CN110379773B - 封装、电子设备、移动体和封装的制造方法 - Google Patents
封装、电子设备、移动体和封装的制造方法 Download PDFInfo
- Publication number
- CN110379773B CN110379773B CN201910725387.XA CN201910725387A CN110379773B CN 110379773 B CN110379773 B CN 110379773B CN 201910725387 A CN201910725387 A CN 201910725387A CN 110379773 B CN110379773 B CN 110379773B
- Authority
- CN
- China
- Prior art keywords
- mark
- package
- straight line
- groove
- cover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 21
- 238000000034 method Methods 0.000 title claims description 28
- 230000002093 peripheral effect Effects 0.000 claims abstract description 68
- 238000007789 sealing Methods 0.000 claims description 67
- 238000003466 welding Methods 0.000 claims description 21
- 238000005304 joining Methods 0.000 claims description 17
- 238000001514 detection method Methods 0.000 description 47
- 239000000463 material Substances 0.000 description 22
- 239000000758 substrate Substances 0.000 description 22
- 230000008569 process Effects 0.000 description 18
- 230000004048 modification Effects 0.000 description 13
- 238000012986 modification Methods 0.000 description 13
- 239000003550 marker Substances 0.000 description 11
- 230000007547 defect Effects 0.000 description 10
- 230000006870 function Effects 0.000 description 10
- 239000002184 metal Substances 0.000 description 10
- 229910052751 metal Inorganic materials 0.000 description 10
- 239000000853 adhesive Substances 0.000 description 9
- 230000001070 adhesive effect Effects 0.000 description 9
- 239000007789 gas Substances 0.000 description 9
- 229910000531 Co alloy Inorganic materials 0.000 description 8
- KGWWEXORQXHJJQ-UHFFFAOYSA-N [Fe].[Co].[Ni] Chemical compound [Fe].[Co].[Ni] KGWWEXORQXHJJQ-UHFFFAOYSA-N 0.000 description 8
- 239000010453 quartz Substances 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- 238000004891 communication Methods 0.000 description 6
- 238000003384 imaging method Methods 0.000 description 6
- 239000011347 resin Substances 0.000 description 6
- 229920005989 resin Polymers 0.000 description 6
- 239000000956 alloy Substances 0.000 description 5
- 239000000470 constituent Substances 0.000 description 5
- 238000007872 degassing Methods 0.000 description 5
- 239000010931 gold Substances 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 229910052709 silver Inorganic materials 0.000 description 5
- 239000004332 silver Substances 0.000 description 5
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 4
- 238000002844 melting Methods 0.000 description 4
- 230000008018 melting Effects 0.000 description 4
- 238000005096 rolling process Methods 0.000 description 4
- 229910000679 solder Inorganic materials 0.000 description 4
- 239000011231 conductive filler Substances 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000002923 metal particle Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000010897 surface acoustic wave method Methods 0.000 description 3
- 238000013022 venting Methods 0.000 description 3
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- -1 for example Substances 0.000 description 2
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 2
- 239000000155 melt Substances 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 241000251468 Actinopterygii Species 0.000 description 1
