CN113451226B - 耐热型qfn封装半导体器件 - Google Patents

耐热型qfn封装半导体器件 Download PDF

Info

Publication number
CN113451226B
CN113451226B CN202110620907.8A CN202110620907A CN113451226B CN 113451226 B CN113451226 B CN 113451226B CN 202110620907 A CN202110620907 A CN 202110620907A CN 113451226 B CN113451226 B CN 113451226B
Authority
CN
China
Prior art keywords
parts
heat
chip
semiconductor device
pad
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202110620907.8A
Other languages
English (en)
Other versions
CN113451226A (zh
Inventor
马磊
党鹏
杨光
彭小虎
王新刚
庞朋涛
任斌
王妙妙
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xi'an Hangsi Semiconductor Co ltd
Original Assignee
Xi'an Hangsi Semiconductor Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xi'an Hangsi Semiconductor Co ltd filed Critical Xi'an Hangsi Semiconductor Co ltd
Priority to CN202110620907.8A priority Critical patent/CN113451226B/zh
Publication of CN113451226A publication Critical patent/CN113451226A/zh
Application granted granted Critical
Publication of CN113451226B publication Critical patent/CN113451226B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • H01L23/293Organic, e.g. plastic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/367Cooling facilitated by shape of device
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/484Connecting portions
    • H01L2224/48463Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
    • H01L2224/48465Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond the other connecting portion not on the bonding area being a wedge bond, i.e. ball-to-wedge, regular stitch
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73265Layer and wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Materials Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Epoxy Resins (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Die Bonding (AREA)

Abstract

本发明公开了一种耐热型QFN封装半导体器件,散热焊盘远离芯片的一侧开有分隔槽,所述分隔槽宽度为0.1~0.3mm,所述分隔槽将散热焊盘远离芯片的一侧等分分隔形成至少2块焊盘单体,所述分隔槽中填充有导热绝缘条;环氧绝缘体的原料包括以下重量份组分:环氧树脂、线型酚醛树脂、液体丁腈橡胶、二苯基甲烷二异氰酸酯、焦碳酸二乙酯、磷酸二苄酯、硅微粉、γ‑甲基丙烯酰氧基丙基三甲氧基硅烷、5‑氟‑2‑甲氧基苯胺、2,4,6‑三(二甲氨基甲基)苯酚、脱模剂、阻燃剂。本发明耐热型QFN封装半导体器件增强了环氧绝缘体的整体力学性能,有效保证了封装结构稳定性和兼具有优秀的耐热性能。

