CN103928366B - 基板握持装置 - Google Patents
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Abstract
本发明提供一种能够可靠地握持基板的基板握持装置。基板握持装置具有:举升多个支柱(2)的升降机构(20)、和分别配置在支柱(2)上的基板保持部(3)及基板引导部件(50)。支柱(2)具有使基板保持部(3)及基板引导部件(50)彼此相对移动的相对移动机构。该相对移动机构在支柱(2)上升时使基板保持部(3)向基板保持部(3)释放基板(W)的周缘部的方向移动,并且使基板引导部件(50)相对于基板保持部(3)上升,在支柱(2)下降时使基板保持部(3)向基板保持部(3)握持基板(W)的周缘部的方向移动,并且使基板引导部件(50)相对于基板保持部(3)下降。
Description
技术领域
本发明涉及基板握持装置,尤其涉及能够适用于半导体晶圆等基板的清洗装置和干燥装置的基板握持装置。
背景技术
在半导体器件的制造工序中,在研磨处理或电镀处理之后进行基板的清洗处理和干燥处理。例如,在基板的清洗处理中,通过基板握持装置握持基板并使基板旋转,在该状态下向基板供给清洗液。作为以往的基板握持装置,公知有通过驱动器等驱动夹具来握持基板的机构。
现有技术文献
专利文献
专利文献1:日本特开平10-59540号公报
专利文献2:日本特开2009-295751号公报
发明内容
本发明涉及以往的基板握持装置的改良,其目的在于提供一种能够可靠地握持基板的基板握持装置。
为了实现上述目的,本发明的一个方案为一种基板握持装置,其特征在于,具有:基台;支承在上述基台上且相对于该基台能够沿上下方向相对移动的多个支柱;用于举升上述支柱的升降机构;和分别配置在上述支柱上的基板保持部及基板引导部件,上述支柱具有使上述基板保持部及上述基板引导部件彼此相对移动的相对移动机构,上述相对移动机构在上述支柱上升时使该基板保持部向上述基板保持部释放上述基板的周缘部的方向移动,并且使上述基板引导部件相对于上述基板保持部上升,在上述支柱下降时使该基板保持部向上述基板保持部握持上述基板的周缘部的方向移动,并且使上述基板引导部件相对于上述基板保持部下降。
本发明的优选方案的特征在于,上述相对移动机构具有:第1杆;相对于上述第1杆能够相对地上下移动地配置且被上述升降机构举升的第2杆;配置在上述基台与上述第1杆之间且将上述第1杆向下弹压的初级弹簧;配置在上述第1杆与上述第2杆之间且将上述第2杆向下弹压的二级弹簧;固定在上述第1杆上且旋转自如地支承上述基板保持部的支承轴;以及将上述第2杆和上述基板保持部连结起来的连结机构。
本发明的优选方案的特征在于,上述初级弹簧的弹簧常数小于上述二级弹簧的弹簧常数。
本发明的优选方案的特征在于,上述初级弹簧的弹簧常数大于上述二级弹簧的弹簧常数。
本发明的优选方案的特征在于,上述基板引导部件固定在上述第2杆上。
本发明的优选方案的特征在于,上述相对移动机构使上述基板引导部件上升得比上述基板保持部高,并使上述基板引导部件下降得比上述基板保持部低。
本发明的优选方案的特征在于,上述基板保持部绕上述基台的中心轴线等间隔地配置,上述基板保持部通过握持上述基板的周缘部来进行上述基板的定心。
本发明的优选方案的特征在于,上述基板保持部具有握持上述基板的周缘部的装夹部、和供上述基板的周缘部载置的倾斜面,上述装夹部一体地形成在上述倾斜面上。
发明效果
根据本发明,当支柱上升时,基板引导部件相对于基板保持部上升。因此,从搬送机构搬送来的基板被基板引导部件引导至基板保持部,由此基板保持部能够可靠地握持基板。在支柱下降而基板保持部握持基板时,基板引导部件相对于基板保持部下降。因此,在将本基板握持装置适用于基板清洗装置等处理液体的装置时,能够防止液体从基板引导部件弹回。
附图说明
图1是表示本发明的第1实施方式的基板握持装置的纵剖视图。
