KR102303584B1 - 압전 센서 - Google Patents

압전 센서 Download PDF

Info

Publication number
KR102303584B1
KR102303584B1 KR1020157036705A KR20157036705A KR102303584B1 KR 102303584 B1 KR102303584 B1 KR 102303584B1 KR 1020157036705 A KR1020157036705 A KR 1020157036705A KR 20157036705 A KR20157036705 A KR 20157036705A KR 102303584 B1 KR102303584 B1 KR 102303584B1
Authority
KR
South Korea
Prior art keywords
sheet
electrode
piezoelectric
ground electrode
signal electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020157036705A
Other languages
English (en)
Korean (ko)
Other versions
KR20160030486A (ko
Inventor
노부또 가미야
분고 하따
다까즈미 오까바야시
나오유끼 모리모또
요시아끼 다마이
Original Assignee
세키스이가가쿠 고교가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2013144215A external-priority patent/JP6074331B2/ja
Priority claimed from JP2013203029A external-priority patent/JP6110267B2/ja
Application filed by 세키스이가가쿠 고교가부시키가이샤 filed Critical 세키스이가가쿠 고교가부시키가이샤
Publication of KR20160030486A publication Critical patent/KR20160030486A/ko
Application granted granted Critical
Publication of KR102303584B1 publication Critical patent/KR102303584B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H01L41/047—
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/08—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of piezoelectric devices, i.e. electric circuits therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • H01L41/0471—
    • H01L41/0472—
    • H01L41/0475—
    • H01L41/1132—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
    • H10N30/302—Sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/875—Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Measuring Fluid Pressure (AREA)
KR1020157036705A 2013-07-10 2014-07-04 압전 센서 Active KR102303584B1 (ko)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
JP2013144215A JP6074331B2 (ja) 2013-07-10 2013-07-10 圧電センサ
JP2013144211 2013-07-10
JPJP-P-2013-144211 2013-07-10
JPJP-P-2013-144215 2013-07-10
JPJP-P-2013-203029 2013-09-30
JP2013203029A JP6110267B2 (ja) 2013-09-30 2013-09-30 圧電センサ構造体
PCT/JP2014/067902 WO2015005238A1 (ja) 2013-07-10 2014-07-04 圧電センサ

Publications (2)

Publication Number Publication Date
KR20160030486A KR20160030486A (ko) 2016-03-18
KR102303584B1 true KR102303584B1 (ko) 2021-09-17

Family

ID=52279922

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020157036705A Active KR102303584B1 (ko) 2013-07-10 2014-07-04 압전 센서

Country Status (7)

Country Link
US (1) US10768066B2 (enExample)
EP (1) EP3021099B1 (enExample)
KR (1) KR102303584B1 (enExample)
CN (1) CN105358950B (enExample)
NO (1) NO3021099T3 (enExample)
TW (1) TWI669370B (enExample)
WO (1) WO2015005238A1 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6983490B2 (ja) * 2016-03-29 2021-12-17 ローム株式会社 電子部品
US11647675B2 (en) * 2016-09-27 2023-05-09 Mitsui Chemicals, Inc. Piezoelectric substrate attachment structure, sensor module, moving body, and protection body
JP6862820B2 (ja) * 2016-12-26 2021-04-21 セイコーエプソン株式会社 超音波デバイス及び超音波装置
JP2019174234A (ja) * 2018-03-28 2019-10-10 セイコーエプソン株式会社 センサー素子、センサーデバイス、力検出装置、およびロボット
TWI679784B (zh) * 2018-04-09 2019-12-11 中原大學 壓電感測模組、壓電感測模組偵測之方法及其壓電感應偵測系統
DE102018008289A1 (de) * 2018-10-19 2020-04-23 Diehl Ako Stiftung & Co. Kg Bedienvorrichtung mit piezoelektrischer Sensorvorrichtung
US12185630B2 (en) 2019-08-09 2024-12-31 Apple Inc. Layered sensor having multiple laterally adjacent substrates in a single layer
CN118715429A (zh) * 2022-02-10 2024-09-27 株式会社村田制作所 传感器
CN115553755B (zh) * 2022-10-29 2023-07-25 宁波韧和科技有限公司 双电容应变式传感器及其制备方法，以及呼吸监测带

