CN102292188B - Method and apparatus for improving reliability of a machining process - Google Patents

Method and apparatus for improving reliability of a machining process Download PDF

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Publication number
CN102292188B
CN102292188B CN200980155059.5A CN200980155059A CN102292188B CN 102292188 B CN102292188 B CN 102292188B CN 200980155059 A CN200980155059 A CN 200980155059A CN 102292188 B CN102292188 B CN 102292188B
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China
Prior art keywords
liquid jet
laser beam
guiding
nozzle
chamber
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CN200980155059.5A
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Chinese (zh)
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CN102292188A (en
Inventor
B.卡伦
G.苏鲁塞亚努
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Synova SA
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Synova SA
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/40—Removing material taking account of the properties of the material involved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/146—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor the fluid stream containing a liquid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/02—Iron or ferrous alloys
    • B23K2103/04—Steel or steel alloys
    • B23K2103/05—Stainless steel
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/08—Non-ferrous metals or alloys
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/08—Non-ferrous metals or alloys
    • B23K2103/12—Copper or alloys thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/30—Organic material
    • B23K2103/38—Fabrics, fibrous materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/30—Organic material
    • B23K2103/42—Plastics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • B23K2103/52—Ceramics

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)

Abstract

A process for providing a protection against damages in a machine head, wherein the machine head launches a transparent liquid jet guided laser beam LB by means of a nozzle (3) along an optical axis for treating a work piece is claimed. The process comprises the following steps: First a blind steel plate (protection plate 20) is fixed to a front of a protection chamber (10) prior to the liquid water jet (WJ). Then the transparent liquid jet (WJ) guided laser beam (LB) is stared, which impinges on the blind steel plate (20) blank and drills a transit-hole into the blind steel plate blank. The transit-hole (23) has a size which substantially corresponds to a cross-section of the laser beam (LB) guiding transparent liquid jet (WJ). The steel plate (20) with the transit-hole (23) provides a protection plate (20) having the transit-hole (23) precisely arranged on the optical axis. Therefore no further alignment is required. Further an apparatus for treating a workpiece by means of a laser beam (LB) which is guided in a transparent liquid jet (WJ) is claimed. The apparatus comprises a laser head with a coupling unit (CU) for producing a liquid jet (WJ) guided laser beam (LB), a protection chamber (10) mounted on the output (5) of the coupling unit (CU) and a protection plate (20) replaceable fixed to the first chamber (10) and mounted at a distance from the outlet (15) of the first chamber (10) and having a hole (23) for passage of the laser beam (LB) guiding transparent liquid jet (WJ) and protecting the outlet (15) of the first chamber (10) from debris sputtered from the treated workpiece.

Description

For improving the method and apparatus of machining process reliability
Technical field
The present invention relates to for improving a kind of method of the process for machining reliability of workpiece, described process for machining comprises the steps:
A) by the nozzle ejection liquid through head, along the jet of the optical axis transmitting transparency liquid to workpiece,
B) by coupling unit, laser beam is coupled in described liquid jet to produce the laser beam of liquid jet guiding,
C) laser beam machine guiding by described liquid jet is processed described workpiece.
In addition, the present invention relates to, for carrying out a kind of device of described process for machining, comprise
A) head, it has coupling unit for laser beam is coupled to liquid jet to produce the laser beam of liquid jet guiding,
B) outlet of head, the laser beam of liquid jet guiding leaves head for the treatment of workpiece by it,
C) protection screen, is removablely fixed to head and is arranged on from described outlet a distance and has perforation as the passage of the laser beam of guiding liquids jet.
Background technology
From US5,902, No. 499 (Synova) is known, for ablator (especially for the dissimilar material of cutting), has enough high-octane laser beams how to be coupled to water jet (or in jet of any suitable transparent liquid medium).Laser to impact workpiece by optical guidance and with the effective diameter of basic corresponding water jet diameter with light beam identical mode in optical fiber in water jet.
