CN112731765A - 一种含氟树脂组合物及制备方法和包含其的固化膜的制备方法 - Google Patents
一种含氟树脂组合物及制备方法和包含其的固化膜的制备方法 Download PDFInfo
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- CN112731765A CN112731765A CN202011612200.4A CN202011612200A CN112731765A CN 112731765 A CN112731765 A CN 112731765A CN 202011612200 A CN202011612200 A CN 202011612200A CN 112731765 A CN112731765 A CN 112731765A
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Abstract
Description
技术领域
本发明涉及树脂合成技术领域,更具体的说是涉及一种含氟树脂组合物及制备方法和包含其的固化膜的制备方法。
背景技术
随着彩色液晶显示器的普及,人们对液晶显示器彩色显示的要求也在不断提高。彩色滤光片和薄膜晶体管是液晶显示器实现彩色显示的关键部件,其表面的平整度和光透过率直接影响着显示器的性能。
为了提高彩色滤光片的性能,可在彩色滤光片制作中,在滤光膜形成表面再旋涂一层树脂材料的固化膜保护层,即:OC膜(Over Coat),用以提高彩色滤光膜表面的平整度和光透过性,同时要求具有较好的耐热性和强度以保护滤光膜不受损坏,提高使用寿命。同样,在薄膜晶体管(TFT)型液晶显示元件中通常使用固化膜作为层间绝缘膜覆盖TFT元件,层间绝缘膜主要作用为各膜层间绝缘、保护及平坦化。
随着显示器高亮度、大型化、高响应的发展趋势以及显示器件中膜形成工艺的不断改进,就要求形成固化膜的树脂组合物具有良好的涂布性能,更高的电绝缘性和光透过性,同时具有更好的耐化学性、耐热性、硬度以及更优的附着力,以满足需求。
因此,开发一种可用于液晶显示器彩色滤光片保护膜(OC膜)和薄膜晶体管(TFT)层间绝缘膜等固化膜材料的树脂组合物是本领域技术人员亟需解决的问题。
发明内容
有鉴于此,本发明提供了一种具有良好的涂布性能,电绝缘性和光透过性,同时具有更好的耐化学性、耐热性、硬度以及更优的附着力的含氟树脂组合物及制备方法。
为了实现上述目的,本发明采用如下技术方案:一种含氟树脂组合物,包括以下重量份数的原料:含化合物(I)的碱溶性树脂(A)18-42份、光引发剂2-8份、增感剂0.3-1.2份、活性稀释剂0-15份、溶剂60-90份、助剂1-8份;
所述化合物(I)单体的结构式为:
其中:R选自-CH=CH2、-C(CH3)=CH2、丙烯酰基或甲基丙烯酰基;
R1、R1'、R2、R2'各自独立地选自:氢、羟基、C1-C4烷基或C1-C4烷氧基;
R3选自氢或C1-C6烷基;
A环选自环己基或苯基;
B环选自苯基、萘基或蒽基。
本发明的有益效果:本发明中的含氟树脂组合物具有良好的涂布性能,电绝缘性和光透过性,同时具有更好的耐化学性、耐热性、硬度以及更优的附着力的。
优选地,化合物(I)单体的结构式为以下结构式中的任一种:
优选地,所述碱溶性树脂(A)的制备方法为:向三口瓶中加入化合物(I)单体2-5份、丙烯酸单体1-5份、丙烯酸酯单体10-30份、马来酰亚胺单体2-5份、引发剂1-5份、分子量调节剂0.2-1.0份和有机溶剂50-84份混合搅拌升温至75-80℃,保温反应3-6h,冷却降温至室温终止反应,得到所述碱溶性树脂(A);其中,所述化合物(I)的使用量按照碱溶性树脂(A)的固含量折算添加8%~15%;
优选地,所述丙烯酸单体为甲基丙烯酸;所述丙烯酸酯单体为甲基丙烯酸甲酯、甲基丙烯酸月桂醇酯、甲基丙烯酸四氢糠酯和甲基丙烯酸缩水甘油酯中的一种或几种;所述马来酰亚胺单体为N-环己基马来酰亚胺;所述引发剂为偶氮二异庚腈;所述分子量调节剂为α-甲基苯乙烯二聚物。
优选地,所述光引发剂为由酚类化合物与215-叠氮萘醌磺酰氯按照摩尔比为1:0.5-1:4经缩合反应得到;其中,光引发剂相对于酚类化合物中羟基数选用料比为50%~100%摩尔比的215-叠氮萘醌磺酰氯进行缩合。
优选地,所述酚类化合物为4-羟基二苯甲酮,2,4-二羟基二苯甲酮、2,4,6-三羟基二苯甲酮,2,3,4-三羟基二苯甲酮、2,2’,4,4’-四羟基二苯甲酮,2,3,4,4’-四羟基二苯甲酮、2,3,4,2’,6’-五羟基二苯甲酮、2,3,4,3’,4’,5’-六羟基二苯甲酮、3,4,5,3’,4’,5’-六羟基二苯甲酮、双酚A、螺双茚满、甲酚三聚体、三(4-羟基苯基)甲烷,1,1,1,-三(四羟基苯基)乙烷,1,1,1,-三(4-羟基苯基)丙烷、1,1,1,-三(4-羟基苯基)丁烷、1,1,-二(4-羟基苯基)环己烷及α,α,α'-三(4-羟苯基)-1-乙基-4-异丙苯中的任一种或几种。
更加优选地,
上述B-1(4-羟基二苯甲酮)、B-2(4,4’-二羟基二苯甲酮)、B-3(2,4-二羟基二苯甲酮)、B-4(2,3,4-三羟基二苯甲酮)、B-5(2,3,4,4’-四羟基二苯甲酮)、B-6(螺双茚满)、B-7(甲酚三聚体)、B-8(双酚A);
该类光引发剂的显影机理为:混配过程光引发剂中的叠氮结构与树脂中的羟基、羧基形成氢键,导致树脂的碱溶性降低,而在紫外光照下叠氮萘醌基团释放N2,并发生重排生成茚酸,生成的氢键被破坏,产品光照部分再一次转变为碱溶性,而非光照区不溶解,形成溶解差异性。
更加优选地,光引发剂为B-4、B-5和B-8中的一种与215-叠氮萘醌磺酰氯经缩合反应得到,更优选B-8与215-叠氮萘醌磺酰氯按照摩尔比(1:0.5)-(1:4)经缩合反应得到。
可列举的商用化产品有NT-200、NT-250、4NT-250、4NT-300、4NT-350、TPPA-200和TPPA-250(东洋合成)中的任一种或几种。
优选地,所述光引发剂为磷盐系、碘鎓盐系、邻硝基苄基盐系、肟酮酯系和三嗪系化合物中的任一种或几种。
更加优选地,所述磷盐系为苯硫基苯基二苯基硫鎓六氟磷酸盐和/或双(4,4’-硫醚三苯基硫鎓)六氟磷酸盐;
所述碘鎓盐系为双噻吩环碘鎓盐、芴酮基苯基碘鎓盐和聚苯乙烯碘锗-六氟锑酸盐中的任一种或几种;
所述邻硝基苄基盐系为N,N-二(2-氨基乙基)-N-(2-硝基苄基)胺三盐酸盐;
所述肟酮酯系可列举的商用化产品有OXE02、PBG-304、OXE01和PBG-30中的任一种或几种。
所述三嗪系化合物为2-(1,3-苯并二氧戊环-5-基)-4,6-双(三氯甲基)-1,3,5-三嗪、PAG-201、PAG-202和PAG-20101中的任一种或几种。
