AR017505A1 - METODO PARA CREAR UNA PELICULA DE CARBONO CON ASPECTO DE DIAMANTE EN UN SUBSTRATO Y ARTíCULO DE FABRICACIoN OBTENIDO POR DICHO METODO - Google Patents

METODO PARA CREAR UNA PELICULA DE CARBONO CON ASPECTO DE DIAMANTE EN UN SUBSTRATO Y ARTíCULO DE FABRICACIoN OBTENIDO POR DICHO METODO

Info

Publication number
AR017505A1
AR017505A1 ARP980102874A ARP980102874A AR017505A1 AR 017505 A1 AR017505 A1 AR 017505A1 AR P980102874 A ARP980102874 A AR P980102874A AR P980102874 A ARP980102874 A AR P980102874A AR 017505 A1 AR017505 A1 AR 017505A1
Authority
AR
Argentina
Prior art keywords
substrate
carbon film
creating
article obtained
dlc
Prior art date
Application number
ARP980102874A
Other languages
English (en)
Original Assignee
Univ Northeastern
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Northeastern filed Critical Univ Northeastern
Publication of AR017505A1 publication Critical patent/AR017505A1/es

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26Deposition of carbon only
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/505Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
    • C23C16/509Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S427/00Coating processes
    • Y10S427/103Diamond-like carbon coating, i.e. DLC
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S427/00Coating processes
    • Y10S427/103Diamond-like carbon coating, i.e. DLC
    • Y10S427/104Utilizing low energy electromagnetic radiation, e.g. microwave, radio wave, IR, UV, visible, actinic laser
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S427/00Coating processes
    • Y10S427/103Diamond-like carbon coating, i.e. DLC
    • Y10S427/106Utilizing plasma, e.g. corona, glow discharge, cold plasma

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Vapour Deposition (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Cold Cathode And The Manufacture (AREA)

Abstract

Un método para crear una película de carbono amorfo (DLC) sobre un substrato que consiste en la exposicion del substrato a un ambiente de hidrocarburos yen la generacion de plasma en ese ambiente con una densidad de electrones de más deaproximadamen te 5 x 1010 por cm3 y un espesor de revestimiento de menos deaproximadamente 2 mm en condiciones de flujo elevado de iones y un bombardeo de iones de baja energía controlado. Además, se provee un producto manufacturadoque tiene unsubstrato con una s uperficie y una película de carbono amorfo (DLC) sobre esa superficie, y dicha película tiene una dureza de más deaproximadamente 20 Gpa, y no se observan retículos cuyo diámetro es 300 mA o más cuando son examinados con unaumento de 50.000X en un m icroscopio electronicocon barrido por emision de campo.
ARP980102874A 1997-06-18 1998-06-17 METODO PARA CREAR UNA PELICULA DE CARBONO CON ASPECTO DE DIAMANTE EN UN SUBSTRATO Y ARTíCULO DE FABRICACIoN OBTENIDO POR DICHO METODO AR017505A1 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/878,222 US6077572A (en) 1997-06-18 1997-06-18 Method of coating edges with diamond-like carbon

Publications (1)

Publication Number Publication Date
AR017505A1 true AR017505A1 (es) 2001-09-12

Family

ID=25371614

Family Applications (1)

Application Number Title Priority Date Filing Date
ARP980102874A AR017505A1 (es) 1997-06-18 1998-06-17 METODO PARA CREAR UNA PELICULA DE CARBONO CON ASPECTO DE DIAMANTE EN UN SUBSTRATO Y ARTíCULO DE FABRICACIoN OBTENIDO POR DICHO METODO

Country Status (22)

Country Link
US (1) US6077572A (es)
EP (1) EP0990060B1 (es)
JP (1) JP4145361B2 (es)
KR (1) KR100586803B1 (es)
CN (1) CN1121510C (es)
AR (1) AR017505A1 (es)
AT (1) ATE234371T1 (es)
AU (1) AU736551B2 (es)
BR (1) BR9810170A (es)
CA (1) CA2290514C (es)
CO (1) CO5031272A1 (es)
DE (1) DE69812092T2 (es)
EG (1) EG21236A (es)
ES (1) ES2190084T3 (es)
HK (1) HK1023791A1 (es)
PL (1) PL186562B1 (es)
RU (1) RU2205894C2 (es)
TR (1) TR199902875T2 (es)
TW (1) TW574397B (es)
UA (1) UA59401C2 (es)
WO (1) WO1998058097A1 (es)
ZA (1) ZA985256B (es)

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Also Published As

Publication number Publication date
PL186562B1 (pl) 2004-01-30
HK1023791A1 (en) 2000-09-22
CO5031272A1 (es) 2001-04-27
TR199902875T2 (xx) 2000-05-22
CN1121510C (zh) 2003-09-17
ES2190084T3 (es) 2003-07-16
WO1998058097A1 (en) 1998-12-23
JP2002505716A (ja) 2002-02-19
PL337485A1 (en) 2000-08-28
CN1260843A (zh) 2000-07-19
CA2290514A1 (en) 1998-12-23
UA59401C2 (uk) 2003-09-15
DE69812092D1 (de) 2003-04-17
JP4145361B2 (ja) 2008-09-03
AU8069498A (en) 1999-01-04
WO1998058097A9 (en) 1999-04-08
EP0990060B1 (en) 2003-03-12
DE69812092T2 (de) 2003-11-20
AU736551B2 (en) 2001-08-02
TW574397B (en) 2004-02-01
KR100586803B1 (ko) 2006-06-07
EP0990060A1 (en) 2000-04-05
ZA985256B (en) 1999-01-06
US6077572A (en) 2000-06-20
ATE234371T1 (de) 2003-03-15
RU2205894C2 (ru) 2003-06-10
KR20010013862A (ko) 2001-02-26
CA2290514C (en) 2004-06-01
EG21236A (en) 2001-03-31
BR9810170A (pt) 2000-08-08

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