CN105358950B - 压电传感器 - Google Patents

压电传感器 Download PDF

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Publication number
CN105358950B
CN105358950B CN201480037748.7A CN201480037748A CN105358950B CN 105358950 B CN105358950 B CN 105358950B CN 201480037748 A CN201480037748 A CN 201480037748A CN 105358950 B CN105358950 B CN 105358950B
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CN
China
Prior art keywords
electrode
sheet
signal electrode
piezoelectric
notch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201480037748.7A
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English (en)
Chinese (zh)
Other versions
CN105358950A (zh
Inventor
神谷信人
八田文吾
冈林赏纯
森本直之
玉井义昭
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sekisui Chemical Co Ltd
Original Assignee
Sekisui Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2013144215A external-priority patent/JP6074331B2/ja
Priority claimed from JP2013203029A external-priority patent/JP6110267B2/ja
Application filed by Sekisui Chemical Co Ltd filed Critical Sekisui Chemical Co Ltd
Publication of CN105358950A publication Critical patent/CN105358950A/zh
Application granted granted Critical
Publication of CN105358950B publication Critical patent/CN105358950B/zh
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/08—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of piezoelectric devices, i.e. electric circuits therefor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/302—Sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/875—Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Measuring Fluid Pressure (AREA)
CN201480037748.7A 2013-07-10 2014-07-04 压电传感器 Active CN105358950B (zh)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
JP2013-144215 2013-07-10
JP2013-144211 2013-07-10
JP2013144215A JP6074331B2 (ja) 2013-07-10 2013-07-10 圧電センサ
JP2013144211 2013-07-10
JP2013203029A JP6110267B2 (ja) 2013-09-30 2013-09-30 圧電センサ構造体
JP2013-203029 2013-09-30
PCT/JP2014/067902 WO2015005238A1 (ja) 2013-07-10 2014-07-04 圧電センサ

Publications (2)

Publication Number Publication Date
CN105358950A CN105358950A (zh) 2016-02-24
CN105358950B true CN105358950B (zh) 2018-04-20

Family

ID=52279922

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201480037748.7A Active CN105358950B (zh) 2013-07-10 2014-07-04 压电传感器

Country Status (7)

Country Link
US (1) US10768066B2 (enExample)
EP (1) EP3021099B1 (enExample)
KR (1) KR102303584B1 (enExample)
CN (1) CN105358950B (enExample)
NO (1) NO3021099T3 (enExample)
TW (1) TWI669370B (enExample)
WO (1) WO2015005238A1 (enExample)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6983490B2 (ja) * 2016-03-29 2021-12-17 ローム株式会社 電子部品
US11647675B2 (en) * 2016-09-27 2023-05-09 Mitsui Chemicals, Inc. Piezoelectric substrate attachment structure, sensor module, moving body, and protection body
JP6862820B2 (ja) * 2016-12-26 2021-04-21 セイコーエプソン株式会社 超音波デバイス及び超音波装置
JP2019174234A (ja) * 2018-03-28 2019-10-10 セイコーエプソン株式会社 センサー素子、センサーデバイス、力検出装置、およびロボット
TWI679784B (zh) * 2018-04-09 2019-12-11 中原大學 壓電感測模組、壓電感測模組偵測之方法及其壓電感應偵測系統
DE102018008289A1 (de) * 2018-10-19 2020-04-23 Diehl Ako Stiftung & Co. Kg Bedienvorrichtung mit piezoelektrischer Sensorvorrichtung
US12185630B2 (en) 2019-08-09 2024-12-31 Apple Inc. Layered sensor having multiple laterally adjacent substrates in a single layer
CN118715429A (zh) * 2022-02-10 2024-09-27 株式会社村田制作所 传感器
CN115553755B (zh) * 2022-10-29 2023-07-25 宁波韧和科技有限公司 双电容应变式传感器及其制备方法，以及呼吸监测带

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4443730A (en) * 1978-11-15 1984-04-17 Mitsubishi Petrochemical Co., Ltd. Biological piezoelectric transducer device for the living body
US6394960B1 (en) * 1999-03-11 2002-05-28 Seiko Instruments Inc. Pulse wave detecting device and method for manufacturing the same, and portable wrist device
JP2005156531A (ja) * 2003-11-05 2005-06-16 Sony Corp 圧力センサおよび生体情報処理装置
CN101784874A (zh) * 2007-08-28 2010-07-21 爱信精机株式会社 压电薄膜传感器

