TW201100954A - Photosensitive resin composition and liquid crystal panel - Google Patents

Photosensitive resin composition and liquid crystal panel Download PDF

Info

Publication number
TW201100954A
TW201100954A TW99106158A TW99106158A TW201100954A TW 201100954 A TW201100954 A TW 201100954A TW 99106158 A TW99106158 A TW 99106158A TW 99106158 A TW99106158 A TW 99106158A TW 201100954 A TW201100954 A TW 201100954A
Authority
TW
Taiwan
Prior art keywords
constituent unit
photosensitive resin
resin composition
mass
meth
Prior art date
Application number
TW99106158A
Other languages
Chinese (zh)
Other versions
TWI480685B (en
Inventor
Takashi Ono
Masaru Shida
Teruhiro Uematsu
Naoto Yamaguchi
Original Assignee
Tokyo Ohka Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Ohka Kogyo Co Ltd filed Critical Tokyo Ohka Kogyo Co Ltd
Publication of TW201100954A publication Critical patent/TW201100954A/en
Application granted granted Critical
Publication of TWI480685B publication Critical patent/TWI480685B/en

Links

Landscapes

  • Materials For Photolithography (AREA)
  • Liquid Crystal (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)

Abstract

The present invention provides a photosensitive resin composition with an appropriate developing time and capable of forming a spacer which is good in shape or has good adhesion to substrates; and a liquid crystal panel having the spacer formed from the photosensitive resin composition. The photosensitive resin composition of the present invention comprises an alkali-soluble resin (A), a photopolymerization monomer (B) and a photopolymerization initiator (C). The alkali-soluble resin (A) comprises, for example, a constituent unit (a1) derived from unsaturated carboxylic acids, a constituent unit (a2) derived from an unsaturated compound of an epoxy group without an alicyclic group, and a constituent unit (a3) derived from an unsaturated compound of an alicyclic epoxy group, wherein the summation of the proportion of the constituent unit (a2) and the proportion of the constituent unit (a3) is more than 71 mass percent.

Description

201100954 六、發明說明: 【發明所屬之技術領域】 本發明係有關一種感光性樹脂組成物及液晶面板’更 詳言之,係有關適合於爲形成在液晶面板之2張基板間所 設置的間隔物時之感光性樹脂組成物、及具有由該感光性 樹脂組成物所形成的間隔物之液晶面板。 0 【先前技術】 於液晶顯示裝置之液晶面板中,由於採用以2張玻璃 基板等之透明基板夾住液晶材料之三明治構造,故必須在 可塡充液晶材料下、於2張基板之間形成間隔物。 以往,爲形成間隔物時,採用在基板之全面上分散形 成間隔物之珠粒的方法,惟會有在畫素顯示部分上;亦附 著珠粒,且影像之對比或顯示畫質降低的問題。因此,近 年來提案各種藉由感光性樹脂組成物形成該間隔物的方法 〇 (參照專利文獻1,2等)。該方法係在基板上塗佈感光性 樹脂組成物,經由所定的光罩予以曝光後,進行顯影,形 成點狀等之間隔物,可僅在除畫素顯示部分外之所定部份 形成間隔物。 [習知技術文獻] [專利文獻] [專利文獻1]日本特開2006- 1 84841號公報 [專利文獻2]日本特開2006-308961號公報 201100954 【發明內容】 此處,爲防止因液晶面板之過剩荷重而導致間隔物之 塑性變形或破壞情形時,必須使所形成的間隔物具有充分 的破壞強度。因此,於感光性樹脂組成物中所含的樹脂, 通常使用具有由甲基丙烯酸環氧丙酯等之含環氧基的不飽 和化合物所衍生的構成單位之鹼可溶性樹脂。 然而,本發明人等再三深入檢討的結果,發現爲提高 破壞強度時,由甲基丙烯酸環氧丙酯等所衍生的構成單位 之比例,例如爲7 1質量%以上時,於顯影時之斷點(BP ;未曝光部被完全溶解的時間)變得極短,不易適當地進 行顯影。另外,可知同時有間隔物之形狀惡化,且對基板 之密接性降低的情形。 本發明係有鑑於該習知的情形者,以提供一種具有適 當的顯影性,且可形成形狀或對基板之密接性良好的間隔 物之感光性樹脂組成物,及具有由該感光性樹脂組成物所 形成的間隔物之液晶面板爲目的。 本發明人等爲解決前述課題時,再三深入硏究檢討。 結果’發現藉由使用具有由不飽和羧酸所衍生的構成單位 及由含有不具脂環式基之環氧基不飽和化合物所衍生的構 成單位、與由含有脂環式環氧基之不飽和化合物所衍生的 構成單位或由含有脂環式基之不飽和化合物所衍生的構成 單位之鹼可溶性樹脂,可解決前述課題,遂而完成本發明 。具體而s ’本發明係提供下述者。 -6 - 201100954 本發明之第一形態係有關一種感光性樹脂組成物,其 係含有鹼可溶性樹脂(A )、光聚合性單體(B )及光聚 合引發劑(C )之感光性樹脂組成物,其特徵爲前述鹼可 溶性樹脂(A )爲具有由不飽和羧酸所衍生的構成單位( al)、由含有不具脂環式基之環氧基的不飽和化合物所衍 生的構成單位(a2)、及由含有脂環式環氧基之不飽和化 合物所衍生的構成單位(a3),且前述構成單位(a2)之 q 比例與前述構成單位(a3 )之比例的合計量爲7 1質量% 以上。 本發明之第二形態係有關一種感光性樹脂組成物,其 係含有鹼可溶性樹脂(A )、光聚合性單體(B )及光聚 合引發劑(C )之感光性樹脂組成物,其特徵爲前述鹼可 溶性樹脂(A )爲具有由不飽和羧酸所衍生的構成單位( al)、由含有不具脂環式基之環氧基的不飽和化合物所衍 生的構成單位(a2)、及由含有脂環式基之不飽和化合物 Q 所衍生的構成單位(a4 ),且前述構成單位(a2 )之比例 爲7 1質量%以上。 本發明之第三形態係有關一種液晶面板,其特徵爲具 有由本發明之感光性樹脂組成物所形成的間隔物。 [發明效果] 藉由本發明,可提供一種具有適當的顯影性,且可形 成形狀或對基板之密接性良好的間隔物之感光性樹脂組成 物’及具有由該感光性樹脂組成物所形成的間隔物之液晶 201100954 面板。 [爲實施發明之形態] <<感光性樹脂組成物>> 本發明之感光性樹脂組成物,係至少含有鹼可溶性樹 脂(A )、光聚合性單體(B )及光聚合引發劑(C )。於 下述中,說明有關本發明之感光性樹脂組成物所含有的各 成分。 <鹼可溶性樹脂(A) > 鹼可溶性樹脂,係指藉由樹脂濃度20質量%之樹脂 溶液(溶劑:丙二醇單甲醚乙酸酯)在基板上形成膜厚i 之樹脂膜,在2.38質量%之氫氧化四甲銨(TMAH) 水溶液中浸漬1分鐘時,溶解膜厚O.Olym以上者。 本發明之感光性樹脂組成物中所含有的鹼可溶性樹脂 (A)(以下亦稱爲「(A)成份」),爲具有由不飽和 羧酸所衍生的構成單位(al )、由含有不具脂環式基之環 氧基的不飽和化合物所衍生的構成單位(a 2 )、及由含有 脂環式環氧基之不飽和化合物所衍生的構成單位(a3 )( 以下該樹脂亦稱爲「( A1 )樹脂」)’與具有前述構成 單位(al)、前述構成單位(a2)、由含有脂環式基之不 飽和化合物所衍生的構成單位(a4 )(以下該樹脂亦稱爲 「( A2 )樹脂」)。於下述中,順序說明有關此等之各 種情形。 -8- 201100954 ((A1 )樹脂) (A 1 )樹脂係至少具有前述構成單位(a 1 )、前述構 成單位(a2)及前述構成單位(a3)。 爲使構成單位(a 1 )衍生時之不飽和羧酸,例如(甲 基)丙烯酸、丁烯酸等之單羧酸;馬來酸、富馬酸、檸康 酸、中康酸、衣康酸等之二羧酸;此等二羧酸之酸酐等。 0 於此等之中,就共聚合反應性、所得的樹脂之鹼可溶性、 容易取得性等而言’以(甲基)丙烯酸及馬來酸酐較佳。 此等之不飽和羧酸可單獨或2種以上組合使用。 爲使構成單位(a2)衍生時之含有不具脂環式基的環 氧基不飽和化合物,例如(甲基)丙烯酸環氧丙酯、(甲 基)丙烯酸2_甲基環氧丙酯、(甲基)丙烯酸3,4 -環氧基 丁酯、(甲基)丙烯酸6,7-環氧基庚酯等之(甲基)丙烯 酸環氧基丨兀醋類’ Λ-乙基丙儲酸環氧丙醋、Q;-正丙基丙 Q 烯酸環氧丙酯、正丁基丙烯酸環氧丙酯、α-乙基丙烯 酸6,7-環氧基庚酯等之〇:-烷基丙烯酸環氧基烷酯類等。 於此等之中’就共聚合反應性、硬化後之樹脂強度等而言 ’以(甲基)丙烯酸環氧丙酯、(甲基)丙烯酸2 -甲基 環氧丙酯、及(甲基)丙烯酸6,7 _環氧基庚酯較佳。此等 含有不具脂環式基之環氧基不飽和化合物,可單獨或2種 以上組合使用。 爲使構成單位(a3 )衍生時之含有脂環式環氧基不飽 和化合物’只文疋具有脂環式環氧基之不飽和化合物即可 201100954 ’沒有特別的限制。構成脂環式環氧基之脂環式基,可以 爲單環、亦可爲多環。單環之脂環式基例如環戊基、環己 基等。另外’多環之脂環式基例如降冰片基、異冰片基、 三環壬基、三環癸基、四環十二烷基等。 具體而言,含脂環式環氧基之不飽和化合物,例如以 下述式(a3-l)〜(a3_15)所示之化合物。於此等之中 ,爲使顯影性爲適當者時,以下述式(a3_l)〜(a3·5) 所示之化合物較佳,以下述式(a3-l)〜(a3-3)所示之 化合物更佳。 【化1】 R11201100954 VI. Description of the Invention: [Technical Field] The present invention relates to a photosensitive resin composition and a liquid crystal panel. More specifically, it relates to an interval suitable for forming between two substrates formed on a liquid crystal panel. A photosensitive resin composition in the case of a material, and a liquid crystal panel having a spacer formed of the photosensitive resin composition. [Prior Art] In the liquid crystal panel of a liquid crystal display device, since a sandwich structure in which a liquid crystal material is sandwiched by a transparent substrate such as two glass substrates is used, it is necessary to form a liquid crystal material between two substrates. Spacer. Conventionally, in order to form a spacer, a method of dispersing beads forming a spacer over the entire substrate is used, but only on the pixel display portion; beads are also attached, and the contrast of the image or the display image quality is lowered. . Therefore, various methods for forming the spacer by the photosensitive resin composition have been proposed in recent years (see Patent Documents 1, 2, etc.). In this method, a photosensitive resin composition is applied onto a substrate, exposed to light through a predetermined mask, and developed to form spacers such as dots, and spacers can be formed only in a predetermined portion other than the pixel display portion. . [PRIOR ART DOCUMENT] [Patent Document 1] Japanese Laid-Open Patent Publication No. 2006-108841 (Patent Document 2) Japanese Laid-Open Patent Publication No. Hei No. 2006-308961 No. 201100954 When the excess load causes plastic deformation or damage of the spacer, the spacer formed must have sufficient breaking strength. Therefore, an alkali-soluble resin having a constituent unit derived from an epoxy group-containing unsaturated compound such as glycidyl methacrylate is usually used as the resin contained in the photosensitive resin composition. However, as a result of intensive review, the inventors of the present invention found that the ratio of the constituent units derived from glycidyl methacrylate or the like to the breaking strength is, for example, 71% by mass or more, which is broken during development. The point (BP; the time when the unexposed portion is completely dissolved) becomes extremely short, and development is not easily performed properly. Further, it is understood that the shape of the spacer is deteriorated at the same time, and the adhesion to the substrate is lowered. The present invention is directed to a photosensitive resin composition having a suitable developability and capable of forming a spacer having a good shape or adhesion to a substrate, and having a photosensitive resin composition. The liquid crystal panel of the spacer formed by the object is for the purpose. In order to solve the above problems, the inventors of the present invention have conducted in-depth review. As a result, it was found that by using a constituent unit derived from an unsaturated carboxylic acid and a constituent unit derived from an epoxy group-containing unsaturated compound having no alicyclic group, and an unsaturated group containing an alicyclic epoxy group The above-mentioned problem can be solved by the constituent unit derived from the compound or the alkali-soluble resin derived from the constituent unit derived from the unsaturated compound containing an alicyclic group, and the present invention has been completed. Specifically, the present invention provides the following. -6 - 201100954 The first aspect of the present invention relates to a photosensitive resin composition comprising a photosensitive resin comprising an alkali-soluble resin (A), a photopolymerizable monomer (B), and a photopolymerization initiator (C). And the alkali-soluble resin (A) is a constituent unit derived from a constituent unit (al) derived from an unsaturated carboxylic acid and derived from an unsaturated compound having an epoxy group having no alicyclic group (a2) And a constituent unit (a3) derived from an unsaturated compound containing an alicyclic epoxy group, and the total ratio of the ratio of the q of the constituent unit (a2) to the ratio of the constituent unit (a3) is 7 1 by mass. % the above. The second aspect of the present invention relates to a photosensitive resin composition containing a photosensitive resin composition of an alkali-soluble resin (A), a photopolymerizable monomer (B), and a photopolymerization initiator (C), which are characterized by The alkali-soluble resin (A) is a constituent unit (a2) having a constituent unit derived from an unsaturated carboxylic acid (al), an unsaturated compound having an epoxy group having no alicyclic group, and The constituent unit (a4) derived from the alicyclic group-containing unsaturated compound Q, and the ratio of the above-mentioned constituent unit (a2) is 71% by mass or more. A third aspect of the present invention relates to a liquid crystal panel characterized by comprising a spacer formed of the photosensitive resin composition of the present invention. [Effect of the Invention] According to the present invention, it is possible to provide a photosensitive resin composition which has a suitable developability and can form a spacer having a good shape or adhesion to a substrate, and a composition formed of the photosensitive resin composition. Spacer 201100954 panel for spacers. [In order to carry out the invention] <<Photosensitive resin composition>> The photosensitive resin composition of the present invention contains at least an alkali-soluble resin (A), a photopolymerizable monomer (B), and photopolymerization. Initiator (C). Each component contained in the photosensitive resin composition of the present invention will be described below. <Alkali-soluble resin (A) > The alkali-soluble resin refers to a resin film having a film thickness i formed on a substrate by a resin solution (solvent: propylene glycol monomethyl ether acetate) having a resin concentration of 20% by mass, at 2.38 When the mass% of tetramethylammonium hydroxide (TMAH) is immersed in an aqueous solution for 1 minute, the film thickness is O.Olym or more. The alkali-soluble resin (A) (hereinafter also referred to as "(A) component)) contained in the photosensitive resin composition of the present invention has a constituent unit (al) derived from an unsaturated carboxylic acid, and contains no a constituent unit (a 2 ) derived from an alicyclic group-containing epoxy group-containing unsaturated compound, and a constituent unit (a3) derived from an alicyclic epoxy group-containing unsaturated compound (hereinafter, the resin is also referred to as "(A1) resin")" and a constituent unit (a4) derived from the above-mentioned constituent unit (al), the above-mentioned constituent unit (a2), and an unsaturated compound containing an alicyclic group (hereinafter, the resin is also referred to as " (A2) Resin"). In the following, the sequence describes various situations related to these. -8- 201100954 ((A1) resin) The resin (A1) has at least the above-mentioned structural unit (a1), the above-mentioned structural unit (a2), and the above-mentioned constituent unit (a3). An unsaturated carboxylic acid such as (meth)acrylic acid or crotonic acid; or a monocarboxylic acid such as (meth)acrylic acid or crotonic acid; maleic acid, fumaric acid, citraconic acid, mesaconic acid, and itaconic acid, which are derived from the constituent unit (a 1 ). Dicarboxylic acid such as acid; acid anhydride of such dicarboxylic acid, and the like. Among these, (meth)acrylic acid and maleic anhydride are preferred in terms of copolymerization reactivity, alkali solubility of the obtained resin, ease of availability, and the like. These unsaturated carboxylic acids may be used singly or in combination of two or more kinds. In order to obtain the epoxy group-unsaturated compound having no alicyclic group when the constituent unit (a2) is derived, for example, glycidyl (meth)acrylate, 2-methylglycidyl (meth)acrylate, Methyl)acrylic acid 3,4-epoxybutyl acrylate, (meth)acrylic acid 6,7-epoxyheptyl ester, etc. (meth)acrylic acid epoxy phthalic acid '-ethyl propylene storage acid Epoxy propylene vinegar, Q; - n-propyl propyl enoyl methacrylate, n-butyl acrylate butyl acrylate, α-ethyl acrylate 6,7-epoxy heptyl ester, etc.: -alkyl Cycloalkyl acrylates and the like. Among these, 'in terms of copolymerization reactivity, resin strength after curing, etc., 'glycidyl methacrylate, 2-methylglycidyl (meth)acrylate, and (methyl) The 6,7-epoxyheptyl acrylate is preferred. These epoxy group-containing unsaturated compounds having no alicyclic group may be used singly or in combination of two or more kinds. In order to make the alicyclic epoxy group-unsaturated compound when the constituent unit (a3) is derivatized, only the unsaturated compound having an alicyclic epoxy group can be used without any particular limitation. The alicyclic group constituting the alicyclic epoxy group may be a single ring or a polycyclic ring. The monocyclic alicyclic group is, for example, a cyclopentyl group, a cyclohexyl group or the like. Further, the polycyclic alicyclic group is, for example, a norbornyl group, an isobornyl group, a tricyclodecyl group, a tricyclodecyl group or a tetracyclododecyl group. Specifically, the alicyclic epoxy group-containing unsaturated compound is, for example, a compound represented by the following formula (a3-1) to (a3-15). In the above, in order to make the developability suitable, the compounds represented by the following formulas (a3_1) to (a3·5) are preferably represented by the following formulas (a3-1) to (a3-3). The compound is better. 【化1】 R11