So-called LMJ ?the critical piece of technology comprises the lens combination of laser focusing bundle, relatively thin high pressure hydroecium (also referred to as coupling unit), and have the nozzle of minor diameter, typical nozzle diameter is 20 to 150 microns.Except its guiding characteristic, water jet is used as the cooling medium of workpiece machined part and by very effective mode, removes the material of ablation, obtains extraordinary machining quality.
Known from No. 2006/050622 patent of WO (Synova company), in order to obtain high-quality cutting and effectively machined, the stability of water jet is brought into play crucial effect.A key character of water jet is its coherence length, and in this move distance, jet is retaining layer stream mode.This is also the region that water jet has its best light guiding characteristic.As long as be possible by workpiece setting microcomputer processing between nozzle and coherence length.This distance is called operating distance.
Known work distance is the diameter of approximately 1000 times of nozzles.Because nozzle diameter is in 20 to 150 micrometer ranges, so operating distance changes at about 20mm between 150mm.Distance is although it is so applicable to most machine-tooled method completely, but has some special application, and they need to be put into workpiece more close nozzle.From theoretical viewpoint, about not restriction of the minimum range from nozzle to workpiece.But experience shows to occur sometimes following phenomenon.
1. due to the feedback effect as with the synergistic result of workpiece, the disturbance of water jet stability.The disturbance of water jet may be partly relevant with the generation of surface wave (vibration).These vibrations may be spread towards nozzle in the vertical direction.It even may arrive jet hole.
2. ablator sucks and its deposition on the dorsal part of nozzle.The water jet impacting has very high speed, at Around Jet, produces pressure drop, and this causes sucking the particle from ablator.Particle from ablator also may arrive nozzle mouth region.
3. in workpiece machining process, the laser reflecting and plasma light.
Due to these phenomenons, and compared with long reach, compare the life-span that usually shortens nozzle, and poorer than expectation for the stability of short operating distance water jet.These effects problem particularly in the time need to having the laser beam of high-light-energy.
Summary of the invention
The object of the invention is to overcome the problem of above-mentioned prior art and a kind of method and machine are provided, it is operated on the high stability of laser beam and the laser energy levels of the better raising of nozzle life of liquid jet guiding.
According to the 1st solution that obtains through the following steps this problem of claims:
A) before the described transparency liquid jet of transmitting, a blind protection screen blank is installed in the place ahead at head,
B) produce the laser beam of described liquid jet guiding and it impacted on blind protection screen blank,
C) laser beam guiding by liquid jet gets out a perforation in blind protection screen blank, and described perforation has the accessible minimum dimension of passing through of laser beam that allows liquid jet guiding.
First before the laser beam of the described transparency liquid jet guiding of transmitting, a blind protection screen blank is installed in the place ahead at head." blind " means that protection screen is not for the perforation of liquid jet.(however, protection screen blank can be useful on some hole or the opening of other objects.Thereby) there are very definite and firm mechanical connection in the place ahead of protection screen being fixed on to head between head and this screen.This mechanical connection guarantees that rapid movement, vibration or the analogue of head can not change the geometrical relationship between protection screen and head.
Then launch the laser beam (machine and carry out work) of transparency liquid jet guiding.Because protection screen is not for the perforation of liquid jet, the laser beam impinge of liquid jet guiding is to blind protection screen blank.In order to make the laser beam of liquid absorption minimum, liquid is transparent to the wavelength of laser beam.Thereby this liquid is water or have certain liquid of low absorption coefficient to make the laser beam that moves off-energy not substantially in liquid jet preferably.
The 3rd laser beam guiding by liquid jet gets out a perforation in blind protection screen stock.Because the relative head in the position of protection screen (thereby laser beam that liquid jet guides relatively) is fixed, so the size of this perforation corresponds essentially to the cross section of transparency liquid jet.This has the protection screen of perforation as the low-cost and accurate protection screen of liquid jet.The minimum cross-section that this perforation has the laser beam of permission liquid jet guiding not to be obstructed.
