CN112867578A - 激光加工设备、其操作方法及使用其加工工件的方法 - Google Patents

激光加工设备、其操作方法及使用其加工工件的方法 Download PDF

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Publication number
CN112867578A
CN112867578A CN202080005766.2A CN202080005766A CN112867578A CN 112867578 A CN112867578 A CN 112867578A CN 202080005766 A CN202080005766 A CN 202080005766A CN 112867578 A CN112867578 A CN 112867578A
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CN
China
Prior art keywords
laser energy
optical
aod
positioner
beam path
Prior art date
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Pending
Application number
CN202080005766.2A
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English (en)
Chinese (zh)
Inventor
詹姆斯·布鲁克伊塞
杰恩·克雷能特
马克·寇摩斯基
提摩太·纽寇斯
杰瑞德·瑞智特尔
吉野郁世
史蒂夫·密里萨
穆罕默德·阿尔帕伊
刘源
克尔特·伊藤
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Irecto Science Industry Co ltd
Original Assignee
Irecto Science Industry Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Irecto Science Industry Co ltd filed Critical Irecto Science Industry Co ltd
Publication of CN112867578A publication Critical patent/CN112867578A/zh
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multi-focusing
    • B23K26/0676—Dividing the beam into multiple beams, e.g. multi-focusing into dependently operating sub-beams, e.g. an array of spots with fixed spatial relationship or for performing simultaneously identical operations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B23K26/0624—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1 ns or less
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0626—Energy control of the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0652—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/083—Devices involving movement of the workpiece in at least one axial direction
    • B23K26/0853—Devices involving movement of the workpiece in at least two axial directions, e.g. in a plane
    • B23K26/0861—Devices involving movement of the workpiece in at least two axial directions, e.g. in a plane in at least three axial directions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment
    • B23K26/704—Beam dispersers, e.g. beam wells

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Lenses (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
CN202080005766.2A 2019-01-31 2020-01-03 激光加工设备、其操作方法及使用其加工工件的方法 Pending CN112867578A (zh)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US201962799218P 2019-01-31 2019-01-31
US62/799,218 2019-01-31
US201962832064P 2019-04-10 2019-04-10
US62/832,064 2019-04-10
US201962854579P 2019-05-30 2019-05-30
US62/854,579 2019-05-30
PCT/US2020/012219 WO2020159666A1 (en) 2019-01-31 2020-01-03 Laser-processing apparatus, methods of operating the same, and methods of processing workpieces using the same

Publications (1)

Publication Number Publication Date
CN112867578A true CN112867578A (zh) 2021-05-28

Family

ID=71842451

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202080005766.2A Pending CN112867578A (zh) 2019-01-31 2020-01-03 激光加工设备、其操作方法及使用其加工工件的方法

Country Status (8)

Country Link
US (1) US12576457B2 (https=)
EP (1) EP3917717A4 (https=)
JP (2) JP7573535B2 (https=)
KR (2) KR102795535B1 (https=)
CN (1) CN112867578A (https=)
SG (1) SG11202103563XA (https=)
TW (3) TWI892641B (https=)
WO (1) WO2020159666A1 (https=)

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WO2022271483A1 (en) 2021-06-21 2022-12-29 Electro Scientific Industries, Inc. Laser processing apparatus including beam analysis system and methods of measurement and control of beam characteristics
CN116614182A (zh) * 2022-02-16 2023-08-18 量子计算有限责任公司 快速可调频光中继器及其使用方法

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CN112059422A (zh) * 2020-09-12 2020-12-11 北京航空航天大学 用于半导体晶圆研磨的激光加工设备
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US20220176495A1 (en) * 2020-12-04 2022-06-09 Lawrence Livermore National Security, Llc System and method for radius of curvature modification of optical plates and lenses by irradiation with optical energy
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TWI754553B (zh) * 2021-02-25 2022-02-01 東捷科技股份有限公司 焊接設備
JP7542198B2 (ja) * 2021-04-02 2024-08-30 パナソニックＩｐマネジメント株式会社 レーザ加工ヘッド及びレーザ加工システム並びにレーザ加工システムの異常判定方法
CN117441225A (zh) * 2021-06-11 2024-01-23 株式会社日本显示器 层叠体及层叠体的制造方法
US12224547B2 (en) * 2021-11-16 2025-02-11 Taiwan Semiconductor Manufacturing Company, Ltd. Laser device and method of using the same
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CN120055909B (zh) * 2025-04-28 2025-07-22 中国科学院长春光学精密机械与物理研究所 磁流变抛光多面共体元件一体加工位姿计算方法
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