CN103569979B - 氩气的纯化方法及纯化装置 - Google Patents
氩气的纯化方法及纯化装置 Download PDFInfo
- Publication number
- CN103569979B CN103569979B CN201310183012.8A CN201310183012A CN103569979B CN 103569979 B CN103569979 B CN 103569979B CN 201310183012 A CN201310183012 A CN 201310183012A CN 103569979 B CN103569979 B CN 103569979B
- Authority
- CN
- China
- Prior art keywords
- argon gas
- hydrogen
- oxygen
- reaction
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 title claims abstract description 484
- 239000007789 gas Substances 0.000 title claims abstract description 302
- 229910052786 argon Inorganic materials 0.000 title claims abstract description 242
- 238000000746 purification Methods 0.000 title claims description 33
- 238000006243 chemical reaction Methods 0.000 claims abstract description 207
- 239000001257 hydrogen Substances 0.000 claims abstract description 170
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 170
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 137
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 125
- 238000000034 method Methods 0.000 claims abstract description 125
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 125
- 239000001301 oxygen Substances 0.000 claims abstract description 125
- 238000001179 sorption measurement Methods 0.000 claims abstract description 96
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims abstract description 88
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 71
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 60
- 239000003463 adsorbent Substances 0.000 claims abstract description 60
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 claims abstract description 57
- 229910002091 carbon monoxide Inorganic materials 0.000 claims abstract description 57
- 239000012535 impurity Substances 0.000 claims abstract description 50
- 239000001569 carbon dioxide Substances 0.000 claims abstract description 42
- 229910002092 carbon dioxide Inorganic materials 0.000 claims abstract description 42
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 36
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 34
- 229910001868 water Inorganic materials 0.000 claims abstract description 34
- 150000002431 hydrogen Chemical class 0.000 claims abstract description 31
- 239000010457 zeolite Substances 0.000 claims abstract description 29
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 26
- 239000002808 molecular sieve Substances 0.000 claims abstract description 24
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 claims abstract description 24
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims abstract description 21
- 230000008569 process Effects 0.000 claims description 78
- 229960004424 carbon dioxide Drugs 0.000 claims description 45
- 230000018044 dehydration Effects 0.000 claims description 32
- 238000006297 dehydration reaction Methods 0.000 claims description 32
- 239000003054 catalyst Substances 0.000 claims description 31
- 239000004215 Carbon black (E152) Substances 0.000 claims description 25
- 229930195733 hydrocarbon Natural products 0.000 claims description 25
- 150000002430 hydrocarbons Chemical class 0.000 claims description 25
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 claims description 13
- 229910021536 Zeolite Inorganic materials 0.000 claims description 12
- 239000003795 chemical substances by application Substances 0.000 claims description 7
- 238000004458 analytical method Methods 0.000 claims description 6
- 230000008676 import Effects 0.000 claims description 5
- 229910002090 carbon oxide Inorganic materials 0.000 claims description 4
- 230000008859 change Effects 0.000 claims description 4
- 241000790917 Dioxys <bee> Species 0.000 claims description 2
- 238000006555 catalytic reaction Methods 0.000 claims description 2
- 238000001816 cooling Methods 0.000 abstract description 6
- 230000009102 absorption Effects 0.000 description 34
- 238000010521 absorption reaction Methods 0.000 description 34
- 238000007792 addition Methods 0.000 description 24
- 239000003921 oil Substances 0.000 description 11
- 239000000203 mixture Substances 0.000 description 10
- 238000011084 recovery Methods 0.000 description 10
- 238000005406 washing Methods 0.000 description 9
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 7
- VUZPPFZMUPKLLV-UHFFFAOYSA-N methane;hydrate Chemical compound C.O VUZPPFZMUPKLLV-UHFFFAOYSA-N 0.000 description 7
- 230000006837 decompression Effects 0.000 description 5
- 238000011049 filling Methods 0.000 description 5
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 4
- 230000000274 adsorptive effect Effects 0.000 description 4
- 239000003610 charcoal Substances 0.000 description 4
- 238000003795 desorption Methods 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 229910052707 ruthenium Inorganic materials 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000005265 energy consumption Methods 0.000 description 3
- 229910052763 palladium Inorganic materials 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- 230000003584 silencer Effects 0.000 description 3
- -1 temperature Substances 0.000 description 3
