CN111167803A - Laser wet cleaning method and device - Google Patents
Laser wet cleaning method and device Download PDFInfo
- Publication number
- CN111167803A CN111167803A CN201911287203.2A CN201911287203A CN111167803A CN 111167803 A CN111167803 A CN 111167803A CN 201911287203 A CN201911287203 A CN 201911287203A CN 111167803 A CN111167803 A CN 111167803A
- Authority
- CN
- China
- Prior art keywords
- pipe
- laser
- water
- cleaned
- water tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 49
- 238000000034 method Methods 0.000 title claims abstract description 28
- 239000007788 liquid Substances 0.000 claims abstract description 45
- 238000001816 cooling Methods 0.000 claims abstract description 25
- 238000005507 spraying Methods 0.000 claims abstract description 24
- 230000017525 heat dissipation Effects 0.000 claims abstract description 20
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 87
- 230000037452 priming Effects 0.000 claims description 15
- 239000007921 spray Substances 0.000 claims description 11
- 238000011084 recovery Methods 0.000 claims description 10
- 239000000463 material Substances 0.000 abstract description 7
- 230000000694 effects Effects 0.000 abstract description 5
- 230000002411 adverse Effects 0.000 abstract description 4
- 238000010438 heat treatment Methods 0.000 abstract description 4
- 230000005855 radiation Effects 0.000 abstract description 4
- 125000004122 cyclic group Chemical group 0.000 abstract description 3
- 238000005516 engineering process Methods 0.000 abstract description 3
- 238000002309 gasification Methods 0.000 abstract description 2
- 230000005611 electricity Effects 0.000 description 5
- 239000010410 layer Substances 0.000 description 5
- 230000003020 moisturizing effect Effects 0.000 description 5
- 239000007789 gas Substances 0.000 description 4
- 239000000084 colloidal system Substances 0.000 description 3
- 238000011109 contamination Methods 0.000 description 3
- 239000003344 environmental pollutant Substances 0.000 description 3
- 238000001914 filtration Methods 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 231100000719 pollutant Toxicity 0.000 description 3
- 238000009834 vaporization Methods 0.000 description 3
- 230000008016 vaporization Effects 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 238000005202 decontamination Methods 0.000 description 2
- 230000003588 decontaminative effect Effects 0.000 description 2
- 238000005108 dry cleaning Methods 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 230000009972 noncorrosive effect Effects 0.000 description 2
- 239000003973 paint Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 241000221535 Pucciniales Species 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000013043 chemical agent Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000012459 cleaning agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000002957 persistent organic pollutant Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
- B08B7/0042—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like by laser
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
- B23K26/1435—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor involving specially adapted flow control means
- B23K26/1436—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor involving specially adapted flow control means for pressure control
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
- B23K26/146—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor the fluid stream containing a liquid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
- B23K26/703—Cooling arrangements
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The invention discloses a laser wet cleaning method and a device, when a to-be-cleaned object is radiated by laser, the to-be-cleaned object is placed in a container containing cooling heat dissipation liquid and/or the to-be-cleaned object is sprayed with the cooling heat dissipation liquid by adopting a spraying system. When the laser is adopted to radiate an object to be cleaned, the gasification of the cooling heat dissipation liquid is utilized to absorb and dissipate heat of the laser radiation surface; the cleaning device has the advantages that the thermal influence caused by the adoption of the original cleaning technology when a cleaning object with a thicker pollution layer or difficult to clean is subjected to multiple pulses for cyclic cleaning is avoided, the adverse effect of heating influence such as near-surface hardening and the like on the surface of a material is eliminated, and the cleaning device is of great significance for small-sized or high-performance cleaning objects.
Description
Technical Field
The invention relates to the technical field of laser cleaning, in particular to a laser wet cleaning method and device.
