CN110379773B - 封装、电子设备、移动体和封装的制造方法 - Google Patents

封装、电子设备、移动体和封装的制造方法 Download PDF

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Publication number
CN110379773B
CN110379773B CN201910725387.XA CN201910725387A CN110379773B CN 110379773 B CN110379773 B CN 110379773B CN 201910725387 A CN201910725387 A CN 201910725387A CN 110379773 B CN110379773 B CN 110379773B
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mark
package
straight line
groove
cover
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CN110379773A (zh
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松泽寿一郎
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Seiko Epson Corp
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Seiko Epson Corp
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/02Containers; Seals
    • H01L23/04Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/544Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03BGENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02Details
    • H03H9/05Holders or supports
    • H03H9/10Mounting in enclosures
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K5/00Casings, cabinets or drawers for electric apparatus
    • H05K5/02Details
    • H05K5/03Covers
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K5/00Casings, cabinets or drawers for electric apparatus
    • H05K5/06Hermetically-sealed casings
    • H05K5/069Other details of the casing, e.g. wall structure, passage for a connector, a cable, a shaft
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/80Constructional details
    • H10N30/88Mounts; Supports; Enclosures; Casings
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/544Marks applied to semiconductor devices or parts
    • H01L2223/5442Marks applied to semiconductor devices or parts comprising non digital, non alphanumeric information, e.g. symbols
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/544Marks applied to semiconductor devices or parts
    • H01L2223/54426Marks applied to semiconductor devices or parts for alignment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/544Marks applied to semiconductor devices or parts
    • H01L2223/54473Marks applied to semiconductor devices or parts for use after dicing
    • H01L2223/54486Located on package parts, e.g. encapsulation, leads, package substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/161Cap
    • H01L2924/1615Shape
    • H01L2924/16195Flat cap [not enclosing an internal cavity]

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Acoustics & Sound (AREA)
  • Gyroscopes (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
CN201910725387.XA 2013-11-11 2014-11-10 封装、电子设备、移动体和封装的制造方法 Active CN110379773B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910725387.XA CN110379773B (zh) 2013-11-11 2014-11-10 封装、电子设备、移动体和封装的制造方法

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2013-232791 2013-11-11
JP2013232791A JP6318556B2 (ja) 2013-11-11 2013-11-11 パッケージの製造方法および電子デバイスの製造方法
CN201410643722.9A CN104639088B (zh) 2013-11-11 2014-11-10 盖体、封装、电子设备、移动体以及封装的制造方法
CN201910725387.XA CN110379773B (zh) 2013-11-11 2014-11-10 封装、电子设备、移动体和封装的制造方法

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CN110379773A CN110379773A (zh) 2019-10-25
CN110379773B true CN110379773B (zh) 2023-04-21

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US (1) US9516773B2 (enExample)
JP (1) JP6318556B2 (enExample)
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Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014216123A (ja) * 2013-04-24 2014-11-17 タイコエレクトロニクスジャパン合同会社 電気コネクタ組立体及びその実装構造
JP2015088644A (ja) * 2013-10-31 2015-05-07 セイコーエプソン株式会社 電子デバイスの製造方法、電子デバイス、電子機器、移動体、および蓋体
JP2015088643A (ja) * 2013-10-31 2015-05-07 セイコーエプソン株式会社 電子デバイスの製造方法、電子デバイス、電子機器、移動体、および蓋体
JP2015087282A (ja) * 2013-10-31 2015-05-07 セイコーエプソン株式会社 電子デバイスの製造方法、電子デバイス、電子機器、移動体、および蓋体
CN109979824B (zh) * 2018-12-04 2020-05-15 江苏长电科技股份有限公司 一种陶瓷封装陶瓷盖的定位贴装方法

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1215919A (zh) * 1997-10-24 1999-05-05 日本电气株式会社 半导体装置
CN1339243A (zh) * 1999-10-01 2002-03-06 精工爱普生株式会社 布线基板、半导体装置及其制造、检测和安装方法、电路基板和电子装置
JP2004304017A (ja) * 2003-03-31 2004-10-28 Kyocera Kinseki Corp 電子部品パッケ−ジ
CN101272012A (zh) * 2007-03-23 2008-09-24 深圳富泰宏精密工业有限公司 接口保护机构及应用该接口保护机构的电子装置
CN102123570A (zh) * 2010-01-09 2011-07-13 鸿富锦精密工业(深圳)有限公司 电子装置
CN102867908A (zh) * 2011-07-04 2013-01-09 精工爱普生株式会社 电子器件用封装、电子器件以及电子设备
CN103296990A (zh) * 2012-02-29 2013-09-11 精工爱普生株式会社 基体、电子器件的制造方法以及电子设备
TW201341773A (zh) * 2012-02-27 2013-10-16 藤倉股份有限公司 壓力感測器模組及蓋體
JP2013217856A (ja) * 2012-04-11 2013-10-24 Seiko Epson Corp センサーデバイスおよび電子機器