Description

耐热型QFN封装半导体器件
技术领域
本发明属于无引脚封装技术领域,尤其涉及一种耐热型QFN封装半导体器件。
背景技术
QFN封装在PCB板中应用很广,QFN封装的应用极大的推动了电子技术的发展。QFN封装具有优异的热性能,主要是因为封装底部有大面积散热焊,为了能有效地将热量从芯片传导到PCB上,PCB底部必须设计与之相对应的散热焊盘以及散热过孔,散热焊盘提供了可靠的焊接面积,散热过孔提供了散热途径。
常规的QFN封装在PCB中的设计通常有一个大面积的散热焊盘,这个散热焊盘通常接地,虽然这个散热焊盘可以起到芯片散热的作用,但往往由于焊盘过大,在贴片(SMT)过程中刷锡过多会导致这个QFN封装中央大的散热焊盘与其他的小的导电焊盘的短路现象。此外,随着集成电路封装向着高密度化、高集成化、高速化方向的不断发展,封装结构也面临承受芯片发热而带来的一系列可靠性风险。因此,如何研发出一种具有防短路功能的耐热封装结构对于高性能电子器件的发展具有重要的意义。
发明内容
本发明目的在于提供一种耐热型QFN封装半导体器件,该封装结构具有良好的防短路功能,且整体力学性能好结构稳定,具有很高的可靠性。
为达到上述目的,本发明采用的技术方案是:一种耐热型QFN封装半导体器件,包括位于环氧绝缘体中的散热焊盘、芯片和导电焊盘,所述芯片位于散热焊盘上,且所述芯片与散热焊盘之间设有银浆层,位于散热焊盘周边设有若干个导电焊盘,所述导电焊盘和芯片通过一引线连接;
所述散热焊盘远离芯片的一侧开有分隔槽,所述分隔槽宽度为0.1~0.3mm,所述分隔槽将散热焊盘远离芯片的一侧等分分隔形成至少2块焊盘单体,所述分隔槽中填充有导热绝缘条,所述分隔槽槽壁上开有若干个延伸至散热焊盘内的T形槽,所述导热绝缘条上设有填充于T形槽中的T形部;
所述环氧绝缘体的原料包括以下重量份组分:环氧树脂100份、线型酚醛树脂55份、液体丁腈橡胶18份、二苯基甲烷二异氰酸酯10份、焦碳酸二乙酯8份、磷酸二苄酯2份、硅微粉70份、γ-甲基丙烯酰氧基丙基三甲氧基硅烷8份、5-氟-2-甲氧基苯胺1份、2,4,6-三(二甲氨基甲基)苯酚0.5份、脱模剂5份、钼酸盐10份。
上述技术方案中进一步改进的技术方案如下:
1. 上述方案中,所述脱模剂为硬脂酸和氧化聚乙烯蜡的混合物。
2. 上述方案中,所述焊盘单体的面积不小于0.3*0.3mm2
3. 上述方案中,所述导电焊盘为T型块。
由于上述技术方案的运用,本发明与现有技术相比具有下列优点:
1. 本发明耐热型QFN封装半导体器件,其环氧绝缘体配方在环氧树脂体系中加入了液体丁腈橡胶,采用2,4,6-三(二甲氨基甲基)苯酚作为固化促进剂,并额外添加了焦碳酸二乙酯和5-氟-2-甲氧基苯,提高了固化物的交联密度,从而增强了环氧绝缘体的整体力学性能,有效保证了封装结构稳定性。
2. 本发明耐热型QFN封装半导体器件,其环氧绝缘体配方在环氧树脂、线型酚醛树脂和液体丁腈橡胶的基础上,又添加了二苯基甲烷二异氰酸酯以及磷酸二苄酯,制得的树脂在保证良好力学性能的前提下,兼具有优秀的耐热性能,玻璃化温度达190~230℃,可满足大功率高发热芯片封装的要求。
3、本发明耐热型QFN封装半导体器件,在远离芯片一侧的散热焊盘表面上开设分隔槽,通过不同形状的分隔槽将散热焊盘远离芯片的一部分等分分割成至少两块焊盘单体,在划分成多个焊盘单体后,焊盘单体远离芯片一侧的表面积小于原散热焊盘远离芯片一侧的表面积,从而减少锡膏的使用量,进而有效控制散热焊盘和导电焊盘之间的短路现象;同时,在分隔槽中填充设置上导热绝缘条后,分隔槽部分不会填充上导热效果较差的环氧绝缘树脂,以保证散热焊盘部分的散热功能不受影响,且随着锡膏使用量的减少,还能降低贴片成本;另外,导热绝缘条在通过注塑的方式填充进分隔槽中时,部分树脂能够进入T形槽中,形成T形部,从而利用T形部与T形槽的卡接稳固住导热绝缘条位置,避免由于注塑质量问题或外力作用导致导热绝缘条脱离分隔槽而影响到其使用。