图2是表示第1实施方式的基板握持装置的俯视图。
图3是表示升降机构上升的状态的图。
图4是支柱及基板保持部的放大图。
图5的(a)是支柱及基板保持部的顶视图,图5的(b)是从箭头A所示的方向观察图4所示的支柱及基板保持部而得到的剖视图。
图6是表示支柱被升降机构举升的状态的图。
图7的(a)是表示支柱位于上升位置时的基板保持部的图,图7的(b)是表示支柱位于下降位置时的基板保持部的图。
图8的(a)是表示支柱位于下降位置时的基板保持部及基板引导部件的图,图8的(b)是表示支柱位于上升位置时的基板保持部及基板引导部件的图。
图9是表示本发明的第2实施方式的图。
图10是表示支柱被升降机构举升的状态的图。
附图标记说明
1 基台
2 支柱
3 基板保持部
5 旋转轴
6 轴承
7 圆筒体
9 架台
11、12 带轮
14 带
15 马达
20 升降机构
21 第1气腔
22 第2气腔
24 第1气体流路
25 第2气体流路
28 旋转杯
31 圆环部件
35 第1杆
36 第2杆
41 初级弹簧
42 二级弹簧
44、45 弹簧止动件
46 支承轴
47 销
48 长孔
50 基板引导部件
51 螺钉
54 载荷传递部件
具体实施方式
以下,参照附图说明本发明的实施方式。
图1是表示本发明的第1实施方式的基板握持装置的纵剖视图。图2是表示第1实施方式的基板握持装置的俯视图。
如图1及图2所示,基板握持装置包括:具有四个臂1a的基台1;支承于各臂1a的前端的四个支柱2;和与支柱2连结的基板保持部3。基台1固定在旋转轴5的上端,该旋转轴5被轴承6旋转自如地支承。轴承6固定于以环绕旋转轴5的方式配置的圆筒体7的内周面上。圆筒体7的下端安装在架台9上,其位置固定。旋转轴5经由带轮11、12及带14而与马达15连结,通过驱动马达15,基台1以其轴心为中心而旋转。附图标记W是晶圆等基板。晶圆W被基板保持部3握持,通过马达15而绕晶圆W的中心轴线旋转。
以环绕圆筒体7周围的方式配置有用于举升支柱2的升降机构20。该升降机构20构成为相对于圆筒体7能够沿上下方向滑动。升降机构20具有四个推进件(pusher)20a,该推进件20a与四个支柱2的下端接触并用于举升这些支柱2。在圆筒体7的外周面与升降机构20的内周面之间形成有第1气腔21和第2气腔22。这些第1气腔21和第2气腔22分别与第1气体流路24及第2气体流路25连通,这些第1气体流路24及第2气体流路25与未图示的加压气体供给源连结。当使第1气腔21内的压力比第2气腔22内的压力高时,如图3所示,升降机构20上升。另一方面,当使第2气腔22内的压力比第1气腔21内的压力高时,如图1所示,升降机构20下降。通过升降机构20使四个支柱2同时上升、下降。
四个支柱2的外周面固定在圆环部件31上,四个支柱2和圆环部件31一体地上下移动。圆环部件31沿支柱2的排列方向延伸,位于基台1的下方。圆环部件31、旋转轴5、基台1、圆筒体7呈同心状地配置。
在基台1的上表面固定有旋转杯28。该旋转杯28用于承接因离心力而从旋转的晶圆W飞出的液体。图1及图3示出了旋转杯28的纵截面。旋转杯28以环绕晶圆W整周的方式配置。旋转杯28的纵截面形状向径向内侧倾斜。另外,旋转杯28的内周面由平滑的曲面构成。旋转杯28的上端与晶圆W接近,旋转杯28的上端的内径设定得比晶圆W的直径稍大。另外,在旋转杯28的上端,与各支柱2对应地形成有沿着支柱2的外周面形状的切缺28a。在旋转杯28的底面上形成有斜着延伸的液体排出孔(未图示)。
四个支柱2及基板保持部3具有相同结构。图4是支柱2及基板保持部3的放大图。图5的(a)是支柱2及基板保持部3的顶视图,图5的(b)是从箭头A所示的方向观察图4所示的支柱2及基板保持部3而得到的剖视图。基台1的臂1a具有以使支柱2滑动自如的方式保持支柱2的保持部件1b。此外,该保持部件1b可以与臂1a一体地构成。在保持部件1b上形成有沿上下延伸的贯穿孔,在该贯穿孔中插入有支柱2。贯穿孔的直径比支柱2的直径稍大,因此支柱2相对于基台1能够沿上下方向相对移动。
