematic(al) representation of the femto-second laser pulse S. E. A. T (t) of temporal shaping are as follows:
Wherein tpFor the pulse width of each pulse, n is pulse number, and the time interval between pulse is expressed as Δ;I table Show i-th of pulse.
Electronics be excited after graphene inner electron fermi level be Ef(γ)(Te)
Wherein γ refers to the different contributions for being excited inner electron for dielectric function, Efd(γ)Different electronic shell are opposite Band gap width in conduction band bottom, KbDielectric constant, TeFor electron temperature.
For the interaction of the pulse of femtosecond laser temporal shaping and the modified composite Nano ball material of graphene, heat source item S(t)It can be described as
Wherein F(t)For laser power density, V is the volume of the modified composite Nano ball material of graphene, CabsChange for graphene Absorption cross-section of the property composite Nano ball material to incident light
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with attached drawing, to the present invention Technical effect verified.
Fig. 5 a, Fig. 5 b and Fig. 6 a, Fig. 6 b are please referred to, femtosecond laser irradiation is respectively indicated and looks unfamiliar without graphene covering and appearance The composite Nano ball spectrogram of graphene is grown.It will become apparent from resonant wavelength corresponding localization electric field peak from Fig. 6 a and Fig. 6 b It is big to be worth localization peak electric field more corresponding with resonant wavelength identical in Fig. 5 b than Fig. 5 a.Illustrate to cover graphene metal nano The localization near-field nanometer focusing effect of material is clearly.
Referring to Fig. 7, clearly can be seen that the number of plies increase with graphene from Fig. 7, although resonant wavelength does not have substantially It changes, but localization electric-field enhancing is fairly obvious.The growth number of plies of graphene is 1 to 10 layer in the present embodiment, The enhancing of localization near field conspicuousness;Electron amount is few in single-layer graphene, few the free electron that excitation generates, generation Localization electric field is unobvious, and the number of plies of graphene is higher than 10 layers, due to other reasons such as free electron saturation or hydridization, so that Also no longer conspicuousness enhances localization electric field.
The above content is merely illustrative of the invention's technical idea, and this does not limit the scope of protection of the present invention, all to press According to technical idea proposed by the present invention, any changes made on the basis of the technical scheme each falls within claims of the present invention Protection scope within.

Claims (11)

1. a kind of femtosecond laser temporal shaping pulse active control method realizing near-field nanometer and focusing, which is characterized in that including Following steps:
The modified composite Nano ball material of S1, graphene;
Noble metal film is deposited in dielectric nanometer ball surface, and in noble metal film outer layer growing graphene, it is modified to obtain graphene Composite Nano ball material;
S2, the femto-second laser pulse for obtaining temporal shaping;
When femtosecond laser pulse is decomposed into a series of by the femtosecond laser temporal shaping optical system built using optical element Femto-second laser pulse column separated from each other on domain;
S3, using step S2 obtain femto-second laser pulse arrange to step S1 preparation graphene modification composite Nano ball material into In the modified composite Nano ball material of graphene and target material contact surface region localization near field enhancement effect occurs for row irradiation.
2. the femtosecond laser temporal shaping pulse active control method according to claim 1 realizing near-field nanometer and focusing, It is characterized by: obtaining the pulse spacing by adjusting the optical element in step S2, the multiple-pulse that energy parameter is redistributed Column.
3. the femtosecond laser temporal shaping pulse active control method according to claim 2 realizing near-field nanometer and focusing, It is characterized by: also adding electrostatic methods to change Fermi's energy of graphene by mixing in step S1.
4. the femtosecond laser temporal shaping pulse active control method according to claim 3 realizing near-field nanometer and focusing, It is characterized by:
In step S1, by electron beam evaporation plating in dielectric nanometer ball surface noble metal-coating film, composite nano materials are formed;
Graphene is grown on composite nano materials surface as follows:
S101, graphene oxide is prepared;
S102, graphene oxide is added dropwise in composite nano materials;
S103, the modified composite nano materials of graphene have been made using hydrazine hydrate method and carbonizatin method reduction.
5. the femtosecond laser temporal shaping pulse active control method according to claim 4 realizing near-field nanometer and focusing, It is characterized by: the dielectric nanosphere is the material that silica or forbidden bandwidth are greater than 2eV;The noble metal be gold or Silver.
