CN107685412B - 成型模、树脂成型装置及树脂成型品的制造方法 - Google Patents
成型模、树脂成型装置及树脂成型品的制造方法 Download PDFInfo
- Publication number
- CN107685412B CN107685412B CN201710573768.1A CN201710573768A CN107685412B CN 107685412 B CN107685412 B CN 107685412B CN 201710573768 A CN201710573768 A CN 201710573768A CN 107685412 B CN107685412 B CN 107685412B
- Authority
- CN
- China
- Prior art keywords
- mold
- frame
- resin
- attached
- inner member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000011347 resin Substances 0.000 title claims abstract description 160
- 229920005989 resin Polymers 0.000 title claims abstract description 160
- 238000000465 moulding Methods 0.000 title claims abstract description 131
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 55
- 238000000034 method Methods 0.000 title abstract description 11
- 239000000758 substrate Substances 0.000 description 102
- 235000012431 wafers Nutrition 0.000 description 44
- 230000007246 mechanism Effects 0.000 description 33
- 239000000463 material Substances 0.000 description 31
- 239000004065 semiconductor Substances 0.000 description 30
- 238000007789 sealing Methods 0.000 description 8
- 230000002093 peripheral effect Effects 0.000 description 7
- 230000007723 transport mechanism Effects 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 230000009969 flowable effect Effects 0.000 description 5
- 238000004806 packaging method and process Methods 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000005538 encapsulation Methods 0.000 description 4
- 238000000748 compression moulding Methods 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
- B29C43/04—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles using movable moulds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/36—Moulds for making articles of definite length, i.e. discrete articles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/565—Moulds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
- B29C43/04—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles using movable moulds
- B29C2043/046—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles using movable moulds travelling between different stations, e.g. feeding, moulding, curing stations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
- B29C43/18—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles
- B29C2043/181—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles encapsulated
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Casting Or Compression Moulding Of Plastics Or The Like (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016152524A JP6827283B2 (ja) | 2016-08-03 | 2016-08-03 | 成形型、樹脂成形装置及び樹脂成形品の製造方法 |
JP2016-152524 | 2016-08-03 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN107685412A CN107685412A (zh) | 2018-02-13 |
CN107685412B true CN107685412B (zh) | 2020-03-06 |
Family
ID=61152976
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201710573768.1A Active CN107685412B (zh) | 2016-08-03 | 2017-07-14 | 成型模、树脂成型装置及树脂成型品的制造方法 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP6827283B2 (ko) |
KR (1) | KR102037098B1 (ko) |
CN (1) | CN107685412B (ko) |
TW (1) | TWI669202B (ko) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6854784B2 (ja) * | 2018-01-15 | 2021-04-07 | Towa株式会社 | 樹脂成形装置及び樹脂成形品製造方法 |
JP6994445B2 (ja) * | 2018-08-31 | 2022-01-14 | Towa株式会社 | 樹脂成形装置、離型フィルムの剥離方法、樹脂成形品の製造方法 |
JP7018377B2 (ja) * | 2018-11-26 | 2022-02-10 | Towa株式会社 | 成形型、樹脂成形装置、樹脂成形品の製造方法 |
JP2022037315A (ja) | 2020-08-25 | 2022-03-09 | Towa株式会社 | 樹脂成形装置及び樹脂成形品の製造方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1832839A (zh) * | 2004-02-13 | 2006-09-13 | 东和株式会社 | 电子元器件的树脂密封方法以及用于该方法的模具 |
CN102529002A (zh) * | 2010-09-16 | 2012-07-04 | 东和株式会社 | 压缩成形模具及压缩成形方法 |
CN103240817A (zh) * | 2012-02-14 | 2013-08-14 | 住友重机械工业株式会社 | 树脂密封装置及树脂密封方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3282453B2 (ja) * | 1995-06-30 | 2002-05-13 | ぺんてる株式会社 | カセット式射出成形用金型装置 |
JP3859457B2 (ja) * | 2001-03-27 | 2006-12-20 | 沖電気工業株式会社 | 半導体装置の製造方法 |
JP3997521B2 (ja) * | 2002-12-06 | 2007-10-24 | 日本ゼオン株式会社 | 射出成形用金型及び平板成形品の製造方法 |
JP4217572B2 (ja) | 2003-09-18 | 2009-02-04 | アピックヤマダ株式会社 | 樹脂モールド方法および樹脂モールド装置 |
JP2005311082A (ja) * | 2004-04-21 | 2005-11-04 | Nec Electronics Corp | 半導体デバイス製造装置 |
JP6039198B2 (ja) * | 2012-03-07 | 2016-12-07 | Towa株式会社 | 樹脂封止電子部品の製造方法及び樹脂封止電子部品の製造装置 |
JP5764629B2 (ja) * | 2013-09-24 | 2015-08-19 | アピックヤマダ株式会社 | シート樹脂の製造方法 |
-
2016
- 2016-08-03 JP JP2016152524A patent/JP6827283B2/ja active Active
-
2017
- 2017-05-12 KR KR1020170059107A patent/KR102037098B1/ko active IP Right Grant
- 2017-07-14 CN CN201710573768.1A patent/CN107685412B/zh active Active
- 2017-08-03 TW TW106126267A patent/TWI669202B/zh active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1832839A (zh) * | 2004-02-13 | 2006-09-13 | 东和株式会社 | 电子元器件的树脂密封方法以及用于该方法的模具 |
CN102529002A (zh) * | 2010-09-16 | 2012-07-04 | 东和株式会社 | 压缩成形模具及压缩成形方法 |
CN103240817A (zh) * | 2012-02-14 | 2013-08-14 | 住友重机械工业株式会社 | 树脂密封装置及树脂密封方法 |
Also Published As
Publication number | Publication date |
---|---|
KR102037098B1 (ko) | 2019-10-29 |
TW201805133A (zh) | 2018-02-16 |
CN107685412A (zh) | 2018-02-13 |
TWI669202B (zh) | 2019-08-21 |
JP2018020477A (ja) | 2018-02-08 |
KR20180015568A (ko) | 2018-02-13 |
JP6827283B2 (ja) | 2021-02-10 |
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