CN102179622A - Method for preparing microstructural target by using laser to improve laser propulsion impulse coupling coefficient - Google Patents
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Abstract
The invention discloses a method for preparing a microstructural target by using laser to improve a laser propulsion impulse coupling coefficient. In the method, preprocessing treatment is performed on a solid target in an ablation laser propulsion technology by a focused near-infrared femtosecond laser pulse, so that microstructures in various shapes can be generated on the surface of the solid target to effectively enhance the impulse coupling coefficient. The microstructural solid target prepared by the femtosecond laser pulse comprises a plurality of types of protruding structures and groove structures which contribute to enhancing light absorption. By a high-sensitivity torsion balance precision measurement device established by experiments, the impulse coupling coefficient of the microstructural solid target is improved by about 170 percent compared with that of a common plane target which is not preprocessed by femtosecond laser within a laser flux variation range of 0.6 to 100 joules/square centimeter. The new method for effectively enhancing the conversion from light energy to mechanical energy in the laser ablation process is potentially and importantly applied in the technical field of laser propulsion.
Description
Technical field
The invention belongs to the structural design and the making field of used solid target in the laser Push Technology, be specifically related to use the micro-structural of femto-second laser pulse, and accurate measurement shows that the solid target of these micro-structurals can improve and strengthen the momentum coupling performance in the ablative laser propelling effectively by experiment at solid target surface preparation acquisition variform.
Background technology
The laser Push Technology has been human since the fifties in last century artificial satellite being sent into Earth's orbit, first kind of novel Push Technology that may realize the LEO launch mission.The laser Push Technology is compared with traditional chemical propulsion technology, has the advantage that load ratio is higher, propulsive parameter (impulse coupling coefficient and specific impulse) adjustable range is bigger and can surmount the maximum speed limit of each grade chemical fuel rocket.In the near future, the laser Push Technology get a good chance of space junk removing, attitude of flight vehicle adjustment, spacecraft orbit is motor-driven and LEO emission and even deep space aerial mission in play an important role.
The initial notion that laser advances is proposed in 1969 by the people such as R. L. Geisler in USAF rocket propulsion laboratory (AFRPL).1974, A. people such as the N. Pirri Long Pulse LASER of having carried out pulse width 100s, wavelength 10.6m advances experiment, obtained impulse coupling coefficient [the Propulsion by absorption of laser radiation. AIAA J. of 10-100 dyne/W, 1974,12 (9): 1254-1261].People such as L. N. Myrabo were using single pulse energy 400 J in 1997, and the 10 kW CO 2 pulse laser devices of pulse recurrence frequency 25 Hz as propellant, have successfully been tested the laser propelling experiment that line is led with air first.Phase at the same time, C. people such as R. Phipps also is devoted to the impulse coupling coefficient that pulse laser and matter interaction produce and the research work of specific impulse, and the laser that has obtained different wave length, different pulse widths produces best laser flow [the Laser impulse coupling at 130 fs. Appl. Surf. Sci. of the maximum thrust coefficient of coup by ablating, 2006,252 (13): 4838-4844].
Since 2000, A. people such as V. Pakhomov utilizes the picosecond laser pulse to carry out the research that ablative laser advances, and studying the performance of multiple materials such as lead, aluminium, acetal resin, polytetrafluoroethylene (PTFE) in ablative laser advances under different laser flows and the incidence angle condition, [Ablative laser propulsion:an update, part 1. 2 to seek the combination of optimum impulse coupling coefficient and specific impulse
NdInternational symposium on beamed energy propulsion, 2004. 702:166-177].The shock wave sequence that people such as V. V. Apollonov proposition in 2002 utilizes a high repeat frequency pulsed laser to induce forms the strong shock wave near the plane, thereby improves impulse coupling coefficient [Stable generation and merging of shock waves for lightcraft applications:part 1. 3 effectively
RdInternational symposium on beamed energy propulsion, 2005. 766:205-215].
