CN1215919A - 半导体装置 - Google Patents

半导体装置 Download PDF

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CN1215919A
CN1215919A CN98120185A CN98120185A CN1215919A CN 1215919 A CN1215919 A CN 1215919A CN 98120185 A CN98120185 A CN 98120185A CN 98120185 A CN98120185 A CN 98120185A CN 1215919 A CN1215919 A CN 1215919A
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田尾哲也
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Desella Advanced Technology Co
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Abstract

一个具高可靠性的封装式半导体装置,能够解决装有众多管脚引发的问题,且还能将其内部的气态高压潮气释放到外面来,它包括一个围绕在半导体芯片周围的增强环,该芯片在其绝缘衬底上有一个突起式电极;填充半导体芯片和绝缘衬底之间空隙的树脂;安放在半导体芯片和增强环上面的顶盖,其中与半导体芯片厚度的方向垂直的方向上至少开有一个开孔。

Description

半导体装置
本发明涉及一种封装式半导体装置。
本申请是以日本专利申请平成09-292941为基础的,本申请对其内容进行了参考与综合。
以往,为消除由包括有一个突起式电极诸如倒焊晶片的封装式半导体装置所吸收的潮气,人们提出了在顶盖上开口的封装式半导体装置,以及在绝缘衬底上开口的封装式半导体装置。
图6展示的了一个封装式半导体装置的例子,该器件在其绝缘衬底上与半导体芯片的厚度平行的方向上开了一个小孔。
在图6中,标号1至9分别表示一个顶盖,一个增强环,一个绝缘衬底,一个半导体芯片,填充树脂,一个BAG焊料突起,粘合剂,一个焊料突起,和一个开孔。
如图6所示,普通的封装式半导体装置中的潮气是经由开孔9释放的,开孔9形成于在绝缘衬底3上未设置,半导体芯片4的位置。
此外,如图7中所示,潮气也可以通过开孔10来释放,开孔10是在封装式半导体装置的顶盖上与半导体芯片的厚度平行的方向形成的。如图7所示,没有必要再在绝缘衬底3上开出开孔9,因此,就有可能增大绝缘衬底3上电气布线的密度,以响应管脚数量增长的趋势。
当封装式半导体装置由连接材料,如普通焊料安装到印刷底板上时,封装式半导体装置与印刷底板之间的连接是通过用软熔炉将连接材料加热至高于其熔点的温度使之熔化,冷却,再固化而完成的。封装式半导体装置在这种情况下被加热,因此,吸入封装式半导体装置内部的潮气蒸发,或者说在封装式半导体装置内部形成的腔中的空气膨胀。结果,封装式半导体装置内部的压力突然增大。这样,封装式半导体装置内部的压力就高,而半导体封装爆烈。因而,封装半导体装置的可靠性降低。为维护常规的封装半导体装置的可靠性,通过经由图6或图7中所示的开口9和10消除潮气的方法来降低对封装式半导体装置造成影响的压力。
在常规封装式半导体装置中,用于连接半导体芯片4和绝缘衬底3的电极,以及电气布线紧挨着分布在绝缘底座的上面和周围。因此,当在绝缘衬底3上方未设置半导体芯片4之处形成开孔9时,问题就出现了,即,管脚的数量越大,为开孔定位的困难就越大。而且,开孔9的直径要很小,以保证为开孔9找到位置,这样,又出现了成本增加的问题。此外,用于安装封装式半导体装置的BGA焊料球6被布置在绝缘衬底3的下面,因此,开孔9应形成在这些BGA焊料球之间。相应地,当封装式半导体装置被安装在印刷电路板如电脑母板上时,焊剂和用于清除焊剂的溶剂进入开孔9中,导致封装式半导体装置的透气性变差了。
由于这些原因,在绝缘底座3上开出开孔9就逐渐变得困难了。
另外,有人曾提议如图7所示在顶盖1上形成开孔10。当在顶盖1上安放散热片以改善散热性能时,开孔10被散热片覆盖的问题也就出现了,以致封装式半导体装置的透气性无法保障。而且,在封装式半导体装置中产生的热是通过使半导体芯片的表面与倒焊晶片中的顶盖1接触的方式排散的。因此,如图8所示,将开孔10开在顶盖1上时,散热面积就变小了。结果,封装式半导体装置散热性变坏的问题也出现了。
因此,本发明的目的之一是提供一个高可靠的封装式半导体装置,该器件能够解决管脚数量大带来的问题,即电气布线密度高而其散热性能下降的问题,并且能够将气态高压潮气从其内部释放到外面来。
本发明第一方面提供了一种封装式半导体装置,包括
一个分布在半导体芯片周围的增强环,在其绝缘衬底上有一个突起式电极;
用于填充半导体芯片与绝缘衬底之间空隙的树脂;和
设置在半导体芯片和增强环上面的顶盖,其上在与半导体芯片厚度垂直的方向至少有一个开孔。
