CN104040676B - 带电粒子线装置以及倾斜观察图像显示方法 - Google Patents

带电粒子线装置以及倾斜观察图像显示方法 Download PDF

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Publication number
CN104040676B
CN104040676B CN201280065865.5A CN201280065865A CN104040676B CN 104040676 B CN104040676 B CN 104040676B CN 201280065865 A CN201280065865 A CN 201280065865A CN 104040676 B CN104040676 B CN 104040676B
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China
Prior art keywords
charged particle
particle beam
observation image
mentioned
sample
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Chinese (zh)
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CN104040676A (zh
Inventor
小竹航
川俣茂
伊东祐博
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Hitachi Ltd
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Hitachi Ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1478—Beam tilting means, i.e. for stereoscopy or for beam channelling
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/21—Means for adjusting the focus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/2611—Stereoscopic measurements and/or imaging

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)
CN201280065865.5A 2012-01-06 2012-12-20 带电粒子线装置以及倾斜观察图像显示方法 Active CN104040676B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2012001617A JP5698157B2 (ja) 2012-01-06 2012-01-06 荷電粒子線装置および傾斜観察画像表示方法
JP2012-001617 2012-01-06
PCT/JP2012/083043 WO2013103090A1 (ja) 2012-01-06 2012-12-20 荷電粒子線装置および傾斜観察画像表示方法

Publications (2)

Publication Number Publication Date
CN104040676A CN104040676A (zh) 2014-09-10
CN104040676B true CN104040676B (zh) 2016-03-16

Family

ID=48745153

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201280065865.5A Active CN104040676B (zh) 2012-01-06 2012-12-20 带电粒子线装置以及倾斜观察图像显示方法

Country Status (5)

Country Link
US (1) US9012842B2 (enExample)
JP (1) JP5698157B2 (enExample)
CN (1) CN104040676B (enExample)
DE (1) DE112012005293B4 (enExample)
WO (1) WO2013103090A1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105097391A (zh) * 2015-08-14 2015-11-25 成都格瑞思文化传播有限公司 一种教学用扫描电子显微镜
CN105549190A (zh) * 2016-01-15 2016-05-04 青岛农业大学 一种智能的折返射投射物镜
JP6783071B2 (ja) * 2016-05-20 2020-11-11 株式会社日立ハイテク 荷電粒子線装置
DE112017007270B4 (de) * 2017-04-21 2023-03-30 Hitachi High-Tech Corporation Ladungsträgerstrahlvorrichtung und Verfahren zum Einstellen von Bedingungen in einer Ladungsträgerstrahlvorrichtung
DE112018007564T5 (de) * 2018-06-04 2021-01-21 Hitachi High-Tech Corporation Elektronenstrahlvorrichtung
US10714303B2 (en) * 2018-07-19 2020-07-14 International Business Machines Corporation Enabling high throughput electron channeling contrast imaging (ECCI) by varying electron beam energy
CN109166781A (zh) * 2018-09-11 2019-01-08 镇江乐华电子科技有限公司 扫描透射电子显微成像方法和系统
US11508551B2 (en) * 2018-12-14 2022-11-22 Kla Corporation Detection and correction of system responses in real-time
US20250132123A1 (en) * 2021-08-16 2025-04-24 Hitachi High-Tech Corporation Charged Particle Beam Device
JP7407785B2 (ja) * 2021-10-27 2024-01-04 日本電子株式会社 電子顕微鏡および画像取得方法

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5180763A (enExample) * 1975-01-10 1976-07-14 Hitachi Ltd
JPS58198841A (ja) * 1982-05-17 1983-11-18 Hitachi Ltd 立体走査型電子顕微鏡の焦点調整装置
JPH06310070A (ja) * 1993-04-21 1994-11-04 Hitachi Ltd 走査型電子顕微鏡およびその類似装置
JP2000195457A (ja) * 1998-12-25 2000-07-14 Jeol Ltd 走査顕微鏡
JP2006012664A (ja) * 2004-06-28 2006-01-12 Hitachi High-Technologies Corp 荷電粒子線装置及びその光軸調整方法
US20090322973A1 (en) * 2008-06-26 2009-12-31 Hitachi High-Technologies Corporation Charged particle beam apparatus
JP2010244740A (ja) * 2009-04-02 2010-10-28 Hitachi High-Technologies Corp レビュー装置、及びレビュー方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5548610Y2 (enExample) 1975-10-08 1980-11-13
JPS5854784Y2 (ja) 1978-09-25 1983-12-14 株式会社日立製作所 立体走査電子顕微鏡
JPH0233843A (ja) 1988-07-25 1990-02-05 Hitachi Ltd 走査電子顕微鏡
JP4383950B2 (ja) 2004-04-23 2009-12-16 株式会社日立ハイテクノロジーズ 荷電粒子線調整方法、及び荷電粒子線装置
JP5350123B2 (ja) 2009-08-10 2013-11-27 株式会社日立ハイテクノロジーズ 荷電粒子線装置及び画像表示方法
JP5364112B2 (ja) 2011-01-25 2013-12-11 株式会社日立ハイテクノロジーズ 荷電粒子線装置
JP5814855B2 (ja) 2012-04-27 2015-11-17 株式会社日立ハイテクノロジーズ 荷電粒子線調整支援装置および方法

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5180763A (enExample) * 1975-01-10 1976-07-14 Hitachi Ltd
JPS58198841A (ja) * 1982-05-17 1983-11-18 Hitachi Ltd 立体走査型電子顕微鏡の焦点調整装置
JPH06310070A (ja) * 1993-04-21 1994-11-04 Hitachi Ltd 走査型電子顕微鏡およびその類似装置
JP2000195457A (ja) * 1998-12-25 2000-07-14 Jeol Ltd 走査顕微鏡
JP2006012664A (ja) * 2004-06-28 2006-01-12 Hitachi High-Technologies Corp 荷電粒子線装置及びその光軸調整方法
US20090322973A1 (en) * 2008-06-26 2009-12-31 Hitachi High-Technologies Corporation Charged particle beam apparatus
JP2010244740A (ja) * 2009-04-02 2010-10-28 Hitachi High-Technologies Corp レビュー装置、及びレビュー方法

Also Published As

Publication number Publication date
DE112012005293B4 (de) 2021-08-05
US9012842B2 (en) 2015-04-21
CN104040676A (zh) 2014-09-10
JP2013143197A (ja) 2013-07-22
US20150001393A1 (en) 2015-01-01
JP5698157B2 (ja) 2015-04-08
WO2013103090A1 (ja) 2013-07-11
DE112012005293T5 (de) 2014-09-04

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