CN104079260B - 振动元件、振子、振荡器、电子设备以及移动体 - Google Patents

振动元件、振子、振荡器、电子设备以及移动体 Download PDF

Info

Publication number
CN104079260B
CN104079260B CN201410104030.7A CN201410104030A CN104079260B CN 104079260 B CN104079260 B CN 104079260B CN 201410104030 A CN201410104030 A CN 201410104030A CN 104079260 B CN104079260 B CN 104079260B
Authority
CN
China
Prior art keywords
axis
vibration
vibrating elements
region
outer edge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201410104030.7A
Other languages
English (en)
Chinese (zh)
Other versions
CN104079260A (zh
Inventor
菊岛正幸
田中雅子
小幡直久
海野幸浩
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of CN104079260A publication Critical patent/CN104079260A/zh
Application granted granted Critical
Publication of CN104079260B publication Critical patent/CN104079260B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/177—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator of the energy-trap type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
    • H03B5/32—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • H10N30/2023—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement having polygonal or rectangular shape
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/208—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using shear or torsion displacement, e.g. d15 type devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H03H9/0547—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
CN201410104030.7A 2013-03-29 2014-03-20 振动元件、振子、振荡器、电子设备以及移动体 Active CN104079260B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013075014A JP6107330B2 (ja) 2013-03-29 2013-03-29 振動素子、振動子、発振器、電子機器および移動体
JP2013-075014 2013-03-29

Publications (2)

Publication Number Publication Date
CN104079260A CN104079260A (zh) 2014-10-01
CN104079260B true CN104079260B (zh) 2018-04-03

Family

ID=51600339

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201410104030.7A Active CN104079260B (zh) 2013-03-29 2014-03-20 振动元件、振子、振荡器、电子设备以及移动体

Country Status (3)

Country Link
US (2) US9035709B2 (https=)
JP (1) JP6107330B2 (https=)
CN (1) CN104079260B (https=)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6051885B2 (ja) * 2013-01-18 2016-12-27 セイコーエプソン株式会社 振動素子、振動子、発振器、電子機器および移動体
JP2014241573A (ja) * 2013-01-29 2014-12-25 日本電波工業株式会社 水晶振動子、振動子パッケージ及び水晶発振器
JP2014146944A (ja) * 2013-01-29 2014-08-14 Nippon Dempa Kogyo Co Ltd 水晶振動子、振動子パッケージ及び発振器
JP6435606B2 (ja) * 2013-03-29 2018-12-12 セイコーエプソン株式会社 振動素子、振動子、発振器、電子機器および移動体
JP6107330B2 (ja) * 2013-03-29 2017-04-05 セイコーエプソン株式会社 振動素子、振動子、発振器、電子機器および移動体
US9762206B2 (en) * 2014-02-07 2017-09-12 Samsung Electro-Mechanics Co., Ltd. AT-cut quartz crystal vibrator with a long side along the X-axis direction
USD760230S1 (en) * 2014-09-16 2016-06-28 Daishinku Corporation Piezoelectric vibration device
JP6578708B2 (ja) * 2015-04-02 2019-09-25 セイコーエプソン株式会社 振動素子、振動子、発振器、電子機器および移動体
JP2017212595A (ja) * 2016-05-25 2017-11-30 日本電波工業株式会社 圧電デバイス
JP2020198492A (ja) * 2019-05-31 2020-12-10 京セラ株式会社 水晶素子、水晶デバイス及び電子機器並びに水晶素子の製造方法

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002198772A (ja) * 2000-12-27 2002-07-12 Toyo Commun Equip Co Ltd 高周波圧電デバイス
JP2004304448A (ja) * 2003-03-31 2004-10-28 Kyocera Kinseki Corp 水晶振動板
JP2006005676A (ja) * 2004-06-17 2006-01-05 Epson Toyocom Corp 水晶振動子とその製造方法
US7098574B2 (en) * 2002-11-08 2006-08-29 Toyo Communication Equipment Co., Ltd. Piezoelectric resonator and method for manufacturing the same
JP2007174562A (ja) * 2005-12-26 2007-07-05 Epson Toyocom Corp 圧電振動片および圧電デバイス
US8026652B2 (en) * 2007-12-28 2011-09-27 Epson Toyocom Corporation Quartz crystal resonator element, quartz crystal device, and method for producing quartz crystal resonator element
JP2012253630A (ja) * 2011-06-03 2012-12-20 Seiko Epson Corp 圧電振動素子、圧電振動子、電子デバイス、及び電子機器
JP2013042440A (ja) * 2011-08-19 2013-02-28 Seiko Epson Corp 圧電振動素子、圧電振動子、電子デバイス、及び電子機器
CN102957396A (zh) * 2011-08-19 2013-03-06 精工爱普生株式会社 振动元件、振子、电子装置、电子设备及移动体

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0435108A (ja) * 1990-05-25 1992-02-05 Toyo Commun Equip Co Ltd 超薄板多重モード水晶フィルタ素子
JP2001144578A (ja) 1999-11-15 2001-05-25 Tokyo Denpa Co Ltd 圧電振動子
JP2002033640A (ja) * 2000-07-17 2002-01-31 Toyo Commun Equip Co Ltd 圧電デバイス
JP3952811B2 (ja) 2002-03-11 2007-08-01 セイコーエプソン株式会社 圧電振動片、圧電振動片の製造方法および圧電デバイス
JP2004165743A (ja) 2002-11-08 2004-06-10 Toyo Commun Equip Co Ltd 圧電基板、圧電振動素子、圧電振動子、圧電発振器、圧電基板ウェハ、圧電基板ウェハの構造、及び製造方法
JP2006203700A (ja) 2005-01-21 2006-08-03 Epson Toyocom Corp 圧電基板の製造方法、圧電振動素子、圧電振動子、及び圧電発振器
JP4305542B2 (ja) * 2006-08-09 2009-07-29 エプソントヨコム株式会社 Ａｔカット水晶振動片及びその製造方法
US8963402B2 (en) * 2010-11-30 2015-02-24 Seiko Epson Corporation Piezoelectric vibrator element, piezoelectric module, and electronic device
JP2012186639A (ja) * 2011-03-04 2012-09-27 Seiko Epson Corp 圧電振動片、圧電振動子、電子デバイス
TW201251157A (en) * 2011-06-03 2012-12-16 Seiko Epson Corp Piezoelectric vibration element, manufacturing method for piezoelectric vibration element, piezoelectric vibrator, electronic device, and electronic apparatus
CN102957394B (zh) * 2011-08-18 2016-12-21 精工爱普生株式会社 振动元件、振子、电子装置、电子设备、移动体及振动元件的制造方法
TWI578585B (zh) * 2012-03-27 2017-04-11 精工愛普生股份有限公司 振動元件、振動器、電子裝置、電子機器及移動體
US9013242B2 (en) * 2012-03-27 2015-04-21 Seiko Epson Corporation Resonator element, resonator, electronic device, electronic apparatus, and mobile object
JP2013255051A (ja) * 2012-06-06 2013-12-19 Seiko Epson Corp 振動素子、振動子、電子デバイス、電子機器及び振動素子の製造方法
JP6107330B2 (ja) * 2013-03-29 2017-04-05 セイコーエプソン株式会社 振動素子、振動子、発振器、電子機器および移動体

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002198772A (ja) * 2000-12-27 2002-07-12 Toyo Commun Equip Co Ltd 高周波圧電デバイス
US7098574B2 (en) * 2002-11-08 2006-08-29 Toyo Communication Equipment Co., Ltd. Piezoelectric resonator and method for manufacturing the same
JP2004304448A (ja) * 2003-03-31 2004-10-28 Kyocera Kinseki Corp 水晶振動板
JP2006005676A (ja) * 2004-06-17 2006-01-05 Epson Toyocom Corp 水晶振動子とその製造方法
JP2007174562A (ja) * 2005-12-26 2007-07-05 Epson Toyocom Corp 圧電振動片および圧電デバイス
US8026652B2 (en) * 2007-12-28 2011-09-27 Epson Toyocom Corporation Quartz crystal resonator element, quartz crystal device, and method for producing quartz crystal resonator element
JP2012253630A (ja) * 2011-06-03 2012-12-20 Seiko Epson Corp 圧電振動素子、圧電振動子、電子デバイス、及び電子機器
JP2013042440A (ja) * 2011-08-19 2013-02-28 Seiko Epson Corp 圧電振動素子、圧電振動子、電子デバイス、及び電子機器
CN102957396A (zh) * 2011-08-19 2013-03-06 精工爱普生株式会社 振动元件、振子、电子装置、电子设备及移动体

Also Published As

Publication number Publication date
JP6107330B2 (ja) 2017-04-05
JP2014200026A (ja) 2014-10-23
US20140292434A1 (en) 2014-10-02
US20150222243A1 (en) 2015-08-06
CN104079260A (zh) 2014-10-01
US9035709B2 (en) 2015-05-19

Similar Documents

Publication Publication Date Title
CN104079260B (zh) 振动元件、振子、振荡器、电子设备以及移动体
CN103944531B (zh) 振动元件、振子、振荡器、电子设备以及移动体
CN104079255B (zh) 振动元件、振子、振荡器、电子设备以及移动体
CN104753492A (zh) 振动片、振子、振荡器、电子设备、传感器和移动体
JP6179104B2 (ja) 振動素子、振動子、発振器、電子機器および移動体
JP6390104B2 (ja) 振動素子、振動子、発振器、電子機器および移動体
CN105987690A (zh) 振动片、振子、振动装置、振荡器、电子设备以及移动体
JP2019114998A (ja) 振動デバイス、電子機器および移動体
JP6179131B2 (ja) 振動素子、振動子、発振器、電子機器および移動体
CN104079254B (zh) 振动元件、振子、振荡器、电子设备以及移动体
WO2015155995A1 (ja) 電子デバイス、電子機器および移動体
CN105281700A (zh) 振动元件、振子、振荡器、电子设备以及移动体
CN104660169A (zh) 振动元件、振子、振荡器、电子设备及移动体
JP6578709B2 (ja) 振動素子、振動子、発振器、電子機器および移動体
JP6543889B2 (ja) 電子デバイス、電子機器および移動体
JP6578708B2 (ja) 振動素子、振動子、発振器、電子機器および移動体
JP2014171152A (ja) 振動素子、振動子、発振器、電子機器および移動体
JP2014171150A (ja) 振動素子、振動子、発振器、電子機器および移動体
JP2017085264A (ja) 振動片、振動子、発振器、電子機器、および移動体
JP2014171151A (ja) 振動素子、振動子、発振器、電子機器および移動体
JP2016197783A (ja) 振動素子、振動子、発振器、電子機器および移動体

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant