CN106887970B - 电气设备、压电马达、机器人、机械手以及送液泵 - Google Patents

电气设备、压电马达、机器人、机械手以及送液泵 Download PDF

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Publication number
CN106887970B
CN106887970B CN201610942666.8A CN201610942666A CN106887970B CN 106887970 B CN106887970 B CN 106887970B CN 201610942666 A CN201610942666 A CN 201610942666A CN 106887970 B CN106887970 B CN 106887970B
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China
Prior art keywords
piezoelectric
piezoelectric actuator
electrical device
circuit board
actuator units
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CN201610942666.8A
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English (en)
Chinese (zh)
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CN106887970A (zh
Inventor
露木幸一郎
古谷升
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Seiko Epson Corp
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Seiko Epson Corp
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0028—Gripping heads and other end effectors with movable, e.g. pivoting gripping jaw surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/12—Program-controlled manipulators characterised by positioning means for manipulator elements electric
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F04B43/09—Pumps having electric drive
    • F04B43/095—Piezoelectric drive
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R12/00—Structural associations of a plurality of mutually-insulated electrical connecting elements, specially adapted for printed circuits, e.g. printed circuit boards [PCB], flat or ribbon cables, or like generally planar structures, e.g. terminal strips, terminal blocks; Coupling devices specially adapted for printed circuits, flat or ribbon cables, or like generally planar structures; Terminals specially adapted for contact with, or insertion into, printed circuits, flat or ribbon cables, or like generally planar structures
    • H01R12/50—Fixed connections
    • H01R12/59—Fixed connections for flexible printed circuits, flat or ribbon cables or like structures
    • H01R12/65—Fixed connections for flexible printed circuits, flat or ribbon cables or like structures characterised by the terminal
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/003—Driving devices, e.g. vibrators using longitudinal or radial modes combined with bending modes
    • H02N2/004—Rectangular vibrators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/103—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/03—Use of materials for the substrate
    • H05K1/0393—Flexible materials
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/03—Use of materials for the substrate
    • H05K1/05—Insulated conductive substrates, e.g. insulated metal substrate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/072—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by laminating or bonding of piezoelectric or electrostrictive bodies
    • H10N30/073—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by laminating or bonding of piezoelectric or electrostrictive bodies by fusion of metals or by adhesives
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • H10N30/2023—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement having polygonal or rectangular shape
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/875—Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Structures For Mounting Electric Components On Printed Circuit Boards (AREA)
CN201610942666.8A 2015-11-13 2016-11-01 电气设备、压电马达、机器人、机械手以及送液泵 Active CN106887970B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015222782A JP6676935B2 (ja) 2015-11-13 2015-11-13 電気デバイス、圧電モーター、ロボット、ハンド及び送液ポンプ
JP2015-222782 2015-11-13

Publications (2)

Publication Number Publication Date
CN106887970A CN106887970A (zh) 2017-06-23
CN106887970B true CN106887970B (zh) 2020-03-06

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Country Link
US (1) US10498260B2 (https=)
JP (1) JP6676935B2 (https=)
CN (1) CN106887970B (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6406538B2 (ja) * 2014-06-17 2018-10-17 Toto株式会社 トイレ装置用のリモコン装置
JP6601174B2 (ja) * 2015-11-13 2019-11-06 セイコーエプソン株式会社 圧電アクチュエーター、積層アクチュエーター、圧電モーター、ロボット、ハンド及び送液ポンプ
JP7167653B2 (ja) * 2018-11-16 2022-11-09 Tdk株式会社 振動デバイス、接続構造体、及び振動デバイスの製造方法
JP7259321B2 (ja) * 2018-12-26 2023-04-18 セイコーエプソン株式会社 圧電駆動装置、圧電素子ユニットの製造方法、およびロボット
JP7207146B2 (ja) * 2019-05-13 2023-01-18 Tdk株式会社 振動デバイス及び電子機器
JP2021035213A (ja) * 2019-08-27 2021-03-01 セイコーエプソン株式会社 圧電駆動装置およびロボット
WO2023188122A1 (ja) * 2022-03-30 2023-10-05 リンテック株式会社 配線シート

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007336504A (ja) * 2006-06-12 2007-12-27 Taiyo Yuden Co Ltd 振動板
CN102918674A (zh) * 2010-06-07 2013-02-06 欧陆汽车有限责任公司 用于制造压电执行器的方法和压电执行器
CN104821448A (zh) * 2014-01-31 2015-08-05 日本航空电子工业株式会社 连接器对
WO2015136984A1 (ja) * 2014-03-10 2015-09-17 トヨタ自動車株式会社 端子接続構造及び半導体装置

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2714178B2 (ja) 1989-09-20 1998-02-16 株式会社日立製作所 真空処理装置
JP3052615B2 (ja) * 1992-11-04 2000-06-19 松下電器産業株式会社 半導体装置およびその製造方法
JPH088688A (ja) * 1994-06-16 1996-01-12 Daishinku Co 多段接続表面実装型圧電フィルタ
JP3052615U (ja) * 1998-03-25 1998-09-29 金堂 呉 取付け継ぎ手
JP2001203229A (ja) 2000-01-18 2001-07-27 Seiko Epson Corp 半導体装置及びその製造方法、回路基板並びに電子機器
JP2001285431A (ja) * 2000-04-03 2001-10-12 Matsushita Electric Ind Co Ltd 携帯機器における内蔵バッテリー保持構造
JP3472526B2 (ja) * 2000-04-27 2003-12-02 日本圧着端子製造株式会社 集積回路素子用接続モジュールおよび接続モジュール付き集積回路素子
US8129253B2 (en) * 2001-08-13 2012-03-06 Finisar Corporation Providing current control over wafer borne semiconductor devices using trenches
JP2007036009A (ja) 2005-07-28 2007-02-08 Seiko Epson Corp 接続構造、接続方法、及び液滴吐出ヘッド
JP2008243853A (ja) * 2007-03-23 2008-10-09 Renesas Technology Corp インターポーザ基板、それを利用したｌｓｉチップ及び情報端末装置、インターポーザ基板製造方法、並びにｌｓｉチップ製造方法
JP5165630B2 (ja) * 2009-04-09 2013-03-21 京セラコネクタプロダクツ株式会社 コネクタ
JP5546369B2 (ja) * 2010-06-25 2014-07-09 千住金属工業株式会社 蓄電デバイス用電極、その製造方法及びその接続方法
JP5682327B2 (ja) 2011-01-25 2015-03-11 ソニー株式会社 固体撮像素子、固体撮像素子の製造方法、及び電子機器
JP2013165925A (ja) * 2012-02-17 2013-08-29 Japan Delivery System Corp 物品収受装置
JP6329372B2 (ja) 2014-01-15 2018-05-23 キヤノン株式会社 駆動装置、レンズ保持装置、及びモータ付き装置
JP2018045886A (ja) * 2016-09-15 2018-03-22 シチズン電子株式会社 コネクタユニット

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007336504A (ja) * 2006-06-12 2007-12-27 Taiyo Yuden Co Ltd 振動板
CN102918674A (zh) * 2010-06-07 2013-02-06 欧陆汽车有限责任公司 用于制造压电执行器的方法和压电执行器
CN104821448A (zh) * 2014-01-31 2015-08-05 日本航空电子工业株式会社 连接器对
WO2015136984A1 (ja) * 2014-03-10 2015-09-17 トヨタ自動車株式会社 端子接続構造及び半導体装置

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JP6676935B2 (ja) 2020-04-08
US10498260B2 (en) 2019-12-03
US20170141702A1 (en) 2017-05-18
JP2017092326A (ja) 2017-05-25
CN106887970A (zh) 2017-06-23

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