附图说明
附图1为本发明耐热型QFN封装半导体器件示意图;
附图2为附图1中A部分的放大图。
以上附图中:1、散热焊盘;11、分隔槽;111、T形槽;12、导热绝缘条;121、T形部;13、焊盘单体;2、银浆层;3、芯片;4、导电焊盘;5、引线;6、环氧绝缘体。
具体实施方式
下面结合实施例对本发明作进一步描述:
实施例:一种耐热型QFN封装半导体器件,包括位于环氧绝缘体6中的散热焊盘1、芯片3和导电焊盘4,所述芯片3位于散热焊盘1上,且所述芯片3与散热焊盘1之间设有银浆层2,位于散热焊盘1周边设有若干个导电焊盘4,所述导电焊盘4和芯片3通过一引线5连接;
所述散热焊盘1远离芯片3的一侧开有分隔槽11,所述分隔槽11宽度为0.1~0.3mm,所述分隔槽11将散热焊盘1远离芯片3的一侧等分分隔形成至少2块焊盘单体13,所述分隔槽11中填充有导热绝缘条12,所述分隔槽11槽壁上开有若干个延伸至散热焊盘1内的T形槽111,所述导热绝缘条12上设有填充于T形槽111中的T形部121;
上述导热绝缘条12厚度小于分隔槽11槽深;
上述焊盘单体13的面积不小于0.3*0.3mm2
上述导电焊盘4和散热焊盘1的间距为0.3mm;
上述导电焊盘4为T型块。
上述环氧绝缘体6的原料包括以下重量份组分:环氧树脂100份、线型酚醛树脂55份、液体丁腈橡胶18份、二苯基甲烷二异氰酸酯10份、焦碳酸二乙酯8份、磷酸二苄酯2份、硅微粉70份、γ-甲基丙烯酰氧基丙基三甲氧基硅烷8份、5-氟-2-甲氧基苯胺1份、2,4,6-三(二甲氨基甲基)苯酚0.5份、脱模剂5份、钼酸盐10份。
上述硅微粉为熔融硅微粉,上述硅微粉D50为4~8μm,上述硅微粉D100为10~25μm。
脱模剂为硬脂酸和氧化聚乙烯蜡的混合物。
上述环氧绝缘体6的原料制备方法包括以下步骤:
S1. 先将硅微粉和阻燃剂与γ-甲基丙烯酰氧基丙基三甲氧基硅烷混合均匀,进行表面处理;
S2. 再加入环氧树脂、线型酚醛树脂、液体丁腈橡胶、二苯基甲烷二异氰酸酯、焦碳酸二乙酯、磷酸二苄酯、5-氟-2-甲氧基苯胺、2,4,6-三(二甲氨基甲基)苯酚和脱模剂,混合均匀;
S3. 将混合物于90~110℃混炼3~5分钟,产物冷却后粉碎过筛。
对比例1~3:一种环氧绝缘体,原料包括以下重量份组分:
表1
Figure DEST_PATH_IMAGE001
上述硅微粉为熔融硅微粉,上述硅微粉D50为4~8μm,上述硅微粉D100为10~25μm。
对比例1中的脱模剂为硬脂酸,阻燃剂为硼酸盐;对比例2中的脱模剂为硬脂酸盐,阻燃剂为硼酸盐;对比例3中的脱模剂为氧化聚乙烯蜡,阻燃剂为钼酸盐。
制备工艺方法同实施例。
上述实施例和对比例1~3制得的环氧绝缘体的性能如表2所示:
表2
Figure DEST_PATH_IMAGE002
各实施例和对比例中,环氧绝缘体的成型条件均为:模具温度180℃,注射压力700kg/cm2,固化时间2min。
如表2的评价结果所示,各实施例中的环氧绝缘体无论是整体力学性能还是耐热性能均优于各对比例,用于QFN封装结构中能够保证封装结构稳定性,并能够满足大功率高发热芯片封装的要求。
上述实施例只为说明本发明的技术构思及特点,其目的在于让熟悉此项技术的人士能够了解本发明的内容并据以实施,并不能以此限制本发明的保护范围。凡根据本发明精神实质所作的等效变化或修饰,都应涵盖在本发明的保护范围之内。

