JP5984570B2 - 導電性フィルム - Google Patents
導電性フィルム Download PDFInfo
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- JP5984570B2 JP5984570B2 JP2012176852A JP2012176852A JP5984570B2 JP 5984570 B2 JP5984570 B2 JP 5984570B2 JP 2012176852 A JP2012176852 A JP 2012176852A JP 2012176852 A JP2012176852 A JP 2012176852A JP 5984570 B2 JP5984570 B2 JP 5984570B2
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- 229910044991 metal oxide Inorganic materials 0.000 claims description 16
- 150000004706 metal oxides Chemical class 0.000 claims description 16
- 239000000758 substrate Substances 0.000 claims description 14
- 229910052751 metal Inorganic materials 0.000 claims description 13
- 239000002184 metal Substances 0.000 claims description 13
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 claims description 12
- 239000005751 Copper oxide Substances 0.000 claims description 12
- 229910000431 copper oxide Inorganic materials 0.000 claims description 12
- NDVLTYZPCACLMA-UHFFFAOYSA-N silver oxide Chemical compound [O-2].[Ag+].[Ag+] NDVLTYZPCACLMA-UHFFFAOYSA-N 0.000 claims description 12
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 11
- 229910052802 copper Inorganic materials 0.000 claims description 11
- 239000010949 copper Substances 0.000 claims description 11
- 238000004544 sputter deposition Methods 0.000 claims description 11
- 229920003050 poly-cycloolefin Polymers 0.000 claims description 7
- 229910045601 alloy Inorganic materials 0.000 claims description 6
- 239000000956 alloy Substances 0.000 claims description 6
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims description 6
- 229910001923 silver oxide Inorganic materials 0.000 claims description 6
- 229910003437 indium oxide Inorganic materials 0.000 claims description 5
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical group [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims description 5
- 229910001316 Ag alloy Inorganic materials 0.000 claims description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 3
- 229910001069 Ti alloy Inorganic materials 0.000 claims description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 239000004332 silver Substances 0.000 claims description 3
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 3
- OYQCBJZGELKKPM-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O-2].[Zn+2].[O-2].[In+3] OYQCBJZGELKKPM-UHFFFAOYSA-N 0.000 claims description 3
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 claims description 3
- 239000010408 film Substances 0.000 description 75
- 239000000463 material Substances 0.000 description 17
- 229910052738 indium Inorganic materials 0.000 description 7
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical group [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 7
- 230000003647 oxidation Effects 0.000 description 6
- 238000007254 oxidation reaction Methods 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000005259 measurement Methods 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012789 electroconductive film Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000007655 standard test method Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B5/00—Non-insulated conductors or conductive bodies characterised by their form
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- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/04—Interconnection of layers
- B32B7/12—Interconnection of layers using interposed adhesives or interposed materials with bonding properties
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- B32B15/20—Layered products comprising a layer of metal comprising aluminium or copper
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- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
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- B32B27/06—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
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- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/32—Layered products comprising a layer of synthetic resin comprising polyolefins
- B32B27/325—Layered products comprising a layer of synthetic resin comprising polyolefins comprising polycycloolefins
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C32/00—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ
- C22C32/001—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ with only oxides
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
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- C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/20—Properties of the layers or laminate having particular electrical or magnetic properties, e.g. piezoelectric
- B32B2307/202—Conductive
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2457/00—Electrical equipment
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C14/00—Alloys based on titanium
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
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- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Description
本発明に用いられる長尺状フィルム基材2は、長手方向とそれに直交する幅方向とを有する。本発明において「長尺状」とは、長手方向寸法が、幅方向寸法よりも十分に大きいことをいい、好ましくは長手方向寸法が、幅方向寸法に対して10倍以上であることをいう。
本発明に用いられるインジウム系酸化物層3は、例えば、本発明の導電性フィルム1をタッチセンサに用いる場合、タッチパネル画面(中央窓部)の透明導電層として用いられる。
本発明に用いられる金属層4は、例えば、本発明の導電性フィルムをタッチセンサに用いる場合、タッチパネル画面(中央窓部)の外縁部に引き回し配線を形成するために用いられる。
本発明に用いられる酸化金属層5は、スパッタ成膜された厚み1nm〜15nmの層である。上記酸化金属層は、第2導電層(金属層)が、大気中の酸素の影響を受けて自然に酸化することを防止するために設けられる。
先ず、幅1.1m、長さ2000m、厚み100μmの押出成形されたポリシクロオレフィンフィルム(日本ゼオン社製 商品名「ZEONOR」(登録商標)」からなる長尺状フィルム基材の一方の側に、第1導電層として厚み25nmのインジウムスズ酸化物層を、第2導電層として厚み50nmの銅層を、第3導電層として厚み7nmの酸化銅層を、それぞれスパッタ法により順次形成した。
(実施例2)
スパッタリング時間を変更することにより、酸化銅層の厚みを5nmに変更した以外は、実施例1と同様の方法で導電性フィルムを作製した。
(実施例3)
スパッタリング時間を変更することにより、酸化銅層の厚みを1.5nmに変更した以外は、実施例1と同様の方法で導電性フィルムを作製した。
(比較例1)
第3導電層としての酸化銅層を形成しなかった以外は、実施例1と同様の方法で導電性フィルムを作製し、23℃の大気中で72時間保管して、第2導電層(銅層)の表面に、厚み1.7nmの酸化皮膜層を形成した。
透過型電子顕微鏡(日立製作所製 H−7650)により断面観察して、インジウムスズ酸化物層と銅層の厚みを測定した。
X線光電子分光(X-ray Photoelectron Spectroscopy)分析装置(PHI社製 製品名「QuanteraSXM」を用いて、酸化銅層の厚みを測定した。
得られた導電性フィルムの表面抵抗値を、4端子法を用いて、幅方向に15cm間隔で5点測定し、その標準偏差を求めた。
2 長尺上フィルム基材
3 インジウム系酸化物層
4 金属層
5 酸化金属層
10 易接着層
11 屈折率調整層
21 導電層
Claims (12)
- 長尺状フィルム基材と、第1導電層と、第2導電層と、第3導電層とをこの順に有する導電性フィルムであって、
前記長尺状フィルム基材は、長手方向とそれに直交する幅方向を有し、
前記長尺状フィルム基材の幅方向寸法は1m以上であり、
前記第1導電層は、インジウム系酸化物層であり、
前記第2導電層は、金属層であり、
前記第3導電層は、スパッタ成膜された物であって、厚み1nm〜15nmの酸化金属層であり、
表面抵抗値が0.1Ω/□〜0.6Ω/□である、
ことを特徴とする導電性フィルム。 - 前記長尺状フィルム基材の幅方向寸法が1m〜3mであることを特徴とする、請求項1記載の導電性フィルム。
- 表面抵抗値が0.3Ω/□〜0.6Ω/□であることを特徴とする、請求項1記載の導電性フィルム。
- 前記幅方向における表面抵抗値の標準偏差が0.01Ω/□以下であることを特徴とする、請求項1記載の導電性フィルム。
- 前記幅方向における表面抵抗値の標準偏差が、0.001〜0.005Ω/□であることを特徴とする、請求項4記載の導電性フィルム。
- 前記第3導電層は、酸化銅、酸化銀、酸化銀合金又は酸化チタン合金からなることを特徴とする、請求項1記載の導電性フィルム。
- 前記第2導電層は、銅、銀、銀合金又はチタン合金からなることを特徴とする、請求項1記載の導電性フィルム。
- 前記第2導電層の厚みが、20nm〜700nmであることを特徴とする、請求項7記載の導電性フィルム。
- 前記第1導電層は、インジウムスズ酸化物、インジウム亜鉛酸化物又は酸化インジウム−酸化亜鉛酸化物からなることを特徴とする、請求項1記載の導電性フィルム。
- 前記第1導電層の厚みが、20nm〜80nmであることを特徴とする、請求項9記載の導電性フィルム。
- 前記長尺状フィルム基材の厚みが、80μm〜200μmであることを特徴とする、請求項1記載の導電性フィルム。
- 前記長尺状フィルム基材がポリシクロオレフィンからなることを特徴とする、請求項11記載の導電性フィルム。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012176852A JP5984570B2 (ja) | 2012-08-09 | 2012-08-09 | 導電性フィルム |
KR20130062012A KR20140020726A (ko) | 2012-08-09 | 2013-05-30 | 도전성 필름 |
US13/944,428 US9304635B2 (en) | 2012-08-09 | 2013-07-17 | Conductive film |
TW102126543A TWI531668B (zh) | 2012-08-09 | 2013-07-24 | Conductive film |
CN201310346726.6A CN103578609B (zh) | 2012-08-09 | 2013-08-09 | 导电性膜 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012176852A JP5984570B2 (ja) | 2012-08-09 | 2012-08-09 | 導電性フィルム |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016151754A Division JP6251782B2 (ja) | 2016-08-02 | 2016-08-02 | 導電性フィルム |
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TWI595507B (zh) * | 2014-06-18 | 2017-08-11 | Geomatec Co Ltd | Laminates, methods of making the same, and electronic machines |
CN104064257B (zh) * | 2014-07-11 | 2017-05-03 | 张家港康得新光电材料有限公司 | 一种低电阻ito透明导电膜 |
WO2016140073A1 (ja) * | 2015-03-04 | 2016-09-09 | 株式会社カネカ | 導電層付き基板、タッチパネル用透明電極付き基板及びそれらの製造方法 |
JP6874406B2 (ja) * | 2016-02-09 | 2021-05-19 | 大日本印刷株式会社 | 光学積層体、これを有する前面板及び画像表示装置 |
JP6251782B2 (ja) * | 2016-08-02 | 2017-12-20 | 日東電工株式会社 | 導電性フィルム |
JP6782211B2 (ja) * | 2017-09-08 | 2020-11-11 | 株式会社東芝 | 透明電極、それを用いた素子、および素子の製造方法 |
JP7114446B2 (ja) * | 2018-11-28 | 2022-08-08 | 日東電工株式会社 | 導電性フィルム、および、そのパターニング方法 |
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US4948677A (en) | 1984-01-31 | 1990-08-14 | Ppg Industries, Inc. | High transmittance, low emissivity article and method of preparation |
US7167796B2 (en) * | 2000-03-09 | 2007-01-23 | Donnelly Corporation | Vehicle navigation system for use with a telematics system |
DE60220379T2 (de) * | 2001-01-23 | 2008-01-24 | Donnelly Corp., Holland | Verbessertes fahrzeugbeleuchtungssystem |
US6743488B2 (en) * | 2001-05-09 | 2004-06-01 | Cpfilms Inc. | Transparent conductive stratiform coating of indium tin oxide |
JP3922109B2 (ja) * | 2001-10-17 | 2007-05-30 | 東洋紡績株式会社 | 透明導電性フィルムロールの製造方法 |
US7217344B2 (en) | 2002-06-14 | 2007-05-15 | Streaming Sales Llc | Transparent conductive film for flat panel displays |
US7626749B2 (en) * | 2005-05-16 | 2009-12-01 | Donnelly Corporation | Vehicle mirror assembly with indicia at reflective element |
JP4971618B2 (ja) * | 2005-09-30 | 2012-07-11 | ジオマテック株式会社 | 表示用電極パターン製造方法 |
JP5519293B2 (ja) * | 2006-12-28 | 2014-06-11 | スリーエム イノベイティブ プロパティズ カンパニー | 薄膜金属層形成のための核形成層 |
US8778116B2 (en) | 2007-12-07 | 2014-07-15 | Meijyo Nano Carbon Co., Ltd. | Method for producing carbon nanotube-containing conductor |
JP5428175B2 (ja) * | 2008-03-27 | 2014-02-26 | 凸版印刷株式会社 | 真空成膜装置及び真空成膜方法 |
JP4601710B1 (ja) | 2009-09-11 | 2010-12-22 | 日本写真印刷株式会社 | 狭額縁タッチ入力シートとその製造方法 |
CN101697288A (zh) | 2009-10-13 | 2010-04-21 | 福建师范大学 | 一种金属银/金属氧化物的透明导电薄膜及其制备方法 |
US20130149555A1 (en) * | 2010-07-06 | 2013-06-13 | Nitto Denko Corporation | Transparent conductive film and manufacturing method therefor |
US20130105301A1 (en) | 2010-07-06 | 2013-05-02 | Nitto Denko Corporation | Transparent conductive film and manufacturing method therefor |
WO2012067444A2 (ko) | 2010-11-17 | 2012-05-24 | 주식회사 엘지화학 | 산화막이 형성된 도전성 필름 및 그 제조방법 |
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JP2014035903A (ja) | 2014-02-24 |
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US9304635B2 (en) | 2016-04-05 |
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