People's waters such as T. Yabe in 2002 cover the surface of metallic target, make so-called water cannon target (water cannon target), under the pulsed laser action of pulse width 5 ns that the YAG laser instrument is exported, the impulse coupling coefficient of water cannon target can reach 350 dyne/W[Microairplane propelled by laser driven exotic target. Appl. Phys. Lett., 2002,80 (23): 4318-4320], compare with using the simple metal target, improved impulse coupling coefficient exponentially.They have done further improvement on the basis of water cannon target subsequently, metal free water cannon target(MFWC has been proposed again) and water film cannon target(WFC) two kinds of target structures, impulse coupling coefficient reaches 240 dyne/W and 368 dyne/W[Laser Propulsion Using Metal-Free Water Cannon Target. 3 respectively
RdInternational symposium on beamed energy propulsion, 2005. 766:394-405].
At home, 2006, Chinese Academy of Sciences's physics seminar use the laser pulse ablation water-confined target(of centre wavelength 532 nm, maximum single pulse energy 800 mJ, pulsewidth 7 ns similar to water cannon target) obtained impulse coupling coefficient [Enhancement of coupling coefficient of laser plasma propulsion by water confinement. Appl. Phys. A above 250 dyne/W, 2006,85,441-443].2007, the flat seminar of the Tang Zhi of China Science ﹠ Technology University water is as propellant, use the YAG laser pulse of wavelength 1.064 μ m, single pulse energy 1.2 J, pulsewidth 12 ns, obtained the impulse coupling coefficient [experimental study of laser water Push Technology of 350 dyne/W, Experimental Mechanics, 2007,22 (1): 43-48].Though laser advances, particularly the impulse coupling coefficient of Long Pulse LASER propelling has been higher than the impulse coupling coefficient that the traditional chemical propulsion mode can be realized far away, but reflection, scattering and the transmission of laser energy can take place in the process of laser and target effect inevitably, thereby cause the waste of laser energy.Therefore, the target that how to develop novel efficient absorption laser energy has become present stage laser and has advanced a important topic in the field.
In recent years, along with the fast development of ultra-short pulse laser technology, the ultrafast laser process technology realizes functional structure and device is little, the emerging means of nanometer receive increasing concern as a kind of.Compare with traditional planar technology, that femtosecond laser microfabrication and technology of preparing have is simple to operate, flexible, speed fast, low cost and other advantages.At present, people utilize femtosecond laser at surfaces of various materials or inner [the Enhancing near-infrared avalanche photodiode performance by femtosecond laser microstructuring of the processing on the submicron-scale that realized, Applied Optics, 2006,45 (35): 8825-8831], solved the key technology problems in the practical application.Recently, researchers are with Dan Shu [Periodic ordering of random surface nanostructures induced by femtosecond laser pulses on metals, Journal of Applied Physics, 2007,101:034903; Ultra-broadband enhanced absorption of metal surfaces structured by femtosecond laser pulses "; Optics Express; 16 (15): 11259-11265 (2008)] or multi beam [Enhanced optical absorptance of metals using interferometric femtosecond ablation; Optics Express; 2007; 15 (21): 13838-13843] femtosecond laser shine the metal surface induce produced three kinds dissimilar little, nanostructured, and record experimentally metal material that these surfaces have micro-nano structure can to ultraviolet-visible-in the incident electromagnetic wave of infrared broadband scope have tangible antireflection characteristic.Yet, existing correlative study mostly is confined to induce the generality of micro-nano structure phenomenon to describe to femtosecond laser, we yet there are no and use the processing design and fabrication of femtosecond laser to the solid target in the ablative laser propelling at present, and the pacing amount of going forward side by side confirms the relevant report of its momentum coupling performance in ablative laser advances.