Claims (4)

1.一种耐热型QFN封装半导体器件,其特征在于:包括位于环氧绝缘体(6)中的散热焊盘(1)、芯片(3)和导电焊盘(4),所述芯片(3)位于散热焊盘(1)上,且所述芯片(3)与散热焊盘(1)之间设有银浆层(2),位于散热焊盘(1)周边设有若干个导电焊盘(4),所述导电焊盘(4)和芯片(3)通过一引线(5)连接;
所述散热焊盘(1)远离芯片(3)的一侧开有分隔槽(11),所述分隔槽(11)宽度为0.1~0.3mm,所述分隔槽(11)将散热焊盘(1)远离芯片(3)的一侧等分分隔形成至少2块焊盘单体(13),所述分隔槽(11)中填充有导热绝缘条(12),所述分隔槽(11)槽壁上开有若干个延伸至散热焊盘(1)内的T形槽(111),所述导热绝缘条(12)上设有填充于T形槽(111)中的T形部(121);
所述环氧绝缘体(6)的原料包括以下重量份组分:环氧树脂100份、线型酚醛树脂55份、液体丁腈橡胶18份、二苯基甲烷二异氰酸酯10份、焦碳酸二乙酯8份、磷酸二苄酯2份、硅微粉70份、γ-甲基丙烯酰氧基丙基三甲氧基硅烷8份、5-氟-2-甲氧基苯胺1份、2,4,6-三(二甲氨基甲基)苯酚0.5份、脱模剂5份、钼酸盐10份。
2.根据权利要求1所述的耐热型QFN封装半导体器件,其特征在于:所述脱模剂为硬脂酸和氧化聚乙烯蜡的混合物。
3.根据权利要求1所述的耐热型QFN封装半导体器件,其特征在于:所述焊盘单体(13)的面积不小于0.3*0.3mm2
4.根据权利要求1所述的耐热型QFN封装半导体器件,其特征在于:所述导电焊盘(4)为T型块。
CN202110620907.8A 2019-03-06 2019-03-06 耐热型qfn封装半导体器件 Active CN113451226B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110620907.8A CN113451226B (zh) 2019-03-06 2019-03-06 耐热型qfn封装半导体器件

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN202110620907.8A CN113451226B (zh) 2019-03-06 2019-03-06 耐热型qfn封装半导体器件
CN201910166939.8A CN109904124B (zh) 2019-03-06 2019-03-06 具有防短路功能的qfn封装结构

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN201910166939.8A Division CN109904124B (zh) 2019-03-06 2019-03-06 具有防短路功能的qfn封装结构

Publications (2)

Publication Number Publication Date
CN113451226A CN113451226A (zh) 2021-09-28
CN113451226B true CN113451226B (zh) 2022-07-19

Family

ID=66946579

Family Applications (5)

Application Number Title Priority Date Filing Date
CN201910166939.8A Active CN109904124B (zh) 2019-03-06 2019-03-06 具有防短路功能的qfn封装结构
CN202110620907.8A Active CN113451226B (zh) 2019-03-06 2019-03-06 耐热型qfn封装半导体器件
CN202110621536.5A Active CN113451228B (zh) 2019-03-06 2019-03-06 高强度qfn封装结构
CN202110620909.7A Active CN113451227B (zh) 2019-03-06 2019-03-06 高可靠性qfn封装器件结构
CN202110620908.2A Active CN113451235B (zh) 2019-03-06 2019-03-06 Qfn封装半导体器件

Family Applications Before (1)

Application Number Title Priority Date Filing Date
CN201910166939.8A Active CN109904124B (zh) 2019-03-06 2019-03-06 具有防短路功能的qfn封装结构

Family Applications After (3)

Application Number Title Priority Date Filing Date
CN202110621536.5A Active CN113451228B (zh) 2019-03-06 2019-03-06 高强度qfn封装结构
CN202110620909.7A Active CN113451227B (zh) 2019-03-06 2019-03-06 高可靠性qfn封装器件结构
CN202110620908.2A Active CN113451235B (zh) 2019-03-06 2019-03-06 Qfn封装半导体器件

Country Status (1)

