CN105684099B - 层叠体、其制造方法和电子设备 - Google Patents
层叠体、其制造方法和电子设备 Download PDFInfo
- Publication number
- CN105684099B CN105684099B CN201580002351.9A CN201580002351A CN105684099B CN 105684099 B CN105684099 B CN 105684099B CN 201580002351 A CN201580002351 A CN 201580002351A CN 105684099 B CN105684099 B CN 105684099B
- Authority
- CN
- China
- Prior art keywords
- metal
- layer
- layered product
- compound layer
- metal compound
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000034 method Methods 0.000 title claims abstract description 45
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 10
- 229910052751 metal Inorganic materials 0.000 claims abstract description 293
- 239000002184 metal Substances 0.000 claims abstract description 293
- 238000002310 reflectometry Methods 0.000 claims abstract description 199
- 150000002736 metal compounds Chemical class 0.000 claims abstract description 189
- 239000000463 material Substances 0.000 claims abstract description 71
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 65
- 239000004065 semiconductor Substances 0.000 claims abstract description 57
- 239000000758 substrate Substances 0.000 claims abstract description 41
- 239000000203 mixture Substances 0.000 claims abstract description 39
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 claims abstract description 36
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 33
- 239000000956 alloy Substances 0.000 claims abstract description 33
- 150000002739 metals Chemical class 0.000 claims abstract description 12
- 239000010410 layer Substances 0.000 claims description 353
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 129
- 239000010949 copper Substances 0.000 claims description 114
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 99
- 229910052757 nitrogen Inorganic materials 0.000 claims description 49
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 30
- 230000008033 biological extinction Effects 0.000 claims description 29
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 27
- 239000001301 oxygen Substances 0.000 claims description 27
- 229910052760 oxygen Inorganic materials 0.000 claims description 27
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 26
- 230000008569 process Effects 0.000 claims description 25
- 229910052802 copper Inorganic materials 0.000 claims description 23
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims description 22
- 229910052782 aluminium Inorganic materials 0.000 claims description 13
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 12
- 229910052750 molybdenum Inorganic materials 0.000 claims description 12
- 229910003437 indium oxide Inorganic materials 0.000 claims description 11
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 10
- 239000011733 molybdenum Substances 0.000 claims description 10
- 229910001182 Mo alloy Inorganic materials 0.000 claims description 9
- 229910052759 nickel Inorganic materials 0.000 claims description 9
- 239000011701 zinc Substances 0.000 claims description 7
- 229910000838 Al alloy Inorganic materials 0.000 claims description 6
- 239000004411 aluminium Substances 0.000 claims description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 5
- 229910052799 carbon Inorganic materials 0.000 claims description 5
- 239000010941 cobalt Substances 0.000 claims description 5
- 229910017052 cobalt Inorganic materials 0.000 claims description 5
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 5
- 229910001887 tin oxide Inorganic materials 0.000 claims description 5
- 239000000654 additive Substances 0.000 claims description 3
- 239000002356 single layer Substances 0.000 claims description 3
- 230000000996 additive effect Effects 0.000 claims description 2
- 229910052725 zinc Inorganic materials 0.000 claims description 2
- 229910000881 Cu alloy Inorganic materials 0.000 claims 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims 1
- 238000009738 saturating Methods 0.000 claims 1
- 230000001603 reducing effect Effects 0.000 abstract description 8
- 238000009740 moulding (composite fabrication) Methods 0.000 description 132
- 239000011787 zinc oxide Substances 0.000 description 62
- 238000005530 etching Methods 0.000 description 35
- 238000012360 testing method Methods 0.000 description 35
- 238000004544 sputter deposition Methods 0.000 description 34
- 230000008859 change Effects 0.000 description 30
- 239000011521 glass Substances 0.000 description 22
- 230000003287 optical effect Effects 0.000 description 20
- 230000008676 import Effects 0.000 description 17
- 150000001875 compounds Chemical class 0.000 description 15
- 239000000126 substance Substances 0.000 description 12
- 239000007789 gas Substances 0.000 description 11
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 10
- 229910052593 corundum Inorganic materials 0.000 description 10
- 229910000765 intermetallic Inorganic materials 0.000 description 10
- 229910001845 yogo sapphire Inorganic materials 0.000 description 10
- 238000010521 absorption reaction Methods 0.000 description 9
- 238000010438 heat treatment Methods 0.000 description 9
- 229910044991 metal oxide Inorganic materials 0.000 description 9
- 150000004706 metal oxides Chemical class 0.000 description 9
- 150000004767 nitrides Chemical class 0.000 description 9
- 229910003399 ZnO-Cu Inorganic materials 0.000 description 8
- 238000009826 distribution Methods 0.000 description 8
- 229910052737 gold Inorganic materials 0.000 description 7
- 239000010931 gold Substances 0.000 description 7
- QWARLPGIFZKIQW-UHFFFAOYSA-N hydrogen peroxide;nitric acid Chemical compound OO.O[N+]([O-])=O QWARLPGIFZKIQW-UHFFFAOYSA-N 0.000 description 7
- 230000009467 reduction Effects 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 208000003351 Melanosis Diseases 0.000 description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical group [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 6
- 230000000149 penetrating effect Effects 0.000 description 6
- 238000011160 research Methods 0.000 description 6
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 5
- 230000003321 amplification Effects 0.000 description 5
- 230000005611 electricity Effects 0.000 description 5
- 238000011156 evaluation Methods 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 238000003199 nucleic acid amplification method Methods 0.000 description 5
- NBIIXXVUZAFLBC-UHFFFAOYSA-N phosphoric acid Substances OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 5
- 230000000007 visual effect Effects 0.000 description 5
- 229910007565 Zn—Cu Inorganic materials 0.000 description 4
- 239000012298 atmosphere Substances 0.000 description 4
- -1 copper nitride Chemical class 0.000 description 4
- TVZPLCNGKSPOJA-UHFFFAOYSA-N copper zinc Chemical compound [Cu].[Zn] TVZPLCNGKSPOJA-UHFFFAOYSA-N 0.000 description 4
- 229910052738 indium Inorganic materials 0.000 description 4
- 229910052709 silver Inorganic materials 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 3
- 239000011651 chromium Substances 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 239000007772 electrode material Substances 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- FBAFATDZDUQKNH-UHFFFAOYSA-M iron chloride Chemical compound [Cl-].[Fe] FBAFATDZDUQKNH-UHFFFAOYSA-M 0.000 description 3
- 150000001247 metal acetylides Chemical class 0.000 description 3
- 238000001465 metallisation Methods 0.000 description 3
- 238000005457 optimization Methods 0.000 description 3
- 238000000059 patterning Methods 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- 229910001316 Ag alloy Inorganic materials 0.000 description 2
- 229920002799 BoPET Polymers 0.000 description 2
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 2
- 235000013871 bee wax Nutrition 0.000 description 2
- 229940092738 beeswax Drugs 0.000 description 2
- 239000012166 beeswax Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000003628 erosive effect Effects 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000002932 luster Substances 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 239000011135 tin Substances 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910018605 Ni—Zn Inorganic materials 0.000 description 1
- 229910002668 Pd-Cu Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 229960004643 cupric oxide Drugs 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000004313 glare Effects 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 229910052809 inorganic oxide Inorganic materials 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/02—Physical, chemical or physicochemical properties
- B32B7/025—Electric or magnetic properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B5/00—Non-insulated conductors or conductive bodies characterised by their form