Background
The laser cleaning can remove pollutants on the surfaces of various materials, no chemical agent or cleaning liquid is used, the cleaned wastes are mainly solid powder, the size is small, the laser cleaning is easy to store and can be recycled, and the environmental pollution caused by cleaning agents can be avoided. The laser cleaning process depends on the characteristics of light pulses generated by a laser, and based on the photophysical reaction caused by the interaction among a high-intensity light beam, a short-pulse laser and a pollution layer, when the high-power-density laser directly irradiates the surface of an object to be cleaned, under the combined action of mechanisms such as rapid thermal vibration, vaporization, melting and plasma stripping, coatings, rusts and oil stains attached to the surface are instantly vaporized, ablated or stripped. Each laser pulse is capable of removing a thickness of the contamination layer. But if the contamination layer is thick or difficult to clean, multiple pulses are required to clean. The number of pulses required to clean the surface depends on the degree of surface contamination. Laser cleaning can be used for cleaning not only organic pollutants, but also inorganic matters, including corrosion of metals, metal particles, dust and the like. The laser cleaning technology is gradually applied to the aspects of cleaning the surfaces of wafers in the mechanical industry and the microelectronic industry, peeling paint on the surfaces of trains in a layering way, removing paint in daily maintenance of airplanes and naval vessels, removing rust of petrochemical pipelines, removing grease of tire molds and the like at home and abroad.
During laser cleaning, due to the combined action of rapid thermal vibration, vaporization, melting, plasma stripping and the like generated by the direct irradiation of high-power-density laser on the surface of a cleaned object, surface pollutants are instantly vaporized, ablated or stripped, and especially pollutants of combustible gas can be generated after high-temperature vaporization. Such as: the colloid on the metal glue pressing valve is as thick as about 4mm, a plurality of pulses are needed for cyclic cleaning and removal, the colloid generates combustible gas and is directly combusted after being radiated by laser with high power density, the colloid and the combustible gas interact, the infrared thermal imager detects that the surface temperature rise exceeds 150 ℃, the melting and recondensing phenomenon occurs on the surface of the base material, and the thermal influence is generated on the surface of the material. The existing laser cleaning method mainly comprises the following steps: a. the laser dry cleaning method adopts pulse laser to directly radiate for decontamination; b. the laser and liquid film method, namely, a layer of liquid film is deposited on the surface of the substrate at first, and then the laser radiation is used for decontamination; c. the laser and inert gas method is characterized in that while laser is radiated, inert gas is blown to the surface of a substrate, and dirt is blown off the surface by the gas immediately after being stripped from the surface, so that the surface is prevented from being polluted and oxidized again; d. the laser + non-corrosive chemical method is to loosen dirt by using laser and then clean the dirt by using the non-corrosive chemical method. Laser dry cleaning methods are generally adopted, and the methods have difficulty in avoiding adverse effects of heating influences such as near-surface hardening and the like on the surface of a material for removing serious pollution which needs to be cleaned in a circulating way by multiple pulses.
Disclosure of Invention
In order to solve the problems mentioned in the background art, the invention provides a laser wet cleaning method and a laser wet cleaning device, which can avoid the adverse effects of heating influences such as near-surface layer hardening and the like on the surface of a material caused by laser cleaning.
When the laser is used for radiating an object to be cleaned, the object to be cleaned is placed in a container containing cooling heat dissipation liquid and/or the cooling heat dissipation liquid is sprayed on the object to be cleaned by adopting a spraying system.
Further, when the object to be cleaned is placed in the container containing the cooling heat-dissipating liquid, the object to be cleaned is immersed in the cooling heat-dissipating liquid to a depth of 0.1 to 1 mm.
Further, the cooling heat dissipation liquid is water.
The invention also provides a device for the laser wet cleaning method, which comprises a container and/or a spraying system for placing the object to be cleaned;
spray system includes the water tank, the water tank leads to pipe intercommunication has first self priming pump, first self priming pump leads to pipe intercommunication has three solenoid valve, two play medium ends of three solenoid valve have spray set, first filter through the pipe intercommunication respectively, first filter leads to pipe and water tank intercommunication, spray set one side is equipped with the recovery pond that is located below the ground horizontal line, the recovery pond leads to pipe intercommunication has the second filter, the second filter leads to pipe intercommunication has the second self priming pump, the second self priming pump leads to pipe and water tank intercommunication.