(a3-1) (a3-2)(a3-1) (a3-2)

(a3-3)(a3-3)

(a3-4)(a3-4)

-10- 201100954-10- 201100954

(a3-7)(a3-7)

(a3-10) -11 - 201100954 【化3】(a3-10) -11 - 201100954 [Chemical 3]

於前述式中,R11係表示氫原子或甲基,R12係表示 碳數1〜6之2價脂肪族飽和烴基,R 13係表示碳數1〜1 〇 之2價烴基,η係表示0〜10之整數。R12爲直鏈狀或支 鏈狀伸烷基、例如亞甲基、伸乙基、伸丙基、四亞甲基、 乙基伸乙基、五亞甲基、六亞甲基較佳。R13例如亞甲基 、伸乙基、伸丙基、四亞甲基、乙基伸乙基、五亞甲基、 六亞甲基、亞苯基、環伸己基、-CH2-Ph-CH2- ( Ph係表 示亞苯基)較佳。 此外,(A1 )樹脂只要是前述構成單位(a2 )之比例 與前述構成單位(a3 )之比例的合計量爲7 1質量%以上 12- 201100954 即可,亦可具有下述之構成單位(a4 )。藉由組合構成單 位(a4),可提高本發明之效果。 另外,(A1)樹脂亦可具有除前述構成單位(al)、 (a2) 、 (a3) 、 (a4)以外之其他構成單位。爲使該其 他構成單位衍生時之化合物,例如(甲基)丙烯酸酯類、 (甲基)丙烯醯胺類、烯丙基化合物、乙烯醚類、乙烯酯 類、苯乙烯類等。此等之化合物可單獨或2種以上組合使 〇用。 (甲基)丙烯酸酯類例如(甲基)丙烯酸甲酯、(甲 基)丙烯酸乙酯、(甲基)丙烯酸丙酯、(甲基)丙烯酸 戊酯、(甲基)丙烯酸第3-辛酯等之直鏈狀或支鏈狀( 甲基)丙烯酸烷酯;(甲基)丙烯酸氯化乙酯、(甲基) 丙烯酸2,2_二甲基羥基丙酯、(甲基)丙烯酸2-羥基乙酯 、單(甲基)丙烯酸三羥甲基丙烷酯、(甲基)丙烯酸苯 甲酯、(甲基)丙烯酸糠酯等。 〇 (甲基)丙烯醯胺類例如(甲基)丙烯醯胺、N-烷基 (甲基)丙烯醯胺、N-芳基(甲基)丙烯醯胺、n,N-二烷 基(甲基)丙烯醯胺、N,N-芳基(甲基)丙烯醯胺、N·甲 基-N-苯基(甲基)丙烯醯胺、N —羥基乙基_N_甲基(甲基 )丙烯醯胺等。 稀丙基化合物例如乙酸烯丙酯、己酸烯丙酯、辛酸烯 丙醋、月桂酸烯丙酯、棕櫚酸烯丙酯、硬脂酸烯丙酯、苯 甲酸嫌丙醋、乙醯基乙酸烯丙酯、乳酸烯丙酯等之烯丙酯 類;烯丙氧基乙醇等。 -13- 201100954 乙烯醚類例如己基乙烯醚、辛基乙烯醚、癸基乙烯醚 、乙基己基乙烯醚、甲氧基乙基乙烯醚、乙氧基乙基乙烯 醚、氯化乙基乙烯醚、1-甲基-2,2-二甲基丙基乙烯醚、2-乙基丁基乙烯醚、羥基乙基乙烯醚、二乙二醇乙烯醚、二 甲基胺基乙基乙烯醚、二乙基胺基乙基乙烯醚、丁基胺基 乙基乙烯醚、苯甲基乙烯醚、四氫糠基乙烯醚等之烷基乙 烯醚;乙烯基苯醚、乙烯基甲苯醚、乙烯基氯化苯醚、乙 烯基-2,4-二氯化苯醚、乙烯基萘醚、乙烯基蒽醚等之乙烯 基芳醚等。 乙烯酯類例如丁酸乙烯酯、異丁酸乙烯酯、三甲基乙 酸乙烯酯、二乙基乙酸乙烯酯、戊酸乙烯酯、己酸乙烯酯 、氯化乙酸乙烯酯、二氯化乙酸乙烯酯、甲氧基乙酸乙烯 酯、丁氧基乙酸乙烯酯、苯基乙酸乙烯酯、乙醯基乙酸乙 烯酯、月桂酸乙烯酯、/3-苯基丁酸乙烯酯 '苯甲酸乙烯 酯、水楊酸乙烯酯、氯化苯甲酸乙烯酯、四氯化苯甲酸乙 烯酯、萘甲酸乙烯酯等。 苯乙烯類例如苯乙烯;甲基苯乙烯、二甲基苯乙烯、 三甲基苯乙烯、乙基苯乙烯、二乙基苯乙烯、異丙基苯乙 烯、丁基苯乙烯、己基苯乙烯、環己基苯乙烯、癸基苯乙 烯、苯甲基苯乙烯、氯化甲基苯乙烯、三氟化甲基苯乙烯 、乙氧基甲基苯乙烯、乙醯氧基甲基苯乙烯等之烷基苯乙 烯;甲氧基苯乙烯、4-甲氧基-3-甲基苯乙烯、二甲氧基 苯乙烯等之烷氧基苯乙烯;氯化苯乙烯、二氯化苯乙烯、 三氯化苯乙烯、四氯化苯乙烯、五氯化苯乙烯、溴化苯乙 -14- 201100954 烯、二溴化苯乙烯、碘化苯乙烯、氟化苯乙烯、三氟化苯 乙烯、2-溴-4-三氟化甲基苯乙烯、4-氟-3-三氟化甲基苯 乙烯等之鹵化苯乙烯等。 (A 1 )樹脂中之前述構成單位(a 1 )的比例,以5〜 29質量%較佳,以1〇〜25質量%更佳。 而且,(A 1 )樹脂中之前述構成單位(a2 )之比例與 前述構成單位(a3 )之比例的合計量爲7 1質量%以上, 0 較佳者爲71〜95質量%,更佳者爲75〜90質量%。其中 ,前述構成單位(a2 )之比例以1 0〜70質量%較佳,以 20〜45質量%更佳。另外,前述構成單位(a3 )之比例 ,以20〜65質量%較佳,以30〜50質量%更佳。藉由使 構成單位(a3 )之比例在前述範圍,可使顯影性爲適當者 ,且可降低硬化物之比介電常數。 此外,(A 1 )樹脂中之前述構成單位(a4 )之比例, 以1〜15質量%較佳,以3〜10質量%更佳。 Q 而且,(A1)樹脂中之前述其他的構成單位之比例 ,以0〜10質量%較佳,以0〜5質量%更佳。 藉由使各構成單位之比例在前述範圍內,可使感光性 樹脂組成物之顯影性爲適當者,且可使硬化物之形狀或破 壞強度、對基板之密接性良好者。 (A1)樹脂之質量平均分子量(Mw:凝膠滲透色層 分析法(GPC ))、藉由苯乙烯換算之測定値。於本說明 書中相同),以2000〜50000較佳,以5000〜30000更佳 。藉由在前述範圍內,可容易得到感光性樹脂組成物之膜 -15- 201100954 形成能力、曝光後之顯像性的平衡性的傾向。 (A1)樹脂爲具有前述構成單位(al) 、(a2)、( a3 )以外之構成單位時’ (A 1 )樹脂可藉由習知的自由基 聚合法製造。換言之’可藉由使各構成單位衍生的各化合 物、以及習知的自由基聚合引發劑溶解於聚合溶劑後’進 行加熱攪拌予以製造。 另外,(A1)樹脂不具除前述構成單位(al) 、(a2 )、()以外之構成單位時’一般的自由基聚合法係使 構成單位(al)之羧基與構成單位(a2) 、(a3)之環氧 基進行反應,予以凝膠化。 所以在上述情形下’藉由先使不飽和羧酸與特定的反 應性化合物進行反應,製得反應混合物(反應步驟)’然 後,使該反應混合物與含有不具脂環式基之環氧基不飽和 化合物及含脂環式環氧基之不飽和化合物進行共聚合(聚 合步驟),製造(A1 )樹脂。視其所需,亦可於最後進 行精製•洗淨處理(精製步驟)。 首先,反應步驟係藉由將不飽和羧酸、與至少1種選 自以下述式(1 )〜(3 )所示之化合物(反應性化合物) 的化合物,加入燒瓶等之適當的反應容器中,進行加熱攪 拌,製得反應混合物。 【化4】 R1—〇—R3-0—R2 (1) (式中’ R1及R2係各表示獨立的碳數1〜4之烷基,R3 係表示亦可含有氧原子之碳數1〜4之直鏈狀或支鏈狀烴 -16- 201100954 基)In the above formula, R11 represents a hydrogen atom or a methyl group, R12 represents a divalent aliphatic saturated hydrocarbon group having 1 to 6 carbon atoms, R 13 represents a divalent hydrocarbon group having 1 to 1 carbon number, and η represents 0 to 0. An integer of 10. R12 is a linear or branched alkyl group such as methylene, ethyl, propyl, tetramethylene, ethylethyl, pentamethylene or hexamethylene. R13 is, for example, methylene, ethyl, propyl, tetramethylene, ethylethyl, pentamethylene, hexamethylene, phenylene, cyclohexyl, -CH2-Ph-CH2- ( Ph is a phenylene group. In addition, the total amount of the ratio of the ratio of the constituent unit (a2) to the constituent unit (a3) of the (A1) resin may be 71% by mass or more and 12 to 201100954, and may have the following constituent units (a4). ). The effect of the present invention can be improved by combining the constituent units (a4). Further, the (A1) resin may have other constituent units other than the above-described constituent units (al), (a2), (a3), and (a4). The compound in the case where the other constituent unit is derived is, for example, a (meth) acrylate, a (meth) acrylamide, an allyl compound, a vinyl ether, a vinyl ester, a styrene or the like. These compounds may be used alone or in combination of two or more. (Meth) acrylates such as methyl (meth) acrylate, ethyl (meth) acrylate, propyl (meth) acrylate, amyl (meth) acrylate, 3-octyl (meth) acrylate Linear or branched alkyl (meth)acrylate; ethyl (meth)acrylate, 2,2-dimethylhydroxypropyl (meth)acrylate, 2-(meth)acrylate Hydroxyethyl ester, trimethylolpropane mono(meth)acrylate, benzyl (meth)acrylate, decyl (meth)acrylate, and the like. Ruthenium (meth) acrylamides such as (meth) acrylamide, N-alkyl (meth) acrylamide, N-aryl (meth) acrylamide, n, N-dialkyl ( Methyl) acrylamide, N,N-aryl (meth) acrylamide, N-methyl-N-phenyl (meth) acrylamide, N-hydroxyethyl _N-methyl (A Base) acrylamide and the like. Dilute propyl compounds such as allyl acetate, allyl hexanoate, allyl octoate, allyl laurate, allyl palmitate, allyl stearate, benzoic acid, acetonitrile, acetaminoacetic acid Allyl esters such as allyl ester and allyl lactate; allyloxyethanol and the like. -13- 201100954 Vinyl ethers such as hexyl vinyl ether, octyl vinyl ether, mercapto vinyl ether, ethylhexyl vinyl ether, methoxy ethyl vinyl ether, ethoxyethyl vinyl ether, ethyl vinyl chloride , 1-methyl-2,2-dimethylpropyl vinyl ether, 2-ethylbutyl vinyl ether, hydroxyethyl vinyl ether, diethylene glycol vinyl ether, dimethylaminoethyl vinyl ether, An alkyl vinyl ether such as diethylaminoethyl vinyl ether, butylaminoethyl vinyl ether, benzyl vinyl ether or tetrahydrofurfuryl vinyl ether; vinyl phenyl ether, vinyl toluene ether, vinyl A vinyl aryl ether such as phenyl chloride, vinyl-2,4-diphenyl ether, vinyl naphthyl ether or vinyl anthracene. Vinyl esters such as vinyl butyrate, vinyl isobutyrate, vinyl trimethyl acetate, vinyl acetate, vinyl valerate, vinyl hexanoate, vinyl acetate, vinyl acetate Ester, methoxyvinyl acetate, butoxy vinyl acetate, phenyl vinyl acetate, ethylene glycol acetate, vinyl laurate, vinyl 3-phenylbutyrate, vinyl benzoate, water Vinyl salicylate, vinyl benzoate, vinyl benzoate, vinyl naphthate, and the like. Styrenes such as styrene; methyl styrene, dimethyl styrene, trimethyl styrene, ethyl styrene, diethyl styrene, isopropyl styrene, butyl styrene, hexyl styrene, An alkane such as cyclohexylstyrene, mercaptostyrene, benzyl styrene, methyl styrene chloride, methyl styrene trifluoride, ethoxymethyl styrene, ethoxymethyl methene styrene Styrene; alkoxystyrene such as methoxystyrene, 4-methoxy-3-methylstyrene, dimethoxystyrene; styrene chloride, styrene dichloride, trichloro Styrene, styrene tetrachloride, styrene pentachloride, phenylethyl bromide-14- 201100954 olefin, styrene dibromide, styrene iodide, fluorinated styrene, styrene trifluoride, 2- Halogenated styrene such as bromo-4-trifluoromethylstyrene or 4-fluoro-3-trifluoromethylstyrene. The ratio of the above-mentioned constituent unit (a 1 ) in the resin (A 1 ) is preferably 5 to 29% by mass, more preferably 1 to 25% by mass. Further, the total ratio of the ratio of the constituent unit (a2) in the (A1) resin to the constituent unit (a3) is 71% by mass or more, and 0 is preferably 71 to 95% by mass, more preferably It is 75 to 90% by mass. The ratio of the constituent unit (a2) is preferably from 10 to 70% by mass, more preferably from 20 to 45% by mass. Further, the ratio of the above-mentioned constituent unit (a3) is preferably 20 to 65 mass%, more preferably 30 to 50 mass%. By setting the ratio of the constituent unit (a3) within the above range, the developability can be made appropriate, and the specific dielectric constant of the cured product can be lowered. Further, the ratio of the above-mentioned constituent unit (a4) in the (A 1 ) resin is preferably from 1 to 15% by mass, more preferably from 3 to 10% by mass. Further, the ratio of the other constituent units in the (A1) resin is preferably 0 to 10% by mass, more preferably 0 to 5% by mass. By setting the ratio of each constituent unit within the above range, the developability of the photosensitive resin composition can be made appropriate, and the shape or the breaking strength of the cured product and the adhesion to the substrate can be improved. (A1) Mass average molecular weight of the resin (Mw: gel permeation chromatography (GPC)), measured by styrene. The same in this specification), preferably from 2000 to 50000, more preferably from 5000 to 30,000. By the above range, the film forming performance of the photosensitive resin composition -15-201100954 tends to be balanced with the development property after exposure. (A1) When the resin has a constituent unit other than the above constituent units (al), (a2), and (a3), the (A 1 ) resin can be produced by a conventional radical polymerization method. In other words, it can be produced by heating and stirring the respective compounds derived from the respective constituent units and a conventional radical polymerization initiator dissolved in a polymerization solvent. Further, when the (A1) resin does not have a constituent unit other than the above constituent units (al), (a2), and (), the general radical polymerization method is such that the carboxyl group of the constituent unit (al) and the constituent unit (a2), The epoxy group of a3) is reacted and gelled. Therefore, in the above case, 'the reaction mixture is prepared by first reacting an unsaturated carboxylic acid with a specific reactive compound (reaction step)', and then the reaction mixture and the epoxy group having no alicyclic group are not The saturated compound and the unsaturated compound containing an alicyclic epoxy group are subjected to copolymerization (polymerization step) to produce a (A1) resin. The refining and washing treatment (refining step) can also be carried out at the end depending on the needs. First, the reaction step is carried out by adding an unsaturated carboxylic acid and at least one compound selected from the group consisting of the compounds represented by the following formulas (1) to (3) (reactive compounds) to a suitable reaction vessel such as a flask. The mixture was heated and stirred to prepare a reaction mixture. R1—〇—R3-0—R2 (1) (wherein R1 and R2 each represent an independent alkyl group having 1 to 4 carbon atoms, and R3 represents a carbon number 1 which may also contain an oxygen atom. 4 linear or branched hydrocarbons-16- 201100954 base)