基板保持部3的上表面呈朝向晶圆W的半径方向内侧而具有向下坡度的倾斜面3b。在倾斜面3b上形成有与晶圆W的周缘部接触的装夹部3a。装夹部3a在基板保持部3的倾斜面3b上一体地形成。在本实施方式中,如图2所示设有四个基板保持部3,这些基板保持部3握持晶圆W的周缘部。晶圆W的周缘部首先载置在倾斜面3b上,然后被装夹部3a握持。基板保持部3绕基台1及旋转轴5的中心轴线等间隔地配置。因此,通过使基板保持部3握持晶圆W的周缘部,能够自动地进行晶圆W的定心(centering)。
支柱2具有沿上下方向滑动自如地保持在保持部件1b上的第1杆35、和收容在该第1杆35的内部的第2杆36。基板保持部3与第1杆35及第2杆36的上端部连结。第1杆35呈圆筒形状,第2杆36在第1杆35内沿上下方向移动自如地配置。即,第2杆36相对于第1杆35能够相对地上下移动。第1杆35固定在圆环部件31上。
在基台1与第1杆35之间配置有初级弹簧41。更具体而言,在第1杆35的外周部固定有弹簧止动件44,在该弹簧止动件44与基台1的保持部件1b之间安装有初级弹簧41。该初级弹簧41将第1杆35向下弹压。
在第1杆35与第2杆36之间配置有二级弹簧42。更具体而言,在第2杆36的外周部上固定有弹簧止动件45,在该弹簧止动件45与第1杆35的下端之间安装有二级弹簧42。该二级弹簧42将第2杆36向下弹压。初级弹簧41的弹簧常数小于二级弹簧42的弹簧常数。
当升降机构20的推进件20a推顶第2杆36时,经由二级弹簧42对第1杆35施加向上的力。由此,第1杆35及第2杆36反抗初级弹簧41的反力而一体地上升。如图6所示,当圆环部件31与基台1的下表面接触时,第1杆35停止上升,而第2杆36继续上升。在第2杆36到达规定高度时,第2杆36停止上升。像这样,在第1杆35停止上升之后第2杆36停止上升。此外,也可以取代圆环部件31而在各个支柱2上设置与基台1的下表面接触的止动件。在该情况下,也能够在第1杆35停止上升之后使第2杆36停止上升。
基板保持部3旋转自如地支承在固定于第1杆35上的支承轴46上。在基板保持部3的下部固定有销47,该销47插入形成于第2杆36的上端的长孔48中。即,基板保持部3通过销47与长孔48的卡合而与第2杆36连结。该销47和长孔48构成将基板保持部3和第2杆36连结起来的连结机构。如上所述,在第1杆35停止上升后,第2杆36相对于第1杆35稍微上升。若第2杆36相对于第1杆35相对上升,则第2杆36推顶固定在基板保持部3上的销47,由此基板保持部3以支承轴46为中心稍微旋转。
图7的(a)是表示支柱2位于上升位置时的基板保持部3的图,图7的(b)是表示支柱2位于下降位置时的基板保持部3的图。如图7的(a)所示,当基板保持部3随着支柱2的上升而绕支承轴46旋转时,装夹部3a与晶圆W的周缘部分离,由此晶圆W从基板保持部3释放。像这样,仅通过使支柱2上升,就能够使基板保持部3向使装夹部3a从晶圆W的周缘部分离的方向移动(旋转)而释放晶圆W。从装夹部3a释放的晶圆W仍然置于基板保持部3的倾斜面3b上。在该状态下,通过未图示的搬送机构将晶圆W搬出。另外,当搬入其他晶圆时,将该晶圆在支柱2上升的状态下置于倾斜面3b上。
以如下方式进行晶圆W的握持动作。当在晶圆W置于倾斜面3b上的状态下使推进件20a下降时,支柱2及基板保持部3通过初级弹簧41及二级弹簧42的反力而下降。当支柱2下降时,第2杆36比第1杆35先开始下降。因此,如图7的(b)所示,与第2杆36连结的基板保持部3绕支承轴46旋转,基板保持部3的装夹部3a与晶圆W的周缘部接触,由此晶圆W被基板保持部3握持。此时的基板保持部3的旋转方向为装夹部3a与晶圆W的周缘部接近的方向。
四个基板保持部3同时动作,在四个基板保持部3各自的装夹部3a上握持晶圆W的周缘部,由此完成晶圆W的定心。像这样,仅通过使支柱2下降,就能够使基板保持部3向使装夹部3a与晶圆W的周缘部接近的方向移动(旋转)而握持晶圆W,进而进行晶圆W的定心。设置圆环部件31的主要目的在于使四个支柱2同步地下降。例如,即使在四个支柱2中的若干个因某些原因而无法顺畅地上下移动的情况下,也能够使保持在圆环部件31上的四个支柱2同步地下降。
如图5的(b)所示,在第2杆36的上端,通过螺钉51而固定有用于将从搬送装置搬送来的晶圆W引导至基板保持部3的基板引导部件50。该基板引导部件50与第2杆36一体地上下移动。因此,基板引导部件50相对于第1杆35相对地上下移动。更具体而言,当支柱2上升时,基板保持部3向使装夹部3a从晶圆W的周缘部分离的方向旋转,与此同步地,基板引导部件50相对于基板保持部3上升,如图7的(a)所示,其上端比基板保持部3更向上突出。在基板引导部件50的上端,形成有将晶圆W的周缘部引导至基板保持部3的倾斜面(上表面)3b上的锥面50a。当基板引导部件50相对于基板保持部3相对上升时,该锥面50a向倾斜面3b的上方移动。因此,晶圆W的周缘部被锥面50a引导而移动至基板保持部3的倾斜面3b。
当支柱2下降时,第2杆36比第1杆35先开始下降。因此,卡合在长孔48中的销47与第2杆36一起下降,由此基板保持部3以支承轴46为中心而旋转。此时的基板保持部3的旋转方向为使装夹部3a与晶圆W的周缘部接近的方向。与该基板保持部3的旋转同步地,基板引导部件50相对于基板保持部3下降,如图7的(b)所示,其上端变得比基板保持部3低。像这样,当晶圆W被基板保持部3握持时,基板引导部件50比基板保持部3低。通过成为这样的结构,能够通过离心力将供给到旋转的晶圆W的上表面的液体不被基板引导部件50干扰地从晶圆W的周缘部排出。例如,在将本实施方式的基板握持装置适用于晶圆(基板)的清洗装置的情况下,向通过马达15而旋转的晶圆W的上表面供给清洗液。该清洗液通过离心力而从晶圆W的周缘部甩出。此时,若基板引导部件50从基板保持部3向上方突出,则有时清洗液从基板引导部件50弹回而附着在晶圆W的上表面。根据本实施方式,能够避免这样的液体的弹回。
图8的(a)是表示支柱2位于下降位置时的基板保持部3及基板引导部件50的图,图8的(b)是表示支柱2位于上升位置时的基板保持部3及基板引导部件50的图。如图8的(a)所示,当支柱2位于下降位置时,基板引导部件50的锥面50a位于基板保持部3的倾斜面3b的外侧。如图8的(b)所示,当支柱2位于上升位置时,基板引导部件50的锥面50a位于基板保持部3的倾斜面3b的正上方。因此,一旦通过基板引导部件50的锥面50a接受搬送机构所运送来的晶圆W,则晶圆W沿该锥面50a被向下方运送而载置在基板保持部3的倾斜面3b上。通过这样的结构,基板保持部3能够可靠地握持晶圆W。
图9是表示本发明的第2实施方式的图。没有特别说明的结构及动作与第1实施方式相同,因此省略其重复的说明。在本实施方式中,初级弹簧41的弹簧常数大于二级弹簧42的弹簧常数。因此,当升降机构20的推进件20a举升支柱2时,第2杆36先上升,然后第1杆35上升。
图10是表示支柱2被升降机构20举升的状态的图。在第1杆35的下端设有与推进件20a接触的载荷传递部件54。该载荷传递部件54贯穿第2杆36的弹簧止动件45并向下方延伸。当二级弹簧42被压缩时,推进件20a与载荷传递部件54接触,第1杆35及第2杆36通过推进件20a而一体地上升。此外,本发明不限于该例,例如,也可以构成为弹簧止动件45的一部分与第1杆35的下端接触。在本实施方式中,没有设置圆环部件31。
