CN103685998B - 固态成像装置 - Google Patents
固态成像装置 Download PDFInfo
- Publication number
- CN103685998B CN103685998B CN201310396144.9A CN201310396144A CN103685998B CN 103685998 B CN103685998 B CN 103685998B CN 201310396144 A CN201310396144 A CN 201310396144A CN 103685998 B CN103685998 B CN 103685998B
- Authority
- CN
- China
- Prior art keywords
- photoelectric conversion
- conversion unit
- transmission
- floating diffusion
- transistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 239000007787 solid Substances 0.000 title claims 9
- 238000003384 imaging method Methods 0.000 title abstract description 45
- 238000006243 chemical reaction Methods 0.000 claims abstract description 48
- 230000005540 biological transmission Effects 0.000 claims abstract description 46
- 238000009792 diffusion process Methods 0.000 claims abstract description 45
- 238000002955 isolation Methods 0.000 claims abstract description 23
- 230000003071 parasitic effect Effects 0.000 claims abstract description 17
- 238000001514 detection method Methods 0.000 claims abstract description 13
- 239000004065 semiconductor Substances 0.000 claims description 11
- 230000005693 optoelectronics Effects 0.000 claims 3
- 230000004888 barrier function Effects 0.000 claims 2
- 230000005622 photoelectricity Effects 0.000 claims 1
- 230000007704 transition Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 26
- 230000003321 amplification Effects 0.000 description 7
- 238000003199 nucleic acid amplification method Methods 0.000 description 7
- 239000011159 matrix material Substances 0.000 description 3
- 238000005036 potential barrier Methods 0.000 description 3
- 238000009825 accumulation Methods 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
- H04N25/70—SSIS architectures; Circuits associated therewith
- H04N25/76—Addressed sensors, e.g. MOS or CMOS sensors
- H04N25/77—Pixel circuitry, e.g. memories, A/D converters, pixel amplifiers, shared circuits or shared components
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/803—Pixels having integrated switching, control, storage or amplification elements
- H10F39/8037—Pixels having integrated switching, control, storage or amplification elements the integrated elements comprising a transistor
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/807—Pixel isolation structures
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/813—Electronic components shared by multiple pixels, e.g. one amplifier shared by two pixels
Landscapes
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012-194182 | 2012-09-04 | ||
| JP2012194182A JP2014049727A (ja) | 2012-09-04 | 2012-09-04 | 固体撮像装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103685998A CN103685998A (zh) | 2014-03-26 |
| CN103685998B true CN103685998B (zh) | 2017-05-10 |
Family
ID=50186107
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310396144.9A Active CN103685998B (zh) | 2012-09-04 | 2013-09-04 | 固态成像装置 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US20140061436A1 (enExample) |
| JP (1) | JP2014049727A (enExample) |
| CN (1) | CN103685998B (enExample) |
Families Citing this family (32)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5967944B2 (ja) | 2012-01-18 | 2016-08-10 | キヤノン株式会社 | 固体撮像装置およびカメラ |
| JP6261361B2 (ja) | 2014-02-04 | 2018-01-17 | キヤノン株式会社 | 固体撮像装置およびカメラ |
| JP6274567B2 (ja) | 2014-03-14 | 2018-02-07 | キヤノン株式会社 | 固体撮像装置及び撮像システム |
| JP6595750B2 (ja) | 2014-03-14 | 2019-10-23 | キヤノン株式会社 | 固体撮像装置及び撮像システム |
| JP6075646B2 (ja) | 2014-03-17 | 2017-02-08 | ソニー株式会社 | 固体撮像装置およびその駆動方法、並びに電子機器 |
| JP6541347B2 (ja) | 2014-03-27 | 2019-07-10 | キヤノン株式会社 | 固体撮像装置および撮像システム |
| JP6587497B2 (ja) * | 2014-10-31 | 2019-10-09 | 株式会社半導体エネルギー研究所 | 半導体装置 |
| CN107005664A (zh) * | 2014-11-20 | 2017-08-01 | 株式会社岛津制作所 | 光检测器 |
| JP6417197B2 (ja) | 2014-11-27 | 2018-10-31 | キヤノン株式会社 | 固体撮像装置 |
| CN111799285B (zh) | 2014-12-18 | 2024-05-14 | 索尼公司 | 成像装置 |
| US9768213B2 (en) | 2015-06-03 | 2017-09-19 | Canon Kabushiki Kaisha | Solid-state image sensor and camera |
| JP6570384B2 (ja) | 2015-09-11 | 2019-09-04 | キヤノン株式会社 | 撮像装置及び撮像システム |
| JP6541523B2 (ja) | 2015-09-11 | 2019-07-10 | キヤノン株式会社 | 撮像装置、撮像システム、および、撮像装置の制御方法 |
| US10205894B2 (en) | 2015-09-11 | 2019-02-12 | Canon Kabushiki Kaisha | Imaging device and imaging system |
| JP6785429B2 (ja) * | 2015-12-03 | 2020-11-18 | パナソニックIpマネジメント株式会社 | 撮像装置 |
| US10652491B2 (en) * | 2016-01-14 | 2020-05-12 | Sony Corporation | Solid-state imaging element, driving method, and electronic device |
| JP6688165B2 (ja) | 2016-06-10 | 2020-04-28 | キヤノン株式会社 | 撮像装置及び撮像システム |
| JP6776011B2 (ja) | 2016-06-10 | 2020-10-28 | キヤノン株式会社 | 撮像装置及び撮像システム |
| JP6727938B2 (ja) | 2016-06-10 | 2020-07-22 | キヤノン株式会社 | 撮像装置、撮像装置の制御方法、及び撮像システム |
| JP7013119B2 (ja) | 2016-07-21 | 2022-01-31 | キヤノン株式会社 | 固体撮像素子、固体撮像素子の製造方法、及び撮像システム |
| JP2018092976A (ja) | 2016-11-30 | 2018-06-14 | キヤノン株式会社 | 撮像装置 |
| JP6957157B2 (ja) | 2017-01-26 | 2021-11-02 | キヤノン株式会社 | 固体撮像装置、撮像システム、および固体撮像装置の製造方法 |
| JP6701108B2 (ja) | 2017-03-21 | 2020-05-27 | キヤノン株式会社 | 固体撮像装置及び撮像システム |
| JP6929114B2 (ja) | 2017-04-24 | 2021-09-01 | キヤノン株式会社 | 光電変換装置及び撮像システム |
| US10818715B2 (en) * | 2017-06-26 | 2020-10-27 | Canon Kabushiki Kaisha | Solid state imaging device and manufacturing method thereof |
| JP6987562B2 (ja) | 2017-07-28 | 2022-01-05 | キヤノン株式会社 | 固体撮像素子 |
| JP7091080B2 (ja) | 2018-02-05 | 2022-06-27 | キヤノン株式会社 | 装置、システム、および移動体 |
| CN110391256B (zh) * | 2018-04-16 | 2021-07-16 | 宁波飞芯电子科技有限公司 | Tof传感器低漏电型高效二级转移存储节点及实现方法 |
| JP7161317B2 (ja) | 2018-06-14 | 2022-10-26 | キヤノン株式会社 | 撮像装置、撮像システム及び移動体 |
| JP7237622B2 (ja) | 2019-02-05 | 2023-03-13 | キヤノン株式会社 | 光電変換装置 |
| JP7292990B2 (ja) * | 2019-06-17 | 2023-06-19 | キヤノン株式会社 | 撮像装置、コンピュータプログラム及び記憶媒体 |
| JP7753044B2 (ja) | 2021-10-20 | 2025-10-14 | キヤノン株式会社 | 光電変換装置 |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6160281A (en) * | 1997-02-28 | 2000-12-12 | Eastman Kodak Company | Active pixel sensor with inter-pixel function sharing |
| JP2001250931A (ja) * | 2000-03-07 | 2001-09-14 | Canon Inc | 固体撮像装置およびこれを用いた撮像システム |
| JP4230406B2 (ja) * | 2004-04-27 | 2009-02-25 | 富士通マイクロエレクトロニクス株式会社 | 固体撮像装置 |
| JP4935354B2 (ja) * | 2004-07-20 | 2012-05-23 | 富士通セミコンダクター株式会社 | Cmos撮像素子 |
| US7804117B2 (en) * | 2005-08-24 | 2010-09-28 | Aptina Imaging Corporation | Capacitor over red pixel |
| JP4851164B2 (ja) * | 2005-10-31 | 2012-01-11 | シャープ株式会社 | 増幅型固体撮像装置 |
| US7633134B2 (en) * | 2005-12-29 | 2009-12-15 | Jaroslav Hynecek | Stratified photodiode for high resolution CMOS image sensor implemented with STI technology |
| JP4710660B2 (ja) * | 2006-03-10 | 2011-06-29 | 株式会社ニコン | 固体撮像素子及びこれを用いた電子カメラ |
| JP5132102B2 (ja) * | 2006-08-01 | 2013-01-30 | キヤノン株式会社 | 光電変換装置および光電変換装置を用いた撮像システム |
| JP4420039B2 (ja) * | 2007-02-16 | 2010-02-24 | ソニー株式会社 | 固体撮像装置 |
| JP4110192B1 (ja) * | 2007-02-23 | 2008-07-02 | キヤノン株式会社 | 光電変換装置及び光電変換装置を用いた撮像システム |
| KR101375830B1 (ko) * | 2009-11-16 | 2014-03-17 | 캐논 가부시끼가이샤 | 촬상장치 및 그 제어방법 |
| US9000500B2 (en) * | 2009-12-30 | 2015-04-07 | Omnivision Technologies, Inc. | Image sensor with doped transfer gate |
| JP2011221253A (ja) * | 2010-04-08 | 2011-11-04 | Sony Corp | 撮像装置、固体撮像素子、撮像方法およびプログラム |
| FR2959013B1 (fr) * | 2010-04-16 | 2012-05-11 | Commissariat Energie Atomique | Dispositif de detection de rayonnement electromagnetique a sensibilite reduite au bruit spacial |
| JP5542091B2 (ja) * | 2010-05-18 | 2014-07-09 | 富士フイルム株式会社 | 固体撮像素子及び撮像装置 |
| WO2012042963A1 (ja) * | 2010-09-29 | 2012-04-05 | 富士フイルム株式会社 | 固体撮像素子及び撮像装置 |
| JP5888914B2 (ja) * | 2011-09-22 | 2016-03-22 | キヤノン株式会社 | 撮像装置およびその制御方法 |
| EP2833623B1 (en) * | 2012-03-30 | 2019-09-18 | Nikon Corporation | Image sensor, imaging method, and imaging device |
-
2012
- 2012-09-04 JP JP2012194182A patent/JP2014049727A/ja active Pending
-
2013
- 2013-08-20 US US13/971,511 patent/US20140061436A1/en not_active Abandoned
- 2013-09-04 CN CN201310396144.9A patent/CN103685998B/zh active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2014049727A (ja) | 2014-03-17 |
| CN103685998A (zh) | 2014-03-26 |
| US20140061436A1 (en) | 2014-03-06 |
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| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
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| GR01 | Patent grant | ||
| GR01 | Patent grant |