CN105223929B - 用于执行辅助配方及批处理配方的方法及设备 - Google Patents

用于执行辅助配方及批处理配方的方法及设备 Download PDF

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Publication number
CN105223929B
CN105223929B CN201510658019.XA CN201510658019A CN105223929B CN 105223929 B CN105223929 B CN 105223929B CN 201510658019 A CN201510658019 A CN 201510658019A CN 105223929 B CN105223929 B CN 105223929B
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China
Prior art keywords
formula
auxiliary
recipe
equipment
batch
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Chinese (zh)
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CN105223929A (zh
Inventor
小詹姆斯·亨利·莫尔
内森·威廉·培特斯
威廉·乔治·厄文
图沙尔·南达
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Fisher Rosemount Systems Inc
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Fisher Rosemount Systems Inc
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Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41835—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by programme execution
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41845—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by system universality, reconfigurability, modularity
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32077—Batch control system
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32095—Text, menu driven editor for batch programming, phase sequence, parameters
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32096—Batch, recipe configuration for flexible batch control
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32128—Gui graphical user interface
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Landscapes

  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Manufacturing & Machinery (AREA)
  • Quality & Reliability (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing And Monitoring For Control Systems (AREA)
  • General Factory Administration (AREA)
  • Management, Administration, Business Operations System, And Electronic Commerce (AREA)
  • Programmable Controllers (AREA)
  • Drying Of Semiconductors (AREA)
  • Feedback Control In General (AREA)
  • Medical Treatment And Welfare Office Work (AREA)
CN201510658019.XA 2007-11-13 2008-11-13 用于执行辅助配方及批处理配方的方法及设备 Active CN105223929B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/939,281 US8825189B2 (en) 2007-11-13 2007-11-13 Methods and apparatus to execute an auxiliary recipe and a batch recipe associated with a process control system
US11/939,281 2007-11-13
CN2008101764642A CN101436063B (zh) 2007-11-13 2008-11-13 用于执行辅助配方及批处理配方的方法及设备

Related Parent Applications (1)

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CN2008101764642A Division CN101436063B (zh) 2007-11-13 2008-11-13 用于执行辅助配方及批处理配方的方法及设备

Publications (2)

Publication Number Publication Date
CN105223929A CN105223929A (zh) 2016-01-06
CN105223929B true CN105223929B (zh) 2018-09-14

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CN201510658019.XA Active CN105223929B (zh) 2007-11-13 2008-11-13 用于执行辅助配方及批处理配方的方法及设备
CN2008101764642A Active CN101436063B (zh) 2007-11-13 2008-11-13 用于执行辅助配方及批处理配方的方法及设备
CN201310328582.1A Active CN103399547B (zh) 2007-11-13 2008-11-13 用于执行辅助配方及批处理配方的方法及设备

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CN201310328582.1A Active CN103399547B (zh) 2007-11-13 2008-11-13 用于执行辅助配方及批处理配方的方法及设备

Country Status (5)

Country Link
US (1) US8825189B2 (enExample)
EP (3) EP2605100B1 (enExample)
JP (2) JP5368775B2 (enExample)
CN (3) CN105223929B (enExample)
GB (1) GB2454786B (enExample)

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US8606379B2 (en) * 2008-09-29 2013-12-10 Fisher-Rosemount Systems, Inc. Method of generating a product recipe for execution in batch processing
US9265429B2 (en) * 2009-09-18 2016-02-23 Welch Allyn, Inc. Physiological parameter measuring platform device supporting multiple workflows
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US10325792B2 (en) * 2015-12-17 2019-06-18 Applied Materials, Inc. Methods and apparatus for interactively and dynamically updating a schematic overlay
CN107368043B (zh) * 2016-05-13 2019-10-29 北京威浦实信科技有限公司 配方管理控制系统
US10783290B2 (en) 2017-09-28 2020-09-22 Taiwan Semiconductor Manufacturing Company, Ltd. IC manufacturing recipe similarity evaluation methods and systems
US11687064B2 (en) * 2017-11-08 2023-06-27 Honeywell International Inc. IBATCH interactive batch operations system enabling operational excellence and competency transition
US11287785B2 (en) * 2019-09-03 2022-03-29 Honeywell International Inc. Apparatus and method for distributed batch control for modular automation
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CN101436063A (zh) 2009-05-20
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CN103399547A (zh) 2013-11-20
US20090125906A1 (en) 2009-05-14
GB0820623D0 (en) 2008-12-17
JP5368775B2 (ja) 2013-12-18
EP2107440A3 (en) 2010-01-06
EP2605100B1 (en) 2014-08-06
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