CN1122115C - 在玻璃上形成氧化锡涂层的方法 - Google Patents

在玻璃上形成氧化锡涂层的方法 Download PDF

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Publication number
CN1122115C
CN1122115C CN97190763A CN97190763A CN1122115C CN 1122115 C CN1122115 C CN 1122115C CN 97190763 A CN97190763 A CN 97190763A CN 97190763 A CN97190763 A CN 97190763A CN 1122115 C CN1122115 C CN 1122115C
Authority
CN
China
Prior art keywords
glass substrate
tin oxide
reactant mixture
fluorine
hot glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CN97190763A
Other languages
English (en)
Chinese (zh)
Other versions
CN1196760A (zh
Inventor
M·J·索贝兰德
A·C·哈利维尔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pilkington Open Co ltd
Pilkington North America Inc
Original Assignee
Pilkington Open Co ltd
Libbey Owens Ford Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pilkington Open Co ltd, Libbey Owens Ford Co filed Critical Pilkington Open Co ltd
Publication of CN1196760A publication Critical patent/CN1196760A/zh
Application granted granted Critical
Publication of CN1122115C publication Critical patent/CN1122115C/zh
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/407—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C03C17/245—Oxides by deposition from the vapour phase
    • C03C17/2453—Coating containing SnO2
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/401—Oxides containing silicon
    • C23C16/402—Silicon dioxide
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/211—SnO2
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/24—Doped oxides
    • C03C2217/241—Doped oxides with halides
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase
    • C03C2218/152—Deposition methods from the vapour phase by cvd

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Inorganic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Surface Treatment Of Glass (AREA)
  • Chemical Vapour Deposition (AREA)
  • Glass Compositions (AREA)
  • Chemically Coating (AREA)
CN97190763A 1996-05-06 1997-05-06 在玻璃上形成氧化锡涂层的方法 Expired - Lifetime CN1122115C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/642,921 US5698262A (en) 1996-05-06 1996-05-06 Method for forming tin oxide coating on glass
US08/642,921 1996-05-06

Publications (2)

Publication Number Publication Date
CN1196760A CN1196760A (zh) 1998-10-21
CN1122115C true CN1122115C (zh) 2003-09-24

Family

ID=24578594

Family Applications (1)

Application Number Title Priority Date Filing Date
CN97190763A Expired - Lifetime CN1122115C (zh) 1996-05-06 1997-05-06 在玻璃上形成氧化锡涂层的方法

Country Status (13)

Country Link
US (1) US5698262A (enExample)
EP (1) EP0839218B1 (enExample)
JP (1) JP4322314B2 (enExample)
KR (1) KR100577945B1 (enExample)
CN (1) CN1122115C (enExample)
AT (1) ATE211779T1 (enExample)
AU (1) AU2828197A (enExample)
BR (1) BR9702244A (enExample)
CA (1) CA2225961A1 (enExample)
DE (1) DE69709525T2 (enExample)
PL (1) PL185373B1 (enExample)
RU (1) RU2194089C2 (enExample)
WO (1) WO1997042357A1 (enExample)

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JP4322314B2 (ja) 2009-08-26
AU2828197A (en) 1997-11-26
ATE211779T1 (de) 2002-01-15
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CN1196760A (zh) 1998-10-21
RU2194089C2 (ru) 2002-12-10
DE69709525D1 (de) 2002-02-14
BR9702244A (pt) 1999-02-17
CA2225961A1 (en) 1997-11-13
EP0839218A4 (enExample) 1998-06-03
JPH11509895A (ja) 1999-08-31
KR19990028727A (ko) 1999-04-15
MX9800254A (es) 1998-07-31
PL185373B1 (pl) 2003-04-30
EP0839218B1 (en) 2002-01-09
WO1997042357A1 (en) 1997-11-13
US5698262A (en) 1997-12-16
DE69709525T2 (de) 2002-08-29
PL324429A1 (en) 1998-05-25

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