优选地,所述增感剂为4-羟基二苯甲酮和/或4,4’-二羟基二苯甲酮;
采用上述技术方案的有益效果:增感剂通常与光引发剂配合使用,其作用为降低光引发剂与树脂之间的氢键结合度,并提高光感敏度,增强溶解差异性,提高分辨率。
所述活性稀释剂为甲基丙烯酸酯类单体或具有杂环结构的脂环族单体。
更加优选地,活性稀释剂为5-10份。其中,所述甲基丙烯酸酯类为甲基丙烯酸羟乙酯、甲基丙烯酸苄酯、季戊四醇三丙烯酸酯、双季戊四醇五丙烯酸酯、双季戊四醇六丙烯酸酯、丙氧基丙三醇三丙烯酸酯、苯氧乙基甲基丙烯酸酯、三羟甲基丙烷三丙烯酸酯和1,6己二醇二丙烯酸酯中的任一种或几种;
所述具有杂环结构的脂环族单体为N-丙烯酰吗啉、甲基丙烯酸缩水甘油酯、4-叔丁基环己基丙烯酸酯和氧杂环丁基丙烯酸甲酯中的任一种或几种。
所述活性稀释剂的重量份数为5-10份。
优选地,所述溶剂为二乙二醇烷基醚类化合物、二丙二醇烷基醚类化合物、丙二醇单烷基醚类化合物、丙二醇单烷基醚乙酸酯化合物、N,N-二甲基酰胺类化合物、乳酸酯类化合物、酮类和3-烷氧基丙酸酯类化合物中的任一种或几种;
所述助剂为表面活性剂、消泡剂、抗氧剂和偶联剂中的任一种或几种。
更加优选地,所述二乙二醇烷基醚类化合物为二乙二醇二甲醚、二乙二醇二乙醚和二乙二醇甲乙醚中的任一种或几种;所述二丙二醇烷基醚类化合物为二丙二醇二甲醚和/或二丙二醇二乙醚;所述丙二醇单烷基醚类化合物为丙二醇单甲醚和/或丙二醇单乙醚;所述N,N-二甲基酰胺类化合物为N,N-二甲基甲酰胺和/或N,N-二甲基乙酰胺;所述乳酸酯类化合物为乳酸甲酯和/或乳酸乙酯;所述酮类为环丁酮和/或环戊酮;所述3-烷氧基丙酸酯类化合物为3-甲氧基丙酸乙酯,3-甲氧基丙酸丙酯,3-乙氧基丙酸甲酯、3-乙氧基丙酸乙酯、3-乙氧基丙酸丙酯和二乙二醇单丁基醚醋酸酯中的任一种或几种。
更加优选地,所述表面活性剂为有机硅类表面活性剂,可列举的商用化产品有KP-341、KP-340、BYK-330、BYK-333、BYK-378和BYK-340中的任一种或几种;
或,含氟类表面活性剂,可列举的商用化产品有R40、R42、R41、F443、F554、F556和F563中的任一种或几种;
所述消泡剂为有机硅类消泡剂,可列举的商用化产品有BYK-020和/或BYK-022;
所述抗氧剂为为受阻酚类抗氧剂或亚磷酸酯类抗氧剂,可列举的商用化产品有1010、1076、1024、1098、BHT、CHEMNOX 168、CHEMNOX 626、CHEMNOX B225和CHEMNOX B561中的任一种或几种;
所述偶联剂为有机硅类或三聚氰胺类偶联剂,可列举的商用化产品有KBM403、KBM503、Z-6040和Z603中的任一种或几种。
本发明中还提供了一种含氟树脂组合物的制备方法,包括以下步骤:
按照含氟树脂组合物称取各重量份数的原料,然后搅拌均匀,将得到的混合物用0.1~0.5μm的滤膜过滤,得到所述的含氟树脂组合物。
优选地,含氟树脂组合物的固体成分浓度为10%-70%,优选的为15%-50%。
优选地,采用0.2μm的滤膜过滤。
本发明中还提供了一种固化膜的制备方法,包括以下步骤:
将含氟树脂组合物涂布于基板表面,软烘,曝光,显影,UV照射,坚膜,得到所述固化膜。
优选地,基板材质为金属平面、硅片、玻璃中的任一种,优选为玻璃;薄膜涂布采取喷涂、旋涂、狭缝涂布中的任一种,优选为旋涂法;所形成的膜厚度根据需要进行调整转速,作为平坦化绝缘膜优选2μm-5μm。
