CN109791116B - 波长色散型荧光x射线分析装置 - Google Patents

波长色散型荧光x射线分析装置 Download PDF

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CN109791116B
CN109791116B CN201780059601.1A CN201780059601A CN109791116B CN 109791116 B CN109791116 B CN 109791116B CN 201780059601 A CN201780059601 A CN 201780059601A CN 109791116 B CN109791116 B CN 109791116B
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dimensional detector
ray
rays
intensity
detection elements
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CN109791116A (zh
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加藤秀一
山田隆
片冈由行
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Rigaku Corp
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Rigaku Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/2209—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using wavelength dispersive spectroscopy [WDS]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/07—Investigating materials by wave or particle radiation secondary emission
    • G01N2223/076—X-ray fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/10—Different kinds of radiation or particles
    • G01N2223/101—Different kinds of radiation or particles electromagnetic radiation
    • G01N2223/1016—X-ray
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/30—Accessories, mechanical or electrical features
    • G01N2223/315—Accessories, mechanical or electrical features monochromators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/30—Accessories, mechanical or electrical features
    • G01N2223/32—Accessories, mechanical or electrical features adjustments of elements during operation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/50—Detectors
    • G01N2223/501—Detectors array
    • G01N2223/5015—Detectors array linear array

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
CN201780059601.1A 2016-09-30 2017-08-31 波长色散型荧光x射线分析装置 Active CN109791116B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2016194356A JP6467600B2 (ja) 2016-09-30 2016-09-30 波長分散型蛍光ｘ線分析装置
JP2016-194356 2016-09-30
PCT/JP2017/031494 WO2018061607A1 (ja) 2016-09-30 2017-08-31 波長分散型蛍光ｘ線分析装置

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CN109791116A CN109791116A (zh) 2019-05-21
CN109791116B true CN109791116B (zh) 2021-06-18

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US (1) US10948436B2 (https=)
EP (1) EP3521813B1 (https=)
JP (1) JP6467600B2 (https=)
CN (1) CN109791116B (https=)
WO (1) WO2018061607A1 (https=)

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Publication number Priority date Publication date Assignee Title
JP6467600B2 (ja) * 2016-09-30 2019-02-13 株式会社リガク 波長分散型蛍光ｘ線分析装置
CN112313503B (zh) * 2018-04-20 2024-07-05 美卓奥图泰芬兰有限公司 X射线荧光分析仪系统和用于对浆料中的感兴趣元素执行x射线荧光分析的方法
JP6962951B2 (ja) * 2019-03-08 2021-11-05 日本電子株式会社 分析装置およびスペクトル生成方法
JP7100910B2 (ja) * 2020-12-01 2022-07-14 株式会社リガク 全反射蛍光ｘ線分析装置
JP7726044B2 (ja) * 2021-01-05 2025-08-20 株式会社島津製作所 Ｘ線分光分析装置および元素分析方法
JP7845687B2 (ja) * 2023-01-31 2026-04-15 株式会社リガク 検出器台座及びｘ線回折装置

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JPS49118493A (https=) * 1973-03-12 1974-11-12
JPH05340897A (ja) * 1992-06-11 1993-12-24 Shimadzu Corp Ｘ線分光器
JP2685726B2 (ja) * 1994-10-31 1997-12-03 理学電機工業株式会社 Ｘ線分析装置
CN1270176C (zh) * 2002-12-02 2006-08-16 中国科学技术大学 对组合样品的结构和成分进行测量分析的方法及装置
US20060153332A1 (en) * 2003-03-27 2006-07-13 Hisayuki Kohno X-ray fluorescence analyzer
US7190762B2 (en) * 2004-10-29 2007-03-13 Broker Axs, Inc Scanning line detector for two-dimensional x-ray diffractometer
JP4908119B2 (ja) * 2005-10-19 2012-04-04 株式会社リガク 蛍光ｘ線分析装置
US8283631B2 (en) * 2008-05-08 2012-10-09 Kla-Tencor Corporation In-situ differential spectroscopy
RU2419088C1 (ru) * 2010-02-01 2011-05-20 Учреждение Российской академии наук Физический институт им. П.Н. Лебедева РАН (ФИАН) Рентгеновский спектрометр
JP5441856B2 (ja) * 2010-09-10 2014-03-12 日本電子株式会社 Ｘ線検出システム
JP5412649B2 (ja) 2011-02-01 2014-02-12 株式会社リガク 蛍光ｘ線分析装置
WO2015056305A1 (ja) * 2013-10-15 2015-04-23 株式会社島津製作所 蛍光ｘ線分析方法及び蛍光ｘ線分析装置
JP6346036B2 (ja) 2014-09-09 2018-06-20 株式会社日立ハイテクサイエンス 蛍光ｘ線分析装置及びその測定位置調整方法
EP3064933B1 (en) * 2015-03-03 2021-04-21 Malvern Panalytical B.V. Quantitative x-ray analysis
US9739730B2 (en) 2015-03-03 2017-08-22 Panalytical B.V. Quantitative X-ray analysis—multi optical path instrument
JP6467600B2 (ja) * 2016-09-30 2019-02-13 株式会社リガク 波長分散型蛍光ｘ線分析装置
JP6383018B2 (ja) * 2017-01-19 2018-08-29 本田技研工業株式会社 Ｘ線回折測定方法及び装置

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Publication number Publication date
JP6467600B2 (ja) 2019-02-13
WO2018061607A1 (ja) 2018-04-05
EP3521813A4 (en) 2020-06-24
US10948436B2 (en) 2021-03-16
CN109791116A (zh) 2019-05-21
JP2018054571A (ja) 2018-04-05
WO2018061607A8 (ja) 2019-04-04
US20190227008A1 (en) 2019-07-25
EP3521813B1 (en) 2022-12-07
EP3521813A1 (en) 2019-08-07

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