【化5 I r\/X/r5 (2) (式中,R4及R5係各表示獨立的碳數1〜4之烷基) 【化6】[Chemical 5 I r\/X/r5 (2) (wherein R4 and R5 each represent an independent alkyl group having 1 to 4 carbon atoms) [Chemical 6]

R6—Ο o r7-° (式中,R6及R7係各表示獨立的碳數1〜4之烷基,R8 係表示氫原子或碳數1〜4之烷基) 以前述式(1 )所示之化合物,例如1,2-二甲氧基乙 烷、1,2-二乙氧基乙烷、1,2-二丙氧基乙烷、1,2-二丁氧 基乙烷、二乙氧基甲烷、二丙氧基甲烷、二丁氧基甲烷、 1,1-二甲氧基丙烷' 1,1-二乙氧基丙烷、1,1-二丙氧基丙 烷、1,1-二丁氧基丙烷、2,2-二甲氧基丙烷、2,2-二乙氧 ^ 基丙烷、2,2-二丙氧基丙烷、2,2-二丁氧基丙烷、二乙二 醇二甲醚、二乙二醇乙基甲醚、二乙二醇二乙醚、二乙二 醇二丙醚、二乙二醇二丁醚等。 以前述式(2 )所示之化合物,例如2,5 -二甲氧基四 氫呋喃、2,5-二乙氧基四氫呋喃、2,5-二丙氧基四氫呋喃 、2,5 -二丁氧基四氫呋喃等。 以前述式(3 )所示之化合物,例如3,4-二甲氧基甲 苯、3,4-二乙氧基甲苯、3,4-二丙氧基甲苯、3,4-二丁氧 基甲苯、1,2-二甲氧基苯、1,2-二乙氧基苯、1,2-二丙氧 -17- 201100954 基苯、1,2-二丁氧基苯等。 於此等之反應性化合物中’就與不飽和竣酸之反應性 而言,以二乙氧基甲烷、1,2-二甲氧基乙烷、丨,2_二乙氧 基乙院、二乙二醇二甲醚、二乙二醇乙基甲醚、2,5 -二甲 氧基四氫呋喃、1,1-二乙氧基丙烷、及2,2 -二乙氧基丙院 較佳。此等之反應性化合物可單獨或2種以上組合使用。 不飽和羧酸與反應性化合物之莫耳比例,沒有特別的 限制,以I : 0.5〜1 : 3較佳,以1 : 〇.8〜1 : 2更佳。而 且,反應溫度以60〜150 °C較佳,以80〜120。(:更佳。反 應時間以1 0分鐘〜1 0小時較佳,以3 0分鐘〜5小時更佳 〇 其次,聚合步驟係藉由使在反應步驟中所得的反應混 合物與含有不具脂環式基之環氧基不飽和化合物及含有脂 環式環氧基之不飽和化合物溶解於習知的自由基聚合引發 劑與聚合溶劑後,進行加熱攪拌,製得共聚物。 最後,精製步驟例如藉由使用貧溶劑等進行洗淨處理 ’以除去殘留物。 (A 1 )樹脂之含有量,相對於下述光聚合性單體(B )之含有量而言,以40〜230質量%較佳’以60〜22〇質 量%更佳,以70〜215質量%最佳。 ((A2 )樹脂) (A2 )樹脂係至少具有前述構成單位(a 1 )、前述構 成單位(a2 )及前述構成單位(a4 )。有關爲使構成單位 -18- 201100954 (a 1 ) 、( a2 )衍生時之化合物,係與(A 1 )樹 ,故省略說明。(A2 )樹脂亦可具有除構成單位 (a2 )、(以)以外之其他構成單位。前述其他 ,例如與(A1 )樹脂之其他構成單位相同的構成 爲使構成單位(a4 )衍生時之含脂環式基不 '物,只要是具有脂環式環氧基之不飽和化合物即 特別的限制。脂環式基,可以爲單環、亦可爲多 0 之脂環式基例如環戊基、環己基等。另外,多環 基例如金剛烷基、降冰片基、異冰片基、三環壬 癸基、四環十二烷基等。 具體而言,含脂環式環氧基之不飽和化合物 下述式(a4_l)〜(a4-7)所示之化合物。於此 爲使顯影性爲適當者時,以下述式(a4-3 )〜( 示之化合物較佳,以下述式(a4-3 ) 、( a4-4 ) 合物更佳。 〇 脂時相同 (al )、 構成單位 單位。 飽和化合 可,沒有 環。單環 之脂環式 基、三環 ,例如以 等之中, a 4 - 8 )所 所示之化 -19- 201100954 【化7】R6—Ο o r7-° (wherein R6 and R7 each represent an independent alkyl group having 1 to 4 carbon atoms, and R8 represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms) by the above formula (1) a compound such as 1,2-dimethoxyethane, 1,2-diethoxyethane, 1,2-dipropoxyethane, 1,2-dibutoxyethane, two Ethoxymethane, dipropoxymethane, dibutoxymethane, 1,1-dimethoxypropane ' 1,1-diethoxypropane, 1,1-dipropoxypropane, 1,1 -dibutoxypropane, 2,2-dimethoxypropane, 2,2-diethoxypropane, 2,2-dipropoxypropane, 2,2-dibutoxypropane, diethyl Diol dimethyl ether, diethylene glycol ethyl methyl ether, diethylene glycol diethyl ether, diethylene glycol dipropyl ether, diethylene glycol dibutyl ether and the like. a compound represented by the above formula (2), for example, 2,5-dimethoxytetrahydrofuran, 2,5-diethoxytetrahydrofuran, 2,5-dipropoxytetrahydrofuran, 2,5-dibutoxy Tetrahydrofuran and the like. a compound represented by the above formula (3), for example, 3,4-dimethoxytoluene, 3,4-diethoxytoluene, 3,4-dipropoxytoluene, 3,4-dibutoxy Toluene, 1,2-dimethoxybenzene, 1,2-diethoxybenzene, 1,2-dipropoxy-17-201100954 benzene, 1,2-dibutoxybenzene, and the like. In such reactive compounds, 'in terms of reactivity with unsaturated decanoic acid, diethoxymethane, 1,2-dimethoxyethane, hydrazine, 2-diethoxy ethoxylate, Diethylene glycol dimethyl ether, diethylene glycol ethyl methyl ether, 2,5-dimethoxytetrahydrofuran, 1,1-diethoxypropane, and 2,2-diethoxypropene are preferred. . These reactive compounds may be used singly or in combination of two or more kinds. The molar ratio of the unsaturated carboxylic acid to the reactive compound is not particularly limited, and is preferably from 1:0.5 to 1:3, more preferably from 1:8 to 1:2. Further, the reaction temperature is preferably 60 to 150 ° C and 80 to 120. (: More preferably. The reaction time is preferably from 10 minutes to 10 hours, preferably from 30 minutes to 5 hours, and the polymerization step is carried out by reacting the reaction mixture obtained in the reaction step with a non-alicyclic ring. The epoxy group-containing unsaturated compound and the alicyclic epoxy group-containing unsaturated compound are dissolved in a conventional radical polymerization initiator and a polymerization solvent, and then heated and stirred to obtain a copolymer. Finally, the purification step is, for example, borrowed. The content of the resin (A 1 ) is preferably 40 to 230% by mass based on the content of the photopolymerizable monomer (B). 'It is more preferably 60 to 22% by mass, and most preferably 70 to 215% by mass. ((A2) Resin) (A2) Resin has at least the above-mentioned constituent unit (a 1 ), the above-mentioned constituent unit (a2), and the aforementioned constitution (a4). The compound in the case of deriving the constituent unit -18-201100954 (a 1 ) and (a2) is a tree of (A 1 ), and therefore the description is omitted. (A2) The resin may have a constituent unit ( Other components other than a2) and (s). For example, the same configuration as the other constituent unit of the (A1) resin is an alicyclic group-containing compound in the case where the constituent unit (a4) is derivatized, and is particularly limited as long as it is an unsaturated compound having an alicyclic epoxy group. An alicyclic group which may be a monocyclic ring or an alicyclic group having more than 0, such as a cyclopentyl group, a cyclohexyl group, etc. In addition, a polycyclic group such as an adamantyl group, a norbornyl group, an isobornyl group, a tricyclic ring. The sulfhydryl group-containing epoxy group-containing unsaturated compound is a compound represented by the following formula (a4_1) to (a4-7). When it is appropriate, it is preferable to use the following formula (a4-3) to (the compound shown is preferably the following formula (a4-3) or (a4-4). The same as the resin (al), the constituent unit Unit. Saturated compound, no ring. Monocyclic alicyclic group, tricyclic ring, for example, etc., a 4 - 8) shown in -19-201100954 [Chem. 7]