- 239000002912 waste gas Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000001914 calming effect Effects 0.000 description 2
- UBAZGMLMVVQSCD-UHFFFAOYSA-N carbon dioxide;molecular oxygen Chemical compound O=O.O=C=O UBAZGMLMVVQSCD-UHFFFAOYSA-N 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 230000008929 regeneration Effects 0.000 description 2
- 238000011069 regeneration method Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- FTAHXGPNHBWWDP-UHFFFAOYSA-N carbon monoxide Chemical compound [O+]#[C-].[O+]#[C-] FTAHXGPNHBWWDP-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 238000000769 gas chromatography-flame ionisation detection Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- QJGQUHMNIGDVPM-OUBTZVSYSA-N nitrogen-15 Chemical compound [15N] QJGQUHMNIGDVPM-OUBTZVSYSA-N 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 150000002940 palladium Chemical class 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 231100000614 poison Toxicity 0.000 description 1
- 230000007096 poisonous effect Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000009628 steelmaking Methods 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
- B01J20/02—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material
- B01J20/10—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material comprising silica or silicate
- B01J20/16—Alumino-silicates
- B01J20/18—Synthetic zeolitic molecular sieves
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B23/00—Noble gases; Compounds thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/151—Reduction of greenhouse gas [GHG] emissions, e.g. CO2
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Separation Of Gases By Adsorption (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012176848A JP5896467B2 (ja) | 2012-08-09 | 2012-08-09 | アルゴンガスの精製方法および精製装置 |
| JP2012-176848 | 2012-08-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103569979A CN103569979A (zh) | 2014-02-12 |
| CN103569979B true CN103569979B (zh) | 2017-08-04 |
Family
ID=50042791
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310183012.8A Active CN103569979B (zh) | 2012-08-09 | 2013-05-16 | 氩气的纯化方法及纯化装置 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5896467B2 (enExample) |
| KR (1) | KR102035870B1 (enExample) |
| CN (1) | CN103569979B (enExample) |
| TW (1) | TWI569864B (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015159094A (ja) | 2014-02-25 | 2015-09-03 | 矢崎総業株式会社 | 接続端子 |
| JP6304089B2 (ja) * | 2015-03-24 | 2018-04-04 | 信越半導体株式会社 | アルゴンガスの精製方法及びアルゴンガスの回収精製装置 |
| KR101954809B1 (ko) * | 2018-04-30 | 2019-06-11 | 티이엠씨 주식회사 | 혼합가스로부터 고순도 네온 회수 방법 및 장치 |
| CN108557787A (zh) * | 2018-06-29 | 2018-09-21 | 上海联风能源科技有限公司 | 一种回收粗氩气再提纯方法 |
| JP7453781B2 (ja) * | 2019-12-13 | 2024-03-21 | 三菱重工業株式会社 | 製造装置用ガス供給装置、アトマイズ装置、３ｄ積層造形装置、及び積層造形システム |
| CN115432678B (zh) * | 2021-04-21 | 2023-12-29 | 上海联风能源科技有限公司 | 一种高纯度氩气的制备方法 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1237124A (zh) * | 1997-09-04 | 1999-12-01 | 液化空气日本有限公司 | 氩精制方法及其装置 |
| JP2000233909A (ja) * | 1999-02-10 | 2000-08-29 | Kyodo Oxygen Co Ltd | 単結晶製造炉からの排ガスアルゴンの精製方法 |
| CN101690864A (zh) * | 2007-10-23 | 2010-04-07 | 气体产品与化学公司 | 使用吸气剂床的在线再生的稀有气体的提纯 |
| CN102153057A (zh) * | 2010-02-10 | 2011-08-17 | 住友精化株式会社 | 氩气的纯化方法及纯化装置 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5488893A (en) * | 1977-12-26 | 1979-07-14 | Nippon Oxygen Co Ltd | Method of purifying inert gas |
| JPS61163106A (ja) * | 1985-01-11 | 1986-07-23 | Hitachi Ltd | 不活性ガスの回収方法および装置 |
| KR910001996B1 (ko) * | 1985-02-09 | 1991-03-30 | 가부시기가이샤 히다찌 세이사꾸쇼 | 불활성 가스의 회수방법 및 장치 |
| JP3496079B2 (ja) * | 1993-11-17 | 2004-02-09 | 日本酸素株式会社 | アルゴンガスの精製方法及び装置 |
| US7862645B2 (en) * | 2008-02-01 | 2011-01-04 | Air Products And Chemicals, Inc. | Removal of gaseous contaminants from argon |
| JP2009234868A (ja) * | 2008-03-27 | 2009-10-15 | Nippon Steel Corp | アルゴンガスの精製装置およびその精製方法 |
| TWI478761B (zh) * | 2010-02-25 | 2015-04-01 | Sumitomo Seika Chemicals | 氬氣之純化方法及純化裝置 |
| JP2012106904A (ja) * | 2010-10-29 | 2012-06-07 | Sumitomo Seika Chem Co Ltd | アルゴンガスの精製方法および精製装置 |
| JP5500650B2 (ja) * | 2010-11-10 | 2014-05-21 | 住友精化株式会社 | アルゴンガスの精製方法および精製装置 |
-
2012
- 2012-08-09 JP JP2012176848A patent/JP5896467B2/ja not_active Expired - Fee Related
-
2013
- 2013-05-10 KR KR1020130053013A patent/KR102035870B1/ko active Active
- 2013-05-16 CN CN201310183012.8A patent/CN103569979B/zh active Active
- 2013-05-17 TW TW102117621A patent/TWI569864B/zh not_active IP Right Cessation
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1237124A (zh) * | 1997-09-04 | 1999-12-01 | 液化空气日本有限公司 | 氩精制方法及其装置 |
| JP2000233909A (ja) * | 1999-02-10 | 2000-08-29 | Kyodo Oxygen Co Ltd | 単結晶製造炉からの排ガスアルゴンの精製方法 |
| CN101690864A (zh) * | 2007-10-23 | 2010-04-07 | 气体产品与化学公司 | 使用吸气剂床的在线再生的稀有气体的提纯 |
| CN102153057A (zh) * | 2010-02-10 | 2011-08-17 | 住友精化株式会社 | 氩气的纯化方法及纯化装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP5896467B2 (ja) | 2016-03-30 |
| JP2014034493A (ja) | 2014-02-24 |
| TWI569864B (zh) | 2017-02-11 |
| CN103569979A (zh) | 2014-02-12 |
| TW201406446A (zh) | 2014-02-16 |
| KR20140020723A (ko) | 2014-02-19 |
| KR102035870B1 (ko) | 2019-10-23 |
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