Summary of the invention
Technical problem to be solved by this invention is: how to utilize the femtosecond laser parallel micromachining technology that the solid target in the ablative laser propelling is carried out surface preparation, grasp wherein key technology and method, and pass through to adopt novel micro-structural target effectively to strengthen, thereby realize ablative laser is advanced the further lifting of whole efficiency by the impulse coupling coefficient that advances the laser ablation generation.With compare without the pretreated common plane solid target of femtosecond laser, the solid target that these surfaces have micro-structural can improve impulse coupling coefficient about 170% in the ablative laser progradation.The technology of the present invention is convenient, fast, operability is high, has overcome numerous and diverse operation that traditional structural design and manufacturing technology method are brought.
The present invention solves this technical problem the technical scheme that is adopted: use femto-second laser pulse and advance solid target (is example with the metal sample) surface preparation to produce the micro-structural of various ways in ablative laser, and by the foundation of high sensitivity torsion balance device and accurately measurement, find and to confirm that these micro-structural solid targets increase than the impulse coupling coefficient without the pretreated corresponding target of femtosecond laser about 170%, provide new method for further effectively improving the laser propulsive efficiency.The steps include:
The first step is used for the solid material that ablative laser advances target with being elected to be, and for example the metallic aluminium sample carries out surperficial mechanical grinding and buffing, then uses the deionized water ultrasonic cleaning, and then places the cleaning open containers to treat that it is air-dry, as the target sample.
Second step, in air ambient, use microcobjective or optical lens that femto-second laser pulse is focused on the specimen material surface of vertical irradiation after first step polishing, back, and seek and the accurate position of definite laser spot, and then sample surfaces is adjusted to appropriate position away from the focal plane along backlight Shu Fangxiang by the size of observation material surface ablated area.
In the 3rd step, setting femtosecond laser machined parameters is: pulse recurrence frequency 1 KHz, pulse durations 50 femtosecond, pulse center wavelength 800 nanometers, and make that incident laser pulse is a linearly polarized light for the linearly polarized light laser pulse.
The 4th step was placed on pending solid target sample on the three-dimensional precise mobile platform, and controlled sample moving spatially by computer, and minimum mobile accuracy is 1 micron, and the sample translational speed can be selected in 0.05-1 mm/second scope.
The 5th step was keeping under the constant situation of incoming laser beam, by choosing suitable laser energy, and with pending solid target sample with the light beam vertical plane in carry out motion scan line by line, be implemented in the large tracts of land micro-structural preparation on the solid target sample surfaces.The sample moving direction can become any angle with the polarization direction, and the distance between adjacent two scan lines can be selected in the 2-100 micrometer range.When the mean power of incident femto-second laser pulse was regulated in 40-250 milliwatt scope, corresponding change also can take place in the microstructure appearance that the sample surfaces generation is observed in experiment, finally obtains two kinds of dissimilar micro-structural targets.
In the 6th step, with the solid target sample deionized water ultrasonic cleaning after the femtosecond laser processing of the 5th step, effectively remove deposit, and microexamination and measurement are carried out in its surface attached to sample surfaces.In the 7th step, go on foot in the experimental system that the surface micro-structure solid target that successfully prepares is applied to ablative laser propelling the 6th, and accurately measure its impulse coupling coefficient in laser ablation process by setting up high sensitivity torsion balance device;
The 8th step, in the ablative laser progradation, when incident laser energy is given regularly, can be by the distance of regulating between solid target and the condenser lens so that the laser flux in the hot spot irradiation area changes, thereby the ablative laser that records common plane target and micro-structural target respectively advances the variation relation of impulse coupling coefficient with laser flux, and then, can find that the micro-structural solid target can improve the impulse coupling coefficient that ablative laser advances effectively by analysis to measurement data.
Femto-second laser pulse described in above-mentioned second step focuses on and adopts microcobjective or optical lens, the solid target sample surfaces is adjusted to position range place away from focal plane 10-250 micron along backlight Shu Fangxiang, can avoid the high laser flux at laser spot place that the degree of depth that the target sample surfaces may cause is ablated like this.
Solid target movement of sample speed is selected in 0.05-1 mm/second scope described in above-mentioned the 4th step, and minimum mobile accuracy is 1 micron, and the distance between adjacent two motion scan lines is selected in the 2-100 micrometer range.