(a4-1) (a4-2) (a4-3)(a4-1) (a4-2) (a4-3)

R21R21

(a4-4) (a4-5)(a4-4) (a4-5)

(a4-6) t(a4-6) t

(a4-7)(a4-7)

(a4-8) -20- 201100954 於前述式中,R21係表示氫原子或甲基,R 單鍵或碳數1〜6之2價脂肪族飽和烴基,R23傍 子或碳數1〜5之烷基。R22爲單鍵、直鏈狀或支 基、例如亞甲基、伸乙基、伸丙基、四亞甲基、 基、五亞甲基、六亞甲基較佳。R23例如甲基、 〇 (A2 )樹脂中之前述構成單位(al )的比例 0 25質量%較佳,以5〜25質量%更佳。 而且,(A2)樹脂中之前述構成單位(a2) 71質量%以上,較佳者爲71〜95質量%,更佳 90質量%。 此外,(A2 )樹脂中之前述構成單位(a4 ) 1〜25質量%較佳,以3〜20質量%更佳,以5 %最佳。藉由使構成單位(a4 )之比例在前述範 使顯影性爲適當者,且可降低硬化物之比介電常 Q 此外,(A2 )樹脂中之前述其他的構成單 ,以0〜10質量%較佳,以0〜5質量%更佳。 藉由使各構成單位之比例在前述範圍內,可 樹脂組成物之顯影性爲適當者,且可使硬化物之 壞強度、對基板之密接性良好者。 (A2 )樹脂之質量平均分子量,以2〇00〜 佳,以5000〜3 00 00更佳。藉由在前述範圍內, 得到感光性樹脂組成物之膜形成能力、曝光後之 平衡性之傾向。 22係表示 (表示氫原 :鏈狀伸烷 乙基伸乙 乙基較佳 卜以3〜 的比例爲 者爲75〜 的比例以 〜15質量 圍內,可 數。 位之比例 使感光性 形狀或破 50000 較 會有容易 顯像性的 -21 - 201100954 (A2)樹脂可藉由習知的自由基聚合法製造 之,可藉由使各構成單位衍生的各化合物、以及習 由基聚合引發劑溶解於聚合溶劑後,進行加熱攪拌 造。 (A2 )樹脂之含有量,相對於下述光聚合性單 )之含有量而Η,以40〜230質量%較佳,以60〜 量%更佳,以70〜215質量%最佳。 另外,(A )成份係除(A1 )樹脂或(Α2 )樹 亦可含有習知的其他鹼可溶性樹脂。惟此時於(A 之全部構成單位中,具有環氧基之構成單位的比传 質量%以上較佳。 而且,(A )成份之含有量相對於感光性樹脂 之固成份而言,以40〜85質量%較佳,以45〜75 更佳。藉由在前述範圍內,會有可容易取得顯影性 性的傾向。 &lt;光聚合單體(B ) &gt; 本發明之感光性樹脂組成物中所含的光聚合琿 )(以下亦稱爲「( B )成份」),以使用具有乙 飽和基之單體較佳。該具有乙烯性不飽和基之單體 官能單體與多官能單體。 單官能單體例如(甲基)丙烯醯胺、羥甲基( 丙烯醯胺、甲氧基甲基(甲基)丙烯醯胺、乙氧基 甲基)丙烯醯胺 '丙氧基甲基(甲基)丙烯醯胺、 。換言 知的自 予以製 :體(B 220質 脂外, )成份 [J 以 5 0 組成物 質量% 之平衡 :體(B 烯性不 ,爲單 甲基) 甲基( 丁氧基 -22- 201100954 甲氧基甲基(甲基)丙烯醯胺、N-羥甲基(甲基)丙烯醯 胺、N-羥基甲基(甲基)丙烯醯胺、(甲基)丙烯酸、富 馬酸、馬來酸、馬來酸酐、衣康酸、衣康酸酐、檸康酸、 檸康酸酐、丁烯酸、2 -丙烯醯胺-2-甲基丙烷磺酸、第3-丁基丙烯醯胺磺酸、(甲基)丙烯酸甲酯、(甲基)丙烯 酸乙酯、(甲基)丙烯酸丁酯、(甲基)丙烯酸2-乙基 己酯、(甲基)丙烯酸環己酯、(甲基)丙烯酸2-羥基 0 乙酯、(甲基)丙烯酸2-羥基丙酯、(甲基)丙烯酸2-羥基丁酯、(甲基)丙烯酸2-苯氧基-2-羥基丙酯、2-( 甲基)丙烯醯氧基-2-羥基丙基苯二甲酸酯、單(甲基) 丙烯酸丙三醇酯、(甲基)丙烯酸四氫糠酯、(甲基)丙 烯酸二甲基胺酯、(甲基)丙烯酸環氧丙酯、(甲基)丙 烯酸2,2,2 -三氟乙酯、(甲基)丙烯酸2,2,3,3 -四氟丙酯 、苯二甲酸衍生物之半(甲基)丙烯酸酯等。此等之單官 能單體可單獨或2種以上組合使用。 Q 此外,多官能單體例如二(甲基)丙烯酸乙二醇酯' 二(甲基)丙烯酸二乙二醇酯、二(甲基)丙烯酸四乙二 醇酯、二(甲基)丙烯酸丙二醇酯、二(甲基)丙烯酸聚 丙二醇酯、二(甲基)丙烯酸丁二醇酯、二(甲基)丙烯 酸新戊醇酯、二(甲基)丙烯酸1,6-己二醇酯、三(甲基 )丙嫌酸三羥甲基丙焼酯、二(甲基)丙嫌酸丙三醇醋、 三丙烯酸季戊四醇酯、四丙烯酸季戊四醇酯、五丙烯酸二 季戊四醇酯、六丙烯酸二季戊四醇酯、二(甲基)丙烯酸 季戊四醇酯、三(甲基)丙烯酸季戊四醇酯、四(甲基) -23- 201100954 丙烯酸季戊四醇酯、五(甲基)丙烯酸二季戊四醇酯、六 (甲基)丙烯酸二季戊四醇酯、2,2-雙(4-(甲基)丙烯 醯氧基二乙氧基苯基)丙烷、2,2-雙(4-(甲基)丙烯醯 氧基聚乙氧基苯基)丙烷、2-羥基-3-(甲基)丙烯醯氧 基丙基(甲基)丙烯酸酯、乙二醇二環氧丙醚二(甲基) 丙烯酸酯、二乙二醇二環氧丙醚二(甲基)丙烯酸酯、苯 二甲酸二環氧丙酯二(甲基)丙烯酸酯、丙三醇三丙烯酸 酯、丙三醇聚環氧丙醚聚(甲基)丙烯酸酯、胺基甲酸酯 (甲基)丙烯酸酯(即二異氰酸甲次苯酯)、三甲基六亞 甲基二異氰酸酯與六亞甲基二異氰酸酯等與2_羥基乙基 (甲基)丙烯酸酯之反應物、亞甲基雙(甲基)丙烯醯胺 、(甲基)丙烯醯胺甲基醚、多元醇與N-羥甲基(甲基 )丙烯醯胺之縮合物等的多官能單體、或三丙烯基甲縮醛 等。此等之多官能單體可使用單獨或2種以上組合使用。 於此等具有乙烯性不飽和基之單體中’就提高感光性 樹脂組成物對基板之密接性 '感光性樹脂組成物於硬化後 之破壞強度而言,以3官能以上之多官能單體較佳’以6 官能以上之多官能單體更佳。 (B)成份之含有量相對於感光性樹脂組成物之固成 份而言,以5〜50質量%較佳,以10〜40質量%更佳。 藉由在前述範圍內,會有可容易取得感度。顯影性、解像 性之平衡性的傾向。 &lt;光聚合引發劑(C) &gt; -24- 201100954 本發明之感光性樹脂組成物中所含有的光聚合引發劑 (c)(以下亦稱爲「( c)成份」),沒有特別的限制 ,可使用習知的光聚合引發劑。 具體而言,光聚合引發劑例如1 -羥基環己基苯酮、2 -羥基-2-甲基-1-苯基丙燒-1-酮、1-[4_(2 -經基乙氧基)苯 基]-2-羥基-2-甲基-1-丙烷-1-酮、1- ( 4-異丙基苯基)-2-羥基-2-甲基丙烷-1-酮、1-(4-十二烷基苯基)-2 —羥基- 2-0 甲基丙烷-1-酮、2,2 -二甲氧基-1,2 -二苯基乙烷-i_酮、雙 (4-二甲基胺基苯基)酮、2-甲基-1-[4-(甲基硫代)苯 基]-2-嗎啉基丙烷-1-酮、2-苯甲基-2-二甲基胺基_ΐ-(4· 嗎啉基苯基)-丁烷-1-酮、乙酮、1-[9-乙基-6-(2-甲基苯 甲醯基)-9H -咔唑-3-基]、1-(〇 -乙醯基肟)、2,4,6-三甲 基苯甲醯基二苯基氧化鱗、4-苯甲醯基- 4’-甲基二甲基硫 醚、4-二甲基胺基苯甲酸、4-二甲基胺基苯甲酸甲酯、4-二甲基胺基苯甲酸乙酯、4-二甲基胺基苯甲酸丁酯、4-二 0 甲基胺基-2-乙基己基苯甲酸、4-二甲基胺基-2-異戊基苯 甲酸、苯甲基- /3 -甲氧基乙基乙縮醒、苯甲基二甲基縮酵 、:I-苯基-1,2-丙烷二酮-2-(o-乙氧基羰基)肟、〇苯甲醯 基苯甲酸甲酯、2,4 -二乙基噻噸酮、2_氯化噻噸酮、2,4-二甲基瞎顺嗣、1-氯-4-丙氧基唾顺嗣、嚷顺、2 -氯化唾囉 、2,4 -二乙基噻噸、2 -甲基噻噸、2_異丙基噻噸、2 -乙基 惠醌' 八甲基蒽醌、1,2-苯并蒽醌、2,3-二苯基蒽醌、偶 氣雙異丁腈、過氧化苯甲醯基、過氧化枯烯' 2-锍基苯并 咪唑、2-锍基苯并噁唑、2-巯基苯并噻唑、2- ( 〇-氯化苯 -25- 201100954 基)-4,5-二(m-甲氧基苯基)-咪唑基二聚物、二苯甲酮 、2-氯化二苯甲酮、p,p’-雙二甲基胺基二苯甲酮、4,4’-雙 二乙基胺基二苯甲酮、4,4’-二氯化二苯甲酮、3,3-二甲 基-4-甲氧基二苯甲酮、苯甲基、苯偶因、苯偶因甲醚、 苯偶因乙醚、苯偶因異丙醚、苯偶殷正丁醚、苯偶因異丁 醚、苯偶因丁醚、苯乙酮、2,2-二乙氧基苯乙酮、p-二甲 基苯乙酮、P-二甲基胺基苯丙酮、二氯化苯乙酮、三氯化 苯乙酮、P-第3-丁基苯乙酮、p-二甲基胺基苯乙酮、p-第 3- 丁基三氯化苯乙酮、p-第3-丁基二氯化苯乙酮、α,α-二氯-4-苯氧基苯乙酮、噻噸酮、2 -甲基噻噸酮、2 -異丙基 噻噸酮、二苯并環庚酮、戊基-4-二甲基胺基苯甲酸酯、 9 -苯基吖啶、1 , 7 -雙-(9 -吖啶基)庚烷、1,5 -雙(9 -吖啶 基)戊烷、1,3-雙-(9-吖啶基)丙烷、ρ-甲氧基三嗪、 2,4,6-參(三氯化甲基)-s-三嗪、2-甲基-4,6-雙(三氯化 甲基)-s-三嗪、2-[2-(5-甲基呋喃-2-基)次乙基]-4,6-雙 (三氯化甲基)-s-三嗪、2-[2-(呋喃-2-基)次乙基]-4,6-雙(三氯化甲基)-s-三嗪、2-[2-(4-二乙基胺基-2-甲基 苯基)次乙基]-4,6-雙(三氯化甲基)-3-三嗪、2-(3,4-二甲氧基苯基)次乙基]-4,6-雙(三氯化甲基)-s-三嗪、 2-(4-甲氧基苯基)-4,6-雙(三氯化甲基)-s-三嗪、2-( 4- 乙氧基苯乙烯基)-4,6-雙(三氯化甲基)-s-三嗪、2-( 4-正丁氧基苯基)-4,6-雙(三氯化甲基)-s-三嗪、2,4-雙-三氯化甲基-6- (3-溴-4-甲氧基)苯基-s-三嗪、2,4-雙-三氯化甲基-6- (2-溴-4-甲氧基)苯基-s-三嗪、2,4-雙-三 -26- 201100954 氯化甲基-6- ( 3 -溴-4 -甲氧基)苯乙稀基苯基-s_三曉、 2,4-雙-三氯化甲基-6- ( 2-溴_4·甲氧基)苯乙烯基苯基-s_ 三嗪等。於此等之中,使用聘系光聚合引發劑,就感度而 言更佳。此等之光聚合引發劑可單獨或2種以上組合使用 〇 (C)成份之含有量,相對於感光性樹脂組成物之固 成份而言以0.5〜30質量%較佳,以1〜20質量%更佳。 0 藉由在前述範圍內’可得充分的耐熱性、耐藥品性,且可 提高塗膜形成能力,抑制硬化不良的情形。 此外’在該(C)成分,亦可組合光引發助劑。光引 發助劑例如三乙醇胺、甲基二乙醇胺、三異丙醇胺、4-二 甲基胺基苯甲酸甲酯、4 -二甲基胺基苯甲酸乙酯、4 -二甲 基胺基異戊酯、4_二甲基胺基苯甲酸2-乙基己酯、苯甲酸 2-二甲基胺基乙酯' N,N-二甲基對甲苯胺、4,4’-雙(二甲 基胺基)二苯甲酮、9,10 -二甲氧基蒽、2 -乙基-9,10 -二甲 〇 氧基蒽、9,10-二乙氧基蔥、2-乙基-9,10-二乙氧基蒽等。 此等之光引發助劑可單獨或2種以上組合使用。 &lt;有機溶劑(S ) &gt; 本發明之感光性樹脂組成物,爲改善塗佈性、調整黏 度時,以含有有機溶劑(S )(以下亦稱爲「( S )成份」 )較佳。 具體而言,有機溶劑例如乙二醇單甲醚、乙二醇單乙 醚、乙二醇單正丙醚、乙二醇單正丁醚、二乙二醇單甲醚 -27- 201100954 、二乙二醇單乙醚、二乙二醇單正丙醚、二乙二醇單正丁 醚、三乙二醇單甲醚、三乙二醇單乙醚、丙二醇單甲醚、 丙二醇單乙醚、丙二醇單正丙醚、丙二醇單正丁醚、二丙 二醇單甲醚、二丙二醇單乙醚、二丙二醇單正丙醚、二丙 二醇單正丁醚、三丙二醇單甲醚、三丙二醇單乙醚等之( 聚)烷二醇單烷醚類;乙二醇單甲醚乙酸酯、乙二醇單乙 醚乙酸酯、二乙二醇單甲醚乙酸酯、二乙二醇單乙醚乙酸 酯、丙二醇單甲醚乙酸酯(PGMEA )、丙二醇單乙醚乙 酸酯等之(聚)烷二醇單烷醚乙酸酯類;二乙二醇二甲醚 、二乙二醇甲基乙醚、二乙二醇二乙醚、四氫呋喃等之其 他醚類;甲基乙酮、環己酮、2-庚酮、3-庚酮等之酮類; 2-羥基丙酸甲酯、2-羥基丙酸乙酯等之乳酸烷酯類;2-羥 基-2-甲基丙酸乙酯、3-甲氧基丙酸甲酯、3-甲氧基丙酸乙 酯、3 -乙氧基丙酸甲酯、3 -乙氧基丙酸乙酯、乙氧基乙酸 乙酯、羥基乙酸乙酯、2-羥基-3-甲基丁酸甲酯、3-甲氧基 丁基乙酸酯、3-甲基-3-甲氧基丁基乙酸酯、3-甲基-3-甲 氧基丁基丙酸酯、乙酸乙酯、乙酸正丙酯、乙酸異丙酯、 乙酸正丁酯、乙酸異丁酯、甲酸正戊酯、乙酸異戊酯、丙 酸正丁酯、丁酸乙酯、丁酸正丙酯、丁酸異丙酯、丁酸正 丁酯、丙酮酸甲酯、丙酮酸乙酯、丙酮酸正丙酯、乙醯基 乙酸甲酯、乙醯基乙酸乙酯、2-羰基丁酸乙酯等之其他酯 類;甲苯、二甲苯等之芳香族烴類;N-甲基吡咯烷酮、 Ν,Ν-二甲基甲醯胺、N,N-二甲基乙醯胺等之醯胺類等。於 此等之中,以烷二醇單烷醚類、烷二醇單烷醚乙酸酯類、 -28- 201100954 前述其他的醚類、乳酸烷酯類、前述其他的酯類較佳,以 烷二醇單烷醚乙酸酯類、前述其他的醚類、前述其他的酯 類更佳。此等之溶劑可單獨或2種以上組合使用。 (S )成分之含有量,沒有特別的限制,以可在基板 等上塗佈的濃度,視塗佈厚度而定予以適當設定。感光性 樹脂組成物之黏度,以5〜5 0 0 cp較佳,以1 0〜5 0 cp更佳 ,以20〜30 cp最佳。而且,固成份濃度以5〜100質量% 0 較佳,以20〜50質量%更佳。 &lt;其他成份&gt; 於本發明之感光性樹脂組成物中,視其所需可含有界 面活性劑、密接性提高劑、熱聚合禁止劑、消泡劑等之添 加劑。任何一種添加劑皆可使用習知者。界面活性劑例如 陰離子、陽離子、非離子系等之化合物,密接性提高劑例 如習知的矽烷偶合劑’熱聚合禁止劑例如氫醌、氫醌單乙 Q 醚等,消泡劑例如矽系、氟系化合物等。 &lt;感光性樹脂組成物之調製方法&gt; 本發明之感光性樹脂組成物、可使前述各成份以3條 輥磨、球磨、砂磨等之攪拌機混合(分散.混練),且視 其所需以5 μιη之薄膜過濾器等之過濾器進行過濾,予以 調製。 &lt;&lt;液晶面板&gt;&gt; -29- 201100954 本發明之液晶面板,係具有由感光性樹脂組成物所形 成的間隔物者。除間隔物外之點,由於與一般的液晶面板 相同,於下述中僅說明有關間隔物之形成方法。 首先,在形成有間隔物之基板上,使用輥塗佈器、可 逆式塗佈器、棒塗佈器等之接觸複印型塗佈裝置或旋轉器 (回轉式塗佈裝置)、簾幕流動塗佈器等之非接觸型塗佈 裝置,塗佈本發明之感光性樹脂組成物且予以乾燥,藉由 除去溶劑,形成感光性樹脂層。 其次,經由負型光罩,在感光性樹脂層上照射紫外線 、準分子雷射光等之活性能量線,進行部份曝光處理。於 曝光時,可使用高壓水銀燈、超高壓水銀燈、氙氣燈、碳 弧燈等發出紫外線之光源。曝光量亦可視感光性樹脂組成 物之組成而不同,例如以約50〜600mJ/cm2較佳。 然後,藉由使曝光後之感光性樹脂層以顯影液進行顯 影,形成間隔物。顯影方法沒有特別的限制,可使用浸漬 法、噴霧法等。顯影液之具體例,如單乙醇胺、二乙醇胺 、三乙醇胺等之有機系者、或氫氧化鈉、氫氧化鉀、碳酸 鈉、氨水、4級銨鹽等之水溶液。本發明之感光性樹脂組 成物,由於具有適度的顯影性,故可適度地進行顯影。 其次,在顯影後之間隔物上實施後烘烤處理,予以加 熱硬化。後烘烤處理之溫度以150〜250°C較佳。 該使用本發明之感光性樹脂組成物所形成的間隔物, 破壞強度高、且形狀或對基板之密接性亦佳。而且,由於 比介電常數低,在配列基板上形成間隔物時爲有效。 -30- 201100954 【實施方式】 於下述中,藉由實施例更詳細地說明本發明,惟本發 明不受此等實施例所限制。 [實施例] &lt;實施例1〜5、比較例1〜3 &gt; 使下述表1所示之各成份混合,溶解於溶劑中,調製 感光性樹脂組成物。 [表1] (A) (B) (C) ⑸ 實施例1 (A)-l (B)-l (C)-l (C)-2 (S)-1 Γ1001 Γ1001 Γ2.71 n〇i [230] 實施例2 (A)-2 (B)-l (C)-l (C)-2 (S)-l Γ1001 _ P.71 『101 [2301 實施例3 (A)-3 (B)-l (C)-l (C)-2 (S)-l _ 「1001 「2.71 「101 『2301 比較例1 (A)-4 (B)-l (C)-l (C)-2 (S)-l _ _ [2.71 [101 [2301 比較例2 ㈧-5 (B)-l (C)-l (C)-2 (S)-l [1001 Γ2-71 [101 『2301 實施例4 (A)-6 (B)-l (C)-3 (S)-2 riooi 「521 Γ4.61 Γ3071 實施例5 (A)-7 (B)-l (C)-3 (S)-2 [1001 [521 『4.61 Γ3071 比較例3 (A)-4 (B)-l (C)-3 (S)-2 [1001 [521 F4.61 [3071 -31 - 201100954 於表1中,各簡稱各如下所示,刮號內之數値爲配合 量(質量份)。 (A) -1:甲基丙烯酸環氧丙酯:甲基丙烯酸:甲基 丙烯酸3,4-環氧基環己基甲酯=60 : 20 : 20 (質量比)之 樹脂(質量平均分子量1 3 000 ) (A) _2··甲基丙烯酸環氧丙酯:甲基丙烯酸:甲基 丙烯酸2,3-環氧基環戊基甲酯=60 ·· 20 : 20 (質量比)之 樹脂(質量平均分子量1 5000 ) (A) -3:甲基丙烯酸環氧丙酯:甲基丙烯酸:甲基 丙烯酸三環癸酯=72: 18: 1〇(質量比)之樹脂(質量平 均分子量1 4000 ) (A) -4:甲基丙烯酸環氧丙酯:甲基丙烯酸40: 20 (質量比)之樹脂(質量平均分子量1 5000 ) (A) -5:甲基丙烯酸環氧丙酯:甲基丙烯酸:甲基 丙烯酸異丁酯=72 : 181 1〇(質量比)之樹脂(質量平均 分子量15000) (A) -6:甲基丙嫌酸環氧丙酯:甲基丙烯酸:甲基 丙烯酸三環癸酯=71: 20: 9(質量比)之樹脂(質量平均 分子量1 2800 ) (A) -7:甲基丙嫌酸環氧丙酯··甲基丙烯酸:甲基 丙烯酸3,4-環氧基環己基甲酯:甲基丙烯酸三環癸酯 = 3 5.5 : 20 : 3 5_5 : 9(質量比)之樹脂(質量平均分子量 11000) (B) -1:六丙稀酸二季戊四醇酯(DPHA) -32- 201100954 (C ) -1 ·· 2-甲基-1- ( 4-甲基硫代苯基)_2_嗎啉基丙 院-1-酮(千葉特殊化學公司製「IRGACURE 907」) (C) _2: 2 -苯甲基-2-二甲基胺基嗎啉基苯基 )-丁酮-1(千葉特殊化學公司製「IRGACURE 369」) (〇)-3:乙酮,1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]、1-(〇-乙醯基肟)(千葉特殊化學公司製 「IRGACURE OXE02」) 0 (S)-1:PGMEA/二乙二醇甲基乙醚/3_甲氧基丙酸 甲酯42/22/56 (質量比)之混合溶劑 (S) -2: PGMEA/二乙二醇甲基乙醚=50/50 (質量比 )之混合溶劑 &lt;評估&gt; [顯影性評估] 在6吋之玻璃基板(Dow Corning公司製、1 73 7玻璃 〇 )上,塗佈以前述各實施例及比較例所調製的感光性樹脂 組成物後,在1 00 °c下進行乾燥2分鐘,製得具有膜厚爲 3 -8 &quot; m之感光性樹脂層。其次,在該感光性樹脂層上經 由負型光罩進行選擇性照射紫外線,使用0.5%之氫氧化 四甲銨水溶液作爲顯影液,藉由在23。(:下進行攪拌顯影, 形成點狀圖案。其次,藉由計測至未曝光部被完全溶解的 時間(BP :斷點),評估顯影性。結果如表2所示。 [密接性評估] -33- 201100954 與前述「顯影性評估」相同地’形成點狀圖案。顯影 時間係以前述之斷點(BP )爲基準,爲bPx1 5。然後, 以純水洗淨’且對所形成的圖案而言,在1 〇(rc下實施後 烘烤處理10分鐘,再於220°C下實施後烘烤處理4〇分鐘 ,形成點狀圖案。 然後,以使光罩尺寸再現時必要的最適曝光量(EOP )、及曝光量50m J/cm2,調查可顯影的點狀圖案尺寸, 進行密接性之評估。結果如表2所示。而且,表2中之「 無」係指顯影後、即使爲20μηι之圖案尺寸,仍沒有被密 接而產生圖案被剝離的情形。 [形狀評估] 曝光量爲前述Ε Ο Ρ ’與前述「密接性評估」相同地形 成直徑1 5 &quot; m之點狀圖案。然後,以s Ε Μ觀察圖案形狀 ,以下基準進行評估。結果如表2所示。 〇:表面沒有粗糙的良好形狀。 △:表面有粗糙情形。 χ :表面及側面之凹凸大。可見溶出殘渣。 [比介電常數評估] 曝光量爲前述ΕΟΡ,與前述「密接性評估」相同地形 成直徑15//m之點狀圖案。然後,使用介電常數測定裝 置SSM495 (日本SSM股份有限公司製),測定點狀圖案 之膜厚方向對真空之比介電常數。結果如表2所示。 -34- 201100954 [表2](a4-8) -20- 201100954 In the above formula, R21 represents a hydrogen atom or a methyl group, a R single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 6 carbon atoms, R23 scorpion or a carbon number of 1 to 5 alkyl. R22 is a single bond, a linear chain or a branched group, for example, a methylene group, an ethyl group, a propyl group, a tetramethylene group, a benzyl group, a pentamethylene group or a hexamethylene group. The ratio of the above-mentioned constituent unit (al) in R23 such as a methyl group or an anthracene (A2) resin is preferably 255% by mass, more preferably 5 to 25% by mass. Further, the above-mentioned constituent unit (a2) in the (A2) resin is 71% by mass or more, preferably 71 to 95% by mass, more preferably 90% by mass. Further, the above-mentioned constituent unit (a4) in the (A2) resin is preferably from 1 to 25% by mass, more preferably from 3 to 20% by mass, most preferably from 5% by mass. By making the ratio of the constituent unit (a4) to the above-mentioned range, the developability is appropriate, and the ratio of the cured product can be lowered to the dielectric constant Q. Further, the other constituent sheets in the (A2) resin are 0 to 10 by mass. % is more preferably 0 to 5% by mass. When the ratio of each constituent unit is within the above range, the developability of the resin composition is appropriate, and the strength of the cured product and the adhesion to the substrate can be improved. (A2) The average molecular weight of the resin, preferably 2 00 00 to 00 00, more preferably 5,000 to 30,000 00. By the above range, the film forming ability of the photosensitive resin composition and the tendency to balance after exposure are obtained. 22 series means (representing hydrogenogen: chain-like alkylene ethyl ethyl ketone is preferably used in a ratio of 3 to 75 to a ratio of ~15 by mass, countable. The ratio of the position makes the photosensitive shape or Breaking 50000 is easier to develop - 21 - 201100954 (A2) Resin can be produced by a conventional free radical polymerization method, and each compound derived from each constituent unit, and a conventional polymerization initiator can be used. After being dissolved in a polymerization solvent, the mixture is heated and stirred. The content of the resin (A2) is preferably 40 to 230% by mass, more preferably 60 to 5% by mass based on the content of the photopolymerizable single). , with 70 to 215 mass% best. Further, the component (A) may contain other conventional alkali-soluble resins in addition to the (A1) resin or the (Α2) tree. In this case, it is preferable that the ratio of the specific mass of the constituent unit having an epoxy group is equal to or higher than the constituent unit of the epoxy group. Further, the content of the component (A) is 40% with respect to the solid content of the photosensitive resin. ~85 mass% is more preferably 45 to 75. Further, in the above range, developability can be easily obtained. <Photopolymerizable monomer (B) &gt; Photosensitive resin composition of the present invention The photopolymerization oxime contained in the substance (hereinafter also referred to as "(B) component") is preferably a monomer having an ethyl group. The monomeric functional monomer having a ethylenically unsaturated group and a polyfunctional monomer. Monofunctional monomers such as (meth) acrylamide, hydroxymethyl (acrylamide, methoxymethyl (meth) acrylamide, ethoxymethyl) acrylamide 'propoxymethyl ( Methyl) acrylamide, . In other words, the self-made system: the body (B 220 lipid, outside), the composition [J to 5 0 composition of the mass% of the balance: body (B ene is not, is monomethyl) methyl (butoxy-22- 201100954 methoxymethyl (meth) acrylamide, N-methylol (meth) acrylamide, N-hydroxymethyl (meth) acrylamide, (meth) acrylate, fumaric acid, Maleic acid, maleic anhydride, itaconic acid, itaconic anhydride, citraconic acid, citraconic anhydride, crotonic acid, 2-propenylamine-2-methylpropanesulfonic acid, 3-butylacrylamide Sulfonic acid, methyl (meth)acrylate, ethyl (meth)acrylate, butyl (meth)acrylate, 2-ethylhexyl (meth)acrylate, cyclohexyl (meth)acrylate, (A) 2-hydroxyethyl acrylate, 2-hydroxypropyl (meth) acrylate, 2-hydroxybutyl (meth) acrylate, 2-phenoxy-2-hydroxypropyl (meth) acrylate, 2 -(Methyl)propenyloxy-2-hydroxypropyl phthalate, glycerol mono(meth)acrylate, tetrahydrofurfuryl (meth)acrylate, dimethyl (meth)acrylate Ester, glycidyl (meth)acrylate, 2,2,2-trifluoroethyl (meth)acrylate, 2,2,3,3-tetrafluoropropyl (meth)acrylate, phthalic acid The semi-functional (meth) acrylate, etc. These monofunctional monomers may be used alone or in combination of two or more. Q Further, a polyfunctional monomer such as ethylene glycol di(meth)acrylate 'di(methyl) Diethylene glycol acrylate, tetraethylene glycol di(meth)acrylate, propylene glycol di(meth)acrylate, polypropylene glycol di(meth)acrylate, butylene glycol di(meth)acrylate, Pentaerythritol di(meth)acrylate, 1,6-hexanediol di(meth)acrylate, trimethylolpropionate tris(methyl)propanoate, di(methyl)propyl citrate Glycerol vinegar, pentaerythritol triacrylate, pentaerythritol tetraacrylate, dipentaerythritol pentaacrylate, dipentaerythritol hexaacrylate, pentaerythritol di(meth)acrylate, pentaerythritol tri(meth)acrylate, tetra(methyl) -23- 201100954 Pentaerythritol Acrylate, Penta(meth)acrylate II Pentaerythritol ester, dipentaerythritol hexa(meth)acrylate, 2,2-bis(4-(methyl)propenyloxydiethoxyphenyl)propane, 2,2-bis(4-(methyl) Propylene decyloxypolyethoxyphenyl)propane, 2-hydroxy-3-(meth)acryloxypropyl (meth) acrylate, ethylene glycol diglycidyl di(meth) acrylate Ester, diethylene glycol diglycidyl ether di(meth) acrylate, diglycidyl phthalate di(meth) acrylate, glycerol triacrylate, glycerol polyglycidyl ether Poly(meth)acrylate, urethane (meth) acrylate (ie, methyl phenyl diisocyanate), trimethyl hexamethylene diisocyanate and hexamethylene diisocyanate, etc. _Hydroxyethyl (meth) acrylate reactant, methylene bis(meth) acrylamide, (meth) acrylamide methyl ether, polyol and N-methylol (meth) propylene A polyfunctional monomer such as a condensate of guanamine or a tripropylene acetal or the like. These polyfunctional monomers can be used singly or in combination of two or more kinds. In the monomer having an ethylenically unsaturated group, the "adhesiveness of the photosensitive resin composition to the substrate is improved." The trifunctional or higher polyfunctional monomer is used for the breaking strength of the photosensitive resin composition after curing. More preferably, a polyfunctional monomer having 6 or more functions is more preferable. The content of the component (B) is preferably 5 to 50% by mass, more preferably 10 to 40% by mass, based on the solid content of the photosensitive resin composition. By being within the above range, sensitivity can be easily obtained. The tendency to balance the developability and resolution. &lt;Photopolymerization Initiator (C) &gt; -24- 201100954 The photopolymerization initiator (c) (hereinafter also referred to as "(c) component)) contained in the photosensitive resin composition of the present invention is not particularly As a limitation, a conventional photopolymerization initiator can be used. Specifically, a photopolymerization initiator such as 1-hydroxycyclohexyl benzophenone, 2-hydroxy-2-methyl-1-phenylpropan-1-one, 1-[4_(2-propenylethoxy) Phenyl]-2-hydroxy-2-methyl-1-propan-1-one, 1-(4-isopropylphenyl)-2-hydroxy-2-methylpropan-1-one, 1-( 