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JPS5044196Y1 (enExample) 1970-10-08 1975-12-17
JPS58180063A (ja) 1982-04-15 1983-10-21 Seiko Epson Corp 薄膜トランジスタ
US4499394A (en) * 1983-10-21 1985-02-12 Koal Jan G Polymer piezoelectric sensor of animal foot pressure
DE3709533A1 (de) * 1986-03-27 1987-10-15 Nettelhorst Frhr Von Herwig Dr Sensor fuer von tierischen oder menschlichen koerpern ausgehenden mechanischen kraeften
EP0355289A1 (en) * 1988-07-01 1990-02-28 ATOCHEM NORTH AMERICA, INC. (a Pennsylvania corp.) Accelerometer
JPH0555656A (ja) * 1991-08-29 1993-03-05 Toyota Motor Corp 圧電素子の電極構造
JP3548280B2 (ja) * 1995-06-29 2004-07-28 シルバー株式会社 流体の移送異常検出装置
JPH10332509A (ja) * 1997-05-27 1998-12-18 Amp Japan Ltd 圧電式圧力センサ
JP2002016301A (ja) * 2000-06-28 2002-01-18 Matsushita Electric Ind Co Ltd 可撓性圧電素子とこれを用いた異常監視装置
JP2002340700A (ja) * 2001-05-14 2002-11-27 Matsushita Electric Ind Co Ltd 圧電センサ
WO2004031711A1 (ja) * 2002-10-01 2004-04-15 National Institute Of Advanced Industrial Science And Technology 圧電センサおよびそれを備えた入力装置
WO2006013942A1 (ja) * 2004-08-04 2006-02-09 Matsushita Electric Industrial Co., Ltd. 侵入検出装置
JP2007017420A (ja) * 2004-10-28 2007-01-25 Matsushita Electric Ind Co Ltd 圧電素子とその製造方法
WO2006080301A1 (ja) 2005-01-25 2006-08-03 The Furukawa Electric Co., Ltd. 電子部品実装配線体および電子部品実装構造体
JP5044196B2 (ja) * 2006-11-13 2012-10-10 アイシン精機株式会社 圧電センサ及びその製造方法
JP5066551B2 (ja) * 2008-05-20 2012-11-07 日本電波工業株式会社 圧電センサ及び感知装置
US8264129B2 (en) * 2010-07-21 2012-09-11 General Electric Company Device and system for measuring material thickness
US8963402B2 (en) * 2010-11-30 2015-02-24 Seiko Epson Corporation Piezoelectric vibrator element, piezoelectric module, and electronic device
JP2012186727A (ja) * 2011-03-07 2012-09-27 Seiko Instruments Inc 圧電振動片の製造方法、圧電振動片の製造装置、圧電振動片、圧電振動子、発振器、電子機器および電波時計
JP5811588B2 (ja) * 2011-05-18 2015-11-11 国立大学法人佐賀大学 複合センサ
CN105264350B (zh) * 2013-06-04 2017-07-18 日本写真印刷株式会社 压电传感器和压力检测装置
US9427967B2 (en) * 2014-07-28 2016-08-30 Rohm Co., Ltd. Piezoelectric membrane, piezoelectric device, and inkjet head

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4443730A (en) * 1978-11-15 1984-04-17 Mitsubishi Petrochemical Co., Ltd. Biological piezoelectric transducer device for the living body
US6394960B1 (en) * 1999-03-11 2002-05-28 Seiko Instruments Inc. Pulse wave detecting device and method for manufacturing the same, and portable wrist device
JP2005156531A (ja) * 2003-11-05 2005-06-16 Sony Corp 圧力センサおよび生体情報処理装置
CN101784874A (zh) * 2007-08-28 2010-07-21 爱信精机株式会社 压电薄膜传感器

Also Published As

Publication number Publication date
EP3021099B1 (en) 2018-02-28
NO3021099T3 (enExample) 2018-07-28
EP3021099A4 (en) 2017-03-08
US10768066B2 (en) 2020-09-08
TW201510161A (zh) 2015-03-16
CN105358950A (zh) 2016-02-24
KR20160030486A (ko) 2016-03-18
WO2015005238A1 (ja) 2015-01-15
US20160153860A1 (en) 2016-06-02
TWI669370B (zh) 2019-08-21
EP3021099A1 (en) 2016-05-18
KR102303584B1 (ko) 2021-09-17

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