This method provides the effective mode of a kind of cost to reduce following risk: the ablator of workpiece be deposited over head above and such ablator may be transported in head and may as be deposited on nozzle.Because this perforation is (being that it generates after plate is fixed to head) of boring at the scene it be automatically with the axial alignment of liquid jet.But although this perforation almost the same with water jet little it does not need to install registration mechanism.
If the thickness of protection screen is that enough thin boring so will be very fast.Can change every now and then this screen.Change and do not need the alignment skill that user is special.
Once complete the step that gets out described perforation, substantially without interrupting, just can start the processing of workpiece.Boring may spend the time (as a few tenths of second) that is less than 1 second.
Particularly, after completing, boring do not need stop liquid jet.In normal situation, need only laser beam is interrupted to one short period to head can be moved to required job site.
According to the preferred embodiments of the present invention focus lens system, focus the laser beam in nozzle, nozzle produces cooling liquid jet.So relatively transparent liquid jet has been stablized the focus of laser beam.Have been found that when using superlaser laser spot plane in operation may change its position.Slight last defective nozzle while not lining up the unstable and long-term operation that may cause liquid jet.
From the transparency liquid jet of No. 2006/050622 (Synova) patent known guide laser beam of WO, preferably with air-flow, surround.By the Room the 1st after nozzle, accomplish this point.By the entrance in sidewall (being periphery wall), will in gas inject to the Room 1, make liquid jet operation by Gai Shi center simultaneously and by gas nozzle, discharge together with gas.According to the transparency liquid jet of the preferred embodiments of the present invention transmit steering laser beam (it surrounds with described air-flow), pass Room the 2nd (protection chamber).Room the 2nd be more or less sealing but opening to surrounding environment to avoid causing chip to pass back to the pressure differential of liquid jet nozzle.The effect of protection chamber is as the buffer of chip (being ablator etc.) with also as the protection of antagonism globule accumulation, and it also may disturb water jet.
The device of processing workpiece by being guided in laser beam in transparency liquid jet has a head, and head comprises coupling unit for laser beam is coupled to liquid jet to produce the laser beam of liquid jet guiding.This head has outlet, by outlet liquid jet guiding laser beam, leaves head for this workpiece of machined.Baffle is fixed on head and replaceably with described outlet installation separated by a distance with have perforation for the passage of the laser beam of liquid jet guiding.Get out at the scene this perforation thereby have the without hindrance minimum dimension of passing through of laser beam that allows liquid jet guiding.
Coupling unit can comprise transparency liquid chamber substantially, and there is entering window and being useful on the nozzle of the predetermined diameter that produces transparency liquid jet of laser beam this chamber.In such a way nozzle is arranged on to the opposite that enters window, makes laser beam before entering the narrow place of nozzle, only pass through the very short distance of liquid chamber.
Preferably Room the 1st is arranged near nozzle and in its downstream.It has the entrance and exit (nozzle component) of the laser beam of liquid jet guiding.Can be with this chamber as protection chamber or as surround the chamber of liquid jet with gas protecting cover.
Protection screen is fixed on to Room the 1st (arrive this chamber before) replaceably." removable " meaning is when machine workpieces, to have screw, bolt or firm fixture by baffle clamping in position, and can with hand or instrument (screwdriver etc.) open or closure screws, fixture etc. so that the baffle of using with new blind plate replacing.Protection screen is arranged on from the outlet of Room the 1st and has the passage of a distance and the porose laser beam as transparency liquid jet guiding and for the protection of nozzle, avoid the injury of the chip that the workpiece from processing splashes out.Protection screen has the effect of stable liquid jet, and this causes better machining quality (high precision).
Its diameter of hole in protection screen is in the scope of nozzle diameter.This perforation may expand at leisure in use.In general it can not be greater than three times of nozzle diameter.The diameter that has just bored at the scene hole this perforation afterwards conventionally may be larger, high to 10%.(diameter of liquid jet is conventionally slightly smaller than the diameter of nozzle).Because protection screen is not very solid, after after a while, will be worn and torn continuously in this hole.The diameter of common this perforation can be 1.5-2.0 times of liquid jet diameter.Even if but in this situation, the effect of protection screen is very significant.Conventionally when changing nozzle, change this protection screen.