- 229910000851 Alloy steel Inorganic materials 0.000 description 1
- WQZGKKKJIJFFOK-GASJEMHNSA-N Glucose Natural products OC[C@H]1OC(O)[C@H](O)[C@@H](O)[C@@H]1O WQZGKKKJIJFFOK-GASJEMHNSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 241000251131 Sphyrna Species 0.000 description 1
- 230000004308 accommodation Effects 0.000 description 1
- WYTGDNHDOZPMIW-RCBQFDQVSA-N alstonine Natural products C1=CC2=C3C=CC=CC3=NC2=C2N1C[C@H]1[C@H](C)OC=C(C(=O)OC)[C@H]1C2 WYTGDNHDOZPMIW-RCBQFDQVSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000008280 blood Substances 0.000 description 1
- 210000004369 blood Anatomy 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 239000008103 glucose Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
- H01L23/04—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/544—Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
- H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
- H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders or supports
- H03H9/10—Mounting in enclosures
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K5/00—Casings, cabinets or drawers for electric apparatus
- H05K5/02—Details
- H05K5/03—Covers
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K5/00—Casings, cabinets or drawers for electric apparatus
- H05K5/06—Hermetically-sealed casings
- H05K5/069—Other details of the casing, e.g. wall structure, passage for a connector, a cable, a shaft
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/88—Mounts; Supports; Enclosures; Casings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/544—Marks applied to semiconductor devices or parts
- H01L2223/5442—Marks applied to semiconductor devices or parts comprising non digital, non alphanumeric information, e.g. symbols
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/544—Marks applied to semiconductor devices or parts
- H01L2223/54426—Marks applied to semiconductor devices or parts for alignment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
- H01L2223/544—Marks applied to semiconductor devices or parts
- H01L2223/54473—Marks applied to semiconductor devices or parts for use after dicing
- H01L2223/54486—Located on package parts, e.g. encapsulation, leads, package substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/161—Cap
- H01L2924/1615—Shape
- H01L2924/16195—Flat cap [not enclosing an internal cavity]
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Acoustics & Sound (AREA)
- Gyroscopes (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910725387.XA CN110379773B (zh) | 2013-11-11 | 2014-11-10 | 封装、电子设备、移动体和封装的制造方法 |
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013-232791 | 2013-11-11 | ||
| JP2013232791A JP6318556B2 (ja) | 2013-11-11 | 2013-11-11 | パッケージの製造方法および電子デバイスの製造方法 |
| CN201410643722.9A CN104639088B (zh) | 2013-11-11 | 2014-11-10 | 盖体、封装、电子设备、移动体以及封装的制造方法 |
| CN201910725387.XA CN110379773B (zh) | 2013-11-11 | 2014-11-10 | 封装、电子设备、移动体和封装的制造方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410643722.9A Division CN104639088B (zh) | 2013-11-11 | 2014-11-10 | 盖体、封装、电子设备、移动体以及封装的制造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110379773A CN110379773A (zh) | 2019-10-25 |
| CN110379773B true CN110379773B (zh) | 2023-04-21 |
Family
ID=53043302