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0511535U (ja) 1991-07-18 1993-02-12 シチズン時計株式会社 水晶振動子
JP3567822B2 (ja) * 1999-10-29 2004-09-22 株式会社村田製作所 電子部品と通信機装置および電子部品の製造方法
JP2001274649A (ja) 2000-03-24 2001-10-05 Daishinku Corp 水晶振動デバイスの気密封止方法
JP4277259B2 (ja) 2003-04-11 2009-06-10 セイコーエプソン株式会社 圧電デバイスおよび圧電デバイスの製造方法
US7342298B1 (en) * 2004-03-09 2008-03-11 Xilinx, Inc. Metal lid with improved adhesion to package substrate
JP2005353885A (ja) 2004-06-11 2005-12-22 Seiko Epson Corp 電子デバイスの製造方法
JP2006073679A (ja) 2004-08-31 2006-03-16 Citizen Watch Co Ltd 電子部品封止体の製造方法および製造装置
JP4244053B2 (ja) * 2006-06-16 2009-03-25 エプソントヨコム株式会社 圧電デバイスを備えた電子モジュール
US8053954B2 (en) * 2006-08-10 2011-11-08 Su-Pei Yang Piezoelectric speaker
JP2008153485A (ja) 2006-12-19 2008-07-03 Epson Toyocom Corp 電子部品の製造方法
JP4893578B2 (ja) 2007-10-17 2012-03-07 株式会社大真空 電子部品の封止方法
CN101640258A (zh) * 2008-07-30 2010-02-03 深圳富泰宏精密工业有限公司 电池盖开合机构
US8208246B2 (en) * 2009-03-19 2012-06-26 Kabushiki Kaisha Toshiba Electronic apparatus
JP5410863B2 (ja) 2009-04-09 2014-02-05 シチズンホールディングス株式会社 レーザ光源
JP5372175B2 (ja) * 2009-12-18 2013-12-18 三菱電機株式会社 電子部品パッケージ
CN102110789A (zh) * 2009-12-24 2011-06-29 深圳富泰宏精密工业有限公司 电池盖结构
JP2012034086A (ja) 2010-07-29 2012-02-16 Nippon Dempa Kogyo Co Ltd 圧電デバイスの製造方法及び圧電デバイス
JP2013012977A (ja) * 2011-06-30 2013-01-17 Nippon Dempa Kogyo Co Ltd 圧電デバイス及び圧電デバイスの製造方法
JP5756712B2 (ja) * 2011-08-17 2015-07-29 日本電波工業株式会社 水晶デバイス
US9116665B2 (en) * 2011-10-10 2015-08-25 AFC Trident, Inc. Modular protective cover with accessory slot for portable electronic device
US9370117B2 (en) * 2013-08-14 2016-06-14 Wirepath Home Systems, Llc Recessed equipment boxes and related assemblies and methods

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1215919A (zh) * 1997-10-24 1999-05-05 日本电气株式会社 半导体装置
CN1339243A (zh) * 1999-10-01 2002-03-06 精工爱普生株式会社 布线基板、半导体装置及其制造、检测和安装方法、电路基板和电子装置
JP2004304017A (ja) * 2003-03-31 2004-10-28 Kyocera Kinseki Corp 電子部品パッケ−ジ
CN101272012A (zh) * 2007-03-23 2008-09-24 深圳富泰宏精密工业有限公司 接口保护机构及应用该接口保护机构的电子装置
CN102123570A (zh) * 2010-01-09 2011-07-13 鸿富锦精密工业(深圳)有限公司 电子装置
CN102867908A (zh) * 2011-07-04 2013-01-09 精工爱普生株式会社 电子器件用封装、电子器件以及电子设备
TW201341773A (zh) * 2012-02-27 2013-10-16 藤倉股份有限公司 壓力感測器模組及蓋體
CN103296990A (zh) * 2012-02-29 2013-09-11 精工爱普生株式会社 基体、电子器件的制造方法以及电子设备
JP2013217856A (ja) * 2012-04-11 2013-10-24 Seiko Epson Corp センサーデバイスおよび電子機器

Also Published As

Publication number Publication date
JP6318556B2 (ja) 2018-05-09
CN110379773A (zh) 2019-10-25
CN104639088B (zh) 2019-09-06
CN104639088A (zh) 2015-05-20
US20150130548A1 (en) 2015-05-14
JP2015094614A (ja) 2015-05-18
US9516773B2 (en) 2016-12-06

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