Protection screen is preferably made by stainless steel and is had thickness mostly to be 0.3mm most, more preferably about 0.1-0.2mm.This steel needs not to be high-quality.The material of protection screen and its preferred thickness depend on the power of laser.Thereby laser power plan selects thickness and quality that perforation can be drilled to being less than in 1 second relatively, is preferably less than 0.5 second and is most preferably about 0.1-0.2 second or less.When using the laser that mean power is 200W, blind protection screen can have the thickness of 0.3mm.
If wish more durable protection, the thickness of protection screen can be larger.Also may select for example aluminium oxide (Al of different metals 2o 3).As long as there are enough thermal resistances, also can select nonmetallic materials.Heat resistant plastic for example, as PEEK(polyether-ether-ketone).Baffle can be fabric or be made and can be used metal and plastics by fiber simultaneously in addition.
Protection screen is baffle preferably, particularly steel plate.Baffle has flat advantage.Thereby the manufacture of such baffle is simple and cost is low.
Another kind is, protection screen is crooked or has and be different from flat geometry.Can imagine equally and have the plate that resembles screen sample, flat or crooked, different thickness had.Thickness can become stepped or change continuously.
The diameter of nozzle is generally not more than 150 μ m(microns), be preferably less than 100 μ m.The most frequently used nozzle diameter of the present invention is in approximately 80 μ m or following scope, because conventional protection is difficult to be applied to little diameter or effect is poor.(with the nozzle diameter of appointment as 15% deviation be still in the scope of " approximately 80 μ m ").
Can be in any way fixing protection screen, it provides the connection of rigidity between this screen and head.Most advantageously installing is as the blind protection screen with punching.Design this hole is connected to head bolt (as 2 bolts) for being assemblied in.This head can have suitable hole for insertion and set bolt or screw.Then can be screwed this screen and not need any accurate location.This punching can have the diameter of several millimeters and between this hole and bolt, can have the gap of a few tenths of millimeter.Main points are that initial fixing screen is blind thereby does not need any special adjusting or align with liquid jet, thereby available screw is fixed on any position by screen.
If change nozzle (because wearing and tearing), so also change protection screen.According to the preferred embodiments of the present invention, construct in such a way head make protection screen (after fixing) relatively nozzle be in the geometric position in rigidity.Because the minor variations that perforation is such thin liquid jet path may cause the part on perforation border to be bored by (powerful) laser beam.
Preferred Room the 1st is gas compartment, it is arranged near liquid jet nozzle and the downstream of nozzle.Gas compartment has laser beam entrance, the gas access of liquid jet guiding and the gas nozzle outlet of surrounding the laser beam of liquid jet guiding with gas protecting cover.
Be drilled at first the diameter of protection screen mesopore than water jet diameter about 10%.The cylindrical shape gas flow of the encirclement water jet that gas " layer " (as helium) is launched from gas nozzle is that about 20-40um is thick.In machining process, the diameter in this hole increases gradually.Have been found that astoundingly the hole in protection screen does not have large impact to the dynamic characteristic of liquid jet.
Device can comprise and is arranged near Room the 1st and the protection chamber in its downstream.Protection chamber is more flat and emptying in peripheral wall.The thickness of protection chamber is about 10mm but can smaller (5-10mm).
Preferably there is funnel-like part protection chamber, the laser beam directed upstream of the relative transparency liquid jet guiding of its narrow terminal.Make the wide terminal of funnel point to downstream and follow a passage.The stable motion of the water jet that the design assurance of funnel is surrounded by assist gas.(" upstream " refers to towards nozzle and " downstream " and refers to towards workpiece).
Protection chamber can have the degree of depth (size that is parallel to the beam direction of transparency liquid jet guiding) to be not more than about 10mm.The stable motion of the water jet that the design assurance of passage is surrounded by assist gas.