优选地,所述软烘温度为90℃-130℃,时间120s-200s。
采用上述技术方案的有益效果:软烘目的主要是去除薄膜中的溶剂。
优选地,所述曝光量为80mJ-200mJ;本工序中使用刻有一定图案性状的掩模对薄膜进行覆盖,使用射线进行照射,所使用的射线选自X-射线、电子束和紫外线中的任一种,其中优选紫外线;
上述曝光使用的紫外线为i线(波长365nm)、g线(波长436nm)和远紫外(例如:KrF)中的任一种或几种,其中优选i线、g线和i线与g线混合射线中的任一种。
优选地,所述显影的具体操作为采用清洗溶剂清洗;其中,清洗溶剂为氢氧化钠、氢氧化钾和四甲基氢氧化铵中的任一种水溶液,更优选2.38%四甲基氢氧化铵水溶液;显影温度为23℃,时间为60s-120s。
优选地,所述UV照射的光强为100-2000mj/cm2;更加优选地为200-1000mj/cm2。
采用上述技术方案的有益效果:彻底破坏剩余的光引发剂,试坚膜过程中膜固化更加充分。
优选地,所述坚膜的具体操作为将显影后的薄膜在150℃-250℃下烘烤。
附图说明
为了更清楚地说明本发明实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本发明的实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据提供的附图获得其他的附图。
图1附图为本发明中固化膜的膜均匀评价的结构示意图;
图2附图为本发明中固化膜的的绝缘性评价测试盒子示意图;
附图3附图为本发明中膜耐热性的评价中的TGA图;
附图4-1附图为本发明中图形形貌的评价中的SEM图;
附图4-2附图为本发明中图形形貌的评价中的显微镜图。
具体实施方式
下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。
实施例1
碱溶性树脂A-1的合成,具体步骤如下:
氮气保护下,向三口瓶中加入二乙二醇二乙醚22.0kg,甲基丙烯酸1.0kg,甲基丙烯酸甲酯1.0kg,甲基丙烯酸四氢糠酯6kg,化合物I-21.0kg,N-环己基马来酰亚胺1.0kg,偶氮二异丁腈0.5kg,α-甲基苯乙烯二聚物0.5kg;搅拌下升温至78℃,保温反应4h,冷却降温至室温终止反应。
实施例2
碱溶性树脂A-2的合成,具体步骤如下:
氮气保护下,向三口瓶中加入二乙二醇二甲醚22.0kg,甲基丙烯酸1.0kg,甲基丙烯酸月桂醇酯0.5kg,甲基丙烯酸缩水甘油酯6kg,甲基丙烯酸二环戊基酯0.5kg,化合物I-251.0kg,N-环己基马来酰亚胺1.0kg,偶氮二异庚腈0.5kg,α-甲基苯乙烯二聚物0.5kg;搅拌下升温至78℃,保温反应4h,冷却降温至室温终止反应。
实施例3
碱溶性树脂A-3的合成,具体步骤如下:
氮气保护下,向三口瓶中加入二乙二醇甲乙醚22.0kg,甲基丙烯酸1.0kg,甲基丙烯酸月桂醇酯0.5kg,甲基丙烯酸缩水甘油酯4kg,甲基丙烯酸四氢糠基酯2kg,甲基丙烯酸二环戊基酯0.5kg,化合物I-261.0kg,N-环己基马来酰亚胺1.0kg,偶氮二异庚腈0.5kg,α-甲基苯乙烯二聚物0.5kg;搅拌下升温至78℃,保温反应4h,冷却降温至室温终止反应。
对比例1
共聚物A-4的合成,具体步骤如下:
氮气保护下,向三口瓶中加入二乙二醇甲乙醚22.0kg,甲基丙烯酸1.0kg,甲基丙烯酸月桂醇酯0.5kg,甲基丙烯酸缩水甘油酯4kg,甲基丙烯酸四氢糠基酯2kg,甲基丙烯酸二环戊基酯0.5kg,4-羟基苯基甲基丙烯酸酯1.0kg,N-环己基马来酰亚胺1.0kg,偶氮二异庚腈0.5kg,α-甲基苯乙烯二聚物0.5kg;搅拌下升温至78℃,保温反应4h,冷却降温至室温终止反应。
其中,替换CF2O单体。
对比例2
共聚物A-5的合成,具体步骤如下:
氮气保护下,向三口瓶中加入二乙二醇甲乙醚22.0kg,甲基丙烯酸1.0kg,甲基丙烯酸月桂醇酯0.5kg,甲基丙烯酸缩水甘油酯4kg,甲基丙烯酸四氢糠基酯2kg,甲基丙烯酸二环戊基酯0.5kg,4’-叔丁氧基-(1,1’-联苯基)-甲基丙烯酸酯1.0kg,N-环己基马来酰亚胺1.0kg,偶氮二异庚腈0.5kg,α-甲基苯乙烯二聚物0.5kg。搅拌下升温至78℃,保温反应4h,冷却降温至室温终止反应。
其中,替换CF2O单体。
1、关于聚合物(A)碱溶性树脂的检测
(1)GPC
仪器:waters(515-2414)
凝胶柱:岛津KF801+KF802+KF803
溶剂:THF
流速:0.8ml/min
(2)透过率
仪器:岛津UV-2600
测定方式:透射率
波长范围200nm-800nm
(3)TGA
仪器:美国TA TGA-Q50
升温速率:10℃/min,升温至800℃
(4)树脂固含量:取树脂溶液1.0000g,120℃烘2h称重,平行三次测样取平均值
固含量=(烘干重量/烘前重量)*100%
聚合物(A)性能测试结果如下(表1):
<u>聚合物</u> | <u>TGA</u> | <u>透过率</u> | <u>固含量</u> | <u>粘度</u> | <u>分子量Mw</u> |
<u>A-1</u> | <u>252.9℃</u> | <u>95.4%</u> | <u>28.2%</u> | <u>68cP</u> | <u>12800</u> |
<u>A-2</u> | <u>255.3℃</u> | 95.8% | <u>27.8%</u> | <u>58cP</u> | <u>10200</u> |
<u>A-3</u> | <u>257.4℃</u> | 96.5% | <u>28.4%</u> | <u>65cP</u> | <u>12400</u> |
<u>A-4</u> | <u>242.0℃</u> | 96.4% | <u>27.5%</u> | <u>60cP</u> | <u>10800</u> |
<u>A-5</u> | <u>255.6℃</u> | 90.1% | <u>28.0%</u> | <u>65cP</u> | <u>11600</u> |
实施例4-13及对比例3-4分别为采用实施例1-3和对比例1-2中制得的共聚物(A)碱溶性树脂制得的树脂组合物的原料配比如下表2中,其中,实施例3-9制得树脂组合物可用于层间绝缘膜,实施例7-8制得树脂组合物可用于化学增幅型层间绝缘膜,实施例12-13可用于OC膜;
表2-1实施例4-13和对比例3-4制备树脂组合物的原料(单位kg)
上述实施例4-13及对比例3-4的制备方法的具体步骤均为:将上述各原料在洁净、黄光环境中溶解,控温20℃~25℃搅拌溶解2h,使过0.2μm孔径的过膜器过滤,制得树脂组合物。