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910725387.XA Active CN110379773B (zh) | 2013-11-11 | 2014-11-10 | 封装、电子设备、移动体和封装的制造方法 |
| CN201410643722.9A Active CN104639088B (zh) | 2013-11-11 | 2014-11-10 | 盖体、封装、电子设备、移动体以及封装的制造方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410643722.9A Active CN104639088B (zh) | 2013-11-11 | 2014-11-10 | 盖体、封装、电子设备、移动体以及封装的制造方法 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US9516773B2 (enExample) |
| JP (1) | JP6318556B2 (enExample) |
| CN (2) | CN110379773B (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014216123A (ja) * | 2013-04-24 | 2014-11-17 | タイコエレクトロニクスジャパン合同会社 | 電気コネクタ組立体及びその実装構造 |
| JP2015088644A (ja) * | 2013-10-31 | 2015-05-07 | セイコーエプソン株式会社 | 電子デバイスの製造方法、電子デバイス、電子機器、移動体、および蓋体 |
| JP2015088643A (ja) * | 2013-10-31 | 2015-05-07 | セイコーエプソン株式会社 | 電子デバイスの製造方法、電子デバイス、電子機器、移動体、および蓋体 |
| JP2015087282A (ja) * | 2013-10-31 | 2015-05-07 | セイコーエプソン株式会社 | 電子デバイスの製造方法、電子デバイス、電子機器、移動体、および蓋体 |
| CN109979824B (zh) * | 2018-12-04 | 2020-05-15 | 江苏长电科技股份有限公司 | 一种陶瓷封装陶瓷盖的定位贴装方法 |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1215919A (zh) * | 1997-10-24 | 1999-05-05 | 日本电气株式会社 | 半导体装置 |
| CN1339243A (zh) * | 1999-10-01 | 2002-03-06 | 精工爱普生株式会社 | 布线基板、半导体装置及其制造、检测和安装方法、电路基板和电子装置 |
| JP2004304017A (ja) * | 2003-03-31 | 2004-10-28 | Kyocera Kinseki Corp | 電子部品パッケ−ジ |
| CN101272012A (zh) * | 2007-03-23 | 2008-09-24 | 深圳富泰宏精密工业有限公司 | 接口保护机构及应用该接口保护机构的电子装置 |
| CN102123570A (zh) * | 2010-01-09 | 2011-07-13 | 鸿富锦精密工业(深圳)有限公司 | 电子装置 |
| CN102867908A (zh) * | 2011-07-04 | 2013-01-09 | 精工爱普生株式会社 | 电子器件用封装、电子器件以及电子设备 |
| CN103296990A (zh) * | 2012-02-29 | 2013-09-11 | 精工爱普生株式会社 | 基体、电子器件的制造方法以及电子设备 |
| TW201341773A (zh) * | 2012-02-27 | 2013-10-16 | 藤倉股份有限公司 | 壓力感測器模組及蓋體 |
| JP2013217856A (ja) * | 2012-04-11 | 2013-10-24 | Seiko Epson Corp | センサーデバイスおよび電子機器 |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0511535U (ja) | 1991-07-18 | 1993-02-12 | シチズン時計株式会社 | 水晶振動子 |
| JP3567822B2 (ja) * | 1999-10-29 | 2004-09-22 | 株式会社村田製作所 | 電子部品と通信機装置および電子部品の製造方法 |
| JP2001274649A (ja) | 2000-03-24 | 2001-10-05 | Daishinku Corp | 水晶振動デバイスの気密封止方法 |
| JP4277259B2 (ja) | 2003-04-11 | 2009-06-10 | セイコーエプソン株式会社 | 圧電デバイスおよび圧電デバイスの製造方法 |
| US7342298B1 (en) * | 2004-03-09 | 2008-03-11 | Xilinx, Inc. | Metal lid with improved adhesion to package substrate |
| JP2005353885A (ja) | 2004-06-11 | 2005-12-22 | Seiko Epson Corp | 電子デバイスの製造方法 |
| JP2006073679A (ja) | 2004-08-31 | 2006-03-16 | Citizen Watch Co Ltd | 電子部品封止体の製造方法および製造装置 |
| JP4244053B2 (ja) * | 2006-06-16 | 2009-03-25 | エプソントヨコム株式会社 | 圧電デバイスを備えた電子モジュール |
| US8053954B2 (en) * | 2006-08-10 | 2011-11-08 | Su-Pei Yang | Piezoelectric speaker |
| JP2008153485A (ja) | 2006-12-19 | 2008-07-03 | Epson Toyocom Corp | 電子部品の製造方法 |
| JP4893578B2 (ja) | 2007-10-17 | 2012-03-07 | 株式会社大真空 | 電子部品の封止方法 |
| CN101640258A (zh) * | 2008-07-30 | 2010-02-03 | 深圳富泰宏精密工业有限公司 | 电池盖开合机构 |
| US8208246B2 (en) * | 2009-03-19 | 2012-06-26 | Kabushiki Kaisha Toshiba | Electronic apparatus |
| JP5410863B2 (ja) | 2009-04-09 | 2014-02-05 | シチズンホールディングス株式会社 | レーザ光源 |
| JP5372175B2 (ja) * | 2009-12-18 | 2013-12-18 | 三菱電機株式会社 | 電子部品パッケージ |
| CN102110789A (zh) * | 2009-12-24 | 2011-06-29 | 深圳富泰宏精密工业有限公司 | 电池盖结构 |
| JP2012034086A (ja) | 2010-07-29 | 2012-02-16 | Nippon Dempa Kogyo Co Ltd | 圧電デバイスの製造方法及び圧電デバイス |