The front end face of protection chamber is advantageously processed into taper to form recessed or load mould.Thereby there is passage (free space) at the edge that protection screen can be fixed on to tapered recess between protection screen and tapered recess.Thereby passage can be on the both sides of protection screen can flow away at an easy rate drilling Kong Shishui.
The periphery of duplet lens system and/or temperature stability is provided above when using cooling system for focus lens system.
The combination of preferred embodiment and claim is described below, has comprised further favourable characteristic and usefulness of the present invention.
Accompanying drawing explanation
The each side being expressed as follows for each figure of details of the present invention of explaining.
Fig. 1 a represents to be connected to the cross section of the protection screen of protecting chamber, and protection chamber is connected to coupling head used in water jet guiding laser technology,
The section that Fig. 1 b presentation graphs 1a amplifies,
Fig. 2 a represents not have the bottom side of the protection chamber of baffle,
Fig. 2 b represents the bottom side of coupling unit and the protection screen being connected with it,
Fig. 3 a-c represents the method for holing in protection screen according to the present invention.
In each figure, identical reference number is specified same parts.
The specific embodiment
Fig. 1 represents the protection screen of baffle 20 forms and is arranged on the cross section of the protection of the present invention chamber 10 on the coupling unit CU that uses water-jet technology.In No. 2006/050622 (Synova) patent, particularly Fig. 6 of WO, can find the detailed description of this coupling unit CU.In order to understand better, provide the short summary of coupling unit CU: the laser beam of propagating along optical axis OA is to send and be coupled in the thin water jet being produced by nozzle 3 by window 2.By complete internal reflection, similar to glass fibre, water jet guiding laser beam.Also consistent with optical axis OA by nozzle 3 generation water jets and its axis.After nozzle 3, the laser beam of water jet guiding, by gas compartment 4, adds that around water jet gas protecting cover makes the surface of (cylindrical shape) water jet more stable there.The water jet guiding laser beam surrounding with gas protecting cover is by the opening 5 of coupling unit CU.
The amplification profile of the circle AA marking in the more detailed presentation graphs 1a of Fig. 1 b.It mainly represents to protect chamber 10 and baffle 20.
The shape that protection chamber 10 the mainly contains dish type therein heart has columnar passage 11.Passage 11 has the axis of the rotation-symmetric consistent with optical axis OA.Protection chamber 10 is arranged on to the consistent with water jet with passage 11 of coupling unit opening 5 above.By inner tube 12, form passage 11.Upstream, towards coupling unit CU, passage 11 terminates in little funnel, and the effect of little funnel is as the entrance 17 of the laser beam of water jet guiding.In end opposite, downstream, passage 11 terminates in larger funnel, and it has the shape of passage 11 conical outlets 15.By outer cylindrical wall 13, protection chamber 10 is connected to coupling unit CU.Between outer wall 13 and inner tube 12, have cavity 14, it has opening towards coupling unit CU.With that mode cavity 14 and laser LH, form empty chamber.Contrary with the outer wall of same coupling unit CU contact, inner tube does not contact coupling unit CU.Thereby there is little gap 18 between pipe 12 and coupling unit CU.This gap 18 can regulate the pressure between cavity 14 and passage 11.
Water jet guiding laser beam is by entrance 17 admission passages 11.During by passage 11 water jet not contact channels 11 wall 16 and by the outlet 15 of passage 11 leave protection chamber still contact with gas protecting cover.The diameter of passage 11 is greater than substantially the diameter of the nozzle that produces water jet and can has identical size with the opening 5 of coupling unit CU.The diameter of passage 11 is about 200-600 μ m, is preferably about 500 μ m.Not directly contact between the diameter of the diameter of nozzle and passage 11.Outlet 15 protects coupling unit CU to avoid the short grained injury of ablator together with passage 11, because granule may be inhaled in the opening 5 of coupling unit CU.Also have, passage 11 prevents the disturbance of water jet, and this disturbance may be due to the feedback effect as water jet and workpiece (not shown) interaction result.
