CN114619038B - 一种高纯度的钨钛合金靶材的制备方法 - Google Patents
一种高纯度的钨钛合金靶材的制备方法 Download PDFInfo
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- CN114619038B CN114619038B CN202210114912.6A CN202210114912A CN114619038B CN 114619038 B CN114619038 B CN 114619038B CN 202210114912 A CN202210114912 A CN 202210114912A CN 114619038 B CN114619038 B CN 114619038B
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- tungsten
- titanium alloy
- purity
- powder
- ammonium paratungstate
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F9/00—Making metallic powder or suspensions thereof
- B22F9/16—Making metallic powder or suspensions thereof using chemical processes
- B22F9/18—Making metallic powder or suspensions thereof using chemical processes with reduction of metal compounds
- B22F9/20—Making metallic powder or suspensions thereof using chemical processes with reduction of metal compounds starting from solid metal compounds
- B22F9/22—Making metallic powder or suspensions thereof using chemical processes with reduction of metal compounds starting from solid metal compounds using gaseous reductors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/001—Starting from powder comprising reducible metal compounds
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/12—Both compacting and sintering
- B22F3/14—Both compacting and sintering simultaneously
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/24—After-treatment of workpieces or articles
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
- C01G41/00—Compounds of tungsten
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/04—Making non-ferrous alloys by powder metallurgy
- C22C1/05—Mixtures of metal powder with non-metallic powder
- C22C1/058—Mixtures of metal powder with non-metallic powder by reaction sintering (i.e. gasless reaction starting from a mixture of solid metal compounds)
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C27/00—Alloys based on rhenium or a refractory metal not mentioned in groups C22C14/00 or C22C16/00
- C22C27/04—Alloys based on tungsten or molybdenum
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
- C23G1/02—Cleaning or pickling metallic material with solutions or molten salts with acid solutions
- C23G1/10—Other heavy metals
- C23G1/106—Other heavy metals refractory metals
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/24—After-treatment of workpieces or articles
- B22F2003/241—Chemical after-treatment on the surface
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Metallurgy (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Powder Metallurgy (AREA)
- Manufacture And Refinement Of Metals (AREA)
- Manufacture Of Metal Powder And Suspensions Thereof (AREA)
Abstract
Description
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN202210114912.6A CN114619038B (zh) | 2022-01-31 | 2022-01-31 | 一种高纯度的钨钛合金靶材的制备方法 |
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CN202210114912.6A CN114619038B (zh) | 2022-01-31 | 2022-01-31 | 一种高纯度的钨钛合金靶材的制备方法 |
Publications (2)
Publication Number | Publication Date |
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CN114619038A CN114619038A (zh) | 2022-06-14 |
CN114619038B true CN114619038B (zh) | 2023-04-25 |
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4838935A (en) * | 1988-05-31 | 1989-06-13 | Cominco Ltd. | Method for making tungsten-titanium sputtering targets and product |
CN103240412A (zh) * | 2013-05-22 | 2013-08-14 | 北京科技大学 | 一种近终形制备粉末超合金的方法 |
CN105568236A (zh) * | 2016-03-14 | 2016-05-11 | 洛阳高新四丰电子材料有限公司 | 一种高纯、高致密、大尺寸钼钛合金溅射靶材的制备方法 |