基于本发明的封装式半导体装置,开孔的透气性能够保障。因此,将气态的高压潮气从其内部排除到外面去,并防止其爆裂的发生是可能的。结果,封装式半导体装置的可靠性得以改善。
而且,可以在不同的绝缘衬底和顶盖上形成开孔。
加之,在绝缘衬底和顶盖上开孔并非必要,因此,本发明的封装式半导体装置能够迎合管脚数量渐增的趋势。
尤其是,当开孔被开在顶盖与增强环之间的边界上,或者增强环与绝缘衬底之间的边界上时,就更容易得到高可靠性、低成本的封装式半导体装置。
再者,当增强环是由增强环子段组成时,增强环子段间的空隙即形成开孔,这样就可以通过设置增强环子段的方式来形成开孔。这样的封装式半导体装置比上述的本发明的封装式半导体装置更易获得,而且成本能够更低。
本发明的另一方面为封装式半导体装置提供了一个顶盖,其中在与半导体芯片厚度方向垂直的方向上开有开孔。
根据本发明的另一方面,本发明为封装式半导体装置提供了一个增强环,其中在与半导体芯片厚度方向垂直的方向上开有开孔。
图1为本发明第一实施例中的封装式半导体装置的横截面图。
图2A是图1所示的封装式半导体装置使用的带有开孔的顶盖的平面图。
图2B是图1所示的封装式半导体装置使用的带有开孔的顶盖的侧面图。
图3是本发明第二个实施例中的封装式半导体装置使用的增强环的横截面图。
图4A是图3所示的封装式半导体装置使用的带有开孔的增强环的平面图。
图4B是图3所示的增强环的侧面图。
图5A是本发明的第三实施例的封装式半导体装置的增强环子段的平面图。
图5B是构成本项发明的第三实施例的封装式半导体装置的增强环子段的侧面图。
图6是在绝缘衬底上与半导体芯片厚度的方向平行的方向上开有开孔的常规封装式半导体装置的横截面图。
图7是在顶盖上与半导体厚度的方向平行的方向上开有开孔的常规封装式半导体装置的横截面图。
图8是图7所示封装式半导体装置所用的顶盖的平面图。
现在,参照图1至图5对本发明的封装式半导体装置进行详细说明。而且,为简化对图1至图5中所示的结构的说明,与图6至图8中所示相同的结构采用了与图6至图8中相同的符号。
图1所示的封装式半导体装置是这样形成的:将半导体芯片4安装到绝缘衬底3上,半导体芯片4带有一个突起式电极,如直径为150μm的焊料突起8;用填充树脂5如环氧树脂来填充焊料突起8与绝缘衬底3之间的缝隙;使树脂固化;粘附铜制的增强环2;将直径为0.6mm的焊球粘附在绝缘衬底3上;在半导体芯片4的表面和增强环2的表面涂上粘合剂7如环氧树脂;用粘合剂7将图2A和图2B中所示的具有宽为2mm的沟槽的顶盖粘合到半导体芯片4和增强环2上面。
图2A和图2B展示了本实施例中使用的顶盖。而且,在图2A中,符号4a表示定位于半导体芯片4中心部位的半导体电路。多个沟槽12设置在顶盖1的边缘上。
如图1所示,顶盖用粘合剂7与增强环2和半导体芯片4粘合。顶盖1必须用粘合剂7粘到半导体芯片4和增强环2的表面,以便不覆盖将作为开孔12的沟槽12。
包括本实施例的顶盖1的半导体封装具有良好的透气性。而且,可通过沟槽12,即在本实施例的顶盖1上开出的开孔12来充分消除封装式半导体装置吸入的潮气。
图3是本发明第二实施例的封装式半导体装置的横截面图。除了将形成开孔11的即开有沟槽11增强环2与顶盖1粘合,而不是将形成开孔12即开有沟槽12的顶盖1与半导体芯片4和增强环2粘合外,该封装式半导体装置是按照与在第一实施例的方式相同的方式产生的。而且,增强环2也用粘合剂7与顶盖1粘合以便不覆盖形成开孔11的沟槽11。
本实施例的带有增强环2的半导体封装具有很好的透气性。而且,通过沟槽11即在本实施例的增强环2上形成的开孔11来充分排除由该封装式半导体装置吸收的潮气是可行的。
图5是本发明的第三实施例中使用的增强环20的平面图。增强环20包括铜制的增强环子段20a。这些增强环子段20a定位在绝缘衬底3上以便围绕在半导体芯片4的周围。用这些增强环子段20a形成的封装式半导体装置的结构在实际上与图1所示的封装式半导体装置的结构是相同的。
该实施例中的带有增强环子段20a的半导体封装具有良好的透气性。而且,通过形成于本实施例的增强环子段20a之间开孔13处的缝隙13来充分排除该封装式半导体装置吸收的潮气是可行的。另外,这些缝隙13的宽度易于控制。
在这些实施例中,这些开孔11、12、13是在不接触散热片的顶盖1的表面或者是在增强环2上形成的,因此,这些开孔11、12和13的透气性可以得到保障,即使是在把散热片加到封装式半导体装置上以保障其散热性能的时候也是如此。
而且,开孔11、12和13不在与散热片和绝缘衬底3接触以从半导体芯片4散热的顶盖1的表面形成,因此可以保障有足够的散热面积。因而,该封装式半导体装置就具有了极好的散热性。
另外,图6所示的在绝缘衬底3上开有开孔9的常规封装式半导体装置的和图7所示的在顶盖1上开有开孔10的常规封装式半导体装置出现爆裂的比率大约为40%。相反,本发明的这些实施例中的封装式半导体装置却无爆裂出现。另外,这些实施例的开孔可以在不分半导体芯片4和绝缘衬底3的种类的精况下,分别开在顶盖1和增强环2上。因而,本发明的这些封装式半导体装置能够迎合管脚数量渐增的趋势。

