WO2018061607A8 - 波長分散型蛍光ｘ線分析装置 - Google Patents

波長分散型蛍光ｘ線分析装置 Download PDF

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Publication number
WO2018061607A8
WO2018061607A8 PCT/JP2017/031494 JP2017031494W WO2018061607A8 WO 2018061607 A8 WO2018061607 A8 WO 2018061607A8 JP 2017031494 W JP2017031494 W JP 2017031494W WO 2018061607 A8 WO2018061607 A8 WO 2018061607A8
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WO
WIPO (PCT)
Prior art keywords
ray
light
fluorescence spectrometer
wavelength dispersive
ray fluorescence
Prior art date
Application number
PCT/JP2017/031494
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English (en)
French (fr)
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WO2018061607A1 (ja
Inventor
秀一 加藤
山田　隆
片岡　由行
Original Assignee
株式会社リガク
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Publication date
Application filed by 株式会社リガク filed Critical 株式会社リガク
Priority to CN201780059601.1A priority Critical patent/CN109791116B/zh
Priority to EP17855565.2A priority patent/EP3521813B1/en
Publication of WO2018061607A1 publication Critical patent/WO2018061607A1/ja
Priority to US16/370,363 priority patent/US10948436B2/en
Publication of WO2018061607A8 publication Critical patent/WO2018061607A8/ja

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/2209—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using wavelength dispersive spectroscopy [WDS]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/07—Investigating materials by wave or particle radiation secondary emission
    • G01N2223/076—X-ray fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/10—Different kinds of radiation or particles
    • G01N2223/101—Different kinds of radiation or particles electromagnetic radiation
    • G01N2223/1016—X-ray
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/30—Accessories, mechanical or electrical features
    • G01N2223/315—Accessories, mechanical or electrical features monochromators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/30—Accessories, mechanical or electrical features
    • G01N2223/32—Accessories, mechanical or electrical features adjustments of elements during operation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/50—Detectors
    • G01N2223/501—Detectors array
    • G01N2223/5015—Detectors array linear array

Abstract

直線状に配列された複数の検出素子（７）を有する単一の一次元検出器（１０）を備えた波長分散型蛍光Ｘ線分析装置であって、一次元検出器（１０）の位置について、検出素子（７）の配列方向が分光素子（６）における分光角度方向に対して平行となる平行位置と交差する交差位置とのいずれかに設定するための検出器位置変更機構（１１）を備え、平行位置では、一次元検出器（１０）の受光面が集光２次Ｘ線（４２）の焦点に位置し、交差位置では、受光スリット（９）が集光２次Ｘ線（４２）の焦点に配置され、一次元検出器（１０）の受光面は受光スリット（９）よりも分光素子（６）から離れた集光２次Ｘ線（４２）の進行方向側に位置する。
PCT/JP2017/031494 2016-09-30 2017-08-31 波長分散型蛍光ｘ線分析装置 WO2018061607A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN201780059601.1A CN109791116B (zh) 2016-09-30 2017-08-31 波长色散型荧光x射线分析装置
EP17855565.2A EP3521813B1 (en) 2016-09-30 2017-08-31 Wavelength dispersive x-ray fluorescence spectrometer
US16/370,363 US10948436B2 (en) 2016-09-30 2019-03-29 Wavelength dispersive X-ray fluorescence spectrometer

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016194356A JP6467600B2 (ja) 2016-09-30 2016-09-30 波長分散型蛍光ｘ線分析装置
JP2016-194356 2016-09-30

Related Child Applications (1)

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US16/370,363 Continuation US10948436B2 (en) 2016-09-30 2019-03-29 Wavelength dispersive X-ray fluorescence spectrometer

Publications (2)

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WO2018061607A1 WO2018061607A1 (ja) 2018-04-05
WO2018061607A8 true WO2018061607A8 (ja) 2019-04-04

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US (1) US10948436B2 (ja)
EP (1) EP3521813B1 (ja)
JP (1) JP6467600B2 (ja)
CN (1) CN109791116B (ja)
WO (1) WO2018061607A1 (ja)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6467600B2 (ja) * 2016-09-30 2019-02-13 株式会社リガク 波長分散型蛍光ｘ線分析装置
US11680913B2 (en) * 2018-04-20 2023-06-20 Outotec (Finland) Oy X-ray fluorescence analyzer system and a method for performing X-ray fluorescence analysis of an element of interest in slurry
JP6962951B2 (ja) * 2019-03-08 2021-11-05 日本電子株式会社 分析装置およびスペクトル生成方法
JP7100910B2 (ja) * 2020-12-01 2022-07-14 株式会社リガク 全反射蛍光ｘ線分析装置

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49118493A (ja) 1973-03-12 1974-11-12
JPH05340897A (ja) * 1992-06-11 1993-12-24 Shimadzu Corp Ｘ線分光器
JP2685726B2 (ja) * 1994-10-31 1997-12-03 理学電機工業株式会社 Ｘ線分析装置
CN1270176C (zh) * 2002-12-02 2006-08-16 中国科学技术大学 对组合样品的结构和成分进行测量分析的方法及装置
JP3729203B2 (ja) * 2003-03-27 2005-12-21 理学電機工業株式会社 蛍光ｘ線分析装置
US7190762B2 (en) * 2004-10-29 2007-03-13 Broker Axs, Inc Scanning line detector for two-dimensional x-ray diffractometer
JP4908119B2 (ja) * 2005-10-19 2012-04-04 株式会社リガク 蛍光ｘ線分析装置
US8283631B2 (en) * 2008-05-08 2012-10-09 Kla-Tencor Corporation In-situ differential spectroscopy
RU2419088C1 (ru) * 2010-02-01 2011-05-20 Учреждение Российской академии наук Физический институт им. П.Н. Лебедева РАН (ФИАН) Рентгеновский спектрометр
JP5441856B2 (ja) * 2010-09-10 2014-03-12 日本電子株式会社 Ｘ線検出システム
JP5412649B2 (ja) 2011-02-01 2014-02-12 株式会社リガク 蛍光ｘ線分析装置
WO2015056305A1 (ja) * 2013-10-15 2015-04-23 株式会社島津製作所 蛍光ｘ線分析方法及び蛍光ｘ線分析装置
JP6346036B2 (ja) * 2014-09-09 2018-06-20 株式会社日立ハイテクサイエンス 蛍光ｘ線分析装置及びその測定位置調整方法
JP6706932B2 (ja) * 2015-03-03 2020-06-10 マルバーン パナリティカル ビー ヴィ 定量ｘ線分析方法及びマルチ光路機器
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JP6383018B2 (ja) * 2017-01-19 2018-08-29 本田技研工業株式会社 Ｘ線回折測定方法及び装置

Also Published As

Publication number Publication date
US10948436B2 (en) 2021-03-16
EP3521813A4 (en) 2020-06-24
EP3521813A1 (en) 2019-08-07
JP2018054571A (ja) 2018-04-05
CN109791116B (zh) 2021-06-18
JP6467600B2 (ja) 2019-02-13
EP3521813B1 (en) 2022-12-07
WO2018061607A1 (ja) 2018-04-05
US20190227008A1 (en) 2019-07-25
CN109791116A (zh) 2019-05-21

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