Solid target movement of sample scanning direction becomes any angle with the polarization direction of incident femto-second laser pulse described in above-mentioned the 5th step; The mean power of incident laser pulse changes in 40-250 milliwatt scope; The micro-structural type for preparing at the target sample surfaces comprises: graininess raised structures that periodicity is arranged and the groove structure of periodically arranging.
The invention has the beneficial effects as follows:
(1) extremely short owing to the femto-second laser pulse duration, even less pulsed laser energy also can have high peak power.Single peak-power of laser pulse can be up to 4 * 10 among the present invention
10Watt, this will can cause on the one hand and be attended by many nonlinear physics effects in the femtosecond laser mechanism, thereby make the metal surface self-organizing to form difform micro nano structure; On the other hand, the supper-fast pulse duration will cause the material heat-conduction effect in the laser action process fundamentally being weakened and eliminating, thereby makes the spatial dimension of Laser Processing can be controlled at sub-micron or nanometer scale.For traditional plane exposure technical matters, that femtosecond laser preparation process of the present invention has is convenient, quick, need not other auxiliary environment and technology, but the sample surfaces self-organizing forms the remarkable advantages such as micro-structural of variform.
(2) existing at present document [Compact and robust laser impulse measurement device, with ultrashort pulse laser ablation results[C]. Beamed energy propulsion:5
ThInternational symposium on beamed energy propulsion, AIP conference proceedings, New York:American Institute of Physics, 2008,997:147-158; Light propulsion of microbeads with femtosecond laser pulses[J]. Opt. Express, 2004,12 (15): 3590-3598] impulse coupling coefficient of Bao Dao metal targets sample in femtosecond laser is ablated propelling is generally several dyne/watt (1 dyne=10
-5Newton), the laser propulsive efficiency is lower.It is about 170% that metallic target propeller with surface micro-structure described in the present invention can improve impulse coupling coefficient, is expected to have important application prospects advancing in the relevant application with laser.
Description of drawings
The present invention is further described below in conjunction with drawings and Examples.
Fig. 1 does not use the scanning electron micrograph of the common plane metallic aluminium target sample of the inventive method processing for embodiment 1.
Fig. 2 uses the scanning electron micrograph of the micro-structural metallic aluminium target sample that the inventive method obtain after mean power is 40 milliwatt femtosecond laser preliminary treatment for embodiment 2.
Fig. 3 is the scanning electron micrograph of the invention process 3 employed micro-structural metallic aluminium target samples that obtain after mean power is 140 milliwatt femtosecond laser preliminary treatment.
Fig. 4 is the scanning electron micrograph of the invention process 4 employed micro-structural metallic aluminium target samples that obtain after mean power is 250 milliwatt femtosecond laser preliminary treatment.
Fig. 5 is the installation drawing of the invention process 1,2,3,4 employed measurement solid targets impulse coupling coefficient in the ablative laser progradation.Wherein: 1 expression ultrashort laser pulse; The optical lens of 2 expression focal distance f=100 millimeter; 3 expression solid target samples; 4 expression helium neon laser beams; The optical lens of 5 expression focal distance f=705 millimeter; 6 expression ccd detectors; 7 expression optical fiber; The liftable periscope device of 8 expressions.
Fig. 6 for the different metal target sample that records in the invention process 1,2,3,4 in the ablative laser progradation impulse coupling coefficient with the graph of a relation of incident laser variations of flux, wherein
Expression is without the pretreated common plane target of femtosecond laser gained result;
The gained result of the micro-structural target that expression process mean power 250 milliwatt femtosecond lasers prepare;
The gained result of the micro-structural target that expression process mean power 140 milliwatt femtosecond lasers prepare;
The gained result of the micro-structural target that expression process mean power 40 milliwatt femtosecond lasers prepare.