Furthermore, the container is included, a plurality of overflow holes which are positioned on the same horizontal line are arranged on the side wall of the container, and the height from the overflow holes to the inner wall of the bottom of the container is 0.1-1 mm.
And furthermore, a water pipe which comprises the spraying system and is communicated with the spraying device and the three-way electromagnetic valve is also communicated with an overflow valve through a water pipe, and the overflow valve is communicated with the water tank through a water pipe.
Furthermore, the spraying device comprises an annular water pipe communicated with the three-way electromagnetic valve through a water pipe, a plurality of nozzles are uniformly distributed on the inner circumferential side wall of the annular water pipe, and the nozzles are obliquely and downwards arranged.
Further, the water tank still communicates has the moisturizing pipe that is used for connecting outside water source, be equipped with electric stop valve on the moisturizing pipe, electric stop valve electricity is connected with the controller, the controller still electricity is connected with the level gauge, the level gauge is located inside the water tank.
Further, the controller is also electrically connected with the three-way electromagnetic valve, the first self-priming pump, the second self-priming pump and the overflow valve.
Further, the liquid level meter is an ultrasonic liquid level meter; the ultrasonic liquid level meter is characterized in that a support is fixedly connected to the inner wall of the water tank, and the ultrasonic liquid level meter is fixedly mounted on the support.
The invention has the beneficial effects that:
1. when the laser is adopted to radiate an object to be cleaned, the gasification of the cooling heat dissipation liquid is utilized to absorb and dissipate heat of the laser radiation surface; the cleaning device has the advantages that the thermal influence caused by the adoption of the original cleaning technology when a cleaning object with a thicker pollution layer or difficult to clean is subjected to multiple pulses for cyclic cleaning is avoided, the adverse effect of heating influence such as near-surface hardening and the like on the surface of a material is eliminated, and the cleaning device is of great significance for small-sized or high-performance cleaning objects.
2. The device is provided with the second self-sucking pump and the second filter, and can be used for filtering water in the recovery tank and then recovering the water into the water tank, so that the purpose of recovery is achieved.
3. When the device is not used for spraying, water in the water tank can sequentially pass through the first self-priming pump, the three-way electromagnetic valve and the first filter and then return to the water tank, so that the aim of circulating filtration is fulfilled.
4. The device is provided with a water replenishing pipe and a liquid level meter, and when the water level in the water tank is reduced to a water level threshold value, the water in the water tank can be automatically replenished.
Drawings
Fig. 1 is a schematic structural diagram of a spraying system.
Fig. 2 is a schematic structural view of the container.
Wherein, 1 is the water tank, 2 is first self priming pump, 3 is three solenoid valve, 4 is first filter, 5 are the recovery pond, 6 are the second filter, 7 are second self priming pump, 8 are the overflow valve, 9 are annular water pipe, 10 are the nozzle, 11 are moisturizing pipe, 12 are electric stop valve, 13 are the controller, 14 are the level gauge, 15 are the support, 16 are the container, 17 are the overflow hole, 18 are for waiting to wash the object.
Detailed Description
The present invention will be described in further detail below with reference to specific embodiments thereof, with reference to the accompanying drawings.
Example 1
A laser wet cleaning method comprises the steps of placing cooling heat dissipation liquid in a container, immersing an object to be cleaned in the cooling heat dissipation liquid, and radiating the part of the object to be cleaned, which is immersed below a liquid level, by adopting laser. Wherein, the cooling heat dissipation liquid is water, and the depth of the object to be cleaned immersed in the cooling heat dissipation liquid is 0.1 mm.
The device for the laser wet cleaning method comprises a container 16 for placing an object 18 to be cleaned, wherein a plurality of overflow holes 17 which are positioned on the same horizontal line are arranged on the side wall of the container 16. Wherein the height from the overflow hole 17 to the inner wall of the bottom of the container 16 is 0.1 mm.
Example 2
A laser wet cleaning method adopts a spraying system to spray cooling heat dissipation liquid on the surface of an object to be cleaned while radiating the object to be cleaned by laser. Wherein the cooling heat dissipation liquid is water.
As shown in the figure, the device for the laser wet cleaning method comprises a spraying system, the spraying system comprises a water tank 1, the water tank 1 is communicated with a first self-sucking pump 2 through a water pipe, the first self-sucking pump 2 is communicated with a three-way electromagnetic valve 3 through a water pipe, the three-way electromagnetic valve 3 is provided with a medium inlet end, two medium outlet ends, the medium inlet end of the three-way electromagnetic valve 3 is communicated with the first self-sucking pump 2 through a water pipe, the two medium outlet ends of the three-way electromagnetic valve 3 are respectively communicated with a spraying device through a water pipe, a first filter 4, the first filter 4 is communicated with the water tank 1 through a water pipe, one side of the spraying device is provided with a recovery pond 5 located below a ground horizontal line, the recovery pond 5 is communicated with a second filter 6 through a water pipe, the second filter 6 is communicated with a second self-sucking pump 7 through a water pipe.
Wherein, the water pipe which communicates the spray device and the three-way electromagnetic valve 3 is also communicated with an overflow valve 8 through a water pipe, and the overflow valve 8 is communicated with the water tank 1 through a water pipe. The relief valve 8 functions as a pressure control.
Wherein, spray set includes the annular water pipe 9 that leads to pipe and three-way solenoid valve 4 intercommunication, and evenly distributed has a plurality of nozzle 10 on the circumference lateral wall in annular water pipe 9, and nozzle 10 slope sets up downwards. Wherein 8 nozzles 10 are provided.
Wherein, water tank 1 still communicates has the moisturizing pipe 11 that is used for connecting outside water source, is equipped with electric stop valve 12 on the moisturizing pipe 11, and electric stop valve 12 electricity is connected with controller 13, and controller 13 still electricity is connected with level gauge 14, and level gauge 14 is located inside water tank 1.
Wherein, controller 13 still is connected with three solenoid valve 3, first self priming pump 2, second self priming pump 7, overflow valve 8 electricity. The controller 13 is a PLC controller.
Wherein the liquid level meter 14 is an ultrasonic liquid level meter. The upper part of the inner wall of the water tank 1 is fixedly connected with a bracket 15, and the ultrasonic liquid level meter is fixedly arranged on the bracket 15.
When concrete implementation, will treat that cleaning object 18 places subaerially, adopt laser to treat cleaning object 18 and open three solenoid valve 3 when carrying out the radiation, water in the water tank 1 enters into nozzle 10 through first self priming pump 2, three solenoid valve 3, annular water pipe 9, water sprays by nozzle 10 and treats cleaning object 18, treats cleaning object 18 and cools off, flows to subaerial water and flows to the recovery pond certainly, again through second filter 6, during second self priming pump 7 retrieves water tank 1. Close three solenoid valve 3 when not needing to spray, the water in the water tank 1 gets back to water tank 1 through first self priming pump 2, three solenoid valve 3, first filter 4 in proper order, plays circulating filtration's effect. The water level threshold value is preset through the controller 13, when the liquid level meter 14 detects that the water level in the water tank 1 drops to the water level threshold value, the liquid level meter 14 transmits a signal to the controller 13, the controller 13 opens the electric stop valve 12, and an external water source enters the water tank 1 through the water replenishing pipe 11.
Example 3
A laser wet cleaning method comprises the steps of placing cooling heat dissipation liquid in a container, immersing an object to be cleaned in the cooling heat dissipation liquid, radiating the object to be cleaned by laser, and spraying the cooling heat dissipation liquid on the surface of the object to be cleaned by a spraying system. Wherein the cooling heat dissipation liquid is water. The depth of the object to be cleaned immersed in the cooling heat dissipation liquid is 0.5 mm.
An apparatus for a laser wet cleaning method comprises a container 16 and a spraying system, wherein the container 16 has the same structure as the container in embodiment 1, and the spraying system has the same structure as the spraying system in embodiment 2. In practice, the container 16 is placed under the spraying device.
Although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that changes may be made in the embodiments and/or equivalents thereof without departing from the spirit and scope of the invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A laser wet cleaning method is characterized in that when an object to be cleaned is irradiated by laser, the object to be cleaned is placed in a container containing cooling heat dissipation liquid and/or the cooling heat dissipation liquid is sprayed on the object to be cleaned by adopting a spraying system.
2. The laser wet cleaning method according to claim 1, wherein when the object to be cleaned is placed in a container containing the cooling heat-dissipating liquid, the object to be cleaned is immersed in the cooling heat-dissipating liquid to a depth of 0.1 to 1 mm.
3. The laser wet cleaning method according to claim 1 or 2, wherein the cooling heat-dissipating liquid is water.
4. The device for the laser wet cleaning method is characterized by comprising a container for placing an object to be cleaned and/or a spraying system;
spray system includes the water tank, the water tank leads to pipe intercommunication has first self priming pump, first self priming pump leads to pipe intercommunication has three solenoid valve, two play medium ends of three solenoid valve have spray set, first filter through the pipe intercommunication respectively, first filter leads to pipe and water tank intercommunication, spray set one side is equipped with the recovery pond that is located below the ground horizontal line, the recovery pond leads to pipe intercommunication has the second filter, the second filter leads to pipe intercommunication has the second self priming pump, the second self priming pump leads to pipe and water tank intercommunication.
5. The apparatus of claim 4, wherein the apparatus comprises the container, and the side wall of the container is provided with a plurality of overflow holes located on the same horizontal line, and the height from the overflow hole to the inner wall of the bottom of the container is 0.1-1 mm.
6. The device for the laser wet cleaning method according to claim 4, wherein a water pipe which comprises the spraying system and is communicated with the spraying device and the three-way electromagnetic valve is further communicated with an overflow valve through a water pipe, and the overflow valve is communicated with a water tank through a water pipe.
7. The apparatus of claim 6, wherein the spraying means comprises an annular water pipe connected to the three-way solenoid valve through a water pipe, and a plurality of nozzles are uniformly distributed on the inner circumferential sidewall of the annular water pipe, and are arranged obliquely downward.
8. The device for the laser wet cleaning method according to claim 6 or 7, wherein the water tank is further communicated with a water replenishing pipe for connecting an external water source, an electric stop valve is arranged on the water replenishing pipe, the electric stop valve is electrically connected with a controller, the controller is further electrically connected with a liquid level meter, and the liquid level meter is positioned inside the water tank.
9. The apparatus according to claim 8, wherein the controller is further electrically connected to the three-way solenoid valve, the first self-priming pump, the second self-priming pump, and the overflow valve.
10. The apparatus for laser wet cleaning method as claimed in claim 8, wherein said liquid level meter is an ultrasonic liquid level meter; the ultrasonic liquid level meter is characterized in that a support is fixedly connected to the inner wall of the water tank, and the ultrasonic liquid level meter is fixedly mounted on the support.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911287203.2A CN111167803A (en) | 2019-12-14 | 2019-12-14 | Laser wet cleaning method and device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201911287203.2A CN111167803A (en) | 2019-12-14 | 2019-12-14 | Laser wet cleaning method and device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111167803A true CN111167803A (en) | 2020-05-19 |
Family
ID=70622416
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911287203.2A Pending CN111167803A (en) | 2019-12-14 | 2019-12-14 | Laser wet cleaning method and device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111167803A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112605067A (en) * | 2020-12-11 | 2021-04-06 | 南开大学 | Laser cleaning method for resin-based composite material surface coating |
| RU2768086C1 (en) * | 2020-11-03 | 2022-03-23 | Общество с ограниченной ответственностью "Технологический центр "Лазарт" (ООО "ТЦЛ") | Method for wet laser cleaning of hard surfaces |
| CN115383328A (en) * | 2022-09-30 | 2022-11-25 | 深圳市奥格斯特科技有限公司 | Disassembling method of full-lamination display screen |
| TWI823059B (en) * | 2021-02-25 | 2023-11-21 | 宏惠光電股份有限公司 | Wet laser cleaning equipment and procedures |
Citations (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060023185A1 (en) * | 2003-04-11 | 2006-02-02 | Nikon Corporation | Cleanup method for optics in immersion lithography |
| CN101474720A (en) * | 2009-01-16 | 2009-07-08 | 深圳市木森科技有限公司 | Laser processing method |
| CN103100537A (en) * | 2012-12-25 | 2013-05-15 | 江苏大学 | Underwater laser cleaning method and cleaning head |
| CN103357621A (en) * | 2013-07-12 | 2013-10-23 | 江苏大学 | Method and device of cleaning microparticles on surface of metal workpiece with laser shock waves |
| CN104439710A (en) * | 2014-11-07 | 2015-03-25 | 江南大学 | Water jet assisted laser chemical etching device and method |
| CN104551393A (en) * | 2015-01-19 | 2015-04-29 | 桂林电子科技大学 | Liquid film protecting laser processing system and method |
| CN206911857U (en) * | 2017-06-27 | 2018-01-23 | 安徽徽博文物保护科技有限公司 | A kind of Bronze Relics laser cleaner |
| CN206911856U (en) * | 2017-06-27 | 2018-01-23 | 安徽徽博文物保护科技有限公司 | A kind of Bronze Relics flexible laser derusting device |
| CN108526091A (en) * | 2018-04-12 | 2018-09-14 | 桂林电子科技大学 | A kind of jet stream laser compound cleaning method and cleaning system |
| CN109465252A (en) * | 2019-01-11 | 2019-03-15 | 桂林电子科技大学 | Ultrasonic wave added Laser Underwater cleaning device and method |
| CN109570151A (en) * | 2019-01-25 | 2019-04-05 | 中国工程物理研究院激光聚变研究中心 | The device and cleaning method of liquid stream ULTRASONIC COMPLEX auxiliary laser cleaning optical element |
| CN109671616A (en) * | 2018-02-28 | 2019-04-23 | 江苏大学 | A kind of method of laser cleaning silicon wafer or lens surface particle |
| CN209109750U (en) * | 2018-09-18 | 2019-07-16 | 中车青岛四方机车车辆股份有限公司 | Wet type laser cleaning system |
| CN211707601U (en) * | 2019-12-14 | 2020-10-20 | 上海航翼高新技术发展研究院有限公司 | Circulating spraying system for laser wet cleaning |
-
2019
- 2019-12-14 CN CN201911287203.2A patent/CN111167803A/en active Pending
Patent Citations (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060023185A1 (en) * | 2003-04-11 | 2006-02-02 | Nikon Corporation | Cleanup method for optics in immersion lithography |
| CN1867865A (en) * | 2003-04-11 | 2006-11-22 | 株式会社尼康 | Cleanup method for optics in immersion lithography |
| CN101474720A (en) * | 2009-01-16 | 2009-07-08 | 深圳市木森科技有限公司 | Laser processing method |
| CN103100537A (en) * | 2012-12-25 | 2013-05-15 | 江苏大学 | Underwater laser cleaning method and cleaning head |
| CN103357621A (en) * | 2013-07-12 | 2013-10-23 | 江苏大学 | Method and device of cleaning microparticles on surface of metal workpiece with laser shock waves |