Country Link
CN (5) CN109904124B (zh)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07242733A (ja) * 1994-03-05 1995-09-19 Toshiba Chem Corp エポキシ樹脂組成物および半導体封止装置
JP2001081286A (ja) * 1999-09-13 2001-03-27 Sumitomo Bakelite Co Ltd 半導体用樹脂ペースト及びそれを用いた半導体装置
TW200712089A (en) * 2005-07-05 2007-04-01 San Apro Ltd Epoxy resin composition for sealing up optical semiconductor
JP2011014885A (ja) * 2009-06-01 2011-01-20 Shin-Etsu Chemical Co Ltd 多層半導体装置用アンダーフィル材のダム材組成物、及び該ダム材組成物を用いた多層半導体装置の製造方法
CN102993638A (zh) * 2011-09-12 2013-03-27 日东电工株式会社 半导体封装用环氧树脂组合物及利用其的半导体装置
CN104673111A (zh) * 2014-06-30 2015-06-03 广东丹邦科技有限公司 环氧树脂基各向异性导电胶膜的配方及制备方法

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2570037B2 (ja) * 1990-12-03 1997-01-08 モトローラ・インコーポレイテッド 分離型ヒートシンク・ボンディングパッドを有する半導体パッケージ
JP3535760B2 (ja) * 1999-02-24 2004-06-07 松下電器産業株式会社 樹脂封止型半導体装置,その製造方法及びリードフレーム
US6204553B1 (en) * 1999-08-10 2001-03-20 Walsin Advanced Electronics Ltd. Lead frame structure
US20030006055A1 (en) * 2001-07-05 2003-01-09 Walsin Advanced Electronics Ltd Semiconductor package for fixed surface mounting
JP3879452B2 (ja) * 2001-07-23 2007-02-14 松下電器産業株式会社 樹脂封止型半導体装置およびその製造方法
US6777788B1 (en) * 2002-09-10 2004-08-17 National Semiconductor Corporation Method and structure for applying thick solder layer onto die attach pad
KR100782225B1 (ko) * 2005-09-02 2007-12-05 엘에스전선 주식회사 함몰부가 형성된 다이패드를 구비한 리드프레임 및반도체 패키지
KR100984132B1 (ko) * 2007-11-12 2010-09-28 삼성에스디아이 주식회사 반도체 패키지 및 그 실장방법
US9029991B2 (en) * 2010-11-16 2015-05-12 Conexant Systems, Inc. Semiconductor packages with reduced solder voiding
JP5832740B2 (ja) * 2010-11-30 2015-12-16 株式会社ダイセル 硬化性エポキシ樹脂組成物
JP2013216871A (ja) * 2012-03-12 2013-10-24 San Apro Kk エポキシ樹脂硬化促進剤
JP2014007363A (ja) * 2012-06-27 2014-01-16 Renesas Electronics Corp 半導体装置の製造方法および半導体装置
US20140255270A1 (en) * 2013-02-28 2014-09-11 California Institute Of Technology Removing sacrificial layer to form liquid containment structure and methods of use thereof
TWI524482B (zh) * 2013-12-11 2016-03-01 南茂科技股份有限公司 晶片封裝結構及其製造方法
CN203871318U (zh) * 2014-03-17 2014-10-08 长华科技股份有限公司 双层导线架结构
TWM488042U (zh) * 2014-05-23 2014-10-11 Immense Digitize Engineering Co Ltd 雲端協同作業平台視覺性設計模組
CN105778409A (zh) * 2014-12-18 2016-07-20 北京首科化微电子有限公司 半导体封装用的环氧树脂组合物及其制备方法
WO2016121356A1 (ja) * 2015-01-30 2016-08-04 パナソニックIpマネジメント株式会社 封止用エポキシ樹脂組成物、硬化物、及び半導体装置
CN106256853B (zh) * 2015-06-22 2021-04-06 味之素株式会社 模塑底部填充用树脂组合物
CN106479128A (zh) * 2016-10-18 2017-03-08 北京中新泰合电子材料科技有限公司 一种光半导体器件封装用环氧树脂组合物及其制备方法
KR20180095410A (ko) * 2017-02-17 2018-08-27 주식회사 동진쎄미켐 도전성 접착제 조성물
CN206789537U (zh) * 2017-05-02 2017-12-22 泰瑞科微电子(淮安)有限公司 表面贴装整流芯片
CN107275305B (zh) * 2017-07-13 2020-03-10 郑州云海信息技术有限公司 一种qfn芯片
CN108129802A (zh) * 2017-12-25 2018-06-08 科化新材料泰州有限公司 一种半导体封装用的环氧树脂组合物制备方法
TWM606836U (zh) * 2020-09-18 2021-01-21 長華科技股份有限公司 導線架

