CN107430988B - 压印装置、压印方法和制造物品的方法 - Google Patents

压印装置、压印方法和制造物品的方法 Download PDF

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Publication number
CN107430988B
CN107430988B CN201680021127.9A CN201680021127A CN107430988B CN 107430988 B CN107430988 B CN 107430988B CN 201680021127 A CN201680021127 A CN 201680021127A CN 107430988 B CN107430988 B CN 107430988B
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China
Prior art keywords
substrate
image
mold
imprint
detection process
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CN201680021127.9A
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English (en)
Chinese (zh)
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CN107430988A (zh
Inventor
寺尾勉
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Canon Inc
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Canon Inc
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Publication of CN107430988A publication Critical patent/CN107430988A/zh
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/002—Component parts, details or accessories; Auxiliary operations
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C37/00—Component parts, details, accessories or auxiliary operations, not covered by group B29C33/00 or B29C35/00
    • B29C2037/90—Measuring, controlling or regulating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C37/00—Component parts, details, accessories or auxiliary operations, not covered by group B29C33/00 or B29C35/00
    • B29C2037/90—Measuring, controlling or regulating
    • B29C2037/903—Measuring, controlling or regulating by means of a computer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C37/00—Component parts, details, accessories or auxiliary operations, not covered by group B29C33/00 or B29C35/00
    • B29C2037/90—Measuring, controlling or regulating
    • B29C2037/906—Measuring, controlling or regulating using visualisation means or linked accessories, e.g. screens, printers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B29C59/022—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
    • B29C2059/023—Microembossing

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
CN201680021127.9A 2015-04-14 2016-03-07 压印装置、压印方法和制造物品的方法 Active CN107430988B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2015-082856 2015-04-14
JP2015082856A JP6403627B2 (ja) 2015-04-14 2015-04-14 インプリント装置、インプリント方法及び物品の製造方法
PCT/JP2016/001218 WO2016166929A1 (en) 2015-04-14 2016-03-07 Imprint apparatus, imprint method, and method of manufacturing article

Publications (2)

Publication Number Publication Date
CN107430988A CN107430988A (zh) 2017-12-01
CN107430988B true CN107430988B (zh) 2020-07-10

Family

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CN201680021127.9A Active CN107430988B (zh) 2015-04-14 2016-03-07 压印装置、压印方法和制造物品的方法

Country Status (7)

Country Link
US (1) US10751930B2 (enExample)
JP (1) JP6403627B2 (enExample)
KR (1) KR101974771B1 (enExample)
CN (1) CN107430988B (enExample)
SG (1) SG11201707268PA (enExample)
TW (1) TWI655076B (enExample)
WO (1) WO2016166929A1 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6799397B2 (ja) * 2015-08-10 2020-12-16 キヤノン株式会社 インプリント装置、および物品の製造方法
JP6541518B2 (ja) * 2015-09-04 2019-07-10 キヤノン株式会社 インプリント装置、インプリント方法、および物品の製造方法
JP6971599B2 (ja) * 2017-03-15 2021-11-24 キヤノン株式会社 インプリント装置、欠陥検査方法、パターン形成方法および物品製造方法
JP2017120930A (ja) * 2017-03-28 2017-07-06 大日本印刷株式会社 インプリント装置及びインプリント方法
JP7241493B2 (ja) * 2017-11-07 2023-03-17 キヤノン株式会社 インプリント装置、情報処理装置、及び物品の製造方法
US11030738B2 (en) * 2019-07-05 2021-06-08 International Business Machines Corporation Image defect identification
JP7328109B2 (ja) * 2019-10-02 2023-08-16 キヤノン株式会社 型、平坦化装置、平坦化方法及び物品の製造方法
US11295439B2 (en) 2019-10-16 2022-04-05 International Business Machines Corporation Image recovery
JP7391806B2 (ja) * 2020-09-16 2023-12-05 キオクシア株式会社 インプリント装置、情報処理装置、及びインプリント方法
JP7685941B2 (ja) * 2021-04-14 2025-05-30 キヤノン株式会社 インプリント装置、インプリント方法及び物品の製造方法
US12353127B2 (en) 2021-04-14 2025-07-08 Canon Kabushiki Kaisha Imprint apparatus, imprint method and article manufacturing method
JP7721736B1 (ja) * 2024-05-14 2025-08-12 キヤノン株式会社 平坦化装置、平坦化方法、および物品の製造方法