Baffle 20 is metal sheets of rectangle, by it be arranged on protection chamber 10 before (protecting the downstream of chamber) and perpendicular to optical axis OA.The top major surface of baffle 20 contacts with the lower end 13a of protection chamber 10 outer walls 13.And the bottom major surface of baffle 20 is towards workpiece (not shown).Baffle 20 is made and had thickness to be preferably about 100 μ m by stainless steel.By 2 screws 21 and 22 each side in rectangular area, be screwed in the lower end 13a that protects chamber 10 outer walls 13 baffle 20 is fixed in position.Porose 23 at baffle 20 center, it is consistent with optical axis OA.The diameter that laser beam this hole of on-the-spot generation guiding with water jet and its diameter are slightly greater than water jet.Make in this way the laser beam of water jet guiding pass through without barrier baffle 20 through via hole 23.
Fig. 2 a represents not connect 10 bottom sides, protection chamber of baffle 20.Fixedly the screw 21 and 22 of baffle 20 has been screwed in the lower end 13a of protection chamber 10 outer walls 13.Distance between two screws 21 and 22 is greater than the conical outlet 15 of passage 11.
Fig. 2 b is the figure of the protection chamber 10 identical with Fig. 2 a, but has baffle 20 to be connected with it.The size of baffle 20 is like this, rectangle baffle 20 compared with long side 20a, be greater than the conical outlet 15 of passage 11 and shorter side 20b is less than the conical outlet 15 of passage 11.Thereby have totally 2 of perforate 15a and 15b in each side of baffle 20 longer side 20a, between baffle 20 and conical outlet 15, form open space.By clamping action, at the shorter terminal 20b of baffle 20 2, place screw 21 and 22, baffle 20 is fixed in position.
The speed that water jet is very high causes water jet ambient pressure to reduce, thereby causes sucking the particle of ablator.Because the diameter in the hole 23 of baffle 20 is very little, the air sucking towards water jet due to pressure drop flows through two perforate 15a and 15b rather than by hole 23.But do not have ablator to find it to pass through the path of these perforates 15a and 15b thereby perforate 5 that it can not arrive coupling unit CU or the conical outlet 15 of passage 11.
Fig. 3 a is illustrated in the step of making hole 23 in baffle 20 to 3c.As shown at Fig. 3 a, when being arranged on protection chamber 10, baffle 20 is single blind thin plates at first, and Ta center does not have hole.First by two screws 21 and 22, baffle 20 is fixed on to the bottom of protecting chamber 10.
Then, as shown at Fig. 3 b, the laser beam LB of the jet WJ that fetches boiling water guiding.It propagates and passes through passage 11 by protection chamber 10 along optical axis OA.Laser beam LB is drilling bore hole 23 in baffle 20 accurately on correct position at once, as aimed at passage 11 and optical axis OA in (on-the-spot boring) this hole as shown at Fig. 3 c.In any case the water of protected plate 20 push and block of water jet WJ can leave the space between baffle 20 and the conical outlet 15 of protection chamber 10 by two perforate 15a and 15b before hole 23 is drilled to.Hole 23 its diameters after being drilled to can not affect the mobile dynamic characteristic of water jet WJ than the diameter of water jet WJ about 10% thereby it.Now, coupling unit CU has been ready for cutting with protection chamber 10 together with baffle 20; Without further aligning, maybe must take other configuration.
For drilling bore hole 23 hydraulic pressure, (the pressure) Give of the water pump of supply coupling unit CU fixes on the numerical value of corresponding actual process operating condition.Use in addition mode identical when carrying out without any baffle 20 to carry out the optical alignment of the relative coupling unit CU of laser beam LB perforate 5.Laser parameter (being pulse recurrence rate, mean power etc.) is given and fixed on the value corresponding with actual processing conditions.
The pollution that baffle 20 provides supplementary protection to resist ablator to coupling unit CU.Also has the infringement of laser/plasma light that its protection coupling unit CU avoids reflecting.
Although preferred embodiment represents protection chamber to be connected to specific coupling unit, by gas protecting cover, surround water jet there, the present invention is not restricted to so specific coupling unit CU.According to the present invention, protection chamber can be connected to laser beam when it is exported and be guided in any coupling unit in water jet.