The specific embodiment
The first step, 10 * 10 * 2 cubic millimeters reguline metal aluminium target samples are polished step by step with 400-800 waterproof abrasive paper and machine glazed finish after, the scanning electron microscopy sheet of sample surfaces is for as shown in Figure 1.Use the deionized water ultrasonic cleaning, be placed in the cleaning open containers stand-by then;
Second step, set up highly sensitive torsion balance device and accurately measure the momentum that above-mentioned common metal aluminium target sample produces in the ablative laser progradation, and the enhancing degree of research momentum coupling.Experimental provision is shown in Fig. 5 (a).For the influence that prevents that air from flowing torsion balance is measured, whole torsion balance device places an airtight plexiglass tent.The ultrashort laser pulse and being used for of target of being used to ablate is surveyed the He-Ne Lasers signal that torsion balance rotates and is entered cover inside by the optical window on the plexiglass tent.Wherein torsion balance is by suspension with rock two parts and form.The suspension that torsion balance uses is 125 microns of cladding diameters, the standard single mode telecommunication optical fiber that core diameter is 8.2 microns (SMF-28e, Corning Inc.).Long 778 millimeters of suspension.Rocking also of torsion balance is made of two parts.In the middle of the pendulum is a little square speculum that is coated with the aluminium film, and substrate is an optical grade stiffened acrylic; The remainder of pendulum is made by common pmma material.The target of two same material identical in quality is fixed on the L type support at pendulum two ends during experiment.
In the 3rd step, use He-Ne laser in the experiment as surveying radiant.He-Ne Lasers through rocking mirror reflects is the lens focusing of 705 millimeters (wavelength is 632.8 nanometers) by a focal length.Regulate the position that receives CCD in the experiment, make on its focal plane that just is positioned at He-Ne Lasers.The solid target sample that rocks when the laser pulse bombardment that focuses on makes and rocks when rotating, and the direction of propagation of He-Ne Lasers signal after rocking mirror reflects changes, and it is surveyed by high-sensitive CCD at the situation of movement in space and accepts.Shown in Fig. 5 (b), it is that 100 millimeters lens focus on by a focal length that laser pulse is carried bundle back through a liftable periscope, and the laser pulse after the focusing is used for ablating and is fixed on the target that rocks.The effect of liftable periscope is to change by lifting the position of laser pulse bombardment target in the experiment, and when making each measurements, what each laser pulse bombarded all is the new region of being bombarded on the target.Utilize CCD to observe little energy femtosecond laser in the experiment and determine the position of target with respect to condenser lens through the back-scattering light of target sample.
The 4th step, we advance the single pulsed laser energy that uses in the experiment at laser is 0.65 millijoule, pulse width is 50 femtoseconds, can realize that by the distance of regulating between solid target and the condenser lens incident laser flux changes in 0.6 joule/square centimeter to ~ 100 joules/square centimeter scope.When the incident laser flux is determined, by measuring the displacement of luminous point in the CCD recording laser ablation process, can obtain the hard-over of torsion balance, thereby calculate the momentum that single laser pulse is ablated and produced, just can obtain impulse coupling coefficient divided by the single pulse energy that uses of ablating with momentum.The impulse coupling coefficient that experiment records common plane metallic aluminium target sample concerns as among Fig. 6 with the laser changes in flow rate
Shown in the curve.Therefrom we are as can be seen: when the incident laser flux increases gradually, the impulse coupling coefficient of this solid target sample increases earlier and reduces then, when the incident laser flux is about 9 joules/square centimeter, the impulse coupling coefficient of common plane metallic aluminium target sample reaches maximum, be about 4.5 dyne/watt.
The first step is identical with embodiment 1.
Second step, in air ambient, use microcobjective or optical lens with the femto-second laser pulse vertical focusing of incident in the first step on the handled solid metal aluminium target sample, and in sample surfaces is adjusted to scope away from focal plane 10-250 micron along backlight Shu Fangxiang;
The 3rd step, the experiment parameter of setting the femtosecond laser preparation is: the sweep speed that the spacing between pulse recurrence frequency 1 KHz, pulse width 50 femtoseconds, pulse center wavelength 800 nanometers, the adjacent Laser Processing groove can be selected in the 20-100 micrometer range, sample moves can be selected in 0.05-1 mm/second scope, and femto-second laser polarized direction can become arbitrarily angled with sample motion scan direction.