在上述第1实施方式中,在支柱2即将停止上升之前基板保持部3向释放晶圆W的周缘部的方向旋转(移动),与之相对,在本实施方式中,在支柱2开始上升时,基板保持部3向释放晶圆W的周缘部的方向旋转(移动)。因此,在本实施方式中,在基板保持部3的装夹部3a从晶圆W的周缘部分离的状态下,晶圆W与支柱2一起上升。基板引导部件50的动作与第1实施方式相同。即,基板引导部件50与基板保持部3的移动(旋转)同步地相对于基板保持部3上下移动。
上述实施方式以使具有本发明所属的技术领域的常规知识的人员能够实施本发明为目的而记载。但对于本领域技术人员来说当然能够实现上述实施方式的各种变形例,本发明的技术思想也能够适用于其他实施方式。因此,本发明不限定于所记载的实施方式,应当为按照权利要求所定义的技术思想的最大范围。
Claims (14)
1.一种基板握持装置,其特征在于,具有:
基台;
支承在所述基台上且相对于该基台能够沿上下方向相对移动的多个支柱;
用于举升所述支柱的升降机构;和
分别配置在所述支柱上的基板保持部及基板引导部件,
所述支柱具有使所述基板保持部及所述基板引导部件彼此相对移动的相对移动机构,
所述相对移动机构在所述支柱上升时使所述基板保持部向该基板保持部释放所述基板的周缘部的方向移动,并且使所述基板引导部件相对于所述基板保持部上升,所述相对移动机构在所述支柱下降时使所述基板保持部向该基板保持部握持所述基板的周缘部的方向移动,并且使所述基板引导部件相对于所述基板保持部下降。
2.如权利要求1所述的基板握持装置,其特征在于,
所述相对移动机构具有:
第1杆;
相对于所述第1杆能够相对地上下移动地配置且被所述升降机构举升的第2杆;
配置在所述基台与所述第1杆之间且将所述第1杆向下弹压的初级弹簧;
配置在所述第1杆与所述第2杆之间且将所述第2杆向下弹压的二级弹簧;
固定在所述第1杆上且以使所述基板保持部旋转自如的方式支承所述基板保持部的支承轴;以及
将所述第2杆和所述基板保持部连结起来的连结机构。
3.如权利要求2所述的基板握持装置,其特征在于,
所述初级弹簧的弹簧常数小于所述二级弹簧的弹簧常数。
4.如权利要求2所述的基板握持装置,其特征在于,
所述初级弹簧的弹簧常数大于所述二级弹簧的弹簧常数。
5.如权利要求2所述的基板握持装置,其特征在于,
所述基板引导部件固定在所述第2杆上。
6.如权利要求1所述的基板握持装置,其特征在于,
所述相对移动机构使所述基板引导部件的上端上升得比所述基板保持部的上端高,并使所述基板引导部件的上端下降得比所述基板保持部的上端低。
7.如权利要求1所述的基板握持装置,其特征在于,
所述基板保持部绕所述基台的中心轴线等间隔地配置,所述基板保持部通过握持所述基板的周缘部来进行所述基板的定心。
8.如权利要求1所述的基板握持装置,其特征在于,
所述基板保持部具有握持所述基板的周缘部的装夹部、和供所述基板的周缘部载置的倾斜面,所述装夹部一体地形成在所述倾斜面上。
9.一种基板握持装置,其特征在于,具有:
基台;
支承在所述基台上且相对于该基台能够在上升位置与下降位置之间沿上下方向相对移动的多个支柱;
基板保持部,其配置在所述支柱上,并根据所述支柱的上下方向的移动而移动,以在所述支柱位于所述下降位置时握持所述基板的周缘部、并且在所述支柱位于所述上升位置时释放所述基板的周缘部;和
基板引导部件,其配置在所述支柱上,并根据所述支柱的上下方向的移动而移动,以在所述支柱位于所述上升位置时引导所述基板的周缘部,在所述支柱位于所述下降位置时,该基板引导部件比所述基板保持部低。
10.一种基板握持装置,其特征在于,具有:
基台;
支承在所述基台上且相对于该基台能够沿上下方向相对移动的多个支柱;
用于举升所述支柱的升降机构;和
分别配置在所述支柱上的基板保持部及基板引导部件,
所述支柱具有使所述基板保持部及所述基板引导部件彼此相对移动的相对移动机构,
所述相对移动机构在所述支柱上升时使所述基板保持部向该基板保持部释放所述基板的周缘部的方向移动,从而使所述基板引导部件的上端位于比所述基板保持部的上端高的位置,