According to the present invention, by the laser head of protecting the protection of chamber and protection screen, work is good especially during for the material of cutting hard.But, when cutting soft material as brass or copper, also obtain good result.
The thickness of protection screen be mainly limited to install its required minimum hardness this on the one hand: on the one hand, if its too thin baffle that makes becomes too easily crooked thereby can not easily process.On the other hand, it is subject to the restriction with laser beam drilling bore hole required time in screen: if required time of its too thick laser beam LB drilling bore hole in screen is oversize.Preferably select like this thickness, make the time of boring be less than 1 second (as 0.1-0.5 second).
Can separately use protection chamber and protection screen.If use protection screen while not protecting chamber, before so the bottom that protection screen is directly connected to coupling unit being exported at its.Between the outlet of coupling unit and protection screen, will generate the chamber of an opening in this case.Before being drilled to hole, water can flow away in this way.
Except using, do not protect the protection screen of chamber or contrary, the present invention is also not limited to the coupling unit of describing in example.This especially means that around the gas protecting cover of water jet be preferably but completely dispensable really.
The shape of protection screen needs not to be rectangle.Other shapes are also possible.Particularly can apply circle, ellipse or square protection screen.Because baffle is fixed to protection chamber or laser head mechanism used, this comprises special form.Rectangle has the low-down advantage of cost.
Can protection screen be connected to protection chamber or coupling unit with diverse ways.Can use latch or replace screw by buckle mechanism, once insert there protection screen, just can be clamped in position.Can protection screen be connected to protection chamber or laser head with soldering or viscose glue in addition, or they are made into one.Also be when using for the 1st time, hole to be drilled in protection screen in this case, if protection screen is for good and all fixed on protection chamber or laser head, it only may change respectively together with protection chamber or laser head so.Protection screen should connect in such a way, and when operation, it can not move or stagger.
In the situation that the bore dia of protection screen becomes too large, can make protection screen be displaced sideways to replace changing protection screen, this mode makes existing hole depart from the optical axis center of water jet/laser beam.And bore the method in new hole when same application when having a new protection screen.
Flat steel plate may be also the simplest embodiment of protection screen in addition, can imagine different geometries, tabular or bulky structure.For example can construct this screen and be assembled to respectively coupling unit or protection chamber, when use is some.Can also imagine that can to make will to be drilled in protection screen the region in hole thinner than other places around.With laser beam, can be easy to drilling bore hole in this way, and the thicker region of leaving hole provides enough stability for protection screen.
Also have in order to improve the performance of laser head, can coolingly focus the laser beam into the condenser lens in water jet.With liquid, water particularly, or can cooling lens with gas.Cooling lens can or carry out indirectly by cooling lens carrier, or directly carry out by least one surface of cooling lens.

Claims (20)

1. for improving the method for the process for machining reliability of workpiece, described process for machining comprises following each step, wherein:
A) by nozzle (3) atomizing of liquids through head (LH), along optical axis (OA) the transmitting transparency liquid jet (WJ) to workpiece,
B) by coupling unit, laser beam (LB) is coupled in described liquid jet (WJ) to produce the laser beam (LB) of liquid jet (WJ) guiding,
C) by workpiece described in laser beam (LB) machined of described liquid jet (WJ) guiding,
Wherein for improving the method for reliability, comprise the steps:
D) at the described transparency liquid jet of transmitting (WJ), before head (LH), fix before a blind protection screen blank (20),
E) produce the laser beam (LB) of described liquid jet (WJ) guiding and it impacted to blind protection screen blank (20) above,
F) laser beam (LB) by liquid jet (WJ) guiding gets out a perforation (23) in blind protection screen blank (20), and the minimum dimension of described perforation (23) allows without hindrance the passing through of laser beam (LB) of liquid jet (WJ) guiding.
2. in accordance with the method for claim 1, it is characterized in that described in machined that the step of workpiece there is no interruptedly follows after drilling the step of hole (23).