4-dodecylphenyl)-2-hydroxy- 2-0 methylpropan-1-one, 2,2-dimethoxy-1,2-diphenylethane-i-ketone, double 4-Dimethylaminophenyl)one, 2-methyl-1-[4-(methylthio)phenyl]-2-morpholinylpropan-1-one, 2-benzyl-2 -Dimethylamino-indole-(4.morpholinylphenyl)-butan-1-one, ethyl ketone, 1-[9-ethyl-6-(2-methylbenzhydryl)- 9H-carbazol-3-yl], 1-(anthracene-ethenyl), 2,4,6-trimethylbenzimidyldiphenyl oxide scale, 4-benzylidene- 4'- Methyl dimethyl sulfide, 4-dimethylaminobenzoic acid, methyl 4-dimethylaminobenzoate, ethyl 4-dimethylaminobenzoate, 4-dimethylaminobenzene Butyl formate, 4-dimethylamino-2-ethylhexylbenzoic acid, 4-dimethylamino-2-isopentylbenzoic acid, benzyl-/3-methoxyethylethyl Awakening, benzyldimethyl Fermentation: I-phenyl-1,2-propanedione-2-(o-ethoxycarbonyl) hydrazine, methyl benzoyl benzoate, 2,4-diethyl thioxanthone, 2 _Chloroxynone, 2,4-dimethylhydrazine, 1-chloro-4-propoxysalazine, hydrazine, 2-cyanopyrene, 2,4-diethyl thioxanthene , 2-methylthioxanthene, 2_isopropylthioxanthene, 2-ethyloxime' octamethylguanidine, 1,2-benzopyrene, 2,3-diphenylanthracene, occasional Biisobutyronitrile, benzammonium peroxide, cumene peroxide '2-mercaptobenzimidazole, 2-mercaptobenzoxazole, 2-mercaptobenzothiazole, 2-(anthracene-chlorobenzene) 25- 201100954 base)-4,5-bis(m-methoxyphenyl)-imidazolyl dimer, benzophenone, 2-benzoic benzophenone, p,p'-bisdimethyl Aminobenzophenone, 4,4'-bisdiethylaminobenzophenone, 4,4'-diphenyl ketone, 3,3-dimethyl-4-methoxy Benzophenone, benzyl, benzoin, benzoin methyl ether, benzoin ether, benzoin isopropyl ether, benzoin n-butyl ether, benzoin isobutyl ether, benzoin butyl ether, phenyl b Ketone, 2,2-diethoxyacetophenone, p-dimethylacetophenone, P -dimethylaminopropiophenone, acetophenone dichloride, acetophenone trichloride, P-tert-butylacetophenone, p-dimethylaminoacetophenone, p-third Butyl trimethyl acetophenone, p-tert 3-butyl acetophenone, α,α-dichloro-4-phenoxyacetophenone, thioxanthone, 2-methylthioxanthone , 2-isopropylthioxanthone, dibenzocycloheptanone, pentyl-4-dimethylaminobenzoate, 9-phenyl acridine, 1, 7-bis-(9-acridine Heptane, 1,5-bis(9-acridinyl)pentane, 1,3-bis-(9-acridinyl)propane, ρ-methoxytriazine, 2,4,6-para (methyl chloride)-s-triazine, 2-methyl-4,6-bis(methyl chloride)-s-triazine, 2-[2-(5-methylfuran-2- Benzene]ethylidene]-4,6-bis(methyl chloride)-s-triazine, 2-[2-(furan-2-yl)ethylidene]-4,6-bis(trichloro) Methyl)-s-triazine, 2-[2-(4-diethylamino-2-methylphenyl)ethylidene]-4,6-bis(methyl chloride)-3 -triazine, 2-(3,4-dimethoxyphenyl)ethylidene]-4,6-bis(methyl chloride)-s-triazine, 2-(4-methoxybenzene Base)-4,6-bis(methyl chloride)-s-triazine, 2-(4-ethoxyphene) Alkenyl)-4,6-bis(methyl chloride)-s-triazine, 2-(4-n-butoxyphenyl)-4,6-bis(methyl chloride)-s- Triazine, 2,4-bis-trichloromethyl-6-(3-bromo-4-methoxy)phenyl-s-triazine, 2,4-bis-trichloromethyl-6- (2-bromo-4-methoxy)phenyl-s-triazine, 2,4-bis-tri-26-201100954 Chloromethyl-6-(3-bromo-4-methoxy)benzene Dilyl phenyl-s_trisyl, 2,4-bis-trichloromethyl-6-(2-bromo-4(methoxy)styrylphenyl-s-triazine, and the like. Among them, the use of a photopolymerization initiator is preferable in terms of sensitivity. The photopolymerization initiator may be used singly or in combination of two or more kinds, and the content of the cerium (C) component is preferably from 0.5 to 30% by mass, preferably from 1 to 20% by mass based on the solid content of the photosensitive resin composition. % is better. In the above range, sufficient heat resistance and chemical resistance can be obtained, and the coating film forming ability can be improved to suppress the curing failure. Further, in the component (C), a photoinitiator may be combined. Photoinitiating aids such as triethanolamine, methyldiethanolamine, triisopropanolamine, methyl 4-dimethylaminobenzoate, ethyl 4-dimethylaminobenzoate, 4-dimethylamino Isoamyl ester, 2-ethylhexyl 4-dimethylaminobenzoate, 2-dimethylaminoethyl benzoate 'N,N-dimethyl-p-toluidine, 4,4'-double ( Dimethylamino)benzophenone, 9,10-dimethoxyanthracene, 2-ethyl-9,10-dimethyloxy oxime, 9,10-diethoxy onion, 2-B Base-9,10-diethoxyanthracene, and the like. These photoinitiating aids may be used singly or in combination of two or more kinds. &lt;Organic solvent (S) &gt; The photosensitive resin composition of the present invention preferably contains an organic solvent (S) (hereinafter also referred to as "(S) component") in order to improve coatability and adjust viscosity. Specifically, an organic solvent such as ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol mono-n-propyl ether, ethylene glycol mono-n-butyl ether, diethylene glycol monomethyl ether-27-201100954, two Glycol monoethyl ether, diethylene glycol mono-n-propyl ether, diethylene glycol mono-n-butyl ether, triethylene glycol monomethyl ether, triethylene glycol monoethyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol single positive (poly)alkane such as propyl ether, propylene glycol mono-n-butyl ether, dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, dipropylene glycol mono-n-propyl ether, dipropylene glycol mono-n-butyl ether, tripropylene glycol monomethyl ether, tripropylene glycol monoethyl ether Glycol monoalkyl ethers; ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether acetate, diethylene glycol monomethyl ether acetate, diethylene glycol monoethyl ether acetate, propylene glycol monomethyl (poly)alkylene glycol monoalkyl ether acetates such as ether acetate (PGMEA), propylene glycol monoethyl ether acetate; diethylene glycol dimethyl ether, diethylene glycol methyl ether, diethylene glycol Other ethers such as diethyl ether and tetrahydrofuran; ketones such as methyl ethyl ketone, cyclohexanone, 2-heptanone and 3-heptanone; 2-hydroxypropyl Ethyl lactate such as methyl ester or ethyl 2-hydroxypropionate; ethyl 2-hydroxy-2-methylpropionate, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, Methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, ethyl ethoxyacetate, ethyl hydroxyacetate, methyl 2-hydroxy-3-methylbutanoate, 3-methoxy Butyl acetate, 3-methyl-3-methoxybutyl acetate, 3-methyl-3-methoxybutyl propionate, ethyl acetate, n-propyl acetate, isopropyl acetate Ester, n-butyl acetate, isobutyl acetate, n-amyl formate, isoamyl acetate, n-butyl propionate, ethyl butyrate, n-propyl butyrate, isopropyl butyrate, n-butyl butyrate , other esters such as methyl pyruvate, ethyl pyruvate, n-propyl pyruvate, methyl acetoxyacetate, ethyl acetoacetate, ethyl 2-carbonylbutyrate; toluene, xylene, etc. Aromatic hydrocarbons; amides such as N-methylpyrrolidone, hydrazine, hydrazine-dimethylformamide, N,N-dimethylacetamide, and the like. Among these, alkanediol monoalkyl ethers, alkylene glycol monoalkyl ether acetates, -28-201100954, other ethers, alkyl lactates, and the other esters described above are preferably used. The diol monoalkyl ether acetates, the other ethers described above, and the other esters described above are more preferred. These solvents may be used singly or in combination of two or more kinds. The content of the component (S) is not particularly limited, and the concentration which can be applied to the substrate or the like is appropriately set depending on the thickness of the coating. The viscosity of the photosensitive resin composition is preferably 5 to 500 cp, more preferably 10 to 50 cp, and most preferably 20 to 30 cp. Further, the solid content concentration is preferably 5 to 100% by mass 0, more preferably 20 to 50% by mass. &lt;Other components&gt; The photosensitive resin composition of the present invention may contain an additive such as an surfactant, an adhesion improver, a thermal polymerization inhibitor, or an antifoaming agent as needed. Any one of the additives can be used by a person skilled in the art. The surfactant is a compound such as an anion, a cation or a nonionic system, and an adhesion improving agent such as a conventional decane coupling agent, a thermal polymerization inhibitor such as hydroquinone or hydroquinone monoethyl ether, and an antifoaming agent such as a hydrazine. Fluorine compounds and the like. &lt;Preparation method of photosensitive resin composition&gt; The photosensitive resin composition of the present invention can be mixed (dispersed and kneaded) by a mixer such as three roll milling, ball milling, sanding, etc., depending on the It is prepared by filtering with a filter such as a membrane filter of 5 μm. &lt;&lt;Liquid Crystal Panel&gt;&gt; -29-201100954 The liquid crystal panel of the present invention has a spacer formed of a photosensitive resin composition. The point other than the spacer is the same as that of the general liquid crystal panel, and only the method of forming the spacer will be described below. First, on a substrate on which a spacer is formed, a contact copy type coating device or a rotator (rotary coating device) using a roll coater, a reversible coater, a bar coater, or the like, a curtain flow coating In the non-contact type coating apparatus such as a cloth, the photosensitive resin composition of the present invention is applied and dried, and a solvent is removed to form a photosensitive resin layer. Next, the photosensitive resin layer is irradiated with an active energy ray such as ultraviolet ray or excimer laser light through a negative mask to perform partial exposure processing. When exposed, a high-pressure mercury lamp, an ultra-high pressure mercury lamp, a xenon lamp, a carbon arc lamp, or the like can be used to emit ultraviolet light. The amount of exposure may also differ depending on the composition of the photosensitive resin composition, and is preferably, for example, about 50 to 600 mJ/cm2. Then, the photosensitive resin layer after the exposure is developed as a developing solution to form a spacer. The developing method is not particularly limited, and a dipping method, a spraying method, or the like can be used. Specific examples of the developing solution include organic ones such as monoethanolamine, diethanolamine, and triethanolamine, or aqueous solutions of sodium hydroxide, potassium hydroxide, sodium carbonate, aqueous ammonia, and a quaternary ammonium salt. Since the photosensitive resin composition of the present invention has moderate developability, development can be appropriately performed. Next, a post-baking treatment is performed on the spacer after development to be heat-hardened. The temperature of the post-baking treatment is preferably 150 to 250 °C. The spacer formed by using the photosensitive resin composition of the present invention has high breaking strength and good shape or adhesion to a substrate. Further, since the specific dielectric constant is low, it is effective when a spacer is formed on the array substrate. -30- 201100954 [Embodiment] The present invention will be described in more detail by way of examples, but the invention is not limited by the embodiments. [Examples] &lt;Examples 1 to 5, Comparative Examples 1 to 3 &gt; Each component shown in the following Table 1 was mixed and dissolved in a solvent to prepare a photosensitive resin composition. [Table 1] (A) (B) (C) (5) Example 1 (A)-l (B)-l (C)-l (C)-2 (S)-1 Γ1001 Γ1001 Γ2.71 n〇i Example 2 (A)-2 (B)-l (C)-l (C)-2 (S)-l Γ1001 _ P.71 『101 [2301 Example 3 (A)-3 (B) )-l (C)-l (C)-2 (S)-l _ "1001 "2.71 "101 『2301 Comparative Example 1 (A)-4 (B)-l (C)-l (C)-2 (S)-l _ _ [2.71 [101 [2301 Comparative Example 2 (8)-5 (B)-l (C)-l (C)-2 (S)-l [1001 Γ2-71 [101 『2301 Example 4 (A)-6 (B)-l (C)-3 (S)-2 riooi "521 Γ4.61 Γ3071 Example 5 (A)-7 (B)-l (C)-3 (S)- 2 [1001 [521 『4.61 Γ3071 Comparative Example 3 (A)-4 (B)-l (C)-3 (S)-2 [1001 [521 F4.61 [3071 -31 - 201100954 in Table 1, each The abbreviations are as follows, and the number in the scratch is the compounding amount (parts by mass). (A) -1: Glycidyl methacrylate: methacrylic acid: 3,4-epoxycyclohexyl methacrylate Methyl ester = 60 : 20 : 20 (mass ratio) resin (mass average molecular weight 1 3 000 ) (A) _2 · · Glycidyl methacrylate: methacrylic acid: 2,3-epoxy methacrylate Cyclopentyl methyl ester = 60 · · 20 : 20 (mass ratio) of resin Amount average molecular weight 1 5000 ) (A) -3: Glycidyl methacrylate: methacrylic acid: tricyclodecyl methacrylate = 72: 18: 1 〇 (mass ratio) of resin (mass average molecular weight 1 4000 (A) -4: Glycidyl methacrylate: 40: 20 (mass ratio) of methacrylic resin (mass average molecular weight 1 5000) (A) -5: Glycidyl methacrylate: methyl Acrylic acid: isobutyl methacrylate = 72: 181 1 〇 (mass ratio) resin (mass average molecular weight 15000) (A) -6: methyl propylene succinic acid propyl acrylate: methacrylic acid: methacrylic acid Cyclodecyl ester = 71: 20: 9 (mass ratio) resin (mass average molecular weight 1 2800 ) (A) -7: methyl propylene succinic acid propyl acrylate · methacrylic acid: methacrylic acid 3,4- Epoxycyclohexylmethyl ester: tricyclodecyl methacrylate = 3 5.5 : 20 : 3 5_5 : 9 (mass ratio) resin (mass average molecular weight 11000) (B) -1: dipentaerythritol hexaacrylate (DPHA) -32- 201100954 (C ) -1 ·· 2-Methyl-1-(4-methylthiophenyl)_2_morpholinylpropan-1-one (IRGACURE, Chiba Special Chemical Co., Ltd. 907") (C) _2: 2 - Methyl-2-dimethylaminomorpholinophenyl)-butanone-1 ("IRGACURE 369" manufactured by Chiba Specialty Chemical Co., Ltd.) (〇)-3: Ethyl ketone, 1-[9-ethyl-6 -(2-Methylbenzylidene)-9H-carbazol-3-yl], 1-(anthracene-ethenyl) (IRGACURE OXE02, manufactured by Chiba Specialty Chemicals Co., Ltd.) 0 (S)-1: PGMEA/diethylene glycol methyl ether/3_methoxypropionic acid methyl ester 42/22/56 (mass ratio) mixed solvent (S) -2: PGMEA/diethylene glycol methyl ether = 50/50 (mass ratio) of the mixed solvent &lt;Evaluation&gt; [Development evaluation] On a 6-inch glass substrate (manufactured by Dow Corning Co., Ltd., 173 7 glass crucible), the coating was prepared by the above respective examples and comparative examples. After the photosensitive resin composition was dried at 100 ° C for 2 minutes, a photosensitive resin layer having a film thickness of 3 -8 &quot; m was obtained. Next, ultraviolet light was selectively irradiated onto the photosensitive resin layer by a negative mask, and a 0.5% aqueous solution of tetramethylammonium hydroxide was used as a developing solution, at 2321. (: Agitated and developed to form a dot pattern. Next, the developability was evaluated by measuring the time until the unexposed portion was completely dissolved (BP: break point). The results are shown in Table 2. [Adhesion evaluation] - 33-201100954 A dot pattern is formed in the same manner as the "developability evaluation" described above. The development time is bPx1 5 based on the above-described breakpoint (BP). Then, it is washed with pure water and the formed pattern is formed. For example, the post-baking treatment was carried out for 1 minute at 1 〇 (rc for 10 minutes, and then post-baking treatment was carried out at 220 ° C for 4 minutes to form a dot pattern. Then, the optimum exposure necessary for the size reproduction of the mask was formed. The amount (EOP) and the exposure amount were 50 m J/cm 2 , and the dot pattern size which can be developed was examined, and the adhesion was evaluated. The results are shown in Table 2. Moreover, "None" in Table 2 means that even after development, even It is a case where the pattern size of 20 μm is still not adhered and the pattern is peeled off. [Shape evaluation] The exposure amount is the aforementioned Ε Ο Ρ 'The dot pattern of the diameter of 1 5 &quot; m is formed in the same manner as the above-mentioned "adhesion evaluation" Then, observe the shape of the pattern with s Ε Μ The results are shown in Table 2. The results are shown in Table 2. 〇: The surface has no rough and good shape. △: The surface has a rough condition. χ: The surface and the side surface have large irregularities. The dissolution residue can be seen. [Specific dielectric constant evaluation] Exposure amount In the same manner as the above-mentioned "adhesive evaluation", a dot pattern having a diameter of 15/m was formed. Then, a dielectric constant measuring device SSM495 (manufactured by SSM Co., Ltd., Japan) was used to measure the film thickness direction of the dot pattern. The specific dielectric constant for vacuum. The results are shown in Table 2. -34- 201100954 [Table 2]

