CN1121510C - 用类金刚石碳镀覆刃口的方法 - Google Patents

用类金刚石碳镀覆刃口的方法 Download PDF

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Publication number
CN1121510C
CN1121510C CN98806296A CN98806296A CN1121510C CN 1121510 C CN1121510 C CN 1121510C CN 98806296 A CN98806296 A CN 98806296A CN 98806296 A CN98806296 A CN 98806296A CN 1121510 C CN1121510 C CN 1121510C
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CN
China
Prior art keywords
substrate
product
plasma
film
diamond
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Expired - Fee Related
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CN98806296A
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English (en)
Chinese (zh)
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CN1260843A (zh
Inventor
J·A·霍普伍德
D·L·帕帕斯
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Northeastern University Boston
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Northeastern University Boston
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Publication of CN1260843A publication Critical patent/CN1260843A/zh
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Publication of CN1121510C publication Critical patent/CN1121510C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
    • C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S427/00—Coating processes
    • Y10S427/103—Diamond-like carbon coating, i.e. DLC
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S427/00—Coating processes
    • Y10S427/103—Diamond-like carbon coating, i.e. DLC
    • Y10S427/104—Utilizing low energy electromagnetic radiation, e.g. microwave, radio wave, IR, UV, visible, actinic laser
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S427/00—Coating processes
    • Y10S427/103—Diamond-like carbon coating, i.e. DLC
    • Y10S427/106—Utilizing plasma, e.g. corona, glow discharge, cold plasma

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Pens And Brushes (AREA)
  • Cold Cathode And The Manufacture (AREA)
CN98806296A 1997-06-18 1998-06-11 用类金刚石碳镀覆刃口的方法 Expired - Fee Related CN1121510C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/878,222 1997-06-18
US08/878,222 US6077572A (en) 1997-06-18 1997-06-18 Method of coating edges with diamond-like carbon

Publications (2)

Publication Number Publication Date
CN1260843A CN1260843A (zh) 2000-07-19
CN1121510C true CN1121510C (zh) 2003-09-17

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CN98806296A Expired - Fee Related CN1121510C (zh) 1997-06-18 1998-06-11 用类金刚石碳镀覆刃口的方法

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US (1) US6077572A (enExample)
EP (1) EP0990060B1 (enExample)
JP (1) JP4145361B2 (enExample)
KR (1) KR100586803B1 (enExample)
CN (1) CN1121510C (enExample)
AR (1) AR017505A1 (enExample)
AT (1) ATE234371T1 (enExample)
AU (1) AU736551B2 (enExample)
BR (1) BR9810170A (enExample)
CA (1) CA2290514C (enExample)
CO (1) CO5031272A1 (enExample)
DE (1) DE69812092T2 (enExample)
EG (1) EG21236A (enExample)
ES (1) ES2190084T3 (enExample)
PL (1) PL186562B1 (enExample)
RU (1) RU2205894C2 (enExample)
TR (1) TR199902875T2 (enExample)
TW (1) TW574397B (enExample)
UA (1) UA59401C2 (enExample)
WO (1) WO1998058097A1 (enExample)
ZA (1) ZA985256B (enExample)

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* Cited by examiner, † Cited by third party
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CN100464087C (zh) * 2005-01-20 2009-02-25 通用汽车公司 耐磨组件的制备方法

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CN102057075B (zh) * 2008-06-11 2013-01-02 欧瑞康贸易股份公司(特吕巴赫) 工件托架
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JP5905297B2 (ja) 2012-02-27 2016-04-20 株式会社パイロットコーポレーション 筆記具
JP6234860B2 (ja) 2014-03-25 2017-11-22 株式会社Ｓｃｒｅｅｎホールディングス 成膜装置および成膜方法
US10415904B1 (en) 2015-04-23 2019-09-17 The United States Of America As Represented By The Secretary Of The Army Firing weapons bonded with diamond-like carbon solid and methods for production thereof
CN108085657B (zh) * 2017-12-29 2020-03-17 苏州大学 基于螺旋波等离子体技术制备氮掺杂类金刚石薄膜的方法
CN112044706A (zh) * 2020-08-05 2020-12-08 王华彬 一种涂布刮刀涂层涂敷的工艺

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100464087C (zh) * 2005-01-20 2009-02-25 通用汽车公司 耐磨组件的制备方法

Also Published As

Publication number Publication date
BR9810170A (pt) 2000-08-08
DE69812092T2 (de) 2003-11-20
CA2290514A1 (en) 1998-12-23
US6077572A (en) 2000-06-20
JP4145361B2 (ja) 2008-09-03
EP0990060A1 (en) 2000-04-05
WO1998058097A1 (en) 1998-12-23
EG21236A (en) 2001-03-31
WO1998058097A9 (en) 1999-04-08
PL337485A1 (en) 2000-08-28
AU8069498A (en) 1999-01-04
KR20010013862A (ko) 2001-02-26
CN1260843A (zh) 2000-07-19
KR100586803B1 (ko) 2006-06-07
HK1023791A1 (en) 2000-09-22
CA2290514C (en) 2004-06-01
PL186562B1 (pl) 2004-01-30
AU736551B2 (en) 2001-08-02
UA59401C2 (uk) 2003-09-15
DE69812092D1 (de) 2003-04-17
TW574397B (en) 2004-02-01
EP0990060B1 (en) 2003-03-12
TR199902875T2 (xx) 2000-05-22
ZA985256B (en) 1999-01-06
RU2205894C2 (ru) 2003-06-10
ES2190084T3 (es) 2003-07-16
ATE234371T1 (de) 2003-03-15
CO5031272A1 (es) 2001-04-27
AR017505A1 (es) 2001-09-12
JP2002505716A (ja) 2002-02-19

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