- H01B5/14—Non-insulated conductors or conductive bodies characterised by their form comprising conductive layers or films on insulating-supports
Landscapes
- Laminated Bodies (AREA)
- Non-Insulated Conductors (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Electroluminescent Light Sources (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014-125422 | 2014-06-18 | ||
| JP2014125422 | 2014-06-18 | ||
| PCT/JP2015/067443 WO2015194587A1 (ja) | 2014-06-18 | 2015-06-17 | 積層体、その製造方法及び電子機器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105684099A CN105684099A (zh) | 2016-06-15 |
| CN105684099B true CN105684099B (zh) | 2018-01-19 |
Family
ID=54935567
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201580002351.9A Expired - Fee Related CN105684099B (zh) | 2014-06-18 | 2015-06-17 | 层叠体、其制造方法和电子设备 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP6010260B2 (ko) |
| KR (1) | KR101681878B1 (ko) |
| CN (1) | CN105684099B (ko) |
| TW (1) | TWI595507B (ko) |
| WO (1) | WO2015194587A1 (ko) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI746603B (zh) * | 2016-08-09 | 2021-11-21 | 南韓商東友精細化工有限公司 | 透明電極、包括其的觸控感測器及影像顯示裝置 |
| KR102545420B1 (ko) * | 2016-11-25 | 2023-06-19 | 동우 화인켐 주식회사 | Oled 일체형 터치 센서 및 이를 포함하는 oled 화상 표시 장치 |
| CN108776563A (zh) * | 2018-06-29 | 2018-11-09 | 信利光电股份有限公司 | 一种一体黑触摸屏及其制备方法 |
| WO2022163546A1 (ja) * | 2021-01-27 | 2022-08-04 | Ａｇｃ株式会社 | 光学薄膜積層体及びその製造方法 |
| WO2024117069A1 (ja) * | 2022-11-30 | 2024-06-06 | 日東電工株式会社 | 反射フィルム |
| WO2024117068A1 (ja) * | 2022-11-30 | 2024-06-06 | 日東電工株式会社 | 反射フィルム |
Family Cites Families (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02304812A (ja) * | 1989-05-17 | 1990-12-18 | Seiko Epson Corp | 透明導電膜およびその製造方法 |
| JP3483355B2 (ja) * | 1995-06-28 | 2004-01-06 | 三井化学株式会社 | 透明導電性積層体 |
| JPH1170610A (ja) * | 1996-07-26 | 1999-03-16 | Asahi Glass Co Ltd | 透明導電膜、および透明電極の形成方法 |
| JPH1170310A (ja) * | 1997-08-29 | 1999-03-16 | Sharp Corp | 空気清浄装置 |
| TWI290328B (en) * | 2002-05-23 | 2007-11-21 | Nof Corp | Transparent conductive laminated film and touch panel |
| JP2007168279A (ja) * | 2005-12-22 | 2007-07-05 | Toppan Printing Co Ltd | 導電性積層体およびそれを用いたディスプレイ |
| JP4961786B2 (ja) * | 2006-03-17 | 2012-06-27 | 住友金属鉱山株式会社 | 透明導電膜、およびこれを用いた透明導電性フィルム |
| JP2007308761A (ja) | 2006-05-18 | 2007-11-29 | Fujifilm Corp | めっき処理方法、導電性金属膜およびその製造方法、並びに透光性電磁波シールド膜 |
| JP2008311565A (ja) | 2007-06-18 | 2008-12-25 | Dainippon Printing Co Ltd | ディスプレイ用複合フィルタ |
| JP2010157497A (ja) * | 2008-12-02 | 2010-07-15 | Geomatec Co Ltd | 透明導電膜付き基板とその製造方法 |
| US9946377B2 (en) | 2010-10-19 | 2018-04-17 | Lg Chem, Ltd. | Structured body with conducting and light absorption layers |
| JP5473990B2 (ja) * | 2011-06-17 | 2014-04-16 | 日東電工株式会社 | 導電性積層体、パターン配線付き透明導電性積層体、および光学デバイス。 |
| JP6099875B2 (ja) | 2011-11-22 | 2017-03-22 | 東レ株式会社 | 積層体の製造方法 |
| JP5531029B2 (ja) | 2012-01-05 | 2014-06-25 | 日東電工株式会社 | 導電性フィルム及び導電性フィルムロール |
| JP2013149196A (ja) | 2012-01-23 | 2013-08-01 | Dainippon Printing Co Ltd | タッチパネルセンサ、タッチパネル付表示装置およびタッチパネルセンサの製造方法 |
| JP2013169712A (ja) | 2012-02-21 | 2013-09-02 | Toray Ind Inc | 積層体 |
| JP2013206315A (ja) | 2012-03-29 | 2013-10-07 | Toppan Printing Co Ltd | フィルム状タッチパネルセンサー及びその製造方法 |
| JP5984570B2 (ja) * | 2012-08-09 | 2016-09-06 | 日東電工株式会社 | 導電性フィルム |
| WO2014035197A1 (ko) * | 2012-08-31 | 2014-03-06 | 주식회사 엘지화학 | 전도성 구조체 및 이의 제조방법 |
| KR102170097B1 (ko) * | 2013-10-31 | 2020-10-26 | 스미토모 긴조쿠 고잔 가부시키가이샤 | 도전성 기판 및 도전성 기판 제조방법 |
| TW201526025A (zh) * | 2013-12-27 | 2015-07-01 | Solar Applied Mat Tech Corp | 複合導電薄膜 |
| TWI515628B (zh) * | 2014-06-17 | 2016-01-01 | 恆顥科技股份有限公司 | 觸控顯示器 |
-
2015
- 2015-06-16 TW TW104119384A patent/TWI595507B/zh active
- 2015-06-17 CN CN201580002351.9A patent/CN105684099B/zh not_active Expired - Fee Related
- 2015-06-17 KR KR1020167009448A patent/KR101681878B1/ko active IP Right Grant
- 2015-06-17 WO PCT/JP2015/067443 patent/WO2015194587A1/ja active Application Filing
- 2015-06-17 JP JP2016528255A patent/JP6010260B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP6010260B2 (ja) | 2016-10-19 |
| WO2015194587A1 (ja) | 2015-12-23 |
| TWI595507B (zh) | 2017-08-11 |
| CN105684099A (zh) | 2016-06-15 |
| JPWO2015194587A1 (ja) | 2017-04-20 |
| KR20160043154A (ko) | 2016-04-20 |
| TW201601169A (zh) | 2016-01-01 |
| KR101681878B1 (ko) | 2016-12-01 |
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