BP 密接性 (50mJ/cm2) 密接性 (EOP) 形狀 比介電常數 實施例1 20-3Osec 9μιη 6 μιη 〇 3.9 實施例2 15-25sec 1 1 μπι 7 μηι 〇 4.0 實施例3 15sec 1 5 μηι 7 μπι Δ 4.1 比較例1 &lt;10sec m 8 μιη X 4.2 比較例2 &lt;10sec irrr 8 μπι X 4.2 實施例4 15-20sec 1 5 μηα 7 μιη Δ 7 實施例5 24sec 9 μιη 6 μηι 〇 比較例3 &lt;10sec Arrr. 無 1 0 μιη XBP adhesion (50 mJ/cm2) Adhesion (EOP) Shape specific dielectric constant Example 1 20-3Osec 9μηη 6 μιη 〇3.9 Example 2 15-25sec 1 1 μπι 7 μηι 〇 4.0 Example 3 15sec 1 5 μηι 7 Μπι Δ 4.1 Comparative Example 1 &lt;10 sec m 8 μηη X 4.2 Comparative Example 2 &lt;10 sec irrr 8 μπι X 4.2 Example 4 15-20 sec 1 5 μηα 7 μηη Δ 7 Example 5 24 sec 9 μηη 6 μηι 〇 Comparative Example 3 &lt;10sec Arrr. None 1 0 μιη X