3. in accordance with the method for claim 1, comprise and coolingly laser beam (LB) is focused on to focus lens system (2) in described coupling unit thereby the step of liquid jet (WJ) stabilized lasers bundle (LB) relatively.
4. comprise the steps: in accordance with the method for claim 1,
A) in nozzle (3) the 1st Room (4) afterwards with gas jet surround transparency liquid jet (WJ) guiding laser beam (LB) and
B) laser beam (LB) that sends transparency liquid jet (WJ) guiding of surrounding with described gas jet is by the 2nd Room (10).
5. the device of laser beam (LB) machine workpieces guiding by liquid jet (WJ), comprising:
A) head (LH), has coupling unit for laser beam (LB) is coupled to liquid jet (WJ) to produce the laser beam (LB) of liquid jet (WJ) guiding,
B) outlet of head (5), the laser beam (LB) of liquid jet (WJ) guiding leaves head (LH) for this workpiece of machined by this outlet,
C) blind protection screen blank (20), is removablely fixed to head (LH) and is arranged on from described outlet (5) a distance, to form perforation (23) by liquid jet (WJ) described blind protection screen blank (20) is upper when described device operation,
D) minimum dimension of described perforation (23) allows without hindrance the passing through of laser beam (LB) of liquid jet (WJ) guiding.
6. according to device claimed in claim 5, it is characterized in that blind protection screen blank (20) is to be formed from steel.
7. according to device claimed in claim 5, it is characterized in that blind protection screen blank (20) is to be made by stainless steel.
8. according to device claimed in claim 5, it is characterized in that blind protection screen blank (20) is baffle and has thickness to be 0.3mm to the maximum.
9. according to the device described in claim 5 or 6, it is characterized in that head (LH) comprises the nozzle (3) for generation of described liquid jet (WJ), its diameter is between 20 and 150 μ m.
10. according to device claimed in claim 9, it is characterized in that described diameter is not more than 60 μ m.
11. according to device claimed in claim 8, it is characterized in that, by screw (21,22), baffle (20) is fixed to head (LH).
12. according to device claimed in claim 5, it is characterized in that coupling unit comprises liquid jet nozzle (3), is arranged near liquid jet nozzle (3) and in the 1st Room (4) in its downstream, there is entrance, the gas access of the laser beam (LB) of liquid jet (WJ) guiding described the 1st Room (4) and exports for surrounded the gas nozzle of the laser beam (LB) of liquid jet (WJ) guiding by gas protecting cover.
13. according to device claimed in claim 5, it is characterized in that coupling unit includes the liquid chamber that laser beam enters window and liquid jet nozzle (3), liquid jet nozzle (3) has predetermined diameter for generation of liquid jet (WJ), and described liquid jet nozzle (3) is arranged in to the opposite that laser beam enters window.
14. according to device claimed in claim 8, it is characterized in that it comprises to be arranged near the 1st Room (4) and in the protection chamber (10) in its downstream, and described protection chamber (10) is flat and in the emptying of peripheral wall place.
15. according to device claimed in claim 9; it is characterized in that there is funnel part described protection chamber (10), its narrow end (17) relatively laser beam (LB) directed upstream of transparency liquid jet (WJ) guiding and its wide end points to downstream and then passage (11).
16. according to device claimed in claim 10, it is characterized in that protecting chamber (10) to have and be parallel to the degree of depth of laser beam (LB) direction of transparency liquid jet (WJ) guiding, and the degree of depth is not more than 10mm.
17. according to the device described in claim 16, it is characterized in that the described degree of depth is between 5-10mm.
18. according to the device described in claim 14, the front end face (15) that it is characterized in that protecting chamber (10) be taper and baffle is fixed to open end and the side to this baffle, open space is provided.
19. according to device claimed in claim 5, it is characterized in that, for laser beam (LB) being focused on to the focus lens system (2) of nozzle (3) opening, cooling system is housed.
20. according to the device described in claim 15, it is characterized in that the periphery of cooling system duplet lens system (2) and/or the stability of temperature is provided above.
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