CN110082935B - 基板装配装置 - Google Patents

基板装配装置 Download PDF

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Publication number
CN110082935B
CN110082935B CN201910219454.0A CN201910219454A CN110082935B CN 110082935 B CN110082935 B CN 110082935B CN 201910219454 A CN201910219454 A CN 201910219454A CN 110082935 B CN110082935 B CN 110082935B
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China
Prior art keywords
substrate
upper substrate
adhesion
stage
substrate surface
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CN201910219454.0A
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English (en)
Chinese (zh)
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CN110082935A (zh
Inventor
市村久
中泽良仁
齐藤正行
海津拓哉
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Ameco Technology Co ltd
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Ameco Technology Co ltd
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Publication of CN110082935A publication Critical patent/CN110082935A/zh
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mathematical Physics (AREA)
  • Liquid Crystal (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
CN201910219454.0A 2014-11-14 2015-11-10 基板装配装置 Active CN110082935B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2014232028A JP5810207B1 (ja) 2014-11-14 2014-11-14 基板組立装置とそれを用いた基板組立方法
JP2014-232028 2014-11-14
CN201510760615.9A CN105607307B (zh) 2014-11-14 2015-11-10 基板装配装置和使用该装置的基板装配方法

Related Parent Applications (1)

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CN201510760615.9A Division CN105607307B (zh) 2014-11-14 2015-11-10 基板装配装置和使用该装置的基板装配方法

Publications (2)

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CN110082935A CN110082935A (zh) 2019-08-02
CN110082935B true CN110082935B (zh) 2022-03-11

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CN201510760615.9A Active CN105607307B (zh) 2014-11-14 2015-11-10 基板装配装置和使用该装置的基板装配方法
CN201910219454.0A Active CN110082935B (zh) 2014-11-14 2015-11-10 基板装配装置

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CN201510760615.9A Active CN105607307B (zh) 2014-11-14 2015-11-10 基板装配装置和使用该装置的基板装配方法

Country Status (4)

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JP (1) JP5810207B1 (ko)
KR (4) KR101680744B1 (ko)
CN (2) CN105607307B (ko)
TW (1) TW201629583A (ko)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106066555B (zh) * 2016-06-30 2020-07-03 京东方科技集团股份有限公司 对盒设备
WO2019092787A1 (ja) * 2017-11-07 2019-05-16 堺ディスプレイプロダクト株式会社 基板貼合装置、基板貼合方法および表示装置の製造方法
JP2018089521A (ja) * 2018-03-22 2018-06-14 株式会社 Ｍｔｇ 美容器
CN108398814B (zh) * 2018-03-22 2021-09-24 京东方科技集团股份有限公司 用于显示设备的加工装置
JP6733966B2 (ja) * 2018-07-09 2020-08-05 Ａｉメカテック株式会社 基板組立装置及び基板組立方法
JP7290375B2 (ja) * 2020-04-14 2023-06-13 Ａｉメカテック株式会社 基板組立装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1469171A (zh) * 2002-07-19 2004-01-21 日立产业有限公司 基板装配装置
KR20070100563A (ko) * 2006-04-07 2007-10-11 주식회사 에이디피엔지니어링 기판 합착기 및 기판 합착 방법
CN101859036A (zh) * 2009-04-08 2010-10-13 芝浦机械电子装置股份有限公司 基板贴合装置和基板贴合方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3363308B2 (ja) * 1996-04-18 2003-01-08 株式会社日立製作所 基板組立方法及び液晶表示セルの製造方法
JP3022879B1 (ja) * 1999-03-08 2000-03-21 鹿児島日本電気株式会社 液晶パネル製造用の基板貼り合わせ装置
US6502324B2 (en) * 2000-12-12 2003-01-07 International Business Machines Corporation Method of alignment between sheet materials, method of alignment, substrate assembling method and aligning apparatus
JP3577546B2 (ja) * 2001-02-08 2004-10-13 株式会社 日立インダストリイズ 基板の組立方法及び組立装置
JP2003098533A (ja) * 2001-09-26 2003-04-03 Shibaura Mechatronics Corp 基板の貼合わせ装置、及び貼合わせ方法
US7416010B2 (en) * 2002-03-08 2008-08-26 Lg Display Co., Ltd. Bonding apparatus and system for fabricating liquid crystal display device
JP4243499B2 (ja) * 2002-06-11 2009-03-25 富士通株式会社 貼合せ基板製造装置及び貼合せ基板製造方法
JP3694691B2 (ja) * 2003-01-29 2005-09-14 株式会社 日立インダストリイズ 大型基板の組立装置及び組立方法
JP4078487B2 (ja) * 2005-05-25 2008-04-23 株式会社日立プラントテクノロジー 基板組立装置及び方法
JP4379435B2 (ja) * 2006-05-17 2009-12-09 株式会社日立プラントテクノロジー 基板組立装置とそれを用いた基板組立方法
KR100770409B1 (ko) * 2007-04-05 2007-10-25 세호로보트산업 주식회사 연성소재의 부착방법
TWI425591B (zh) * 2008-04-02 2014-02-01 Ap Systems Inc 基板組合裝置
CN201808268U (zh) * 2010-03-15 2011-04-27 株式会社日立工业设备技术 贴合装置
JP2012124444A (ja) * 2010-12-06 2012-06-28 Shinko Engineering Kk 基板貼り合せ方法
JP5759348B2 (ja) * 2011-11-30 2015-08-05 株式会社Ｓｃｒｅｅｎホールディングス パターン形成装置およびパターン形成方法
JP2013218198A (ja) * 2012-04-11 2013-10-24 Hitachi High-Technologies Corp 基板貼り合わせ装置
JP5968456B2 (ja) * 2012-10-31 2016-08-10 中外炉工業株式会社 基板保持装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1469171A (zh) * 2002-07-19 2004-01-21 日立产业有限公司 基板装配装置
KR20070100563A (ko) * 2006-04-07 2007-10-11 주식회사 에이디피엔지니어링 기판 합착기 및 기판 합착 방법
CN101859036A (zh) * 2009-04-08 2010-10-13 芝浦机械电子装置股份有限公司 基板贴合装置和基板贴合方法

Also Published As

Publication number Publication date
CN110082935A (zh) 2019-08-02
TWI561889B (ko) 2016-12-11
KR102636535B1 (ko) 2024-02-15
KR102454458B1 (ko) 2022-10-14
KR20210118782A (ko) 2021-10-01
CN105607307A (zh) 2016-05-25
KR20160138363A (ko) 2016-12-05
CN105607307B (zh) 2019-04-09
TW201629583A (zh) 2016-08-16
KR101680744B1 (ko) 2016-11-29
KR20220142980A (ko) 2022-10-24
JP5810207B1 (ja) 2015-11-11
JP2016095420A (ja) 2016-05-26
KR20160058047A (ko) 2016-05-24
KR102305145B1 (ko) 2021-09-28

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