CN104079262A - 振动元件、振子、振荡器、电子设备以及移动体 - Google Patents
振动元件、振子、振荡器、电子设备以及移动体 Download PDFInfo
- Publication number
- CN104079262A CN104079262A CN201410112799.3A CN201410112799A CN104079262A CN 104079262 A CN104079262 A CN 104079262A CN 201410112799 A CN201410112799 A CN 201410112799A CN 104079262 A CN104079262 A CN 104079262A
- Authority
- CN
- China
- Prior art keywords
- vibrating
- vibrating elements
- arm
- base
- vibration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 32
- 235000014676 Phragmites communis Nutrition 0.000 claims 3
- 239000000853 adhesive Substances 0.000 abstract description 90
- 230000001070 adhesive effect Effects 0.000 abstract description 90
- 239000000758 substrate Substances 0.000 description 42
- 238000005452 bending Methods 0.000 description 18
- 239000010453 quartz Substances 0.000 description 17
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 17
- 229910052751 metal Inorganic materials 0.000 description 16
- 239000002184 metal Substances 0.000 description 16
- 238000001039 wet etching Methods 0.000 description 14
- 238000006073 displacement reaction Methods 0.000 description 12
- 230000007423 decrease Effects 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 9
- 241000251131 Sphyrna Species 0.000 description 8
- 230000006866 deterioration Effects 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 239000000919 ceramic Substances 0.000 description 5
- 238000004891 communication Methods 0.000 description 5
- 239000000470 constituent Substances 0.000 description 5
- 230000006870 function Effects 0.000 description 5
- 238000003384 imaging method Methods 0.000 description 5
- 238000013459 approach Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 230000003071 parasitic effect Effects 0.000 description 4
- 239000010931 gold Substances 0.000 description 3
- 239000011229 interlayer Substances 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 239000010955 niobium Substances 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- 229910001316 Ag alloy Inorganic materials 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- 229910001020 Au alloy Inorganic materials 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910000531 Co alloy Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000599 Cr alloy Inorganic materials 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- WQZGKKKJIJFFOK-GASJEMHNSA-N Glucose Natural products OC[C@H]1OC(O)[C@H](O)[C@@H](O)[C@@H]1O WQZGKKKJIJFFOK-GASJEMHNSA-N 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- KGWWEXORQXHJJQ-UHFFFAOYSA-N [Fe].[Co].[Ni] Chemical compound [Fe].[Co].[Ni] KGWWEXORQXHJJQ-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000008280 blood Substances 0.000 description 1
- 210000004369 blood Anatomy 0.000 description 1
- 230000036772 blood pressure Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 229910052576 carbides based ceramic Inorganic materials 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000000788 chromium alloy Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- PSHMSSXLYVAENJ-UHFFFAOYSA-N dilithium;[oxido(oxoboranyloxy)boranyl]oxy-oxoboranyloxyborinate Chemical compound [Li+].[Li+].O=BOB([O-])OB([O-])OB=O PSHMSSXLYVAENJ-UHFFFAOYSA-N 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000008103 glucose Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000003353 gold alloy Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- RHZWSUVWRRXEJF-UHFFFAOYSA-N indium tin Chemical compound [In].[Sn] RHZWSUVWRRXEJF-UHFFFAOYSA-N 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 235000012149 noodles Nutrition 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- -1 silver halide Chemical class 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000002195 synergetic effect Effects 0.000 description 1
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 description 1
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/21—Crystal tuning forks
- H03H9/215—Crystal tuning forks consisting of quartz
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders or supports
- H03H9/10—Mounting in enclosures
- H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
- H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
- H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
- H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
- H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
- H03B5/32—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Oscillators With Electromechanical Resonators (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Theoretical Computer Science (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013075328A JP6107332B2 (ja) | 2013-03-29 | 2013-03-29 | 振動子、発振器、電子機器および移動体 |
| JP2013-075328 | 2013-03-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104079262A true CN104079262A (zh) | 2014-10-01 |
Family
ID=51600341
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410112799.3A Pending CN104079262A (zh) | 2013-03-29 | 2014-03-25 | 振动元件、振子、振荡器、电子设备以及移动体 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US9214919B2 (enExample) |
| JP (1) | JP6107332B2 (enExample) |
| CN (1) | CN104079262A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108631749A (zh) * | 2017-03-24 | 2018-10-09 | 精工爱普生株式会社 | 振动器件、振荡器、陀螺仪传感器、电子设备和移动体 |
| CN112703673A (zh) * | 2018-09-28 | 2021-04-23 | 株式会社村田制作所 | 谐振子和谐振装置 |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014086933A (ja) * | 2012-10-25 | 2014-05-12 | Seiko Epson Corp | 振動片、振動子、発振器、電子機器及び移動体 |
| JP6145288B2 (ja) * | 2013-03-15 | 2017-06-07 | エスアイアイ・クリスタルテクノロジー株式会社 | 圧電振動片、圧電振動子、発振器、電子機器、及び電波時計 |
| JP6182998B2 (ja) * | 2013-06-24 | 2017-08-23 | セイコーエプソン株式会社 | 水晶振動片、振動子、電子デバイス、電子機器および移動体 |
| JP2015023422A (ja) * | 2013-07-18 | 2015-02-02 | セイコーエプソン株式会社 | 振動片、振動子、発振器、電子機器および移動体 |
| TWI634742B (zh) * | 2013-11-16 | 2018-09-01 | 精工愛普生股份有限公司 | 振動片、振動子、振盪器、電子機器及移動體 |
| JP6636683B2 (ja) * | 2014-03-07 | 2020-01-29 | エスアイアイ・クリスタルテクノロジー株式会社 | 圧電振動片及び圧電振動子 |
| JP6506535B2 (ja) * | 2014-11-11 | 2019-04-24 | エスアイアイ・クリスタルテクノロジー株式会社 | 圧電振動片および圧電振動子 |
| JP6592248B2 (ja) * | 2015-01-30 | 2019-10-16 | シチズン時計株式会社 | 振動子ユニット |
| JP6551649B2 (ja) * | 2015-02-09 | 2019-07-31 | セイコーエプソン株式会社 | 振動片の製造方法、振動片、振動子、発振器、リアルタイムクロック、電子機器、および移動体 |
| JP6521221B2 (ja) * | 2015-02-13 | 2019-05-29 | セイコーエプソン株式会社 | 振動片、振動子、発振器、リアルタイムクロック、電子機器、および移動体 |
| JP6552225B2 (ja) * | 2015-03-12 | 2019-07-31 | エスアイアイ・クリスタルテクノロジー株式会社 | 圧電振動片及び圧電振動子 |
| JP6488861B2 (ja) * | 2015-04-28 | 2019-03-27 | セイコーエプソン株式会社 | 振動片、振動子、発振器、リアルタイムクロック、センサー、電子機器および移動体 |
| JP7076692B2 (ja) * | 2018-03-30 | 2022-05-30 | 株式会社村田製作所 | 振動素子及びそれを備えた振動子 |
| JP7240200B2 (ja) * | 2019-02-26 | 2023-03-15 | エスアイアイ・クリスタルテクノロジー株式会社 | 圧電振動片、及び圧電振動子 |
| JP6750711B2 (ja) * | 2019-06-24 | 2020-09-02 | セイコーエプソン株式会社 | 振動片、振動子、発振器、リアルタイムクロック、電子機器、および移動体 |
| WO2021059731A1 (ja) * | 2019-09-26 | 2021-04-01 | 株式会社大真空 | 圧電振動板、圧電振動デバイス、及び、圧電振動デバイスの製造方法 |
| JP7404760B2 (ja) * | 2019-10-18 | 2023-12-26 | セイコーエプソン株式会社 | 発振器、電子機器、及び移動体 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7084556B1 (en) * | 2005-06-09 | 2006-08-01 | Eta Sa Manufacture Horlogere Suisse | Small-sized piezoelectric resonator |
| US20110001394A1 (en) * | 2009-07-02 | 2011-01-06 | Eta Sa | Piezoelectric thin-film tuning fork resonator |
| CN102377409A (zh) * | 2010-08-07 | 2012-03-14 | 日本电波工业株式会社 | 压电装置及其制造方法 |
| CN102386872A (zh) * | 2010-09-03 | 2012-03-21 | 日本电波工业株式会社 | 音叉型水晶振动片及水晶装置 |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3517288A (en) * | 1968-09-03 | 1970-06-23 | Bulova Watch Co Inc | Transformer-coupled drive system for tuning-fork oscillator |
| JPS4946283Y1 (enExample) * | 1969-05-01 | 1974-12-18 | ||
| JPS4837392B1 (enExample) * | 1969-11-07 | 1973-11-10 | ||
| JP3343315B2 (ja) | 1995-09-29 | 2002-11-11 | アイホン株式会社 | インターホン装置 |
| JP2002141770A (ja) | 2000-11-01 | 2002-05-17 | Citizen Watch Co Ltd | 小型振動子 |
| JP2005136705A (ja) * | 2003-10-30 | 2005-05-26 | Seiko Epson Corp | 圧電振動片の接合構造及び接合方法、圧電デバイスおよびその製造方法、ならびに圧電デバイスを利用した携帯電話装置と電子機器 |
| ATE390758T1 (de) * | 2005-06-09 | 2008-04-15 | Eta Sa Mft Horlogere Suisse | Piezoelektrischer resonator und anordnung mit dem in ein gehäuse eingeschlossenen resonator |
| EP1732217B1 (en) | 2005-06-09 | 2009-01-21 | ETA SA Manufacture Horlogère Suisse | Small-sized piezoelectric resonator |
| US20060279176A1 (en) * | 2005-06-09 | 2006-12-14 | Eta Manufacture Horlogere Suisse | Small-sized piezoelectric resonator |
| JP4389924B2 (ja) * | 2006-11-07 | 2009-12-24 | エプソントヨコム株式会社 | 圧電デバイス |
| US8234774B2 (en) * | 2007-12-21 | 2012-08-07 | Sitime Corporation | Method for fabricating a microelectromechanical system (MEMS) resonator |
| WO2009116523A1 (ja) * | 2008-03-18 | 2009-09-24 | シチズンホールディングス株式会社 | 圧電デバイス |
| JP5218104B2 (ja) * | 2009-01-29 | 2013-06-26 | 株式会社大真空 | 音叉型圧電振動片、および音叉型圧電振動デバイス |
| JP5509647B2 (ja) | 2009-03-26 | 2014-06-04 | セイコーエプソン株式会社 | 振動片 |
| JP2011082841A (ja) | 2009-10-08 | 2011-04-21 | Seiko Epson Corp | 振動片 |
| JP5085681B2 (ja) * | 2010-03-31 | 2012-11-28 | 日本電波工業株式会社 | 圧電振動片、圧電デバイスおよび圧電振動片の製造方法 |
| JP2010206821A (ja) * | 2010-04-22 | 2010-09-16 | Seiko Epson Corp | 圧電振動片 |
| US20120098389A1 (en) * | 2010-10-21 | 2012-04-26 | Micro Crystal Ag | Method for mounting a piezoelectric resonator in a case and packaged piezoelectric resonator |
| JP5003811B2 (ja) * | 2010-11-04 | 2012-08-15 | セイコーエプソン株式会社 | 圧電振動片、圧電振動子および加速度センサ |
| JP2014135655A (ja) * | 2013-01-10 | 2014-07-24 | Sii Crystal Technology Inc | 圧電振動片、圧電振動子、発振器、電子機器及び電波時計 |
| JP6013228B2 (ja) * | 2013-02-25 | 2016-10-25 | エスアイアイ・クリスタルテクノロジー株式会社 | 圧電振動子、発振器、電子機器及び電波時計 |
-
2013
- 2013-03-29 JP JP2013075328A patent/JP6107332B2/ja active Active
-
2014
- 2014-03-25 US US14/224,999 patent/US9214919B2/en active Active
- 2014-03-25 CN CN201410112799.3A patent/CN104079262A/zh active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7084556B1 (en) * | 2005-06-09 | 2006-08-01 | Eta Sa Manufacture Horlogere Suisse | Small-sized piezoelectric resonator |
| US20110001394A1 (en) * | 2009-07-02 | 2011-01-06 | Eta Sa | Piezoelectric thin-film tuning fork resonator |
| CN102377409A (zh) * | 2010-08-07 | 2012-03-14 | 日本电波工业株式会社 | 压电装置及其制造方法 |
| CN102386872A (zh) * | 2010-09-03 | 2012-03-21 | 日本电波工业株式会社 | 音叉型水晶振动片及水晶装置 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108631749A (zh) * | 2017-03-24 | 2018-10-09 | 精工爱普生株式会社 | 振动器件、振荡器、陀螺仪传感器、电子设备和移动体 |
| CN108631749B (zh) * | 2017-03-24 | 2023-10-10 | 精工爱普生株式会社 | 振动器件、振荡器、陀螺仪传感器、电子设备和移动体 |
| CN112703673A (zh) * | 2018-09-28 | 2021-04-23 | 株式会社村田制作所 | 谐振子和谐振装置 |
| CN112703673B (zh) * | 2018-09-28 | 2024-04-12 | 株式会社村田制作所 | 谐振子和谐振装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| US9214919B2 (en) | 2015-12-15 |
| JP6107332B2 (ja) | 2017-04-05 |
| US20140292435A1 (en) | 2014-10-02 |
| JP2014200043A (ja) | 2014-10-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104079262A (zh) | 振动元件、振子、振荡器、电子设备以及移动体 | |
| CN104079263B (zh) | 振动元件、振子、振荡器、电子设备、传感器以及移动体 | |
| CN109067379B (zh) | 振动元件、振子、振荡器、电子设备以及移动体 | |
| KR20140118840A (ko) | 진동 소자, 진동자, 발진기, 전자 기기 및 이동체 | |
| CN103580641B (zh) | 振动片、振子、振荡器以及电子设备 | |
| CN103944531A (zh) | 振动元件、振子、振荡器、电子设备以及移动体 | |
| CN105987690B (zh) | 振动片、振子、振动装置、振荡器、电子设备以及移动体 | |
| TWI649964B (zh) | 振動元件、振動子、振盪器、電子機器及移動體 | |
| US20150137900A1 (en) | Resonator element, resonator, oscillator, electronic device, and mobile object | |
| JP2015008352A (ja) | 振動片、振動子、電子デバイス、電子機器及び移動体 | |
| CN104242866B (zh) | 振动元件、振子、振荡器、电子设备以及移动体 | |
| CN104038178A (zh) | 振动元件、振子、振荡器、电子设备及移动体 | |
| CN104753491B (zh) | 振子、振荡器、电子设备、物理量传感器和移动体 | |
| JP2014200050A (ja) | 振動素子、振動子、発振器、電子機器および移動体 | |
| CN104242858A (zh) | 振动元件、振子、振荡器、电子设备以及移动体 | |
| CN104660169A (zh) | 振动元件、振子、振荡器、电子设备及移动体 | |
| JP7439852B2 (ja) | 振動素子、振動子、発振器、電子機器および移動体 | |
| JP6816805B2 (ja) | 振動素子、振動子、発振器、電子機器および移動体 | |
| JP6521148B2 (ja) | 振動素子、振動子、発振器、電子機器および移動体 | |
| JP2014179914A (ja) | 振動子、発振器、電子機器および移動体 | |
| JP2019115079A (ja) | 振動素子、振動子、発振器、電子機器および移動体 | |
| JP2018061286A (ja) | 振動素子、振動子、発振器、電子機器および移動体 | |
| JP2017139823A (ja) | 振動片、振動子、電子デバイス、電子機器及び移動体 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20141001 |
|
| WD01 | Invention patent application deemed withdrawn after publication |