Citations (8)

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CN101884019A (zh) * 2007-12-04 2010-11-10 分子制模股份有限公司 基于接触线移动跟踪控制的高吞吐量刻印
CN103129117A (zh) * 2011-11-30 2013-06-05 大日本网屏制造株式会社 定位方法、转印方法以及转印装置
JP5455583B2 (ja) * 2009-11-30 2014-03-26 キヤノン株式会社 インプリント装置
US8734701B2 (en) * 2009-06-16 2014-05-27 Canon Kabushiki Kaisha Imprint apparatus and method of manufacturing article
CN104281002A (zh) * 2013-07-02 2015-01-14 佳能株式会社 图案形成方法、光刻装置、光刻系统及物品制造方法
JP2015018997A (ja) * 2013-07-12 2015-01-29 大日本印刷株式会社 インプリント装置及びインプリント方法
JP2015050217A (ja) * 2013-08-30 2015-03-16 大日本印刷株式会社 インプリント方法およびインプリント装置
WO2015045348A1 (en) * 2013-09-25 2015-04-02 Canon Kabushiki Kaisha Method for forming a patterned film, method for manufacturing optical component, method for manufacturing circuit board, and method for manufacturing electronic component

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US20080160129A1 (en) 2006-05-11 2008-07-03 Molecular Imprints, Inc. Template Having a Varying Thickness to Facilitate Expelling a Gas Positioned Between a Substrate and the Template
JP2005214980A (ja) * 2005-01-31 2005-08-11 Miyazaki Oki Electric Co Ltd ウエハのマクロ検査方法および自動ウエハマクロ検査装置
JP2006294684A (ja) * 2005-04-06 2006-10-26 Nikon Corp 表面検査装置
JP5004027B2 (ja) 2008-04-22 2012-08-22 富士電機株式会社 インプリント方法およびその装置
JP2010149469A (ja) * 2008-12-26 2010-07-08 Showa Denko Kk インプリント装置およびモールドの汚染検出方法
JP2010203892A (ja) * 2009-03-03 2010-09-16 Nikon Corp 基板検査方法
JP2011240662A (ja) * 2010-05-20 2011-12-01 Toshiba Corp インプリント方法、インプリント装置及びプログラム
JP6282069B2 (ja) 2013-09-13 2018-02-21 キヤノン株式会社 インプリント装置、インプリント方法、検出方法及びデバイス製造方法

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101884019A (zh) * 2007-12-04 2010-11-10 分子制模股份有限公司 基于接触线移动跟踪控制的高吞吐量刻印
US8734701B2 (en) * 2009-06-16 2014-05-27 Canon Kabushiki Kaisha Imprint apparatus and method of manufacturing article
JP5455583B2 (ja) * 2009-11-30 2014-03-26 キヤノン株式会社 インプリント装置
CN103129117A (zh) * 2011-11-30 2013-06-05 大日本网屏制造株式会社 定位方法、转印方法以及转印装置
CN104281002A (zh) * 2013-07-02 2015-01-14 佳能株式会社 图案形成方法、光刻装置、光刻系统及物品制造方法
JP2015018997A (ja) * 2013-07-12 2015-01-29 大日本印刷株式会社 インプリント装置及びインプリント方法
JP2015050217A (ja) * 2013-08-30 2015-03-16 大日本印刷株式会社 インプリント方法およびインプリント装置
WO2015045348A1 (en) * 2013-09-25 2015-04-02 Canon Kabushiki Kaisha Method for forming a patterned film, method for manufacturing optical component, method for manufacturing circuit board, and method for manufacturing electronic component

Also Published As

Publication number Publication date
CN107430988A (zh) 2017-12-01
US20180022015A1 (en) 2018-01-25
US10751930B2 (en) 2020-08-25
SG11201707268PA (en) 2017-10-30
KR20170133501A (ko) 2017-12-05
WO2016166929A1 (en) 2016-10-20
JP2016201522A (ja) 2016-12-01
TWI655076B (zh) 2019-04-01
JP6403627B2 (ja) 2018-10-10
KR101974771B1 (ko) 2019-05-02
TW201636186A (zh) 2016-10-16

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