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5044196Y1 (enExample) 1970-10-08 1975-12-17
JPS5825450B2 (ja) * 1978-11-15 1983-05-27 三菱油化株式会社 生体用トランスジユ−サ
JPS58180063A (ja) 1982-04-15 1983-10-21 Seiko Epson Corp 薄膜トランジスタ
US4499394A (en) * 1983-10-21 1985-02-12 Koal Jan G Polymer piezoelectric sensor of animal foot pressure
DE3709533A1 (de) * 1986-03-27 1987-10-15 Nettelhorst Frhr Von Herwig Dr Sensor fuer von tierischen oder menschlichen koerpern ausgehenden mechanischen kraeften
EP0355289A1 (en) * 1988-07-01 1990-02-28 ATOCHEM NORTH AMERICA, INC. (a Pennsylvania corp.) Accelerometer
JPH0555656A (ja) * 1991-08-29 1993-03-05 Toyota Motor Corp 圧電素子の電極構造
JP3548280B2 (ja) * 1995-06-29 2004-07-28 シルバー株式会社 流体の移送異常検出装置
JPH10332509A (ja) * 1997-05-27 1998-12-18 Amp Japan Ltd 圧電式圧力センサ
JP2000316858A (ja) * 1999-03-11 2000-11-21 Seiko Instruments Inc 脈波検出装置、その製造方法、および腕携帯機器
JP2002016301A (ja) * 2000-06-28 2002-01-18 Matsushita Electric Ind Co Ltd 可撓性圧電素子とこれを用いた異常監視装置
JP2002340700A (ja) * 2001-05-14 2002-11-27 Matsushita Electric Ind Co Ltd 圧電センサ
WO2004031711A1 (ja) * 2002-10-01 2004-04-15 National Institute Of Advanced Industrial Science And Technology 圧電センサおよびそれを備えた入力装置
JP2005156531A (ja) * 2003-11-05 2005-06-16 Sony Corp 圧力センサおよび生体情報処理装置
WO2006013942A1 (ja) * 2004-08-04 2006-02-09 Matsushita Electric Industrial Co., Ltd. 侵入検出装置
JP2007017420A (ja) * 2004-10-28 2007-01-25 Matsushita Electric Ind Co Ltd 圧電素子とその製造方法
WO2006080301A1 (ja) 2005-01-25 2006-08-03 The Furukawa Electric Co., Ltd. 電子部品実装配線体および電子部品実装構造体
JP5044196B2 (ja) * 2006-11-13 2012-10-10 アイシン精機株式会社 圧電センサ及びその製造方法
JP2009053109A (ja) * 2007-08-28 2009-03-12 Aisin Seiki Co Ltd 圧電フィルムセンサ
JP5066551B2 (ja) * 2008-05-20 2012-11-07 日本電波工業株式会社 圧電センサ及び感知装置
US8264129B2 (en) * 2010-07-21 2012-09-11 General Electric Company Device and system for measuring material thickness
US8963402B2 (en) * 2010-11-30 2015-02-24 Seiko Epson Corporation Piezoelectric vibrator element, piezoelectric module, and electronic device
JP2012186727A (ja) * 2011-03-07 2012-09-27 Seiko Instruments Inc 圧電振動片の製造方法、圧電振動片の製造装置、圧電振動片、圧電振動子、発振器、電子機器および電波時計
JP5811588B2 (ja) * 2011-05-18 2015-11-11 国立大学法人佐賀大学 複合センサ
CN105264350B (zh) * 2013-06-04 2017-07-18 日本写真印刷株式会社 压电传感器和压力检测装置
US9427967B2 (en) * 2014-07-28 2016-08-30 Rohm Co., Ltd. Piezoelectric membrane, piezoelectric device, and inkjet head

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
인용발명: 미국 특허출원공개공보 US2010/0253183호(2010.10.07.) 1부.*

Also Published As

Publication number Publication date
EP3021099B1 (en) 2018-02-28
NO3021099T3 (enExample) 2018-07-28
EP3021099A4 (en) 2017-03-08
US10768066B2 (en) 2020-09-08
TW201510161A (zh) 2015-03-16
CN105358950A (zh) 2016-02-24
KR20160030486A (ko) 2016-03-18
WO2015005238A1 (ja) 2015-01-15
US20160153860A1 (en) 2016-06-02
TWI669370B (zh) 2019-08-21
EP3021099A1 (en) 2016-05-18
CN105358950B (zh) 2018-04-20

Similar Documents

Publication Publication Date Title
KR102303584B1 (ko) 압전 센서
JP6574889B2 (ja) 圧電センサ
CN105576297B (zh) 制造二次电池的方法和二次电池
US20120219847A1 (en) Pouch type battery and its manufacturing method
CN108475756A (zh) 电极体的制造方法以及非水电解质二次电池的制造方法
US11664501B2 (en) Electrode assembly and secondary battery having a protective layer therein
WO2016017048A1 (ja) 電池パック
CN108475827B (zh) 薄膜型电池
JP6294177B2 (ja) 圧電センサ
US9083013B2 (en) Electrochemical device
JP2017058344A (ja) 圧電センサ構造
JP2003257409A (ja) ポリマー二次電池の端子接続構造及びその端子接続方法
KR20170052547A (ko) 전지
TWI774941B (zh) 鋰二次電池
JP2002170532A (ja) 電子素子
JP2019091563A (ja) 蓄電素子
JP6066773B2 (ja) 圧電センサの製造方法
JP2019046624A (ja) 電極組立体のテープ貼り付け方法
JP6074331B2 (ja) 圧電センサ
US20180175453A1 (en) Electrode plate of laminated power storage element, laminated power storage element, and method for manufacturing electrode plate for laminated power storage element
JP6110267B2 (ja) 圧電センサ構造体
JP2014169945A (ja) 圧電センサ
JP2015014550A (ja) 圧電センサシート原反及び圧電素子
CN111033789A (zh) 蓄电装置
JP2017062200A (ja) 圧電センサ構造

Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

P22-X000 Classification modified

St.27 status event code: A-2-2-P10-P22-nap-X000

A201 Request for examination
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U12-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 5

U11 Full renewal or maintenance fee paid

Free format text: ST27 STATUS EVENT CODE: A-4-4-U10-U11-OTH-PR1001 (AS PROVIDED BY THE NATIONAL OFFICE)

Year of fee payment: 5