Claims (11)

1、一种半导体封装,其特征在于,它包括:
一个围绕在半导体芯片周围的增强环,绝缘衬底上带有一个突起式电极;
用于填充半导体芯片和绝缘衬底之间空隙的树脂;和
一个半导体芯片和增强环上的顶盖,
其中在与半导体芯片的厚度方向垂直的方向上至少开有一个开孔。
2、根据权利要求1所述的半导体封装,其特征在于,其中在顶盖上至少开有一个开孔。
3、根据权利要求2所述的半导体封装,其特征在于,其中在顶盖的与增强环接触的表面上至少开有一个开孔。
4、根据权利要求1所述的半导体封装,其特征在于,其中在增强环上至少开有一个开孔。
5、根据权利要求2所述的半导体封装,其特征在于,其中在增强环的与绝缘衬底接触的表面上至少开有一个开孔。
6、根据权利要求1所述的半导体封装,其特征在于,其中的增强环由增强环子段构成,且在增强环子段之间的缝隙处形成有至少一个开孔。
7、一种封装式半导体装置,其特征在于,它还有与权利要求1相对应的半导体封装。
8、一种半导体装置的顶盖,其特征在于,其中在与其厚度方向相垂直的方向上至少开有一个开孔。
9、根据权利要求8所述的半导体装置的顶盖,其特征在于,其中在顶盖的与增强环接触的表面上至少开有一个开孔。
10、一种用于半导体装置的增强环,其特征在于,其中在与其厚度的方向垂直的方向上至少开有一个开孔。
11、根据权利要求10所述的增强环,其特征在于,其中在增强环的与顶盖接触的表面上至少开有一个开孔。
CN98120185A 1997-10-24 1998-10-23 半导体装置 Expired - Lifetime CN1101063C (zh)

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JP9292941A JP2991172B2 (ja) 1997-10-24 1997-10-24 半導体装置
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JP292941/1997 1997-10-24

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