实施例14-23的固化膜的制备方法为:在100mm×100mm×0.7mm的TFT玻璃基板(EAGLE XG)上使用旋转匀胶机涂布实施例4-13制备的树脂组合物溶液,在热板上110℃下软烘120s,再使用SUSS制造的MJB4曝光机,以1000mj/cm2的曝光量进行曝光,然后在洁净烘箱中230℃下坚膜40min,在TFT玻璃基板上形成2μm厚的固化膜。
对比例5-6的固化膜的制备方法同实施例14-23。
固化膜物性评价
1、固化膜表面的评价
对实施例14-23和对比例5-6的膜表面照射钠灯,目测膜面的平整度,结果见表3。
2、膜均匀性的评价
针对于实施例14-23和对比例5-6的膜,在覆有膜面的基板上选取1cm×1cm区域,取九个点(如图1);
使用VASE椭偏仪(美国J.A.Woollam公司,VB-400)分别测定不同点的的膜厚,按照以下公式计算膜均匀度:
在试样表面三个不同部位进行测定,取平均值,当膜均匀度≤2.0%时记作A,2.0%~4.0%时记作B,≥4.0%时记作C,结果见表3。
3、膜附着力的评价
针对于实施例14-23和对比例5-6的膜;将上述覆膜基板膜面朝上放置在坚硬、平直的物面上,使用划格试验器(BYK 5123刀齿数11,刀齿间距1mm),握住切割刀具,使刀垂直于样板表面,均匀施力,以平稳的手法划出平行的11条切割线;再与原先的切割线成90°角垂直交叉划出平行的11条切割线,形成网格图形,所有的切口均需穿透到基板的表面;用软毛刷沿着网格图形的每一条对角线,轻轻地向后扫几次,再向前扫几次;在膜面上施加胶带(3M610胶带),除去胶带最前面一段,然后剪下长约75mm的胶带,将其中心点放在网格上方压平,胶带长度至少超过网格20mm,并确保其与膜面完全接触;在贴上胶带5min内,拿住胶带悬空的一端,并以与膜面尽可能成60°的角度,在0.5~1.0s内平稳地将胶带撕离,然后用显微镜观察膜面脱落的情况;在试样表面三个不同部位进行试验,记录划格试验等级。
当切割边缘完全平滑,无一格脱落,记作A;当在切口交叉处膜层有少许分离,划格区受影响不大于5%,记作B;当划格区受影响大于5%,记作C,结果见表3。
4、膜硬度的评价
针对于实施例14-23和对比例5-6的膜;将上述覆膜基板膜面朝上放置在坚硬、平直的物面上,用一组符合GB 149高级绘图铅笔,即铅笔等级6H、5H、4H、3H、2H、H、HB,B、2B、3B、4B、5B、6B,使其笔芯露出4~6mm,垂直砂纸打磨直至端面平整,边缘锐利为宜。用便携式铅笔法硬度计(QHO-A),从6H铅笔开始,用力向前推进,每级铅笔划5次,每级若有2次膜层划破,更换另一等级的铅笔,至少有4次不能划破膜层的铅笔为止,记录相应硬度值,结果见表3。
5、膜透过率的评价
针对于实施例14-23和对比例5-6的膜;使用分光光度计[岛津UV2600],在400~800nm范围的波长下测定具有该固化膜的玻璃基板的光线透过率。该最低光线透过率的值在95%以上时,认为透明性良好,结果见表3。
6、膜耐热性的评价
针对于实施例14-23和对比例5-6的膜;固化膜剥离,TGA测试其5%失重温度,结果见表3,实施例的TGA图见附图3。
7、膜耐溶剂性的评价
针对于实施例14-23和对比例5-6的膜;使用分光光度计[岛津UV2600]测定该固化膜400nm处透过率T2。接着,将样品裁切成大小相同的两片,分别浸泡在25℃,N-甲基吡咯烷酮(NMP)和异丙醇(IPA)中60min,N2气枪吹去溶剂后,分别测定固化膜的400nm处透过率TNMP和TIPA,按照以下公式计算固化膜耐溶剂透过变化率:
固化膜耐溶剂透过变化率结果见表3,该值在2%以下时,认为耐溶剂性良好。
8、膜耐碱性的评价
针对于实施例14-23和对比例5-6的膜;测定固化膜的膜厚T3,接着将样片浸泡在25℃,5%的氢氧化钾水溶液中60min后,用超纯水清洗膜层,N2气枪吹干,测定固化膜膜厚T3’,按照以下公式计算耐碱性膜厚变化率:
耐碱性膜厚变化率结果见表3,该值在5%以下时,认为耐碱性良好。
9、敏感度的评价
在100mm×100mm×0.7mm的TFT玻璃基板(EAGLE XG)上使用旋转匀胶机涂布制备的实施例4-13及对比例3-4树脂组合物溶液,在热板上110℃下软烘120s,形成厚2.2μm的膜。使用SUSS制造的MJB4曝光机,改变曝光时间,插入具有不同分辨率和图形的掩膜版对膜层进行曝光,接着,使用2.38%质量分数的四甲基氢氧化铵水溶液(显影液),使用静态法在25℃下进行显影处理,显影时间60s,显影后用超纯水清洗膜层,并用N2气枪吹干,在洁净烘箱中230℃下坚膜40min,在玻璃基板上形成图案。进过曝光-显影-坚膜处理后,测定5μm处图案完全显影所需的曝光量,该数值作为敏感度,测定结果见,该值小于100mj/cm2时,认为光敏度良好。
10、图形形貌的评价
与上述敏感度评价的制备方法相同,其中,以敏感度的评价中所需曝光量在玻璃基板上形成膜厚2μm的图案。这样形成的图案用扫描式电子显微镜(SEM)观察其形状。
5μm处线条及点阵图形无残膜,线条清晰整齐,且坡度在30~70度时,认为形状良好。,实施例的SEM图和显微镜照片见附图4-(1-2)。
[绝缘性的评价]
按照以图2中制作测试盒子;
I在覆有ITO膜的50mm×50mm玻璃基材上使用旋转匀胶机涂布制备的树脂组合物溶液,在热板上在热板上110℃下软烘120s,形成膜层。
II使用曝光机(德国SUSS,MJB4,GHI混合线),以100mj/cm2曝光量,插入所示图形掩膜版对膜层进行曝光。接着使用2.38%质量分数的四甲基氢氧化铵水溶液(显影液),使用静态法在25℃下进行显影处理,显影时间60s。显影后用超纯水清洗膜层,并用N2气枪吹干,在洁净烘箱中230℃下坚膜40min,在基板上形成膜厚2μm的边缘ITO裸露的40mm×40mm固化膜,使用VASE椭偏仪(美国J.A.Woollam公司,VB-400)测定膜厚d(m)。
III图示位置使用真空蒸镀装置(沈阳市超高真空应用技术研究所)在固化膜上形成5mm×5mm Al电极(S=7.85×10-5m2)。接着,ITO裸露部分和Al电极连接到LCR仪表(安捷伦4284A),25℃下,以0.1V,100KHz测得电容值C,按照如下公式计算介电常数:
介电常数结果见表3,该值在3.3以下时,认为绝缘性良好。
表3实施例14-23和对比例5-6制得的固化膜的性能从测试结果
本说明书中各个实施例采用递进的方式描述,每个实施例重点说明的都是与其他实施例的不同之处,各个实施例之间相同相似部分互相参见即可。对于实施例公开的装置而言,由于其与实施例公开的方法相对应,所以描述的比较简单,相关之处参见方法部分说明即可。