由表2可知,使用具有由含有不具脂環式基之環氧基 的不飽和化合物所衍生的構成單位、及含有脂環式環氧基 之不飽和化合物或含有脂環式基之不飽和化合物所衍生的 構成單位之樹脂的各實施例,具有斷點爲1 5〜3 0秒之適 度顯影性。而且,可以5〇mJ/cm2之曝光量,使9〜15ym 之點狀圖案予以顯影等’密接性優異,圖案形狀亦佳。而 〇 且’有關實施例1〜3,比介電常數較比較例1、2更低。 而且,實施例4、5之比介電常數,與比較例3相比時, 爲同等以下之低値。 對此而言’使用不具脂環式基之樹脂的各比較例,斷 點未達1 0秒之短時間,顯影耐性惡化。而且,無法以 5 0mJ/cm2之曝光量形成圖案,且密接性低。此外,以 EOP予以曝光時,圖案形狀不佳,且確認比較例3中因溶 出殘渣而導致形狀不佳的情形。 -35-As is clear from Table 2, a constituent unit derived from an unsaturated compound containing an epoxy group having no alicyclic group, and an unsaturated compound containing an alicyclic epoxy group or an unsaturated compound containing an alicyclic group are used. Each of the examples of the resin of the constituent unit derived has a moderate developability with a breakpoint of 15 to 30 seconds. Further, the dot pattern of 9 to 15 μm can be developed by an exposure amount of 5 〇 mJ/cm 2 , and the adhesion is excellent, and the pattern shape is also good. Further, with respect to Examples 1 to 3, the specific dielectric constant was lower than Comparative Examples 1 and 2. Further, the specific dielectric constants of Examples 4 and 5 were less than or equal to those of Comparative Example 3. On the other hand, in the comparative examples using the resin having no alicyclic group, the breakage point was less than 10 seconds, and the development resistance was deteriorated. Further, the pattern cannot be formed with an exposure amount of 50 mJ/cm 2 and the adhesion is low. Further, when exposed by EOP, the pattern shape was not good, and the case where the shape was poor due to the elution residue in Comparative Example 3 was confirmed. -35-