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07242733A (ja) * 1994-03-05 1995-09-19 Toshiba Chem Corp エポキシ樹脂組成物および半導体封止装置
JP2001081286A (ja) * 1999-09-13 2001-03-27 Sumitomo Bakelite Co Ltd 半導体用樹脂ペースト及びそれを用いた半導体装置
TW200712089A (en) * 2005-07-05 2007-04-01 San Apro Ltd Epoxy resin composition for sealing up optical semiconductor
JP2011014885A (ja) * 2009-06-01 2011-01-20 Shin-Etsu Chemical Co Ltd 多層半導体装置用アンダーフィル材のダム材組成物、及び該ダム材組成物を用いた多層半導体装置の製造方法
CN102993638A (zh) * 2011-09-12 2013-03-27 日东电工株式会社 半导体封装用环氧树脂组合物及利用其的半导体装置
CN104673111A (zh) * 2014-06-30 2015-06-03 广东丹邦科技有限公司 环氧树脂基各向异性导电胶膜的配方及制备方法

Also Published As

Publication number Publication date
CN109904124B (zh) 2021-04-23
CN113451228B (zh) 2022-07-19
CN113451235B (zh) 2022-07-19
CN109904124A (zh) 2019-06-18
CN113451227A (zh) 2021-09-28
CN113451227B (zh) 2022-07-19
CN113451235A (zh) 2021-09-28
CN113451226A (zh) 2021-09-28
CN113451228A (zh) 2021-09-28

Similar Documents

Publication Publication Date Title
US7843058B2 (en) Flip chip packages with spacers separating heat sinks and substrates
US20110049701A1 (en) Semiconductor device and method of manufacturing the same
US11862542B2 (en) Dual side cooling power module and manufacturing method of the same
CN109904125B (zh) 耐高温qfn封装结构的制备方法
JPH10275818A (ja) 樹脂封止型半導体装置の製造方法および樹脂封止型半導体装置
CN113451226B (zh) 耐热型qfn封装半导体器件
CN112435974B (zh) 高强度dfn封装半导体器件
CN112420532B (zh) 无引脚dfn封装器件的封装工艺
JP3406073B2 (ja) 樹脂封止型半導体装置
JP2008181922A (ja) 熱伝導基板、その製造方法および熱伝導基板を用いた半導体装置
JP2008115373A (ja) 樹脂組成物の流れ率の測定方法、封止用エポキシ樹脂組成物及び電子部品装置
JPH08162573A (ja) 半導体装置
KR101239117B1 (ko) 전력 반도체 패키지 및 그 제조방법
KR102487625B1 (ko) 양면 냉각 파워 모듈 패키지
CN208923108U (zh) Smt用防短路dfn器件封装结构
KR101204223B1 (ko) 전력 모듈 패키지 및 그 제조방법
JP5421157B2 (ja) 半導体モジュールの製造方法
CN116403979A (zh) 封装结构及晶片封装方法
CN114921057A (zh) 一种环氧塑封料组合物、制备方法及应用
JPS62114286A (ja) 配線基板
JP2001345332A (ja) 樹脂層付ウェハ、半導体装置およびそれらの製法ならびにそれらに用いられるエポキシ樹脂組成物製タブレット
TW200845327A (en) Electrical resistance packing structure by tabular heat spreader device
JPH0742143U (ja) 表面実装形ハイブリッドic

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant