CN105990193B - 粘接装置以及粘接方法 - Google Patents
粘接装置以及粘接方法 Download PDFInfo
- Publication number
- CN105990193B CN105990193B CN201610150040.3A CN201610150040A CN105990193B CN 105990193 B CN105990193 B CN 105990193B CN 201610150040 A CN201610150040 A CN 201610150040A CN 105990193 B CN105990193 B CN 105990193B
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- CN
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- standard
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- mounting
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000000034 method Methods 0.000 title claims abstract description 14
- 239000000758 substrate Substances 0.000 claims abstract description 80
- 238000006073 displacement reaction Methods 0.000 claims description 4
- 238000009434 installation Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 3
- 239000000470 constituent Substances 0.000 description 2
- 230000014509 gene expression Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000001413 cellular effect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/0015—Orientation; Alignment; Positioning
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67121—Apparatus for making assemblies not otherwise provided for, e.g. package constructions
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/02—Feeding of components
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/04—Mounting of components, e.g. of leadless components
- H05K13/0404—Pick-and-place heads or apparatus, e.g. with jaws
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Wire Bonding (AREA)
- Supply And Installment Of Electrical Components (AREA)
- Operations Research (AREA)
Abstract
Description
Claims (5)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020150036187A KR102247600B1 (ko) | 2015-03-16 | 2015-03-16 | 본딩 장치 및 본딩 방법 |
KR10-2015-0036187 | 2015-03-16 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN105990193A CN105990193A (zh) | 2016-10-05 |
CN105990193B true CN105990193B (zh) | 2021-05-18 |
Family
ID=57043932
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201610150040.3A Active CN105990193B (zh) | 2015-03-16 | 2016-03-16 | 粘接装置以及粘接方法 |
Country Status (3)
Country | Link |
---|---|
KR (1) | KR102247600B1 (zh) |
CN (1) | CN105990193B (zh) |
TW (1) | TWI701760B (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6626027B2 (ja) * | 2017-03-16 | 2019-12-25 | Towa株式会社 | 製造装置および電子部品の製造方法 |
MY186148A (en) * | 2017-11-27 | 2021-06-28 | Mi Equipment M Sdn Bhd | Setup camera auto height alignment |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2780000B2 (ja) * | 1993-06-16 | 1998-07-23 | 澁谷工業株式会社 | 半導体位置合せ装置 |
KR100261590B1 (ko) * | 1995-01-06 | 2000-07-15 | 이중구 | 칩 마운팅 장치에서 줌렌즈를 이용한 오프셋 감지 장치 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11163047A (ja) | 1997-11-27 | 1999-06-18 | Toshiba Corp | 半導体装置の製造方法及びその装置 |
JP4128540B2 (ja) * | 2003-06-05 | 2008-07-30 | 株式会社新川 | ボンディング装置 |
US7727800B2 (en) * | 2005-12-12 | 2010-06-01 | Asm Assembly Automation Ltd. | High precision die bonding apparatus |
TWI468295B (zh) * | 2009-04-03 | 2015-01-11 | Hon Hai Prec Ind Co Ltd | 貼附裝置及使用該貼附裝置之貼附方法 |
TWM387365U (en) * | 2009-11-06 | 2010-08-21 | Gallant Prec Machining Co Ltd | Die bonding apparatus |
JP2016076505A (ja) * | 2013-01-23 | 2016-05-12 | 株式会社新川 | ダイボンダおよびダイボンダによる半導体ダイの破損検出方法 |
-
2015
- 2015-03-16 KR KR1020150036187A patent/KR102247600B1/ko active IP Right Grant
-
2016
- 2016-03-16 TW TW105108028A patent/TWI701760B/zh active
- 2016-03-16 CN CN201610150040.3A patent/CN105990193B/zh active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2780000B2 (ja) * | 1993-06-16 | 1998-07-23 | 澁谷工業株式会社 | 半導体位置合せ装置 |
KR100261590B1 (ko) * | 1995-01-06 | 2000-07-15 | 이중구 | 칩 마운팅 장치에서 줌렌즈를 이용한 오프셋 감지 장치 |
Also Published As
Publication number | Publication date |
---|---|
KR102247600B1 (ko) | 2021-05-03 |
KR20160111261A (ko) | 2016-09-26 |
TWI701760B (zh) | 2020-08-11 |
TW201635420A (zh) | 2016-10-01 |
CN105990193A (zh) | 2016-10-05 |
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Legal Events
Date | Code | Title | Description |
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C06 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
CB02 | Change of applicant information | ||
CB02 | Change of applicant information |
Address after: Gyeongnam Changwon City, South Korea Applicant after: HANWHA AEROSPACE Co.,Ltd. Address before: Gyeongnam Changwon City, South Korea Applicant before: HANWHA TECHWIN Co.,Ltd. |
|
TA01 | Transfer of patent application right | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20190408 Address after: Gyeongnam Changwon City, South Korea Applicant after: Hanwha Precision Machinery Co.,Ltd. Address before: Gyeongnam Changwon City, South Korea Applicant before: HANWHA AEROSPACE Co.,Ltd. |
|
GR01 | Patent grant | ||
GR01 | Patent grant |