In the 4th step, the mean power of regulating incident laser pulse is 40 milliwatts, after above-mentioned laser irradiating method is handled metallic aluminium target sample, can be observed its surface by SEM and has formed a kind of peculiar fine structure, as shown in Figure 2.It is made up of the projection and the groove of many micron dimensions, and these micro-structurals make the metallic target sample surfaces become comparatively coarse, are similar to a kind of absorber of loose structure.Direct viewing with the naked eye, this metallic target sample surfaces colour-darkening that is covered with micro-structural.
In the 5th step, except that the metallic aluminium target sample that adopts above-mentioned surface micro-structure, other technologies and experiment condition are all identical with step 2 among the embodiment 1.
The 6th step, identical with step 3 among the embodiment 1.
The 7th step, identical with step 4 among the embodiment 1.The impulse coupling coefficient that experiment records micro-structural metallic aluminium target sample concerns as among Fig. 6 with the laser changes in flow rate
Shown in the curve.Compare with common plane metallic aluminium target sample, the impulse coupling coefficient of such surface micro-structure metallic aluminium target sample increases, maximum increase to 6.5 dyne/watt, but this moment, corresponding laser flux was reduced to 2.1 joules/square centimeter.We think that this may be because aluminium target sample surfaces micro-structural makes the Laser Ablation Threshold reduction cause.
Embodiment 3
Be 140 milliwatts with the incident laser pulse average power adjustments except that prepare micro-structural solid target process at femtosecond laser in, the other technologies step is all identical with embodiment 2 with experiment condition.In this case, experiment is observed through the postradiation metallic aluminium target of femtosecond laser sample surfaces and also is formed with the striated micro-structural that a plurality of bump array form, and its scanning electron micrograph as shown in Figure 3.Compare with Fig. 2, when incident laser power became big, the size that metallic aluminium target sample surfaces forms bulge-structure diminished gradually as can be known for we.The impulse coupling coefficient that experiment records surface micro-structure metallic aluminium target sample concerns as Fig. 6 with the laser changes in flow rate
Shown in the curve.We find that with this understanding, micro-structural metallic aluminium target sample still has higher impulse coupling coefficient than common plane metallic aluminium target, and with embodiment 2 in the result that obtains roughly the same.
Embodiment 4
Be 250 milliwatts with the incident laser pulse average power adjustments except that prepare micro-structural metallic aluminium target sample process at femtosecond laser in, the other technologies step is all identical with embodiment 2 with experiment condition.In this case, the generation that has not had bulge-structure through the postradiation metallic aluminium target of femtosecond laser sample surfaces is observed in experiment, only forms the groove structure of periodic distribution, and the width of groove is about tens microns, and its scanning electron micrograph as shown in Figure 4.The impulse coupling coefficient that experiment records this micro-structural metallic aluminium target sample concerns as Fig. 6 with the laser changes in flow rate
Shown in the curve.Compare with the situation among the embodiment 2,3, further raising has taken place in the impulse coupling coefficient of micro-structural metallic aluminium target sample under this kind condition.Maximum increase to 7.7 dyne/watt, and compare without the pretreated common plane aluminium of femtosecond laser target sample, the maximum thrust coefficient of coup has improved about 170%.