| CN104439710A (en) * | 2014-11-07 | 2015-03-25 | 江南大学 | Water jet assisted laser chemical etching device and method |
| CN104551393A (en) * | 2015-01-19 | 2015-04-29 | 桂林电子科技大学 | Liquid film protecting laser processing system and method |
| CN206911857U (en) * | 2017-06-27 | 2018-01-23 | 安徽徽博文物保护科技有限公司 | A kind of Bronze Relics laser cleaner |
| CN206911856U (en) * | 2017-06-27 | 2018-01-23 | 安徽徽博文物保护科技有限公司 | A kind of Bronze Relics flexible laser derusting device |
| CN109671616A (en) * | 2018-02-28 | 2019-04-23 | 江苏大学 | A kind of method of laser cleaning silicon wafer or lens surface particle |
| CN108526091A (en) * | 2018-04-12 | 2018-09-14 | 桂林电子科技大学 | A kind of jet stream laser compound cleaning method and cleaning system |
| CN209109750U (en) * | 2018-09-18 | 2019-07-16 | 中车青岛四方机车车辆股份有限公司 | Wet type laser cleaning system |
| CN109465252A (en) * | 2019-01-11 | 2019-03-15 | 桂林电子科技大学 | Ultrasonic wave added Laser Underwater cleaning device and method |
| CN109570151A (en) * | 2019-01-25 | 2019-04-05 | 中国工程物理研究院激光聚变研究中心 | The device and cleaning method of liquid stream ULTRASONIC COMPLEX auxiliary laser cleaning optical element |
| CN211707601U (en) * | 2019-12-14 | 2020-10-20 | 上海航翼高新技术发展研究院有限公司 | Circulating spraying system for laser wet cleaning |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2768086C1 (en) * | 2020-11-03 | 2022-03-23 | Общество с ограниченной ответственностью "Технологический центр "Лазарт" (ООО "ТЦЛ") | Method for wet laser cleaning of hard surfaces |
| CN112605067A (en) * | 2020-12-11 | 2021-04-06 | 南开大学 | Laser cleaning method for resin-based composite material surface coating |
| CN112605067B (en) * | 2020-12-11 | 2023-12-26 | 南开大学 | Laser cleaning method for resin matrix composite surface coating |
| TWI823059B (en) * | 2021-02-25 | 2023-11-21 | 宏惠光電股份有限公司 | Wet laser cleaning equipment and procedures |
| CN115383328A (en) * | 2022-09-30 | 2022-11-25 | 深圳市奥格斯特科技有限公司 | Disassembling method of full-lamination display screen |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN111167803A (en) | Laser wet cleaning method and device | |
| US5240506A (en) | Process for the ultrasonic cleaning of a printing cylinder | |
| KR100806476B1 (en) | Apparatus for Removing Organic Films | |
| CN105195465A (en) | Fully-automatic optical element cleaning device with ultrasonic-megasonic composite frequency | |
| US20020066464A1 (en) | Processing a workpiece using ozone and sonic energy | |
| JPH06264274A (en) | Method and apparatus for cleaning metal workpiece | |
| CN1539161A (en) | Process and apparatus for treating workpiece such as semionductor wafer | |
| JPH03503975A (en) | How to clean surfaces and liquids | |
| EP1779936A2 (en) | Squirter jet ultrasonic cleaning | |
| CN105107797A (en) | Component surface pollutant composite cleaning device and method | |
| CN104099555B (en) | The apparatus and method of the offshore platform steel LASER HEAT spraying anti-seawater corrosion of aluminized coating | |
| KR20080002926A (en) | Component for a painting facility and device for removing paint from it | |
| CN211707601U (en) | Circulating spraying system for laser wet cleaning | |
| JPH01130771A (en) | Method and apparatus for washing process | |
| JP5377535B2 (en) | Insulated wire manufacturing method and manufacturing apparatus | |
| JP6329342B2 (en) | Cleaning method and cleaning device | |
| JP2014200726A (en) | Washing equipment using volatile organic solvent | |
| WO2005005063A1 (en) | Cleaning and drying a substrate | |
| JP2006332481A (en) | Etching processing method and etching apparatus | |
| JPH06179991A (en) | Device and method for cleaning | |
| US6684889B2 (en) | Method and device for treating a substrate | |
| CN110314882B (en) | Composite cleaning device and method for shade | |
| JPS61166134A (en) | Processor | |
| JP2008307444A (en) | Washing equipment and washing method | |
| CN217289618U (en) | Water environment laser paint removing device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20200519 |