CN109676124A (zh) * | 2018-12-24 | 2019-04-26 | 北京科技大学 | 一种金属材料的烧结致密化及晶粒尺寸控制方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5863398A (en) * | 1996-10-11 | 1999-01-26 | Johnson Matthey Electonics, Inc. | Hot pressed and sintered sputtering target assemblies and method for making same |
JP4578704B2 (ja) * | 2001-03-02 | 2010-11-10 | アルバックマテリアル株式会社 | W−Tiターゲット及びその製造方法 |
CN102211188B (zh) * | 2011-06-03 | 2013-01-09 | 厦门虹鹭钨钼工业有限公司 | 半导体及太阳能溅射靶材行业用钨钛合金靶材的制备方法 |
CN103132033B (zh) * | 2013-03-26 | 2016-03-16 | 金堆城钼业股份有限公司 | 一种制备钼靶的方法 |
CN106319463B (zh) * | 2016-09-22 | 2018-11-23 | 安泰天龙钨钼科技有限公司 | 一种轧制加工钨钛合金靶材的制备方法 |
CN108907211B (zh) * | 2018-08-16 | 2021-10-08 | 北京科技大学 | 一种制备大尺寸钼板坯的方法 |
CN108751259B (zh) * | 2018-08-17 | 2020-12-22 | 厦门钨业股份有限公司 | 一种含钨废料生产偏钨酸铵的方法及其装置 |
CN111283211A (zh) * | 2020-02-26 | 2020-06-16 | 厦门虹鹭钨钼工业有限公司 | 一种高纯钨粉的制备方法 |
CN112678871B (zh) * | 2021-01-29 | 2022-10-28 | 宁波江丰电子材料股份有限公司 | 一种超高纯仲钨酸铵的制备方法 |
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2022
- 2022-01-31 CN CN202210114912.6A patent/CN114619038B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4838935A (en) * | 1988-05-31 | 1989-06-13 | Cominco Ltd. | Method for making tungsten-titanium sputtering targets and product |
CN103240412A (zh) * | 2013-05-22 | 2013-08-14 | 北京科技大学 | 一种近终形制备粉末超合金的方法 |
CN105568236A (zh) * | 2016-03-14 | 2016-05-11 | 洛阳高新四丰电子材料有限公司 | 一种高纯、高致密、大尺寸钼钛合金溅射靶材的制备方法 |
CN109676124A (zh) * | 2018-12-24 | 2019-04-26 | 北京科技大学 | 一种金属材料的烧结致密化及晶粒尺寸控制方法 |
Non-Patent Citations (1)
Title |
---|
高纯钨溅射靶材制取工艺研究;郭让民;中国钼业;第21卷(第S1期);第39-41页 * |
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Inventor after: Qu Xuanhui Inventor after: Que Zhongyou Inventor after: Yang Junjun Inventor after: Li Xingyu Inventor after: Zhang Lin Inventor after: Xiong Ning Inventor after: Wang Guangda Inventor after: Qin Mingli Inventor after: Chen Gang Inventor after: Zhang Baicheng Inventor after: Wei Zichen Inventor before: Qu Xuanhui Inventor before: Wei Zichen Inventor before: Que Zhongyou Inventor before: Yang Junjun Inventor before: Li Xingyu Inventor before: Zhang Lin Inventor before: Xiong Ning Inventor before: Liu Guohui Inventor before: Qin Mingli Inventor before: Chen Gang Inventor before: Zhang Baicheng Inventor before: Wang Guangda |
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Effective date of registration: 20221026 Address after: 100083 No. 30, Haidian District, Beijing, Xueyuan Road Applicant after: University OF SCIENCE AND TECHNOLOGY BEIJING Applicant after: ATTL ADVANCED MATERIALS Co.,Ltd. Applicant after: ADVANCED TECHNOLOGY & MATERIALS Co.,Ltd. Address before: 100083 No. 30, Haidian District, Beijing, Xueyuan Road Applicant before: University OF SCIENCE AND TECHNOLOGY BEIJING |
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CB03 | Change of inventor or designer information |
Inventor after: Qu Xuanhui Inventor after: Wei Zichen Inventor after: Que Zhongyou Inventor after: Yang Junjun Inventor after: Li Xingyu Inventor after: Zhang Lin Inventor after: Xiong Ning Inventor after: Wang Guangda Inventor after: Liu Guohui Inventor after: Qin Mingli Inventor after: Chen Gang Inventor after: Zhang Baicheng Inventor before: Qu Xuanhui Inventor before: Que Zhongyou Inventor before: Yang Junjun Inventor before: Li Xingyu Inventor before: Zhang Lin Inventor before: Xiong Ning Inventor before: Wang Guangda Inventor before: Qin Mingli Inventor before: Chen Gang Inventor before: Zhang Baicheng Inventor before: Wei Zichen |
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