CN103946967B - 用于裸工件储料器的容器存储附加装置 - Google Patents

用于裸工件储料器的容器存储附加装置 Download PDF

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Publication number
CN103946967B
CN103946967B CN201280043130.2A CN201280043130A CN103946967B CN 103946967 B CN103946967 B CN 103946967B CN 201280043130 A CN201280043130 A CN 201280043130A CN 103946967 B CN103946967 B CN 103946967B
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China
Prior art keywords
container
workpiece
storage
naked
stocker
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CN201280043130.2A
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Chinese (zh)
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CN103946967A (zh
Inventor
卢茨·莱伯斯托克
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Brooks Automation Germany GmbH
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Dynamic Micro Systems
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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H10P72/3404—Storage means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3302—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7602—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a robot blade or gripped by a gripper for conveyance

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
CN201280043130.2A 2011-09-05 2012-09-04 用于裸工件储料器的容器存储附加装置 Active CN103946967B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US13/225,547 US8888434B2 (en) 2011-09-05 2011-09-05 Container storage add-on for bare workpiece stocker
US13/225,547 2011-09-05
PCT/IB2012/054560 WO2013035037A1 (en) 2011-09-05 2012-09-04 Container storage add-on for bare workpiece stocker

Publications (2)

Publication Number Publication Date
CN103946967A CN103946967A (zh) 2014-07-23
CN103946967B true CN103946967B (zh) 2018-02-02

Family

ID=47189983

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201280043130.2A Active CN103946967B (zh) 2011-09-05 2012-09-04 用于裸工件储料器的容器存储附加装置

Country Status (7)

Country Link
US (4) US8888434B2 (https=)
EP (1) EP2754174B1 (https=)
JP (1) JP6109176B2 (https=)
KR (1) KR102000776B1 (https=)
CN (1) CN103946967B (https=)
TW (1) TWI509726B (https=)
WO (1) WO2013035037A1 (https=)

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US11569138B2 (en) 2015-06-16 2023-01-31 Kla Corporation System and method for monitoring parameters of a semiconductor factory automation system
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US20190031440A1 (en) * 2016-02-15 2019-01-31 Murata Machinery, Ltd. Storage apparatus and conveyance system
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US10138060B1 (en) * 2016-06-22 2018-11-27 Amazon Technologies, Inc. Modular, multi-function robotic positioning system
CN106044229A (zh) * 2016-07-22 2016-10-26 京东方科技集团股份有限公司 一种掩模板搬运设备及曝光机组系统
US10928792B2 (en) * 2016-07-25 2021-02-23 Leridge Corporation Parallel manufacturing systems and methods
US10220511B2 (en) * 2016-07-28 2019-03-05 X Development Llc Customized robotic installation based on measurements collected on site
US20180029235A1 (en) * 2016-07-28 2018-02-01 X Development Llc Error Accrual and Mitigation During Robotic Process
EP3519937A4 (en) 2016-09-30 2020-04-29 Staples, Inc. HYBRID MODULAR MEMORY ACCESS SYSTEM
US10589931B2 (en) 2016-09-30 2020-03-17 Staples, Inc. Hybrid modular storage fetching system
US10683171B2 (en) 2016-09-30 2020-06-16 Staples, Inc. Hybrid modular storage fetching system
WO2018147953A1 (en) * 2017-01-05 2018-08-16 Staples, Inc. Hybrid modular storage fetching system
US11084410B1 (en) 2018-08-07 2021-08-10 Staples, Inc. Automated guided vehicle for transporting shelving units
US11590997B1 (en) 2018-08-07 2023-02-28 Staples, Inc. Autonomous shopping cart
US11630447B1 (en) 2018-08-10 2023-04-18 Staples, Inc. Automated guided vehicle for transporting objects
US11437258B2 (en) * 2018-08-30 2022-09-06 Taiwan Semiconductor Manufacturing Co., Ltd. Workpiece storage system, method of storing workpiece, and method of transferring workpiece using the same
US11180069B2 (en) 2018-12-31 2021-11-23 Staples, Inc. Automated loading of delivery vehicles using automated guided vehicles
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TWI859799B (zh) * 2023-03-31 2024-10-21 迅得機械股份有限公司 小型倉儲裝置
TWI859798B (zh) * 2023-03-31 2024-10-21 迅得機械股份有限公司 具有可折收承載件的小型倉儲裝置
KR102931077B1 (ko) * 2023-08-29 2026-02-26 쿠팡 주식회사 이송 장치 및 이를 이용한 이송 방법
TWI871123B (zh) * 2023-12-05 2025-01-21 旭東機械工業股份有限公司 晶圓盒之移送裝置
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Also Published As

Publication number Publication date
US10529609B2 (en) 2020-01-07
TWI509726B (zh) 2015-11-21
US20130058743A1 (en) 2013-03-07
US20160247701A1 (en) 2016-08-25
US8888434B2 (en) 2014-11-18
US20200126833A1 (en) 2020-04-23
US20210398836A1 (en) 2021-12-23
EP2754174B1 (en) 2021-04-07
EP2754174A1 (en) 2014-07-16
JP2014529914A (ja) 2014-11-13
TW201321287A (zh) 2013-06-01
US11049750B2 (en) 2021-06-29
US11587816B2 (en) 2023-02-21
JP6109176B2 (ja) 2017-04-05
KR102000776B1 (ko) 2019-07-16
KR20140060347A (ko) 2014-05-19
CN103946967A (zh) 2014-07-23
WO2013035037A1 (en) 2013-03-14

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Effective date of registration: 20251222

Address after: Steischlingen, Germany

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