CN108291934B - 电子部件的检查装置以及检查方法 - Google Patents

电子部件的检查装置以及检查方法 Download PDF

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Publication number
CN108291934B
CN108291934B CN201680042075.3A CN201680042075A CN108291934B CN 108291934 B CN108291934 B CN 108291934B CN 201680042075 A CN201680042075 A CN 201680042075A CN 108291934 B CN108291934 B CN 108291934B
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China
Prior art keywords
inspection
inspection chamber
dry gas
electronic component
temperature
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Chinese (zh)
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CN108291934A (zh
Inventor
朝仓秀树
藤田建豪
菅野晶夫
前泽信明
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Murata Manufacturing Co Ltd
Tokyo Weld Co Ltd
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Murata Manufacturing Co Ltd
Tokyo Weld Co Ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
CN201680042075.3A 2015-09-29 2016-06-30 电子部件的检查装置以及检查方法 Active CN108291934B (zh)

Applications Claiming Priority (3)

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JP2015-190873 2015-09-29
JP2015190873 2015-09-29
PCT/JP2016/069422 WO2017056607A1 (ja) 2015-09-29 2016-06-30 電子部品の検査装置及び検査方法

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CN108291934A CN108291934A (zh) 2018-07-17
CN108291934B true CN108291934B (zh) 2021-04-06

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JP (1) JP6560356B2 (ja)
CN (1) CN108291934B (ja)
WO (1) WO2017056607A1 (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020165902A (ja) * 2019-03-29 2020-10-08 新東工業株式会社 検査装置
TWI793463B (zh) * 2020-10-16 2023-02-21 萬潤科技股份有限公司 電子元件檢測設備
KR20220080393A (ko) * 2020-12-07 2022-06-14 삼성전자주식회사 테스트 장치 및 방법
JP7007677B1 (ja) 2021-03-11 2022-02-10 上野精機株式会社 電子部品検査装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103957683A (zh) * 2014-05-13 2014-07-30 瑟帕斯（天津）水系统科技有限公司 一种适用于电力电子装置的密封式循环冷却系统
CN104596675A (zh) * 2013-10-31 2015-05-06 精工爱普生株式会社 传感器元件、力检测装置、机器人、电子部件输送装置

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JPS62187263A (ja) * 1986-02-14 1987-08-15 Hitachi Ltd 試験装置
JPH06148268A (ja) * 1992-11-11 1994-05-27 Ee I Tec:Kk Ｉｃ用低温ハンドラ
JPH0843481A (ja) * 1994-08-02 1996-02-16 Hitachi Ltd 電子部品検査装置
JPH10274667A (ja) * 1997-03-31 1998-10-13 Tokyo Denpa Kk 電子部品の自動温度特性試験装置
JPH11142469A (ja) * 1997-11-05 1999-05-28 Nec Corp 低高温電気特性測定方法および装置
JP3690257B2 (ja) * 2000-08-28 2005-08-31 株式会社村田製作所 チップ部品の搬送装置
JP2006292590A (ja) * 2005-04-12 2006-10-26 Seiko Epson Corp 検査方法および検査装置
DE102006015365B4 (de) * 2006-04-03 2009-11-19 Multitest Elektronische Systeme Gmbh Verfahren und Vorrichtung zum Temperieren von elektronischen Bauelementen
JP2009105339A (ja) * 2007-10-25 2009-05-14 Mitsumi Electric Co Ltd 検査装置及び検査方法
JP5377915B2 (ja) * 2008-09-30 2013-12-25 東京エレクトロン株式会社 検査装置及び検査方法
TWI426280B (zh) * 2011-07-15 2014-02-11 Hon Tech Inc The crimping mechanism of the electronic component testing device
JP5452640B2 (ja) * 2012-02-07 2014-03-26 シャープ株式会社 半導体試験装置
JP2014011373A (ja) * 2012-07-02 2014-01-20 Tokyo Electron Ltd 半導体検査システム及びインターフェース部の結露防止方法
JP2016023939A (ja) * 2014-07-16 2016-02-08 セイコーエプソン株式会社 電子部品搬送装置および電子部品検査装置
JP6148268B2 (ja) * 2015-02-27 2017-06-14 株式会社三共 遊技機

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104596675A (zh) * 2013-10-31 2015-05-06 精工爱普生株式会社 传感器元件、力检测装置、机器人、电子部件输送装置
CN103957683A (zh) * 2014-05-13 2014-07-30 瑟帕斯（天津）水系统科技有限公司 一种适用于电力电子装置的密封式循环冷却系统

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
正温度系数电热元件及器具试验仪的研制;司念朋;《中国优秀硕士学位论文全文数据库 信息科技辑》;20150515(第5期);I135-119 *

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WO2017056607A1 (ja) 2017-04-06
CN108291934A (zh) 2018-07-17
JP6560356B2 (ja) 2019-08-14
JPWO2017056607A1 (ja) 2018-04-05

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