并且所述相对移动机构在所述支柱下降时使所述基板保持部向该基板保持部握持所述基板的周缘部的方向移动,从而使所述基板引导部件的上端位于比所述基板保持部的上端低的位置。
11.如权利要求10所述的基板握持装置,其特征在于,
所述基板保持部具有握持所述基板的周缘部的装夹部、和供所述基板的周缘部载置的倾斜面,
所述装夹部一体地形成在所述倾斜面上。
12.如权利要求11所述的基板握持装置,其特征在于,
所述基板引导部件具有对所述基板的周缘部进行引导的锥面,
当所述支柱位于下降位置时,所述锥面位于所述基板保持部的所述倾斜面的外侧,当所述支柱位于上升位置时,所述锥面位于所述基板保持部的所述倾斜面的正上方。
13.如权利要求10所述的基板握持装置,其特征在于,
所述相对移动机构具有:
第1杆;
相对于所述第1杆能够相对地上下移动地配置且被所述升降机构举升的第2杆;
配置在所述基台与所述第1杆之间且将所述第1杆向下弹压的初级弹簧;
配置在所述第1杆与所述第2杆之间且将所述第2杆向下弹压的二级弹簧;
固定在所述第1杆上且以使所述基板保持部旋转自如的方式支承所述基板保持部的支承轴;以及
将所述第2杆和所述基板保持部连结起来的连结机构。
14.如权利要求1所述的基板握持装置,其特征在于,
所述基板引导部件固定于所述支柱的一个部件上,以使得所述基板引导部件与所述支柱的所述部件一起移动。
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CN201611120446.3A Active CN107424941B (zh) | 2013-01-11 | 2014-01-09 | 基板握持装置 |
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US (2) | US9269605B2 (zh) |
JP (2) | JP6053528B2 (zh) |
KR (1) | KR102094385B1 (zh) |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107424941A (zh) * | 2013-01-11 | 2017-12-01 | 株式会社荏原制作所 | 基板握持装置 |
CN107424941B (zh) * | 2013-01-11 | 2020-05-22 | 株式会社荏原制作所 | 基板握持装置 |
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KR102094385B1 (ko) | 2020-03-30 |
JP2014133642A (ja) | 2014-07-24 |
JP6307143B2 (ja) | 2018-04-04 |
KR20140091453A (ko) | 2014-07-21 |
JP2017076807A (ja) | 2017-04-20 |
US20160133503A1 (en) | 2016-05-12 |
US20140197610A1 (en) | 2014-07-17 |
US9892953B2 (en) | 2018-02-13 |
TW201436097A (zh) | 2014-09-16 |
CN103928366A (zh) | 2014-07-16 |
CN107424941B (zh) | 2020-05-22 |
US9269605B2 (en) | 2016-02-23 |
JP6053528B2 (ja) | 2016-12-27 |
TWI626709B (zh) | 2018-06-11 |
CN107424941A (zh) | 2017-12-01 |
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