对所公开的实施例的上述说明,使本领域专业技术人员能够实现或使用本发明。对这些实施例的多种修改对本领域的专业技术人员来说将是显而易见的,本文中所定义的一般原理可以在不脱离本发明的精神或范围的情况下,在其它实施例中实现。因此,本发明将不会被限制于本文所示的这些实施例,而是要符合与本文所公开的原理和新颖特点相一致的最宽的范围。
Claims (10)
2.根据权利要求1所述的一种含氟树脂组合物,其特征在于,所述碱溶性树脂(A)的制备方法为:向三口瓶中加入化合物(I)单体2-5份、丙烯酸单体1-5份、丙烯酸酯单体10-30份、马来酰亚胺单体2-5份、引发剂1-5份、分子量调节剂0.2-1.0份和有机溶剂50-84份混合搅拌升温至75-80℃,保温反应3-6h,冷却降温至室温终止反应,得到所述碱溶性树脂(A)。
3.根据权利要求1所述的一种含氟树脂组合物,其特征在于,所述光引发剂由酚类化合物与215-叠氮萘醌磺酰氯按照摩尔比为(1:0.5)-(1:4)经缩合反应得到。
4.根据权利要求3所述的一种含氟树脂组合物,其特征在于,所述酚类化合物为4-羟基二苯甲酮,4,4’-二羟基二苯甲酮、2,4-二羟基二苯甲酮、2,4,6-三羟基二苯甲酮,2,3,4-三羟基二苯甲酮、2,2’,4,4’-四羟基二苯甲酮,2,3,4,4’-四羟基二苯甲酮、2,3,4,2’,6’-五羟基二苯甲酮、2,3,4,3’,4’,5’-六羟基二苯甲酮、3,4,5,3’,4’,5’-六羟基二苯甲酮、双酚A、螺双茚满、甲酚三聚体、三(4-羟基苯基)甲烷,1,1,1,-三(四羟基苯基)乙烷,1,1,1,-三(4-羟基苯基)丙烷、1,1,1,-三(4-羟基苯基)丁烷、1,1,-二(4-羟基苯基)环己烷及α,α,α'-三(4-羟苯基)-1-乙基-4-异丙苯中的任一种或几种。
5.根据权利要求1所述的一种含氟树脂组合物,其特征在于,所述光引发剂为磷盐系、碘鎓盐系、邻硝基苄基盐系、肟酮酯系和三嗪系化合物中的任一种或几种。
6.根据权利要求1所述的一种含氟树脂组合物,其特征在于,所述增感剂为4-羟基二苯甲酮和/或4,4’-二羟基二苯甲酮;
所述活性稀释剂为甲基丙烯酸酯类单体或具有杂环结构的脂环族单体。
7.根据权利要求1所述的一种含氟树脂组合物,其特征在于,所述溶剂为二乙二醇烷基醚类化合物、二丙二醇烷基醚类化合物、丙二醇单烷基醚类化合物、丙二醇单烷基醚乙酸酯化合物、N,N-二甲基酰胺类化合物、乳酸酯类化合物、酮类和3-烷氧基丙酸酯类化合物中的任一种或几种;
所述助剂为表面活性剂、消泡剂、抗氧剂和偶联剂中的任一种或几种。
8.一种含氟树脂组合物的制备方法,其特征在于,包括以下步骤:
按照权利要求1-7任一项所述的含氟树脂组合物称取各重量份数的原料,然后搅拌均匀,将得到的混合物用0.1~0.5μm的滤膜过滤,得到所述含氟树脂组合物。
9.一种固化膜的制备方法,其特征在于,包括以下步骤:
将权利要求1-7任一项所述的含氟树脂组合物或采用权利要求8的制备方法制得的含氟树脂组合物涂布于基板表面,软烘,曝光,显影,UV照射,坚膜,得到所述固化膜。
10.根据权利要求9所述的一种固化膜的制备方法,其特征在于,所述软烘温度为90℃-130℃,时间120s-200s;
所述曝光量为80mJ-200mJ;
所述显影的具体操作为采用清洗溶剂清洗;
所述UV照射的光强为100-2000mj/cm2;
所述坚膜的具体操作为将显影后的薄膜在150℃-250℃下烘烤。
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