| JP2013012977A (ja) * | 2011-06-30 | 2013-01-17 | Nippon Dempa Kogyo Co Ltd | 圧電デバイス及び圧電デバイスの製造方法 |
| JP5756712B2 (ja) * | 2011-08-17 | 2015-07-29 | 日本電波工業株式会社 | 水晶デバイス |
| US9116665B2 (en) * | 2011-10-10 | 2015-08-25 | AFC Trident, Inc. | Modular protective cover with accessory slot for portable electronic device |
| US9370117B2 (en) * | 2013-08-14 | 2016-06-14 | Wirepath Home Systems, Llc | Recessed equipment boxes and related assemblies and methods |
-
2013
- 2013-11-11 JP JP2013232791A patent/JP6318556B2/ja active Active
-
2014
- 2014-11-10 US US14/537,132 patent/US9516773B2/en active Active
- 2014-11-10 CN CN201910725387.XA patent/CN110379773B/zh active Active
- 2014-11-10 CN CN201410643722.9A patent/CN104639088B/zh active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1215919A (zh) * | 1997-10-24 | 1999-05-05 | 日本电气株式会社 | 半导体装置 |
| CN1339243A (zh) * | 1999-10-01 | 2002-03-06 | 精工爱普生株式会社 | 布线基板、半导体装置及其制造、检测和安装方法、电路基板和电子装置 |
| JP2004304017A (ja) * | 2003-03-31 | 2004-10-28 | Kyocera Kinseki Corp | 電子部品パッケ−ジ |
| CN101272012A (zh) * | 2007-03-23 | 2008-09-24 | 深圳富泰宏精密工业有限公司 | 接口保护机构及应用该接口保护机构的电子装置 |
| CN102123570A (zh) * | 2010-01-09 | 2011-07-13 | 鸿富锦精密工业(深圳)有限公司 | 电子装置 |
| CN102867908A (zh) * | 2011-07-04 | 2013-01-09 | 精工爱普生株式会社 | 电子器件用封装、电子器件以及电子设备 |
| TW201341773A (zh) * | 2012-02-27 | 2013-10-16 | 藤倉股份有限公司 | 壓力感測器模組及蓋體 |
| CN103296990A (zh) * | 2012-02-29 | 2013-09-11 | 精工爱普生株式会社 | 基体、电子器件的制造方法以及电子设备 |
| JP2013217856A (ja) * | 2012-04-11 | 2013-10-24 | Seiko Epson Corp | センサーデバイスおよび電子機器 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6318556B2 (ja) | 2018-05-09 |
| CN110379773A (zh) | 2019-10-25 |
| CN104639088B (zh) | 2019-09-06 |
| CN104639088A (zh) | 2015-05-20 |
| US20150130548A1 (en) | 2015-05-14 |
| JP2015094614A (ja) | 2015-05-18 |
| US9516773B2 (en) | 2016-12-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US9350318B2 (en) | Method for manufacturing electronic device, cover body, electronic device, electronic apparatus, and moving object | |
| US9291457B2 (en) | Method of manufacturing electronic device, electronic device, electronic apparatus, and moving object | |
| US8804316B2 (en) | Electronic device package, electronic device, and electronic apparatus | |
| CN110379773B (zh) | 封装、电子设备、移动体和封装的制造方法 | |
| CN104601135A (zh) | 电子器件及其制造方法、电子设备、移动体以及盖体 | |
| JP6175760B2 (ja) | 電子デバイス用パッケージの製造方法、電子デバイスの製造方法、電子機器の製造方法、および移動体の製造方法 | |
| US20150116974A1 (en) | Method of manufacturing electronic device, electronic device, electronic apparatus, moving object, and lid body | |
| CN104602477A (zh) | 电子器件及其制造方法、电子设备、移动体以及盖体 | |
| JP5747691B2 (ja) | 電子デバイス用パッケージの製造方法、電子デバイスおよび電子機器 | |
| JP2014107317A (ja) | 電子デバイス用パッケージの製造方法、電子デバイス、電子機器、および移動体 | |
| JP6493589B2 (ja) | パッケージ、電子機器、移動体、およびパッケージの製造方法 | |
| JP6171516B2 (ja) | 電子デバイス、電子デバイスの製造方法、電子機器、および移動体 | |
| JP2014107316A (ja) | 蓋体、パッケージ、電子デバイス、電子機器、移動体、および電子デバイスの製造方法 | |
| JP2014145701A (ja) | 電子デバイスの製造方法、電子デバイス、電子機器、および移動体 | |
| JP2014146735A (ja) | 電子デバイスの製造方法 | |
| US20200298350A1 (en) | Electronic device manufacturing method, electronic device, electronic apparatus, and vehicle | |
| JP6112138B2 (ja) | 電子デバイスの製造方法 | |
| JP2013016660A (ja) | 電子デバイス用パッケージの製造方法、電子デバイスおよび電子機器 | |
| JP2013016658A (ja) | 電子デバイス用パッケージ、電子デバイス用パッケージの製造方法、電子デバイスおよび電子機器 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |