JPS5180763A - - Google Patents
Info
- Publication number
- JPS5180763A JPS5180763A JP50004946A JP494675A JPS5180763A JP S5180763 A JPS5180763 A JP S5180763A JP 50004946 A JP50004946 A JP 50004946A JP 494675 A JP494675 A JP 494675A JP S5180763 A JPS5180763 A JP S5180763A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50004946A JPS5820456B2 (ja) | 1975-01-10 | 1975-01-10 | リツタイソウサガタデンシケンビキヨウ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50004946A JPS5820456B2 (ja) | 1975-01-10 | 1975-01-10 | リツタイソウサガタデンシケンビキヨウ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5180763A true JPS5180763A (enExample) | 1976-07-14 |
| JPS5820456B2 JPS5820456B2 (ja) | 1983-04-23 |
Family
ID=11597727
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50004946A Expired JPS5820456B2 (ja) | 1975-01-10 | 1975-01-10 | リツタイソウサガタデンシケンビキヨウ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5820456B2 (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57114807A (en) * | 1981-01-08 | 1982-07-16 | Erionikusu:Kk | Microdistance measuring device using electron beam |
| WO2013103090A1 (ja) * | 2012-01-06 | 2013-07-11 | 株式会社 日立ハイテクノロジーズ | 荷電粒子線装置および傾斜観察画像表示方法 |
-
1975
- 1975-01-10 JP JP50004946A patent/JPS5820456B2/ja not_active Expired
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57114807A (en) * | 1981-01-08 | 1982-07-16 | Erionikusu:Kk | Microdistance measuring device using electron beam |
| WO2013103090A1 (ja) * | 2012-01-06 | 2013-07-11 | 株式会社 日立ハイテクノロジーズ | 荷電粒子線装置および傾斜観察画像表示方法 |
| JP2013143197A (ja) * | 2012-01-06 | 2013-07-22 | Hitachi High-Technologies Corp | 荷電粒子線装置および傾斜観察画像表示方法 |
| CN104040676A (zh) * | 2012-01-06 | 2014-09-10 | 株式会社日立高新技术 | 带电粒子线装置以及倾斜观察图像显示方法 |
| CN104040676B (zh) * | 2012-01-06 | 2016-03-16 | 株式会社日立高新技术 | 带电粒子线装置以及倾斜观察图像显示方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5820456B2 (ja) | 1983-04-23 |