Claims (6)
1. utilize laser to prepare the micro-structural target and improve the method that laser advances impulse coupling coefficient, the steps include:
The first step will be elected to be used for the solid material that ablative laser advances target, carry out surperficial mechanical grinding and buffing after, use the deionized water ultrasonic cleaning, place then and clean open containers and treat that it is air-dry, as the target sample;
Second step, in air ambient, the target specimen material surface of femto-second laser pulse vertical irradiation after will focusing on earlier after first step polishing, and seek and the accurate position of definite laser spot, and then target specimen material surface is adjusted to position away from the focal plane along backlight Shu Fangxiang by the size in observation target specimen material ablated surface zone;
In the 3rd step, the parameter of setting femto-second laser pulse is: pulse recurrence frequency 1 KHz, pulse durations 50 femtosecond, pulse center wavelength 800 nanometers, and make that incident laser pulse is a linearly polarized light;
The 4th step was placed on pending solid target sample on the three-dimensional precise mobile platform, and controlled target sample moving spatially by computer;
The 5th step was keeping under the constant situation of incoming laser beam, by choosing laser energy, and with pending target sample with the light beam vertical plane in carry out motion scan line by line, be implemented in the large tracts of land micro-structural preparation on the solid target sample surfaces;
In the 6th step, with the solid target sample deionized water ultrasonic cleaning after the femto-second laser pulse processing of the 5th step, effectively remove deposit, and microexamination and measurement are carried out in its surface attached to sample surfaces;
In the 7th step, go on foot solid target sample application that the surface that successfully prepares has a micro-structural in the experimental system of ablative laser propelling with the 6th, and accurately measure its impulse coupling coefficient in laser ablation process by setting up highly sensitive torsion balance device;
The 8th step, when the energy that ablative laser advances is given regularly, realize regulation and control by changing distance between solid target sample and the condenser lens to luminous flux in the irradiation spot area, thus record respectively common plane target and micro-structural target in ablative laser advances impulse coupling coefficient with the variation relation of laser flux.
2. method according to claim 1, it is characterized in that: the femto-second laser pulse described in above-mentioned second step focuses on and adopts microcobjective or optical lens, the solid target sample surfaces is adjusted to position range place away from focal plane 10-250 micron along backlight Shu Fangxiang, and the degree of depth that can avoid the high laser flux at laser spot place may cause the target sample surfaces is like this ablated and removed.
3. method according to claim 1, it is characterized in that: solid target movement of sample speed is selected in 0.05-1 mm/second scope described in above-mentioned the 4th step, minimum mobile accuracy is 1 micron, and the distance between adjacent two motion scan lines is selected in the 2-100 micrometer range.
4. method according to claim 1 is characterized in that: solid target movement of sample scanning direction becomes any angle with the polarization direction of incident femto-second laser pulse described in above-mentioned the 5th step; The mean power of incident laser pulse changes in 40-250 milliwatt scope; The micro-structural type for preparing at the target sample surfaces comprises: graininess raised structures that periodicity is arranged and the groove structure of periodically arranging.
5. according to the method for claim 1, it is characterized in that: the process of measuring impulse coupling coefficient described in above-mentioned the 7th step is: rock the solid target sample of placement and make when the laser focusing pulsed bombardment and rock when rotating, detecting light beam mobile variation in the direction of propagation after rocking speculum is surveyed by high-sensitive CCD; It is that 100 millimeters lens focus on and are fixed on the target sample surfaces that rocks by a focal length that laser pulse is carried bundle back through periscope, lifting by periscope in the experiment changes the particular location of laser pulse to the solid target bombardment, when making each measurement, each laser pulse bombardment all be the new region of being bombarded on the target.
6. method according to claim 1, it is characterized in that: above-mentioned the 8th the step described in when the incident laser flux is determined, utilize the high-sensitive CCD record to record the space displacement of exploring spot in the ablative laser progradation, promptly obtain the hard-over of torsion balance, thereby calculate the momentum that single laser pulse produces in ablation process, just obtain impulse coupling coefficient divided by the single pulse energy that uses of ablating with momentum.
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| CN113405993A (en) * | 2021-06-23 | 2021-09-17 | 北京卫星环境工程研究所 | Device and method for measuring two-dimensional impulse of irregular target driven by laser ablation |
| CN114473227A (en) * | 2022-03-28 | 2022-05-13 | 武汉华工激光工程有限责任公司 | Laser processing method for corrosion-resistant black sculpture of stainless steel |
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