6. the femtosecond laser temporal shaping pulse active control method according to claim 5 realizing near-field nanometer and focusing, It is characterized by: the growth number of plies of graphene is greater than 1 less than 10, the radius of dielectric nanosphere is 35nm~65nm;Noble metal The thickness of film is between 10nm~25nm.
7. the femtosecond laser temporal shaping pulse active control method according to claim 1 realizing near-field nanometer and focusing, It is characterized by:
In step S2,
The femtosecond laser temporal shaping optical system includes the n optical unit set gradually along optical path;
Each optical unit include the first semi-transparent semi-reflecting lens (4), the second semi-transparent semi-reflecting lens (5) and be located at the first semi-transparent semi-reflecting lens (4) reflection and/or transmitted light path in optic extension line (6);The optic extension line (6) is to reflection and/or transmitted pulse light Time interval, polarization state and the energy of beam are regulated and controled, and second semi-transparent semi-reflecting lens (5) will adjust by optic extension line (6) Reflected impulse light beam and transmitted pulse light beam after section close beam;
The first semi-transparent semi-reflecting lens (4) in first optical unit are located in the emitting light path of femtosecond laser, the latter optics list The first semi-transparent semi-reflecting lens (4) in member are located in the emitting light path of previous the second semi-transparent semi-reflecting lens of optical unit (5).
8. the femtosecond laser temporal shaping pulse active control method according to claim 7 realizing near-field nanometer and focusing, It is characterized by:
Each optical unit further include the first reflecting mirror to (1), the second reflecting mirror to (2) and third reflecting mirror to (3);Described One reflecting mirror is located at (1) in the reflected light path of the first semi-transparent semi-reflecting lens (4), and second reflecting mirror is located at the first half to (2) In the transmitted light path of saturating semi-reflective mirror (4), the third reflecting mirror to (3) be located at the second semi-transparent semi-reflecting lens (5) emitting light path and In the input path of next the first semi-transparent semi-reflecting lens of optical unit (4);
The reflecting mirror (7) that every group of reflecting mirror is 90 ° to opposite including two mirror surfaces and angle;
The optic extension line (6) includes quarter wave plate and attenuator.
9. -8 any femtosecond laser temporal shaping pulse active control realizing near-field nanometer and focusing according to claim 1 Method, it is characterised in that: the optical maser wavelength of the femtosecond laser is 700~900nm;Irradiation time is 1~3h in step S3;Institute The average output power for stating femtosecond laser is 3W, and pulse width is 50~100fs.
10. a kind of femtosecond laser temporal shaping optical system, it is characterised in that: including the n optics list set gradually along optical path Member;
Each optical unit include the first semi-transparent semi-reflecting lens (4), the second semi-transparent semi-reflecting lens (5) and be located at the first semi-transparent semi-reflecting lens (4) reflection and/or transmitted light path in optic extension line (6);The optic extension line (6) is to reflection and/or transmitted pulse light Time interval, polarization state and the energy of beam are regulated and controled, and second semi-transparent semi-reflecting lens (5) will adjust by optic extension line (6) Reflected impulse light beam and transmitted pulse light beam after section close beam;
The first semi-transparent semi-reflecting lens (4) in first optical unit are located in the emitting light path of femtosecond laser, the latter optics list The first semi-transparent semi-reflecting lens (4) in member are located in the emitting light path of previous the second semi-transparent semi-reflecting lens of optical unit (5).
11. femtosecond laser temporal shaping optical system according to claim 10, it is characterised in that:
Each optical unit further include the first reflecting mirror to (1), the second reflecting mirror to (2) and third reflecting mirror to (3);Described One reflecting mirror is located at (1) in the reflected light path of the first semi-transparent semi-reflecting lens (4), and second reflecting mirror is located at the first half to (2) In the transmitted light path of saturating semi-reflective mirror (4), the third reflecting mirror to (3) be located at the second semi-transparent semi-reflecting lens (5) emitting light path and In the input path of next the first semi-transparent semi-reflecting lens of optical unit (4);
The reflecting mirror (7) that every group of reflecting mirror is 90 ° to opposite including two mirror surfaces and angle;
The optic extension line (6) includes quarter wave plate and attenuator.
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