Claims (1)

201100954 七、申請專利範圍: 1 · 一種感光性樹脂組成物,其係含有鹼可溶性樹脂 (A )、光聚合性單體(B)及光聚合引發劑(C)之感光 性樹脂組成物,其特徵爲 前述鹼可溶性樹脂(A )爲具有由不飽和羧酸所衍生 的構成單位(al)、由含有不具脂環式基之環氧基的不飽 和化合物所衍生的構成單位(a2 )、及由含有脂環式環氧 基之不飽和化合物所衍生的構成單位(a3 ),且前述構成 單位(a2 )之比例與前述構成單位(a3 )之比例的合計量 爲7 1質量%以上。 2. —種感光性樹脂組成物’其係含有鹼可溶性樹脂 (A )、光聚合性單體(B)及光聚合引發劑(C)之感光 性樹脂組成物,其特徵爲 前述鹼可溶性樹脂(A)爲具有由不飽和羧酸所衍生 的構成單位(al)、由含有不具脂環式基之環氧基的不飽 和化合物所衍生的構成單位(a2 )、及由含有脂環式基之 不飽和化合物所衍生的構成單位(a4 )’且前述構成單位 (a2 )之比例爲71質量%以上。 3 .如申請專利範圍第1項之感光性樹脂組成物,其 中前述構成單位(a3)之比例爲〜6〇質量%。 4.如申請專利範圍第2項之感光性樹脂組成物,其 中前述構成單位(a4)之比例爲1〜25質量%。 5 .如申請專利範圍第1〜4項中任一項之感光性樹脂 組成物,其係使用於形成液晶面板之間隔物(spacer )。 -36- 201100954 6. —種液晶面板,其特徵爲具有由申請專利範圍第 1至5項中任一項之感光性樹脂組成物所形成的間隔物。201100954 VII. Patent application scope: 1 . A photosensitive resin composition containing a photosensitive resin composition of an alkali-soluble resin (A), a photopolymerizable monomer (B), and a photopolymerization initiator (C), The alkali-soluble resin (A) is characterized by having a constituent unit (al) derived from an unsaturated carboxylic acid, a constituent unit (a2) derived from an unsaturated compound having an epoxy group having no alicyclic group, and The constituent unit (a3) derived from the unsaturated compound containing an alicyclic epoxy group, and the total ratio of the ratio of the constituent unit (a2) to the constituent unit (a3) is 71% by mass or more. 2. A photosensitive resin composition comprising a photosensitive resin composition containing an alkali-soluble resin (A), a photopolymerizable monomer (B), and a photopolymerization initiator (C), which is characterized by the alkali-soluble resin (A) is a structural unit (al) derived from an unsaturated carboxylic acid, a constituent unit (a2) derived from an unsaturated compound containing an epoxy group having no alicyclic group, and an alicyclic group The constituent unit (a4)' derived from the unsaturated compound and the ratio of the above-mentioned constituent unit (a2) are 71% by mass or more. 3. The photosensitive resin composition of claim 1, wherein the ratio of the constituent unit (a3) is ~6% by mass. 4. The photosensitive resin composition of claim 2, wherein the ratio of the constituent unit (a4) is 1 to 25% by mass. The photosensitive resin composition according to any one of claims 1 to 4, which is used for forming a spacer for a liquid crystal panel. A liquid crystal panel characterized by having a spacer formed of the photosensitive resin composition according to any one of claims 1 to 5. -37- 201100954 四、指定代表圖: (一) 、本案指定代表圖為:無 (二) 、本代表圖之元件符號簡單說明:無-37- 201100954 IV. Designated representative map: (1) The designated representative figure of this case is: None (2), the symbol of the representative figure is simple: no 〇 201100954 五 本案若有化學式時,請揭示最能顯示發明特徵的化學 式:無〇 201100954 5. If there is a chemical formula in this case, please reveal the chemical formula that best shows the characteristics of the invention: none
TW099106158A 2009-03-31 2010-03-03 A photosensitive resin composition and a liquid crystal panel TWI480685B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009085713 2009-03-31
JP2009256776A JP5437027B2 (en) 2009-03-31 2009-11-10 Photosensitive resin composition and liquid crystal panel

Publications (2)

Publication Number Publication Date
TW201100954A true TW201100954A (en) 2011-01-01
TWI480685B TWI480685B (en) 2015-04-11

Family

ID=43317785

Family Applications (1)

Application Number Title Priority Date Filing Date
TW099106158A TWI480685B (en) 2009-03-31 2010-03-03 A photosensitive resin composition and a liquid crystal panel

Country Status (2)

Country Link
JP (1) JP5437027B2 (en)
TW (1) TWI480685B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102967994A (en) * 2011-08-30 2013-03-13 住友化学株式会社 Solidified resin composition
CN104570607A (en) * 2013-09-24 2015-04-29 罗门哈斯电子材料韩国有限公司 Negative type photosensitive resin composition of the insulating film and insulating film using the same

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6460836B2 (en) * 2015-02-26 2019-01-30 東京応化工業株式会社 Non-rotating coating composition and resin composition film forming method

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4168443B2 (en) * 2003-07-30 2008-10-22 Jsr株式会社 Radiation-sensitive resin composition, interlayer insulating film and microlens, and production method thereof
JP2007219362A (en) * 2006-02-20 2007-08-30 Toyo Ink Mfg Co Ltd Polymerizable composition, negative resist obtained by using the same and image pattern forming method using the same
JP2008024915A (en) * 2006-06-23 2008-02-07 Jsr Corp Radiation-sensitive resin composition for use in spacer, spacer, and forming method thereof
JP2008052256A (en) * 2006-07-27 2008-03-06 Mitsubishi Chemicals Corp Curable composition, cured object, color filter and liquid crystal display device
JP5045064B2 (en) * 2006-11-02 2012-10-10 Jnc株式会社 Alkali-soluble polymer and positive photosensitive resin composition using the same
JP5083540B2 (en) * 2007-03-20 2012-11-28 Jsr株式会社 Radiation-sensitive protective film forming resin composition, method for forming protective film from the composition, liquid crystal display element, and solid-state imaging element
JP4748324B2 (en) * 2007-03-22 2011-08-17 Jsr株式会社 Radiation-sensitive resin composition, interlayer insulating film, microlens and manufacturing method thereof
JP5207837B2 (en) * 2007-08-02 2013-06-12 富士フイルム株式会社 Curable composition, cured film, method for producing photospacer, substrate for liquid crystal display device and liquid crystal display device
JP5313740B2 (en) * 2009-03-31 2013-10-09 東京応化工業株式会社 Photosensitive resin composition and liquid crystal panel

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102967994A (en) * 2011-08-30 2013-03-13 住友化学株式会社 Solidified resin composition
CN104570607A (en) * 2013-09-24 2015-04-29 罗门哈斯电子材料韩国有限公司 Negative type photosensitive resin composition of the insulating film and insulating film using the same

Also Published As

Publication number Publication date
JP2010256848A (en) 2010-11-11
TWI480685B (en) 2015-04-11
JP5437027B2 (en) 2014-03-12

Similar Documents

Publication Publication Date Title
KR101839397B1 (en) Silane coupling agent, negative-type photosensitive resin composition, curable film and touch panel component
KR101855239B1 (en) Blocked isocyanato group-containing polymer, composition containing polymer, and applications thereof
JP2011039165A (en) Alkali-soluble photocurable composition, cured coating film using the composition and transparent member
JP2003165830A (en) Photopolymerizable unsaturated resin, method for producing the same and alkali-soluble radiation- sensitive resin composition using the same
JP2019511737A (en) Low temperature curable negative photosensitive composition
WO2014192671A1 (en) Photosensitive resin composition, photospacer, protective film for color filters, and protective film or insulating film of touch panel
JP5603634B2 (en) Manufacturing method of resin pattern
JP2003176343A (en) Photopolymerizable unsaturated resin, method for producing the same and alkali-soluble radiation- sensitive resin composition produced by using the resin
KR101717784B1 (en) Photosensitive resin composition and liquid crystal panel
TWI769286B (en) Siloxane resin composition, adhesive using the same, display device, semiconductor device, and lighting device
TW201100954A (en) Photosensitive resin composition and liquid crystal panel
TWI803587B (en) Radiation sensitive composition, cured film and display element
TW201927571A (en) Transfer film, electrode protective film, laminate, capacitive input device, and method for producing touch panel
KR20150011070A (en) A photosensitive resin composition for spacer and a spacer using the same
JP5313740B2 (en) Photosensitive resin composition and liquid crystal panel
TWI765978B (en) Photosensitive siloxane resin composition, cured film, member for touch panel, laminated body, and manufacturing method thereof
JP2003176344A (en) Photopolymerizable unsaturated resin, method for producing the same and alkali-soluble radiation- sensitive resin composition produced by using the resin
TWI591106B (en) A resin composition, a photosensitive resin composition, a spacer, and a display device
JP6737027B2 (en) Photocurable resin composition and color filter having cured film thereof
KR20160071994A (en) Black photosensitive resin composition, black matrix and image display device comprising thereof
JP2009286904A (en) Photosensitive resin composition
TWI621911B (en) Colored photosensitive resin composition, color filter and color liquid crystal display element
JP5637024B2 (en) Photosensitive resin composition and use thereof
JP2023174312A (en) Photosensitive resin composition and method for producing substrate having patterned resin film
JP2023147017A (en) photosensitive composition